公开(公告)号：US20150228450A1

公开(公告)日：2015-08-13

申请号：US14617259

申请日：2015-02-09

Applicant: HITACHI HIGH-TECH SCIENCE CORPORATION

Inventor： Atsushi UEMOTO ,  Tatsuya ASAHATA ,  Hidekazu SUZUKI ,  Yo YAMAMOTO

IPC: H01J37/20 ,  H01J37/28 ,  H01J37/22 ,  H01J37/18

CPC classification number: H01J37/20 ,  H01J37/023 ,  H01J37/18 ,  H01J37/222 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/063 ,  H01J2237/14 ,  H01J2237/182 ,  H01J2237/206 ,  H01J2237/208 ,  H01J2237/2448 ,  H01J2237/2806 ,  H01J2237/2813 ,  H01J2237/31749

Abstract: A charged particle beam apparatus includes: a charged particle beam column; a detector configured to detect secondary charged particles; an image processor; a display device; a needle arranged in an irradiation area of charged particle beam; a needle actuator; a user interface; and a controller configured to control the needle actuator to actuate the needle in accordance with a target position that is set by the user interface. The controller controls the needle actuator to move the needle to track a change of the target position that is set by the user interface.

Abstract translation: 带电粒子束装置包括：带电粒子束柱; 检测器，被配置为检测次级带电粒子; 图像处理器 显示装置; 布置在带电粒子束的照射区域中的针; 针式致动器; 用户界面; 以及控制器，其被配置为根据由用户界面设置的目标位置来控制针致动器致动针。 控制器控制针致动器移动针以跟踪由用户界面设置的目标位置的变化。

公开(公告)号：US09040909B2

公开(公告)日：2015-05-26

申请号：US13681746

申请日：2012-11-20

Applicant: FEI Company

Inventor： N. William Parker ,  Mark W. Utlaut

IPC: G01N23/00 ,  G01N23/225 ,  G01N21/64 ,  H01J37/22 ,  H01J37/28

CPC classification number: G01N21/6428 ,  G01N21/6458 ,  G01N21/6486 ,  G01N23/225 ,  H01J37/228 ,  H01J37/28 ,  H01J37/285 ,  H01J2237/206 ,  H01J2237/2443 ,  H01J2237/24455 ,  H01J2237/2448 ,  H01J2237/2803 ,  H01J2237/2857

Abstract: A method and system for the imaging and localization of fluorescent markers such as fluorescent proteins or quantum dots within biological samples is disclosed. The use of recombinant genetics technology to insert “reporter” genes into many species is well established. In particular, green fluorescent proteins (GFPs) and their genetically-modified variants ranging from blue to yellow, are easily spliced into many genomes at the sites of genes of interest (GoIs), where the GFPs are expressed with no apparent effect on the functioning of the proteins of interest (PoIs) coded for by the GoIs. One goal of biologists is more precise localization of PoIs within cells. The invention is a method and system for enabling more rapid and precise PoI localization using charged particle beam-induced damage to GFPs. Multiple embodiments of systems for implementing the method are presented, along with an image processing method relatively immune to high statistical noise levels.

Abstract translation: 公开了用于生物样品中荧光标记如荧光蛋白或量子点的成像和定位的方法和系统。 使用重组遗传学技术将“记者”基因插入许多物种已经很成熟。 特别地，绿色荧光蛋白（GFP）及其从蓝色到黄色的遗传修饰的变体易于在感兴趣的基因（GoI）的位点处接合到许多基因组中，其中GFP表达对功能没有明显的影响 的由GoI编码的感兴趣的蛋白质（PoI）。 生物学家的一个目标是更精确地定位细胞内的PoI。 本发明是一种方法和系统，用于使得能够使用带电粒子束对GFP的损伤进行更快速和精确的PoI定位。 提出了用于实现该方法的系统的多个实施例，以及相对不受高统计噪声水平影响的图像处理方法。

公开(公告)号：US20150048815A1

公开(公告)日：2015-02-19

申请号：US14460161

申请日：2014-08-14

Applicant: FEI Company

Inventor： Paul Johannes L. Barends ,  Mathijs P.W. van den Boogaard ,  Philip Brundage

IPC: G01R1/067

CPC classification number: G01R1/06705 ,  H01J37/20 ,  H01J2237/2008 ,  H01J2237/206 ,  H01J2237/208 ,  H01J2237/24564 ,  H01J2237/24592

Abstract: A probe assembly can be connected and disconnected from its electrical harness within a vacuum chamber so that the probe assembly with the work piece mounted can be rotated and tilted without interference from a cable, and can then be reconnected without opening the vacuum chamber. Also described is a means of grounding a sample and probes when the probe assembly is disconnected from its electrical harness and a means of preventing damage to the probe mechanism and the probe itself by ensuring that the probes are not sticking up too far during operations.

Abstract translation: 探针组件可以在真空室内与其电气线束连接和断开，从而安装工件的探头组件可以旋转和倾斜而不受电缆干扰，然后可以重新连接而不打开真空室。 还描述了当探针组件与其电气线束断开连接时，将样品和探针接地的手段，以及通过确保探头在操作过程中不会粘住太远的手段来防止探针机构和探针本身的损坏。

公开(公告)号：US20130140459A1

公开(公告)日：2013-06-06

申请号：US13309425

申请日：2011-12-01

Applicant: Simon Galloway

Inventor： Simon Galloway

IPC: H01J37/26

CPC classification number: G01N1/06 ,  G01N2001/068 ,  H01J37/02 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/024 ,  H01J2237/206 ,  H01J2237/208 ,  H01J2237/2445 ,  H01J2237/2611 ,  H01J2237/2808 ,  H01J2237/31749

Abstract: A system is disclosed for obtaining layered cathodoluminescence images of a sample wherein the light collecting equipment is highly efficient and wherein the microtoming or Focused Ion Beam equipment does not interfere with the efficiency of the light collecting equipment and wherein the position of the sample with respect to the light collecting equipment is not disturbed in the microtoming or ion beam milling process. Embodiments are disclosed allowing simultaneous collection of cathodoluminescence images and collection of other electron based imaging signals such as backscattered and secondary electrons.

Abstract translation: 公开了一种用于获得样品的层状阴极发光图像的系统，其中所述光收集设备是高效的，并且其中所述切片或聚焦离子束设备不干扰所述光收集设备的效率，并且其中所述样品相对于 在切片或离子束研磨过程中，光收集设备不受干扰。 公开了实施例，允许阴离子发光图像的同时收集和其他基于电子的成像信号（例如背散射和二次电子）的收集。

公开(公告)号：US20120305765A1

公开(公告)日：2012-12-06

申请号：US13589461

申请日：2012-08-20

Applicant: Ulrike ZEILE ,  Andreas SCHERTEL

Inventor： Ulrike ZEILE ,  Andreas SCHERTEL

IPC: H01J37/26

CPC classification number: H01J37/20 ,  H01J37/26 ,  H01J37/3056 ,  H01J2237/201 ,  H01J2237/20207 ,  H01J2237/206 ,  H01J2237/31745 ,  H01J2237/31749

Abstract: A particle beam device includes a movable carrier element with at least one receiving element for receiving a specimen and in which the receiving element is situated on the carrier element. In various embodiments, the receiving element may be situated removably on the carrier element and/or multiple receiving elements may be situated on the carrier element in such a way that a movement of the carrier element causes a movement of the multiple receiving elements in the same spatial direction or around the same axis. The carrier element may be movable in three spatial directions situated perpendicular to one another and rotatable around a first axis which is parallel to an optical axis of the particle beam device and around a second axis which is situated perpendicular to the optical axis. A method for using the particle beam device in connection with specimen study and preparation is also disclosed.

Abstract translation: 粒子束装置包括具有至少一个用于接收样本的接收元件的可移动的载体元件，并且其中接收元件位于载体元件上。 在各种实施例中，接收元件可以可拆卸地位于载体元件上和/或多个接收元件可以位于载体元件上，使得载体元件的移动导致多个接收元件在同一移动中的移动 空间方向或围绕同一轴线。 载体元件可以在三个空间方向上移动，该三个空间方向彼此垂直并可围绕平行于粒子束装置的光轴并围绕垂直于光轴定位的第二轴线的第一轴线旋转。 还公开了与样品研究和制备相关的使用粒子束装置的方法。

公开(公告)号：US20120293791A1

公开(公告)日：2012-11-22

申请号：US13479330

申请日：2012-05-24

Applicant: Mirko Milas ,  Yimei Zhu ,  Jonathan David Rameau

Inventor： Mirko Milas ,  Yimei Zhu ,  Jonathan David Rameau

IPC: G01N21/01 ,  H01J37/20

CPC classification number: H01J37/26 ,  G01N23/2204 ,  G01N2223/309 ,  G21K7/00 ,  H01J37/20 ,  H01J37/226 ,  H01J2237/20 ,  H01J2237/206 ,  H01J2237/2802 ,  H01J2237/31745

Abstract: A method for performing time resolved imaging, spectroscopy or diffraction techniques involving a sample held in an analytical device. The method generally includes supporting a sample within an analytical device with a sample holder, conveying a light beam through an internal conduit of a sample holder body of the sample holder and directing the light beam between the sample holder body and the sample with a first light beam positioner of a sample support member of the sample holder, such that the light beam and an energy pulse emitted by an energy source of the analytical device converge on the sample supported by the sample holder within the analytical device.

Abstract translation: 用于执行涉及保持在分析装置中的样品的时间分辨成像，光谱学或衍射技术的方法。 该方法通常包括将样品支撑在具有样品保持器的分析装置内，将光束通过样品保持器的样品保持器主体的内部导管传送，并用第一光引导光束在样品保持器主体和样品之间 使得所述光束和由所述分析装置的能量源发射的能量脉冲会聚在由所述分析装置内的样品保持器支撑的样品上。

公开(公告)号：US08191168B2

公开(公告)日：2012-05-29

申请号：US12264750

申请日：2008-11-04

Applicant: Xin Man ,  Kouji Iwasaki ,  Tatsuya Asahata

Inventor： Xin Man ,  Kouji Iwasaki ,  Tatsuya Asahata

IPC: G01N13/10

CPC classification number: H01J37/3056 ,  B82Y15/00 ,  G01N1/286 ,  H01J37/20 ,  H01J37/26 ,  H01J2237/2007 ,  H01J2237/202 ,  H01J2237/204 ,  H01J2237/206 ,  H01J2237/2067 ,  H01J2237/2802 ,  H01J2237/31745 ,  H01J2237/31749

Abstract: Provided is a method of preparing a sample piece for a transmission electron microscope, the sample piece for a transmission electron microscope including a substantially planar finished surface which can be observed with the transmission electron microscope and a grabbing portion which microtweezers can grab without contacting the finished surface. The method of preparing a sample piece for a transmission electron microscope is characterized by including: a first step of cutting out the sample piece from a sample body Wa with a charged particle beam, the sample piece being coupled to the sample body at a coupling portion; a second step of grabbing with the microtweezers the grabbing portion of the sample piece with the finished surface of the sample piece cut out in the first step being covered with the microtweezers; a third step of detaching the sample piece grabbed with the microtweezers in the second step from the sample body by cutting the coupling portion with the charged particle beam with a grabbed state of the sample piece being maintained; and a fourth step of transferring and fixing with the microtweezers the sample piece detached in the third step onto a sample holder.

Abstract translation: 提供了一种制备透射电子显微镜样品的方法，用于透射电子显微镜的样品片，其包括可透射电子显微镜观察的基本上平面的成品表面，以及微型加工者可以在不接触成品的情况下抓取的抓取部分 表面。 制备透射电子显微镜样品的方法的特征在于包括：第一步骤，利用带电粒子束从样品体Wa切出样品片，样品片以耦合部分 ; 第二步骤是用微型加湿器抓住样品的抓取部分，其中在第一步骤中切出的样品的成品表面被微型加工机覆盖; 第三步骤，通过用保持样品的抓取状态的带电粒子束切割耦合部分，将样品从第二步骤中剥离出来; 以及第四步骤，用微型加工机将第三步骤中拆卸的样品片转移和固定到样品架上。

公开(公告)号：US08134131B2

公开(公告)日：2012-03-13

申请号：US12329661

申请日：2008-12-08

Applicant: Shohei Terada ,  Kazutoshi Kaji ,  Shigeto Isakozawa

Inventor： Shohei Terada ,  Kazutoshi Kaji ,  Shigeto Isakozawa

IPC: G21K5/00

CPC classification number: H01J37/20 ,  G01N23/2251 ,  G01N23/2252 ,  H01J37/26 ,  H01J2237/2008 ,  H01J2237/206 ,  H01J2237/2802

Abstract: An object of the invention is to provide a method and apparatus for observing inside structures and a specimen holder, wherein aging degradation of a good sample to a bad sample can be tracked in the same field of view, using the same specimen in order to determine the mechanism of failure. The present invention is a method for observing inside structures. The method comprises irradiating a specimen with a corpuscular beam generated from a corpuscular beam source, detecting transmitted particles transmitted by the specimen, applying a voltage to a portion of the specimen, and observing of a detection status of the transmitted particles in the voltage-applied portion as needed.

Abstract translation: 本发明的目的是提供一种用于观察内部结构和样本保持器的方法和装置，其中可以使用相同的样本在相同的视野中跟踪良好样本的老化劣化到不良样本，以便确定 失败的机制。 本发明是一种观察内部结构的方法。 该方法包括用从粒子束源产生的粒子束照射样本，检测由样本透射的透射粒子，向样本的一部分施加电压，并观察施加电压的透射粒子的检测状态 部分。

公开(公告)号：US07915583B2

公开(公告)日：2011-03-29

申请号：US12234567

申请日：2008-09-19

Applicant: Ahmed Zewail ,  Vladimir Lobastov

Inventor： Ahmed Zewail ,  Vladimir Lobastov

IPC: H01J37/26 ,  H01J37/252

CPC classification number: H01J37/26 ,  H01J37/065 ,  H01J37/073 ,  H01J37/24 ,  H01J37/243 ,  H01J37/265 ,  H01J2237/0432 ,  H01J2237/06333 ,  H01J2237/06341 ,  H01J2237/206 ,  H01J2237/2065 ,  H01J2237/24585 ,  H01J2237/2482 ,  H01J2237/2803 ,  H01J2237/2809 ,  H01J2237/2813 ,  H01J2237/2855

Abstract: An ultrafast system (and methods) for characterizing one or more samples. The system includes a stage assembly, which has a sample to be characterized. The system has a laser source that is capable of emitting an optical pulse of less than 1 ps in duration. The system has a cathode coupled to the laser source. In a specific embodiment, the cathode is capable of emitting an electron pulse less than 1 ps in duration. The system has an electron lens assembly adapted to focus the electron pulse onto the sample disposed on the stage. The system has a detector adapted to capture one or more electrons passing through the sample. The one or more electrons passing through the sample is representative of the structure of the sample. The detector provides a signal (e.g., data signal) associated with the one or more electrons passing through the sample that represents the structure of the sample. The system has a processor coupled to the detector. The processor is adapted to process the data signal associated with the one or more electrons passing through the sample to output information associated with the structure of the sample. The system has an output device coupled to the processor. The output device is adapted to output the information associated with the structure of the sample.

Abstract translation: 用于表征一个或多个样品的超快系统（和方法）。 该系统包括具有要表征的样品的载物台组件。 该系统具有能够发射持续时间小于1ps的光脉冲的激光源。 该系统具有耦合到激光源的阴极。 在具体实施例中，阴极能够发射持续时间小于1ps的电子脉冲。 该系统具有适于将电子脉冲聚焦到设置在载物台上的样品上的电子透镜组件。 该系统具有适于捕获穿过样品的一个或多个电子的检测器。 通过样品的一个或多个电子代表样品的结构。 检测器提供与通过样品的一个或多个电子相关联的信号（例如，数据信号），其表示样品的结构。 该系统具有耦合到检测器的处理器。 处理器适于处理与通过样本的一个或多个电子相关联的数据信号，以输出与样本的结构相关联的信息。 该系统具有耦合到处理器的输出设备。 输出设备适于输出与样本结构相关联的信息。

公开(公告)号：US07745802B2

公开(公告)日：2010-06-29

申请号：US12023443

申请日：2008-01-31

Applicant: Hidetoshi Nishiyama ,  Mitsuru Koizumi

Inventor： Hidetoshi Nishiyama ,  Mitsuru Koizumi

IPC: G01N1/28 ,  G21K5/08 ,  H01J37/20

CPC classification number: H01J37/28 ,  H01J37/20 ,  H01J37/228 ,  H01J2237/0266 ,  H01J2237/2004 ,  H01J2237/206 ,  H01J2237/2608 ,  H01J2237/2808

Abstract: A specimen holder, a specimen inspection apparatus, and a specimen inspection method permitting a specimen consisting of cultured cells to be observed or inspected. Also, a method of fabricating the holder is offered. The holder has an open specimen-holding surface. At least a part of this surface is formed by a film. A specimen cultured on the specimen-holding surface of the film can be irradiated via the film with a primary beam for observation or inspection of the specimen. Consequently, the cultured specimen (e.g., cells) can be observed or inspected in vitro. Especially, if an electron beam is used as the primary beam, the specimen in vitro can be observed or inspected by SEM. Because the specimen-holding surface is open, a manipulator can gain access to the specimen. A stimulus can be given to the specimen using the manipulator. The reaction can be observed or inspected.

Abstract translation: 试样支架，试样检查装置和允许观察或检查由培养细胞组成的试样的试样检查方法。 此外，提供了制造保持器的方法。 支架具有开放的标本保持表面。 该表面的至少一部分由膜形成。 可以在膜的试样保持表面上培养的样品通过膜通过主光束照射，用于观察或检查样品。 因此，可以在体外观察或检查培养的标本（例如细胞）。 特别地，如果使用电子束作为主光束，则可以通过SEM观察或检查体外的样本。 由于样品保持表面是开放的，操纵器可以进入样品。 可以使用机械手对试样给予刺激。 可以观察或检查反应。