公开(公告)号：US20180197797A1

公开(公告)日：2018-07-12

申请号：US15835889

申请日：2017-12-08

Applicant: Skyworks Solutions, Inc.

Inventor： Elena Becerra Woodard ,  Daniel Kwadwo Amponsah Berkoh ,  Kelly Yuji Kimura

IPC: H01L21/66 ,  H01J37/32 ,  G01J3/02 ,  G01J3/443 ,  H01L21/3065

CPC classification number: H01L22/26 ,  G01J3/0218 ,  G01J3/443 ,  H01J37/32853 ,  H01J37/3288 ,  H01J37/32963 ,  H01L21/3065

Abstract: An endpoint booster transports an optical signal from inside of a plasma etch chamber through a viewport to an optical cable outside of the plasma etch chamber. The optical signal is analyzed to determine an endpoint of a plasma process. The endpoint booster inhibits process byproducts from accumulating on the viewport during the plasma process, which increases the time between chamber cleanings. The reduction in chamber downtime for cleaning increases production throughput.

公开(公告)号：US10018508B2

公开(公告)日：2018-07-10

申请号：US15262061

申请日：2016-09-12

Applicant: Spectro Analytical Instruments GmbH

Inventor： Wolfram Bohle ,  Alexander Morlang

IPC: G01J3/28 ,  G01J3/02 ,  G02B7/18 ,  G02B7/182 ,  G01J3/443 ,  G01J3/18

CPC classification number: G01J3/021 ,  G01J3/0286 ,  G01J3/06 ,  G01J3/18 ,  G01J3/20 ,  G01J3/443 ,  G01J2003/064 ,  G02B7/181 ,  G02B7/1827

Abstract: A spectrometer for examining the spectrum of an optical emission source may include: an optical base body, a light entry aperture connected to the optical base body to couple light into the spectrometer, at least one dispersion element to receive the light as a beam of rays and generate a spectrum, and at least one detector for measuring the generated spectrum. A light path may run from the light entry aperture to the detector. A mirror group with at least two mirrors may be provided in a section of the light path between the light entry aperture and the at least one detector, in which the beam does not run parallel, which may compensate for temperature effects. In the mirror group, at least one mirror or the entire mirror group may be moveable relative to the optical base body and may be coupled to a temperature-controlled drive.

公开(公告)号：US20180136118A1

公开(公告)日：2018-05-17

申请号：US15802286

申请日：2017-11-02

Applicant: Verity Instruments, Inc.

Inventor： Andrew Weeks Kueny ,  Mike Whelan ,  Mark Anthony Meloni ,  John D. Corless ,  Rick Daignault ,  Sean Lynes

IPC: G01N21/27 ,  H01J37/32 ,  G01J3/443 ,  G01J3/28 ,  H01L21/68 ,  G01N21/66 ,  H05H1/00 ,  H01L21/66

CPC classification number: G01N21/274 ,  G01J3/0289 ,  G01J3/0297 ,  G01J3/10 ,  G01J3/2823 ,  G01J3/443 ,  G01N21/66 ,  G01N21/73 ,  G01N2021/8416 ,  H01J37/32963 ,  H01J37/32972 ,  H01J2237/2482 ,  H01L21/681 ,  H01L22/26 ,  H05H1/0006

Abstract: The disclosure provides an optical calibration device for in-chamber calibration of optical signals associated with a processing chamber, a characterization system for plasma processing chambers, methods of characterizing plasma processing chambers, and a chamber characterizer. In one example, the optical calibration device includes: (1) an enclosure, (2) an optical source located within the enclosure and configured to provide a source light having a continuous spectrum, and (3) optical shaping elements located within the enclosure and configured to form the source light into a calibrating light that approximates a plasma emission during an operation within the processing chamber.

公开(公告)号：US20180130651A1

公开(公告)日：2018-05-10

申请号：US15727198

申请日：2017-10-06

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： VLADIMIR VOLYNETS ,  Protopopov Vladimir ,  Young Do Kim ,  Yuri Barsukov ,  Sang Heon Lee ,  Sung Ho Jang

IPC: H01J49/40 ,  G01J3/443 ,  H01J49/10 ,  H01J49/00 ,  H01J49/12 ,  H01L21/02 ,  C23C16/455 ,  H01J37/32 ,  H01L29/786

CPC classification number: H01J49/40 ,  C23C16/45502 ,  G01J3/2889 ,  G01J3/443 ,  H01J37/32963 ,  H01J49/0031 ,  H01J49/10 ,  H01J49/12 ,  H01J2237/327 ,  H01L21/02274 ,  H01L29/78696

Abstract: A pulsed plasma analyzer includes a pulse modulator that controls an off-time of a pulsed plasma that includes a target radical, an optical spectrometer that measures optical emissions of the pulsed plasma after the off-time to determine optical emission data, and a concentration estimating module that estimates a concentration of the target radical during the off-time based on an initial optical emission value of the optical emission data that changes as a function of the off-time, and outputs an estimated concentration.

公开(公告)号：US20170343414A1

公开(公告)日：2017-11-30

申请号：US15679969

申请日：2017-08-17

Applicant: AGILENT TECHNOLOGIES, INC.

Inventor： Michael Bolles ,  Yin Sheng Sun ,  Lindsay Buck ,  Glyn Russell

IPC: G01J3/10 ,  G01J3/443 ,  G01J3/02 ,  G01J3/12

CPC classification number: G01J3/10 ,  G01J3/0205 ,  G01J3/0208 ,  G01J3/12 ,  G01J3/443 ,  G01J2003/1217

Abstract: An optical emission spectrometer system includes a light source and a dichroic beam combiner. The light source emits first light in a first direction and second light in a second direction different from the first direction. The dichroic beam combiner receives the first light via a first light path and the second light via a second light path, reflects a portion the first light into an entrance aperture of a light detection and measurement apparatus, and transmits a portion of the second light into the entrance aperture, enabling analysis and measurement of both first and second light characteristics simultaneously. The portion of the first light reflected into the entrance aperture predominately has wavelengths in a first range of wavelengths and the portion of the second light transmitted into the entrance aperture predominately has wavelengths in a second range of wavelengths, different from the first range of wavelengths.

公开(公告)号：US20170336261A1

公开(公告)日：2017-11-23

申请号：US15497181

申请日：2017-04-25

Applicant: Panasonic Intellectual Property Management Co., Ltd.

Inventor： SEIJI FUJIHARA ,  YASUYUKI NAITO ,  MORIO TOMIYAMA

IPC: G01J3/42 ,  G01N21/3581 ,  G01N21/35 ,  G01J3/443 ,  G01N21/49 ,  G01N21/3563

CPC classification number: G01J3/42 ,  G01J3/4338 ,  G01J2003/2859 ,  G01J2003/421 ,  G01J2003/425 ,  G01N21/3563 ,  G01N21/3581 ,  G01N2021/3572

Abstract: Provided is a terahertz wave spectrometry system that is capable of identifying analyzing target molecules contained in an analyte even if the analyte contains water, by activating a water remover to remove water according a comparison of absorption spectrums so that water in the analyte is easily removed without causing the analyzing target molecules to disappear due to decomposition or denaturation.

公开(公告)号：US09778112B2

公开(公告)日：2017-10-03

申请号：US15338851

申请日：2016-10-31

Applicant: University of Virginia Patent Foundation

Inventor： Brooks Hart Pate ,  Justin L. Neill

IPC: G01J3/30 ,  G01J3/443 ,  G01J3/28 ,  G01J3/433 ,  G01N21/3586 ,  G01N21/35

CPC classification number: G01J3/443 ,  G01J3/2889 ,  G01J3/4338 ,  G01J3/453 ,  G01N21/35 ,  G01N21/3586 ,  G01N2021/3595

Abstract: An emission can be obtained from a sample in response to excitation using a specified range of excitation frequencies. Such excitation can include generating a specified chirped waveform and a specified downconversion local oscillator (LO) frequency using a digital-to-analog converter (DAC), upconverting the chirped waveform via mixing the chirped waveform with a specified upconversion LO frequency, frequency multiplying the upconverted chirped waveform to provide a chirped excitation signal for exciting the sample, receiving an emission from sample, the emission elicited at least in part by the chirped excitation signal, and downconverting the received emission via mixing the received emission with a signal based on the specified downconversion LO signal to provide a downconverted emission signal within the bandwidth of an analog-to-digital converter (ADC). The specified chirped waveform can include a first chirped waveform during a first duration, and a second chirped waveform during a second duration.

公开(公告)号：US09752933B2

公开(公告)日：2017-09-05

申请号：US14614381

申请日：2015-02-04

Applicant: AGILENT TECHNOLOGIES, INC.

Inventor： Michael Bolles ,  Yin Sheng Sun ,  Lindsay Buck ,  Glyn Russell

IPC: G01J3/30 ,  G01J3/10 ,  G01J3/443 ,  G01J3/02 ,  G01J3/12

CPC classification number: G01J3/10 ,  G01J3/0205 ,  G01J3/0208 ,  G01J3/12 ,  G01J3/443 ,  G01J2003/1217

Abstract: An optical emission spectrometer system includes a light source and a dichroic beam combiner. The light source emits first light in a first direction and second light in a second direction different from the first direction. The dichroic beam combiner receives the first light via a first light path and the second light via a second light path, reflects a portion the first light into an entrance aperture of a light detection and measurement apparatus, and transmits a portion of the second light into the entrance aperture, enabling analysis and measurement of both first and second light characteristics simultaneously. The portion of the first light reflected into the entrance aperture predominately has wavelengths in a first range of wavelengths and the portion of the second light transmitted into the entrance aperture predominately has wavelengths in a second range of wavelengths, different from the first range of wavelengths.

公开(公告)号：US09721768B2

公开(公告)日：2017-08-01

申请号：US15089520

申请日：2016-04-02

Applicant: Samsung Electronics Co., Ltd.

Inventor： In-Joong Kim ,  Ilgu Yun

IPC: G01J3/30 ,  H01J37/32 ,  G01J3/443

CPC classification number: H01J37/32972 ,  G01J3/0202 ,  G01J3/0221 ,  G01J3/0248 ,  G01J3/0289 ,  G01J3/443 ,  H01J37/32917

Abstract: Disclosed is an apparatus for optical emission spectroscopy which includes a light measuring unit measuring light in a process chamber performing a plasma process on a substrate, a light analyzing unit receiving light collected from the light measuring unit to analyze a plasma state, a control unit receiving an output signal of the light analyzing unit to process the output signal, and a light collecting controller disposed between the process chamber and the light measuring unit so as to be combined with the light measuring unit. The light collecting controller controls the light collected to the light measuring unit.

公开(公告)号：US20170212047A1

公开(公告)日：2017-07-27

申请号：US15312771

申请日：2015-04-07

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Shigeru EURA ,  Kengo SUZUKI ,  Kenichiro IKEMURA ,  Kazuya IGUCHI

IPC: G01N21/64 ,  G01J3/443

CPC classification number: G01N21/64 ,  G01J3/0254 ,  G01J3/443 ,  G01N2201/12753

Abstract: An optical measurement device inputs excitation light to an integrating sphere in which a sample is disposed, irradiates the sample with the excitation light having a predetermined beam cross-section, detects measurement light output from the integrating sphere by a photodetector, and acquires intensity data of the sample. The optical measurement device includes a storage unit in which correction data is stored and an optical characteristic calculation unit for calculating optical characteristics of the sample based on the intensity data of the sample and the correction data. The correction data is calculated based on first corrective intensity data and second corrective intensity data. The predetermined beam cross-section is covered with the first light absorbing member and covers the second light absorbing member.