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公开(公告)号：US11815399B2
公开(公告)日：2023-11-14
申请号：US17653645
申请日：2022-03-05
Applicant: Topcon Corporation
Inventor： Akira Takada
CPC classification number: G01J3/45 , G01J3/021 , G01J3/0208
Abstract: A wavelength-swept light source is configured to generate light to be measured that is wavelength-swept coherent light with a wavelength periodically changed. The light to be measured is separated into a measurement section and a reference section that have different optical path lengths, and is then coupled in an interference section to generate interfering light. An analyzer performs a Fourier transform of interference signals of the interfering light, and acquires an actual measured noise floor value for each of the optical path length differences based on a point spread function. An estimated coherence time is determined so that an actual measured amplitude value of the noise floor value and a calculated amplitude value coincide with each other. Linewidth of the light emitted from the coherent light source is measured based on the estimated coherence time.
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12.发明公开公开(公告)号：US20230359018A1
公开(公告)日：2023-11-09
申请号：US18028582
申请日：2021-09-27
Applicant: HORIBA FRANCE SAS
Inventor： Vasily GAVRILYUK
CPC classification number: G02B26/0816 , G01J3/4412 , G01J3/021 , G01J3/0229 , G02B26/10
Abstract: Disclosed is an optical device for deflecting a light beam, including: —a first flat reflective element arranged so as to reflect an incoming light beam into a reflected light beam, extending in a first plane, the incoming light beam and the reflected light beam defining an incidence plane; and —a second flat reflective element, arranged to reflect the reflected light beam into an outgoing light beam, extending in a second plane that is transverse to the plane of incidence. The first plane and the second plane are secant along a line of intersection and form between them a dihedral angle. The first reflective element and the second reflective element can be rotated together about an axis of rotation substantially coincident with the line of intersection.
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公开(公告)号：US20230332952A1
公开(公告)日：2023-10-19
申请号：US18211018
申请日：2023-06-16
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Takafumi YOKINO , Anna Yoshida , Katsuhiko Kato
CPC classification number: G01J3/28 , G01J3/0202 , G01J3/021 , G01J3/18
Abstract: A spectrometer includes a support having a bottom wall part and a side wall part arranged on one side of the bottom wall part, a light detection element supported by the support to face a surface of the bottom wall part on the one side through a spectroscopic space, a resin molded layer provided at least on the surface of the bottom wall part on the one side, and a reflecting layer provided on the resin molded layer and included in an optical function part on the bottom wall part. The resin molded layer has a first part having a shape corresponding to the optical function part and a second part which surrounds the first part and is thinner than the first part.
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公开(公告)号：US20230332950A1
公开(公告)日：2023-10-19
申请号：US18131508
申请日：2023-04-06
Applicant: Hitachi High-Tech Corporation
Inventor： Kaifeng ZHANG , Masahiro WATANABE , Takenori HIROSE
CPC classification number: G01J3/021 , G01J3/0208 , G01J3/0229 , G01J3/10 , G01J2003/102
Abstract: Provided is a spectrometry apparatus that suppresses a reduction in usage efficiency of an irradiation energy of a light. A spectrometry apparatus of the disclosure includes a stage on which a sample is placed, an electromagnetic source that emits an electromagnetic wave, one or a plurality of optical elements that transform a spatial energy distribution of the electromagnetic wave and emit the electromagnetic wave, and a reflective objective lens that collects the electromagnetic wave after a transformation of the spatial energy distribution and irradiates the sample with the collected electromagnetic wave.
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公开(公告)号：US20230314220A1
公开(公告)日：2023-10-05
申请号：US18312730
申请日：2023-05-05
Applicant: Sanguis Corporation
Inventor： Jeffrey Owen Katz
CPC classification number: G01J3/4412 , G01J3/0202 , G01J3/021 , G01J3/0218 , G01J3/0275 , G01J3/06 , G01N21/65 , G01N33/492 , G01J2003/062 , G01J2003/064
Abstract: A system for non-invasively interrogating an in vivo sample for measurement of analytes comprises a pulse sensor coupled to the in vivo sample for detect a blood pulse of the sample and for generating a corresponding pulse signal, a laser generator for generating a laser radiation having a wavelength, power and diameter, the laser radiation being directed toward the sample to elicit Raman signals, a laser controller adapted to activate the laser generator, a spectrometer situated to receive the Raman signals and to generate analyte spectral data; and a computing device coupled to the pulse sensor, laser controller and spectrometer which is adapted to correlate the spectral data with the pulse signal based on timing data received from the laser controller in order to isolate spectral components from analytes within the blood of the sample from spectral components from analytes arising from non-blood components of the sample.
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Patent Agency Ranking
16.发明公开公开(公告)号：US20230314219A1
公开(公告)日：2023-10-05
申请号：US18011019
申请日：2021-03-19
Applicant: SHIMADZU CORPORATION
Inventor： Tomoki SASAYAMA , Yugo ISHIHARA , Takeshi MAJI , Tomoyo TAO
CPC classification number: G01J3/4412 , G01J3/0216 , G01J3/0229 , G01J3/0237 , G01J3/021 , G01J3/0218 , G01N21/65 , G01J3/0297
Abstract: Microscopic Raman spectroscopy device that detects and analyzes Raman scattering light emitted from sample irradiated with excitation light includes: laser light source that emits excitation light; spectrometer for measuring spectrum of the Raman scattering light; wavelength discriminator such as a dichroic filter that reflects the excitation light emitted from the laser light source toward the sample and transmits Raman scattering light emitted from the sample toward the spectrometer; condenser lens arranged between wavelength discriminator and the spectrometer for condensing the Raman scattering light passing through the wavelength discriminator; aperture arranged between the condenser lens and the spectrometer for limiting Raman scattering light incident on the spectrometer; adjusting means for adjusting to match a position of spot image of Raman scattering light condensed by condensing lens with a position of the aperture so that light amount of Raman scattering light passing through the aperture is maximized.
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公开(公告)号：US11749511B2
公开(公告)日：2023-09-05
申请号：US17149150
申请日：2021-01-14
Applicant: Tokyo Electron Limited
Inventor： Ryoji Yamazaki , Hiroyuki Miyashita , Mikio Sato
CPC classification number: H01J37/32972 , G01J3/021 , G01J3/0218 , G01J3/28 , H01J37/32192 , H01J37/32449 , H01J37/32963 , H01J2237/334 , H01J2237/335
Abstract: A plasma observation system includes a plasma processing apparatus which includes a processing container in which a substrate is processed with plasma, and a plurality of observation windows each capable of observing an emission state of the plasma in the processing container; and a measuring device including a light receiver configured to receive a plurality of light beams intersecting in the processing container through a plurality of observation windows, and a controller configured to specify an observation point of the plasma and determine a state of the plasma at the observation point based on the plurality of light beams received by the light receiver.
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公开(公告)号：US11725986B2
公开(公告)日：2023-08-15
申请号：US17426145
申请日：2020-01-28
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Takafumi Yokino , Anna Yoshida , Katsuhiko Kato
CPC classification number: G01J3/28 , G01J3/021 , G01J3/0202 , G01J3/18
Abstract: A spectrometer includes a support having a bottom wall part and a side wall part arranged on one side of the bottom wall part, a light detection element supported by the support to face a surface of the bottom wall part on the one side through a spectroscopic space, a resin molded layer provided at least on the surface of the bottom wall part on the one side, and a reflecting layer provided on the resin molded layer and included in an optical function part on the bottom wall part. The resin molded layer has a first part having a shape corresponding to the optical function part and a second part which surrounds the first part and is thinner than the first part.
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公开(公告)号：US20230221106A1
公开(公告)日：2023-07-13
申请号：US18121164
申请日：2023-03-14
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Tomofumi Suzuki , Kyosuke Kotani , Tatsuya Gugimoto , Yutaka Kuramoto , Katsumi Shibayama , Noburo Hosokawa
IPC: G01B9/02 , G01J3/45 , G01J3/02 , B81B3/00 , G02B27/14 , G02B26/08 , G02B7/182 , G01J3/10 , G01J3/14 , G01J3/453
CPC classification number: G01B9/02051 , G01J3/45 , G01J3/0202 , G01J3/021 , B81B3/00 , G02B27/144 , B81B3/0021 , B81B3/007 , G02B26/0816 , G02B7/182 , G01J3/108 , G01J3/0237 , G01B9/02049 , G02B26/0833 , G01J3/14 , G02B26/0841 , G01B2290/35 , G01J3/4532 , G01B2290/25 , B81B2203/0154 , G01J3/4535 , G01J2003/104 , B81B2201/042
Abstract: In an optical device, a base and a movable unit are constituted by a semiconductor substrate including a first semiconductor layer, an insulating layer, and a second semiconductor layer in this order from one side in a predetermined direction. The base is constituted by the first semiconductor layer, the insulating layer, and the second semiconductor layer. The movable unit includes an arrangement portion that is constituted by the second semiconductor layer. The optical function unit is disposed on a surface of the arrangement portion on the one side. The first semiconductor layer that constitutes the base is thicker than the second semiconductor layer that constitutes the base. A surface of the base on the one side is located more to the one side than the optical function unit.
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公开(公告)号：US11688581B2
公开(公告)日：2023-06-27
申请号：US17223146
申请日：2021-04-06
Applicant: Gatan, Inc.
Inventor： John Andrew Hunt , Michael Bertilson
IPC: H01J37/244 , G01J3/02 , G01J3/44 , G01N21/66 , H01J37/22 , H01J37/285
CPC classification number: H01J37/244 , G01J3/021 , G01J3/0216 , G01J3/0218 , G01J3/4406 , G01N21/66 , H01J37/226 , H01J37/285 , H01J2237/2445 , H01J2237/262 , H01J2237/2855
Abstract: Apparatuses for collection of upstream and downstream transmission electron microscopy (TEM) cathodoluminescence (CL) emitted from a sample exposed to an electron beam are described. A first fiber optic cable carries first CL light emitted from a first TEM sample surface, into a spectrograph. A second fiber optic cable carries second CL light emitted from a second TEM sample surface into the spectrograph. The first and second fiber optic cables are positioned such that the spectrograph produces a first light spectrum for the first fiber optic cable and a separate light spectrum for the second fiber optic cable. The described embodiments allow collection of TEM CL data in a manner that allows analyzing upstream and downstream TEM CL signals separately and simultaneously with an imaging spectrograph.
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