公开(公告)号：US3098408A

公开(公告)日：1963-07-23

申请号：US79531159

申请日：1959-02-11

Applicant: APPLIED PHYSICS CORP

Inventor： CARY HENRY H

IPC: G01J3/04 ,  G01J3/12 ,  G01J3/16 ,  G01J3/18

CPC classification number: G01J3/12 ,  G01J3/04 ,  G01J3/16 ,  G01J2003/1828

公开(公告)号：US20180209849A1

公开(公告)日：2018-07-26

申请号：US15416552

申请日：2017-01-26

Applicant: WESTCO SCIENTIFIC INSTRUMENTS, INC

Inventor： Jerome J. Workman, Jr. ,  Tushar Saraf ,  Thomas Andrew Bennett ,  John Glaberson

IPC: G01J3/28 ,  G01J3/18 ,  G01J3/02

CPC classification number: G01J3/28 ,  G01J3/0202 ,  G01J3/0235 ,  G01J3/0267 ,  G01J3/0289 ,  G01J3/06 ,  G01J3/1804 ,  G01J2003/1828

Abstract: Aspects of blending data detected by a monochromator over multiple wavelength ranges is described herein. In one embodiment, the monochromator includes a diffraction grating, a grating drive motor that rotates the diffraction grating to provide, by diffraction of broadband light, first dispersed wavelengths of light and second dispersed wavelengths of light, a detector that detects a first reflection from the first dispersed wavelengths of light and a second reflection from the second dispersed wavelengths of light, and processing circuitry that blends data values from the first reflection and data values from the second reflection together to provide a spectrum of combined data values. By blending data detected over multiple ranges, measurements of relatively high precision and quality can be provided over a wider spectral range.

公开(公告)号：US20100201981A1

公开(公告)日：2010-08-12

申请号：US12369947

申请日：2009-02-12

Applicant: Fred STANKE ,  Adam Norton ,  Holger Tuitje

Inventor： Fred STANKE ,  Adam Norton ,  Holger Tuitje

IPC: G01J3/28

CPC classification number: G01J3/02 ,  G01B2210/56 ,  G01J3/0205 ,  G01J3/0224 ,  G01J3/0297 ,  G01J3/28 ,  G01J3/2803 ,  G01J2003/1828 ,  G01N21/274

Abstract: A zoned order sorting filter for a spectrometer in a semiconductor metrology system is disclosed with reduced light dispersion at the zone joints. The order sorting filter comprises optically-transparent layers deposited underneath, or on top of thin-film filter stacks of the order sorting filter zones, wherein the thicknesses of the optically-transparent layers are adjusted such that the total optical lengths traversed by light at a zone joint are substantially equal in zones adjacent the zone joint. A method for wavelength to detector array pixel location calibration of spectrometers is also disclosed, capable of accurately representing the highly localized nonlinearities of the calibration curve in the vicinity of zone joints of an order sorting filter.

Abstract translation: 公开了一种用于半导体测量系统中的光谱仪的分区排序分选过滤器，其中在区域关节处的光散射减小。 订单分选过滤器包括沉积在下面的光学透明层，或者在分级过滤器区域的薄膜过滤器堆叠的顶部，其中调整光学透明层的厚度，使得在光 区域接头在邻近区域接头的区域中基本相等。 还公开了一种用于波长到检测器阵列像素位置校准的光谱仪的方法，其能够精确地表示在订单分选滤波器的区域接头附近的校准曲线的高度局部化的非线性。

公开(公告)号：US06813019B2

公开(公告)日：2004-11-02

申请号：US09958458

申请日：2001-10-05

Applicant: Michael R. Hammer ,  Philip V. Wilson ,  Mark R. Williams ,  Dower C. Bricker ,  Martin K. Masters ,  Stewart R. Campbell ,  Peter G. Layton

Inventor： Michael R. Hammer ,  Philip V. Wilson ,  Mark R. Williams ,  Dower C. Bricker ,  Martin K. Masters ,  Stewart R. Campbell ,  Peter G. Layton

IPC: G01J328

CPC classification number: G01J3/36 ,  G01J3/02 ,  G01J3/0213 ,  G01J3/0227 ,  G01J3/0229 ,  G01J3/0232 ,  G01J3/1809 ,  G01J3/2803 ,  G01J5/62 ,  G01J2003/1828 ,  G01N21/27 ,  G01N21/31

Abstract: A method and apparatus for the spectrochemical analysis of a sample in which a solid state array detector (82) is used to detect radiation (62) of spectrochemical interest. The invention involves the use of a shutter (72) adjacent the entrance aperture (70) of a polychromator (74-80) to expose the detector (82) to the radiation (62) for varying lengths of time whereby for short duration exposure times charge accumulation in elements (i.e. pixels) of the detector (82) due to high intensity components of the radiation is limited and for longer exposure times charge accumulation in elements (pixels) of the detector (82) due to feeble intesity components of radiation (62) is increased. This ensures that each reading of the detector (82) includes at least one exposure in which the amount of charge accumulated at each wavelength of interest is neither too little or too great. The problems of feeble radiation components not being accurately measurable and of high intensity radiation components exceeding the charge carrying capacity of elements (pixels) of the detector (82) are thereby able to be avoided. An attenuator (90) may be placed between the radiation source (60) and the detector (82) to permit longer exposure times to be used for very high intensity radiation.

Abstract translation: 用于对样品进行光谱化学分析的方法和装置，其中固态阵列检测器（82）用于检测分光光度的辐射（62）。 本发明涉及使用与多色调剂（74-80）的入口孔（70）相邻的快门（72）将检测器（82）暴露于辐射（62）以改变长度的时间，从而短时间曝光时间 由于辐射的高强度分量，检测器（82）的元件（即，像素）中的电荷累积受到限制，并且由于辐射的微弱的肥胖分量，对于更长的曝光时间来检测器（82）的元件（像素）中的电荷累积 62）增加。 这确保了检测器（82）的每次读取包括至少一次曝光，其中在每个感兴趣波长处累积的电荷量既不太小也不太大。 因此能够避免无法精确测量的微弱辐射成分和超过检测器（82）的元件（像素）的电荷承载能力的高强度辐射成分的问题。 衰减器（90）可以放置在辐射源（60）和检测器（82）之间，以允许更长的曝光时间用于非常高强度的辐射。

公开(公告)号：US06573990B1

公开(公告)日：2003-06-03

申请号：US09564298

申请日：2000-05-03

Applicant: Duwayne R. Anderson

Inventor： Duwayne R. Anderson

IPC: G01J328

CPC classification number: G01J3/1804 ,  G01J3/02 ,  G01J3/0218 ,  G01J3/0243 ,  G01J3/0294 ,  G01J2003/1828 ,  G01J2003/2866 ,  G02B6/3534 ,  G02B6/3568 ,  G02B6/3586

Abstract: An optical system having a first order spectral range that is usable in an optical spectrum analyzer receives an broadband optical test signal and a optical calibration signal and couples the optical signals via two optically isolated paths to separate optical detectors. First and second pairs of optical fibers, with each pair having an input fiber and an output fiber, are positioned in a focal plane of a collimating optic that has an optical axis. The fiber pairs are symmetrically positioned on either side of the optical axis with the input fibers positioned on one side of the optical axis and the output fibers positioned on the opposite side of the optical axis. The input fibers receive the optical test signal and the optical calibration signal. The output optical fibers are coupled to first and second optical detectors. An optical calibration source generates second order or greater spectral lines that fall within the first order spectral range of the optical system. A diffraction grating receives the optical test signal and the optical calibration signal from the collimating optic and separates the first order spectral components of the broadband optical test signal and passes the second order or greater spectral lines of the optical calibration signal. The first optical detector that is responsive to the first order spectral components of the optical test signal receives the optical test signal from the collimating optic and converts the optical test signal to an electrical signal. A second optical detector that is responsive to the second order or greater spectral lines of the optical calibration signal concurrently receives the optical calibration signal from the collimating optic and converts the calibrations signal to an electrical signal.

Abstract translation: 具有可用于光谱分析仪中的一阶光谱范围的光学系统接收宽带光学测试信号和光学校准信号，并且经由两个光学隔离路径将光信号耦合到分离的光学检测器。 每对具有输入光纤和输出光纤的第一和第二对光纤被定位在具有光轴的准直光学器件的焦平面中。 光纤对对称地位于光轴的任一侧，其中输入光纤位于光轴的一侧，并且输出光纤位于光轴的相反侧。 输入光纤接收光学测试信号和光学校准信号。 输出光纤耦合到第一和第二光学检测器。 光学校准源产生落在光学系统的一阶光谱范围内的第二级或更多光谱线。 衍射光栅接收来自准直光学器件的光学测试信号和光学校准信号，并分离宽带光学测试信号的一阶光谱分量，并通过光学校准信号的第二级或更多谱线。 响应于光学测试信号的一阶光谱分量的第一光学检测器从准直光学器件接收光学测试信号，并将光学测试信号转换为电信号。 响应于光学校准信号的二阶或更高谱线的第二光学检测器同时从准直光学器件接收光学校准信号，并将校准信号转换为电信号。

公开(公告)号：US06404492B1

公开(公告)日：2002-06-11

申请号：US09068028

申请日：1998-07-07

Applicant: Kexin Xu ,  Keiichi Fukada

Inventor： Kexin Xu ,  Keiichi Fukada

IPC: G01J328

CPC classification number: G01J3/10 ,  G01J2003/1828

Abstract: An acousto-optic tunable filter 4 including: an acousto-optic crystal 41; an acoustic wave driver 42; and a piezoelectric transducer 43, is provided in front of a light source section 2 including a plurality of light sources 2A, 2B, . . . 2N having different wavelength characteristics. The frequency of RF generated by the acoustic wave driver 42 is varied in accordance with a desired wavelength. Thus, the light having the desired wavelength is incident on a converging lens 5 as plus and minus first-order light beams, and the light having wavelengths other than the desired wavelength is incident on a converging lens 5 as a zero-order light beam. The converging lens 5 converges the plus and minus first-order light beams and the zero-order light beams at positions different from each other. A selector 6 having openings located at the positions onto which the plus and first-order light beams are converged is provided in front of the converging lens 5. Therefore, only the light having the desired wavelength can pass through the selector 6 and is emitted from the light source apparatus 1.

Abstract translation: 声光可调滤波器4，包括：声光晶体41; 声波驱动器42; 并且在包括多个光源2A，2B的光源部2的前方设置有压电换能器43。 。 。 2N具有不同的波长特性。 由声波驱动器42产生的RF的频率根据期望的波长而变化。 因此，具有期望波长的光作为正，负一级光束入射在会聚透镜5上，并且具有期望波长的波长的光作为零级光束入射在会聚透镜5上。 会聚透镜5将正，负一级光束和零级光束会聚在彼此不同的位置。 在会聚透镜5的前面设置有具有位于正和一级光束会聚的位置的开口的选择器6。因此，只有具有所需波长的光才能通过选择器6并从 光源装置1。

公开(公告)号：US5504576A

公开(公告)日：1996-04-02

申请号：US331564

申请日：1994-10-28

Applicant: Klaus-Michael Ohle ,  Ingolf Adam ,  Hans-Peter Buban ,  Hans W. Lutz

Inventor： Klaus-Michael Ohle ,  Ingolf Adam ,  Hans-Peter Buban ,  Hans W. Lutz

IPC: G01J3/06 ,  G01J3/18

CPC classification number: G01J3/18 ,  G01J3/06 ,  G01J2003/1828

Abstract: A monochromator for examining very narrow band ranges of a light spectrum has a fixed inlet slot, a grid illuminated by said slot and rotatively driven by a grid drive, a fixed outlet slot arranged in the angular area of the generated spectrum and at least one cutoff filter arranged in the path of the rays, continuously and swivelingly driven by the grid drive transversely to the path of the rays for filtering out light of orders other than the observed order. The cutoff filter is coupled to the grid drive in such a way that it is synchronically swiveled over the same angle as the grid, covering the desired spectral range.

Abstract translation: PCT No.PCT / EP93 / 00982 Sec。 371日期：1994年10月28日 102（e）1994年10月23日PCT PCT 1993年4月23日PCT公布。 公开号WO93 / 22636 日期：1993年11月11日。用于检查光谱的非常窄带范围的单色仪具有固定的入口狭槽，由所述槽照亮并由栅格驱动器旋转驱动的栅格，布置在 产生的光谱和布置在光线路径中的至少一个截止滤光片，其被横列于光线的路径的格栅驱动器连续地和旋转地驱动，以滤除观察到的顺序以外的顺序的光。 截止滤波器以与栅格相同的角度同步旋转的方式耦合到栅格驱动器，覆盖期望的光谱范围。

公开(公告)号：US4997281A

公开(公告)日：1991-03-05

申请号：US398094

申请日：1989-08-24

Applicant: Edward W. Stark

Inventor： Edward W. Stark

IPC: G01J3/18 ,  G01J3/28

CPC classification number: G01J3/2803 ,  G01J2003/1828 ,  G01J3/1838

Abstract: An improved flat field grating spectrometer for increasing the spectral resolutiion and usable spectral range. The spectrometer comprises an entrance slit or port, a concave grating, a field flattening lens and detection means encompassing the desired spectral region and capable of providing separate measurements between different regions of the spectral image plane. A second embodiment provides a beam splitter (dichroic or neutral density) placed between the grating and the detector to divert a portion of the energy at selected wavelengths through a second field flattening lens to a second detection means.

公开(公告)号：US4875773A

公开(公告)日：1989-10-24

申请号：US191262

申请日：1988-05-06

Applicant: Richard Burns ,  James Defendorf ,  Edward King ,  Cornelius McCarthy

Inventor： Richard Burns ,  James Defendorf ,  Edward King ,  Cornelius McCarthy

IPC: G01J3/18 ,  G01J3/04 ,  G01J3/10 ,  G01J3/12 ,  G01J3/28 ,  G01J3/42 ,  G01J3/44 ,  G01J3/443 ,  G01N21/31

CPC classification number: G01J3/04 ,  G01J3/02 ,  G01J3/0294 ,  G01J3/12 ,  G01J3/2803 ,  G01J2003/045 ,  G01J2003/102 ,  G01J2003/1204 ,  G01J2003/1295 ,  G01J2003/1828 ,  G01J2003/425 ,  G01J3/1838 ,  G01J3/42 ,  G01J3/4406 ,  G01J3/443 ,  G01N2021/174 ,  G01N2021/3129

Abstract: An optical system for a multidetector array spectrophotometer which includes multiple light sources for emitting light of selected wavelength ranges and means for selectively transmitting the selected wavelength ranges of light to respective slits of a multi-slit spectrograph for multiple wavelength range detection. The spectrograph has two or more slits which direct the selected wavelength ranges of the light spectra to fall upon a dispersive and focusing system which collects light from each slit, disperses the light by wavelength and refocuses the light at the positions of a single set of detectors.

公开(公告)号：US4729658A

公开(公告)日：1988-03-08

申请号：US871056

申请日：1986-06-05

Applicant: Sherman K. Poultney

Inventor： Sherman K. Poultney

IPC: G01J3/18 ,  G01J3/28 ,  G01J3/36

CPC classification number: G01J3/18 ,  G01J2003/1828 ,  G01J2003/1885 ,  G01J3/2803

Abstract: A very wide spectral coverage grating spectrometer which gathers light from a scene being viewed and collimates that light. A mosaic grating is disposed in collimated space which disperses the collimated light. The dispersed light is focused onto a detector array.

Abstract translation: 一种非常宽的光谱覆盖光栅光谱仪，可以从正在观看的场景中收集光并准直光。 马赛克光栅设置在准直空间中，分散准直光。 分散的光聚焦到检测器阵列上。