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    SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
    12.
    发明公开
    SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD 审中-公开

    公开(公告)号：US20240157390A1

    公开(公告)日：2024-05-16

    申请号：US18509106

    申请日：2023-11-14

    Applicant: SCREEN Holdings Co., Ltd.

    Inventor： Tomohiro MOTONO ,  Koji ANDO ,  Noritake SUMI ,  Kei SUZUKI

    IPC: B05C5/02 ,  B05D1/26

    CPC classification number: B05C5/02 ,  B05D1/26

    Abstract: In the substrate processing apparatus, a support tray supporting a substrate is housed in an internal space of a chamber. A processing fluid is supplied into the internal space from one end side of the internal space. The support tray includes a tray member and a plurality of support members attached to the tray member in such a manner as to surround a substrate facing surface. The tray member has a downstream-side standing portion that has a downstream-side standing portion that stands upward further than the substrate facing surface while located in proximity to a peripheral surface of the substrate on a downstream side supported by the plurality of support members. An upper surface of the downstream-side standing portion is below the upper surface of the substrate in a vertical direction supported by the plurality of support members.

    METHODS AND SYSTEMS FOR COATING A FOIL
    14.
    发明公开
    METHODS AND SYSTEMS FOR COATING A FOIL 审中-公开

    公开(公告)号：US20240066546A1

    公开(公告)日：2024-02-29

    申请号：US17821551

    申请日：2022-08-23

    Applicant: Reophotonics, Ltd.

    Inventor： Michael Zenou ,  Elad Dotan ,  Mark Sheridan

    IPC: B05C1/08 ,  B05D1/26

    CPC classification number: B05C1/0882 ,  B05C1/0808 ,  B05C1/0817 ,  B05C1/083 ,  B05D1/26 ,  B05D2252/02

    Abstract: In a coating system, two rollers are arranged adjacent to one another. A donor foil with rheological material dispensed thereon is advanced through a gap between the two rollers. Such gap spreads the dispensed material over the donor foil, coating the donor foil with a layer of the material with a uniform thickness associated with the gap width. Each roller is supported on a holder. Adjustment of the gap width may be effected by keeping the position of one of the holders fixed, while horizontally translating the position of the other holder. The position of the translatable holder may be adjusted by pistons and linear actuators. The pistons may bias the moveable holder towards the stationary holder. The linear actuators mounted on the moveable holder may extend respective arms against the stationary holder, thereby countering the biasing of the pistons and pushing the moveable holder away from the stationary holder.

    Device and method for coating a circular cylindrical object
    16.
    发明授权
    Device and method for coating a circular cylindrical object 有权

    公开(公告)号：US11857996B2

    公开(公告)日：2024-01-02

    申请号：US18000294

    申请日：2021-06-04

    Applicant: Ivan Patrik Ortendahl

    Inventor： Ivan Patrik Ortendahl

    IPC: B05C17/00 ,  B05C5/02 ,  B05C17/005 ,  B05D1/26

    CPC classification number: B05C5/0241 ,  B05C17/002 ,  B05C17/00516 ,  B05D1/26

    Abstract: The invention relates to a tool (1) for applying liquid agent such as, for example, an insulating foam, an adhesive, or paint to the mantle surface of a circular-cylindrical object (10), comprising a tool head (2) having an axially through hole (3) with a substantially circular cross-section. The tool head (2) comprises an inner flange (8), an outer flange (16), a distribution chamber (12) running around the inner flange (8) and that comprises at least one outlet (13; 23; 33) distributed around the through hole (3). An asymmetrical restriction is arranged at the outlet (13) so that the outlet is restricted where the pressure is as highest (14). The invention also relates to a method for applying an agent around a circular-cylindrical object (10) with the tool (1).

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