公开(公告)号：US09259176B2

公开(公告)日：2016-02-16

申请号：US13880744

申请日：2011-11-02

Applicant: Hiromichi Suzuki

Inventor： Hiromichi Suzuki

IPC: A61B5/1455 ,  G01J3/10 ,  G01J3/28 ,  G01J3/42 ,  A61B5/145 ,  G01N21/31 ,  G01N21/359

CPC classification number: A61B5/14552 ,  A61B5/14546 ,  A61B5/1455 ,  A61B2560/0252 ,  A61B2560/0437 ,  G01J3/10 ,  G01J3/28 ,  G01J3/42 ,  G01N21/359 ,  G01N2021/3133 ,  G01N2021/3144 ,  G01N2021/3155

Abstract: A biological optical measurement instrument includes a single temperature sensor that detects a radiation temperature from a plurality of light emitting elements that emit light of a predetermined wavelength, and an absorption coefficient correcting unit that corrects an absorption coefficient value of a notable substance inside the object on the basis of the radiation temperature detected by the temperature sensor, referring to data indicating a correspondence relationship between a temperature obtained in advance for each emitted light of the plurality of light emitting elements and an absorption coefficient value that varies according to the temperature.

Abstract translation: 一种生物光学测量仪器，包括从发出预定波长的光的多个发光元件检测辐射温度的单一温度传感器，以及将物体内的显着物质的吸收系数值校正为吸收系数值的吸收系数校正单元， 以温度传感器检测出的辐射温度为基础，参照表示多个发光元件的每个发光的预先获得的温度与根据温度变化的吸收系数值之间的对应关系的数据。

公开(公告)号：US09255841B2

公开(公告)日：2016-02-09

申请号：US13873636

申请日：2013-04-30

Applicant: EOS Photonics, Inc.

Inventor： Mark F. Witinski ,  Laurent Diehl ,  Christian Pfluegl

IPC: G01J3/00 ,  G01J3/42 ,  G01J3/02 ,  G01J3/10

CPC classification number: G01J3/42 ,  G01J3/0208 ,  G01J3/0286 ,  G01J3/0291 ,  G01J3/10 ,  G01J2003/102

Abstract: A spectroscopy system includes an array of quantum cascade lasers (QCLs) that emits an array of non-coincident laser beams. A lens array coupled to the QCL array substantially collimates the laser beams, which propagate along parallel optical axes towards a sample. The beams remain substantially collimated over the lens array's working distance, but may diverge when propagating over longer distances. The collimated, parallel beams may be directed to/through the sample, which may be within a sample cell, flow cell, multipass spectroscopic absorption cell, or other suitable holder. Alternatively, the beams may be focused to a point on, near, or within the target using a telescope or other suitable optical element(s). When focused, however, the beams remain non-coincident; they simply intersect at the focal point. The target transmits, reflects, and/or scatters this incident light to a detector, which transduces the detected radiation into an electrical signal representative of the target's absorption or emission spectrum.

Abstract translation: 光谱系统包括发射非重合激光束阵列的量子级联激光器阵列（QCL）。 耦合到QCL阵列的透镜阵列基本上准直了沿着平行光轴朝向样本传播的激光束。 光束在透镜阵列的工作距离上保持基本上准直，但是当在较长距离上传播时可能会发散。 准直的平行光束可以被引导到/通过样品，其可以在样品池，流通池，多光谱吸收单元或其它合适的保持器内。 或者，可以使用望远镜或其它合适的光学元件将光束聚焦到靶上，接近或在目标内的点。 然而，当专注时，梁保持不重合; 他们只是在焦点处相交。 目标将该入射光透射，反射和/或散射到检测器，检测器将检测到的辐射转换成代表目标吸收或发射光谱的电信号。

公开(公告)号：US20160033332A1

公开(公告)日：2016-02-04

申请号：US14450627

申请日：2014-08-04

Applicant: APPLIED VISION CORPORATION

Inventor： RICHARD A. SONES ,  MICHAEL L. KRESS ,  BRIAN M. ENSINGER

IPC: G01J3/50 ,  G01J3/10 ,  G01J3/02

CPC classification number: G01J3/501 ,  G01J3/0248 ,  G01J3/10 ,  G01J2003/106 ,  G01N21/8806 ,  G01N21/909 ,  G01N21/9515

Abstract: Systems and methods for extracting topographic information from inspected objects to identify defects in the inspected objects. A part to be inspected is illuminated with at least two different colors emitted from an illuminator providing a gradient of light consisting of the at least two different colors. A single color image of the illuminated part to be inspected is acquired, providing a color-coded topographic mapping of the part to be inspected due, at least in part, to the gradient of light. Topographic monochrome views of the part to be inspected may be generated from the single color image. Each view of the topographic monochrome views may enhance a different type of feature or defect present in the part to be inspected which can be analyzed and detected.

Abstract translation: 用于从检查对象中提取地形信息以识别被检查对象中的缺陷的系统和方法。 要被检查的部件被照射到从照明器发射的至少两种不同的颜色，提供由至少两种不同颜色组成的光的梯度。 获取要被检查的被照明部分的单色图像，至少部分地提供待检查部分的颜色编码的地形图。 要检查的零件的地形单色视图可以从单色图像生成。 地形单色视图的每个视图可以增强可被分析和检测的待检查部分中存在的不同类型的特征或缺陷。

公开(公告)号：US20160025562A1

公开(公告)日：2016-01-28

申请号：US14010675

申请日：2013-08-27

Applicant: University of Maribor

Inventor： Denis Donlagic ,  Simon Pevec

IPC: G01J3/02 ,  G01J3/10 ,  G01J3/28

CPC classification number: G01J3/0218 ,  G01B2290/25 ,  G01J3/0208 ,  G01J3/0224 ,  G01J3/0237 ,  G01J3/0289 ,  G01J3/10 ,  G01J3/26 ,  G01J3/28 ,  G01J3/2803 ,  G01J3/32 ,  G01J3/42 ,  G01J3/427 ,  G01J2003/102 ,  G01J2003/104 ,  G01L9/0079

Abstract: An optical system having an optical sensor with an ultra-short FP cavity, and a low-resolution optical interrogation system coupled to the optical sensor and operational to send light signals and receive light signals to and from the optical sensor is disclosed. The optical system may operate in a wavelength range including the visible and near-infrared range. Methods of interrogating optical sensors are provided, as are numerous other aspects.

Abstract translation: 公开了一种光学系统，其具有具有超短FP腔的光学传感器，以及耦合到光学传感器并可操作以发送光信号并从光学传感器接收光信号的低分辨率光询问系统。 光学系统可以在包括可见光和近红外范围的波长范围内工作。 提供询问光学传感器的方法，以及许多其它方面。

公开(公告)号：US20160025561A1

公开(公告)日：2016-01-28

申请号：US14807286

申请日：2015-07-23

Applicant: NEC Laboratories America, Inc.

Inventor： Yue Tian ,  Ting Wang

IPC: G01J3/02 ,  G01J3/10 ,  G01J3/28

CPC classification number: G01J3/10 ,  G01J3/12 ,  G01J3/28 ,  G01J3/42

Abstract: A spectroscopy system and method includes illuminating a target with a wideband light pulse that includes an entire testing wavelength spectrum. The light pulse is transformed with a dispersive medium to introduce a frequency-based time delay to the light pulse after the light pulse has interacted with a target. The dispersed light pulse is converted to a time-domain electrical signal with a photodiode. The time-domain electrical signal is converted into a spectral profile of the target.

Abstract translation: 光谱系统和方法包括用包括整个测试波长光谱的宽带光脉冲照射目标。 用分散介质转换光脉冲，以在光脉冲与目标相互作用之后，将光脉冲引入基于频率的时间延迟。 分散的光脉冲被转换成具有光电二极管的时域电信号。 时域电信号被转换成目标的光谱分布。

公开(公告)号：US20160011408A1

公开(公告)日：2016-01-14

申请号：US14773057

申请日：2013-03-08

Applicant: SHIMADZU CORPORATION

Inventor： Akira NODA

IPC: G02B21/36 ,  G01J3/10 ,  G01J3/02 ,  G01J3/453

CPC classification number: G02B21/361 ,  G01J3/0248 ,  G01J3/0275 ,  G01J3/0289 ,  G01J3/108 ,  G01J3/28 ,  G01J3/453 ,  G01N21/35 ,  G01N2021/3595 ,  G02B21/365 ,  G06K9/0014 ,  G06K9/6202 ,  G06T7/0004 ,  G06T7/11 ,  G06T2207/10048 ,  G06T2207/10056 ,  G06T2207/20056 ,  G06T2207/30164

Abstract: Provided is an analysis target region setting apparatus that can accurately set an analysis target region, based on an observation image of a sample obtained with an optical microscope and the like irrespective of texture on the sample surface when the analysis target region is set therein. The analysis target region setting apparatus according to the present invention divides the observation image into a plurality of sub-regions based on pixel information on each pixel constituting the observation image. Subsequently, consolidation information on each sub-region is calculated, and two adjacent sub-regions themselves are consolidated based on the consolidation information. According to this, it is possible to divide the observation image into sub-regions having similar pixel information with a disregard of noise attributed to the shape of a surface and the like. A user designates one sub-region from among the sub-regions finally obtained, as the analysis target region.

Abstract translation: 提供一种分析对象区域设定装置，其能够在设定分析对象区域时，基于用光学显微镜等获得的样本的观察图像来准确地设定分析对象区域，而与样本表面的纹理无关。 根据本发明的分析对象区域设定装置，根据构成观察图像的各像素的像素信息，将观察图像分割为多个子区域。 随后，计算每个子区域的合并信息，并且基于合并信息来合并两个相邻的子区域本身。 据此，可以将观察图像分割成具有类似像素信息的子区域，而不考虑由于表面形状等引起的噪声。 用户从最终获得的子区域中指定一个子区域作为分析目标区域。

公开(公告)号：US20150369729A1

公开(公告)日：2015-12-24

申请号：US14608539

申请日：2015-01-29

Applicant: HÜBNER GmbH & Co. KG

Inventor： Daniel MOLTER ,  Frank ELLRICH ,  Daniel HÜBSCH ,  Thorsten SPRENGER

IPC: G01N21/3581 ,  G01J3/10

CPC classification number: G01N21/3581 ,  G01J3/108 ,  G01N21/3586 ,  G01N22/00 ,  G01N2201/06113 ,  G01N2201/12

Abstract: A method of spectrometry on a spatially extensive sample with generation of a measure in respect of a match of a detected spectrum of a first generation with a single or a plurality of predetermined comparative spectra of chemical substances is disclosed. The method includes the steps: determining at least one location of the first generation on the sample, irradiating the sample with electromagnetic radiation with a plurality of frequencies or a frequency band between 1 GHz and 30 THz at the given location of the first generation of a first order on the sample, frequency-resolved detection of a measure in respect of the intensity of the electromagnetic radiation irradiated on to the sample at the location of the first generation and transmitted or reflected by the sample as the spectrum of the first generation, and calculating a respective measure in respect of a match of the detected spectrum of the first generation with one of the comparative spectra.

Abstract translation: 公开了一种在空间广泛的样品上进行光谱测定的方法，其中生成关于第一代的检测光谱与化学物质的单个或多个预定比较光谱的匹配的测量。 该方法包括以下步骤：在样本上确定第一代的至少一个位置，在第一代的给定位置用具有多个频率或1GHz和30Hz之间的频带的电磁辐射照射样本 样本上的第一顺序，针对在第一代的位置处照射到样本并由样本发射或反射的电磁辐射的强度的度量的频率分辨检测作为第一代的谱，以及 计算关于第一代的检测光谱与比较光谱之一的匹配的相应测量。

公开(公告)号：US09213216B2

公开(公告)日：2015-12-15

申请号：US14506278

申请日：2014-10-03

Applicant: THE BRAIN WINDOW, INC.

Inventor： Andreas G. Nowazyk

IPC: H03F3/08 ,  H03F7/00 ,  G02F1/39 ,  G01N21/27 ,  G01N21/64 ,  G02B21/00 ,  G01J3/02 ,  G01J3/10

CPC classification number: G02F1/39 ,  G01J3/0264 ,  G01J3/108 ,  G01N21/27 ,  G01N21/64 ,  G01N21/645 ,  G01N2201/123 ,  G02B21/0096 ,  G02F2001/392 ,  H03F3/08 ,  H03F7/00

Abstract: A solid state detection system includes a degenerate photo-parametric amplifier (PPA), wherein the PPA comprises a photo diode, and a periodically pulsed light source, wherein the photo-parametric, amplifier (PPA) is synchronized to the pulsed light source with a phase locked loop that generates a pump waveform for the PPA at twice the frequency of the excitation pulse rate.

Abstract translation: 固态检测系统包括退化光参数放大器（PPA），其中PPA包括光电二极管和周期性脉冲光源，其中光参量放大器（PPA）与脉冲光源同步 锁相环，以激励脉冲频率的两倍产生PPA的泵浦波形。

公开(公告)号：US20150346029A1

公开(公告)日：2015-12-03

申请号：US14490948

申请日：2014-09-19

Applicant: KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY

Inventor： Sun Ho KIM ,  Yong Soo KIM ,  Jae Hun KIM ,  Min-Chul PARK ,  Young Tae BYUN ,  Min Ah SEO ,  Joon Mo AHN ,  Deok Ha WOO ,  Seok LEE ,  Taik Jin LEE ,  Young Min JHON

IPC: G01J3/02 ,  G01J3/28 ,  G01J3/10

CPC classification number: G01J3/0297 ,  G01J3/10 ,  G01J3/28 ,  G01J3/2803 ,  G01J2003/282

Abstract: Disclosed are herein an apparatus and method for extreme ultraviolet (EUV) spectroscope calibration. The apparatus for EUV spectroscope calibration includes an EUV generating module, an Al filter, a diffraction grating, a CCD camera, a spectrum conversion module, and a control module that compares a wavelength value corresponding to a maximum peak among peaks of the spectrum depending on the order of the EUV light converted from the spectrum conversion module with a predetermined reference wavelength value depending on an order of high-order harmonics to calculate a difference value with the closest reference wavelength value, and controls the spectrum depending on the order of the EUV light converted from the spectrum conversion module to be moved in a direction of wavelength axis by the calculated difference value. Thus, it is possible to accurately measure a wavelength of a spectrum of EUV light used in EUV exposure technology and mask inspection technology.

Abstract translation: 本文公开了用于极紫外（EUV）分光仪校准的装置和方法。 用于EUV分光仪校准的装置包括EUV生成模块，Al滤光片，衍射光栅，CCD照相机，光谱转换模块和控制模块，该模块将与频谱峰值中的最大峰值对应的波长值与 根据高次谐波的顺序，从频谱转换模块转换成具有预定参考波长值的EUV光的顺序，以计算具有最接近参考波长值的差值，并根据EUV的顺序来控制光谱 从光谱转换模块转换为沿波长轴方向移动计算出的差值的光。 因此，可以精确地测量在EUV曝光技术和掩模检查技术中使用的EUV光的光谱的波长。

公开(公告)号：US09201009B2

公开(公告)日：2015-12-01

申请号：US13983016

申请日：2012-02-03

Applicant: Torben Biehl

Inventor： Torben Biehl

IPC: G01N21/64 ,  G01J3/28 ,  G01J1/58 ,  G01J3/10 ,  G01J3/44 ,  G01J1/42

CPC classification number: G01N21/64 ,  G01J1/58 ,  G01J3/10 ,  G01J3/28 ,  G01J3/4406 ,  G01J2001/4247 ,  G01N21/6408 ,  G01N2021/6417 ,  G01N2021/6495

Abstract: A testing method for an escape path marking which has an installation position and is illuminated by a light source located in a defined position relative to the installation position, in order to charge the escape path marking for achieving afterglow,the following steps: An excitation curve A (λ) for the escape path marking is provided; the irradiance E (λ) of the light source is recorded for the installation position of the escape path marking; a weighted irradiance B (λ) is determined as a product of the irradiance and the excitation curve; a charging irradiance (BiL) is determined as an integral over the weighted irradiance across the wavelength; and a characteristic curve Kt1 (BiL) depending upon the charging time t1 specifies what afterglow time emerges for the escape path marking with the charging time t1 for the charging irradiance (BiL).

Abstract translation: 一种逃生路径标记的测试方法，其具有安装位置，并被位于相对于安装位置的限定位置的光源照射，以便对逸出路径标记进行充电以实现余辉，以下步骤：激发曲线 提供了用于逃生路径标记的A（λ）; 记录光源的辐照度E（λ）用于逃生路径标记的安装位置; 加权辐照度B（λ）被确定为辐照度和激发曲线的乘积; 充电辐照度（BiL）被确定为跨越波长的加权辐照度的积分; 并且根据充电时间t1的特性曲线Kt1（BiL）指定对于充电辐照度（BiL）的充电时间t1，逃逸路径标记出现余辉时间。