Hyperspectral sensing system and method for qualitative analysis of fluids

    公开(公告)号:US11650145B2

    公开(公告)日:2023-05-16

    申请号:US17396986

    申请日:2021-08-09

    Inventor: Joseph Y. Fang

    Abstract: A system and method using remote sensing instrument with hyper spectrum quantitatively measure metal dust elements in lubricating oil, which includes (no limited): Al, Cd, Cr, Cu, Fe, Pb, Mg, Mn, Mo, Ni, Ag, Sn, Ti, V, Zn, B (Boron, for Coolant), Ca (Calcium for water contaminant), and particle size, cone penetration, dropping point, steel mesh oil separation, moisture, PQ concentration, in few seconds. The instrument integrates near-field communication (NFC) Internet of Thing (IoT) Cloud computing, spectral matching and other data processing, and application software forming a system to easily operated and build a model enable self-learning to improve precision through collection accumulation. With the system, the instrument as FIG. 1 can provide comprehensive on-site analysis enable preventive maintenance of mission critical engine and rotating equipment. The characteristics of the system are easy to operate, get result quickly, and self-learning to improve precision.

    METROLOGY METHOD AND APPARATUS, SUBSTRATE, LITHOGRAPHIC METHOD AND ASSOCIATED COMPUTER PRODUCT

    公开(公告)号:US20180238737A1

    公开(公告)日:2018-08-23

    申请号:US15962826

    申请日:2018-04-25

    Abstract: A method of measuring n values of a parameter of interest (e.g., overlay) relating to a structure forming process, where n>1. The method includes performing n measurements on each of n+1 targets, each measurement performed with measurement radiation having a different wavelength and/or polarization combination and determining the n values for a parameter of interest from the n measurements of n+1 targets, each of the n values relating to the parameter of interest for a different pair of the layers. Each target includes n+1 layers, each layer including a periodic structure, the targets including at least n biased targets having at least one biased periodic structure formed with a positional bias relative to the other layers, the biased periodic structure being in at least a different one of the layers per biased target. Also disclosed is a substrate having such a target and a patterning device for forming such a target.

    Irregular Motion Compensation for Three-Dimensional Spectroscopy

    公开(公告)号:US20180106672A1

    公开(公告)日:2018-04-19

    申请号:US15294435

    申请日:2016-10-14

    Applicant: BaySpec, Inc.

    Abstract: Methods and media for compensating for irregular motion in three-dimensional spectroscopy are provided herein. Exemplary methods include: receiving a plurality of spectrographs for a series of respective locations and corresponding images of the respective locations, each spectrograph of the plurality of spectrographs being produced using a spectrographic data set of a plurality of spectrographic data sets, each of the plurality of spectrographic data sets being measured by a spectrograph and each of the corresponding images being captured by a camera at substantially the same time, the spectrograph being coupled to the camera such that the spectrograph and camera move in tandem and at least partially share the same point of view; generating a continuous image using the images; identifying a respective corresponding position in the continuous image for each spectrograph, such that each spectrograph is a measurement of the respective position; and associating each spectrograph with the respective position.

    Adjustment for irregular sensor movement during spectral imaging

    公开(公告)号:US09784615B1

    公开(公告)日:2017-10-10

    申请号:US15362108

    申请日:2016-11-28

    Applicant: BaySpec, Inc.

    Abstract: Systems for adjusting for irregular movement during spectral imaging are provided herein. Exemplary systems include: a spectrograph measuring a plurality of spectrographic data sets; a camera capturing images, a processor communicatively coupled to the spectrograph and the camera; and a memory coupled to the processor, the memory storing instructions executable by the processor to perform a method comprising: receiving a plurality of spectrographs for a series of respective locations and the images corresponding to the respective locations; generating a continuous image using the images; identifying a respective corresponding position in the continuous image for each spectrograph, such that each spectrograph is a measurement of the respective position; and associating each spectrograph with the respective position.

    Spectral data processing apparatus, spectral data processing method, and recording medium

    公开(公告)号:US09696203B2

    公开(公告)日:2017-07-04

    申请号:US14307913

    申请日:2014-06-18

    CPC classification number: G01J3/28 G01J2003/283

    Abstract: A spectral data processing apparatus includes an analyzer configured to perform principal component analysis of spectral data acquired for each of a plurality of regions of a sample, wherein the analyzer obtains an eigenvector by performing the principal component analysis of first spectral data of a first region out of the plurality of regions, and performs the principal component analysis of second spectral data of a second region different from the first region out of the plurality of regions using the obtained eigenvector.

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