公开(公告)号：US20150213995A1

公开(公告)日：2015-07-30

申请号：US14162802

申请日：2014-01-24

Applicant: Keysight Technologies, Inc.

Inventor： Lawrence P. Muray ,  Scott W. Indermuehle ,  James P. Spallas ,  Ying Wu ,  Dimitri Klyachko

IPC: H01J37/05 ,  G01T1/36 ,  H01J37/28

CPC classification number: H01J37/04 ,  H01J37/05 ,  H01J37/20 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/04735 ,  H01J2237/1205 ,  H01J2237/2007 ,  H01J2237/202 ,  H01J2237/2442 ,  H01J2237/2445

Abstract: A scanning electron microscopy (SEM) and energy dispersive spectroscopy (EDS) apparatus that includes a scanning electron microscope, an x-ray detector, and an auxiliary acceleration voltage source. The scanning electron microscope includes a sample holder, and a layered electron beam column arranged to output an electron beam towards the sample holder at an initial beam energy. The auxiliary acceleration voltage source is to apply an auxiliary acceleration voltage between the sample holder and the layered electron beam column to accelerate the electron beam to a final beam energy. At the final beam energy, the electron beam is capable of generating x-rays at multiple wavelengths from a larger range of atomic species than the electron beam at the initial beam energy.

Abstract translation: 包括扫描电子显微镜，X射线检测器和辅助加速电压源的扫描电子显微镜（SEM）和能量色散光谱（EDS）装置。 扫描电子显微镜包括样品保持器和分层电子束柱，其被布置成以初始光束能量朝向样品保持器输出电子束。 辅助加速电压源是在样品架和分层电子束柱之间施加辅助加速电压，以将电子束加速到最终的束能。 在最终光束能量下，电子束能够在起始光束能量下从原子物质的范围比电子束产生多个波长的x射线。

公开(公告)号：US20150069261A1

公开(公告)日：2015-03-12

申请号：US14394591

申请日：2012-08-06

Applicant: Libo Peng ,  Huiyue Long ,  Junyu Xie

Inventor： Libo Peng ,  Huiyue Long ,  Junyu Xie

IPC: H01J37/147 ,  H01J37/317

CPC classification number: H01J37/1472 ,  H01J37/05 ,  H01J37/147 ,  H01J37/1475 ,  H01J37/3171 ,  H01J2237/055 ,  H01J2237/057 ,  H01J2237/152

Abstract: A method for transmitting a broadband ion beam (100) and an ion implanter adopt an analyzing magnetic field (1), a calibration magnetic field (2) and an analyzing grating (6) to transmit a broadband ion beam. If the analyzing magnetic field (1) enables the broadband ion beam (100) emitted into the analyzing magnetic field from an incident face (101) thereof to be deflected anticlockwise in a horizontal direction, the calibration magnetic field (2) enables an ion beam diffusing again after passing through the analyzing grating (6) to be deflected clockwise in the horizontal direction; if the analyzing magnetic field (1) enables the broadband ion beam (100) emitted into the analyzing magnetic field from the incident face (101) thereof to be deflected clockwise in the horizontal direction, the calibration magnetic field (2) enables an ion beam diffusing again after passing through the analyzing grating (6) to be deflected anticlockwise in the horizontal direction. The analyzing magnetic field (1) and the calibration magnetic field (2) enable the ion beam to be deflected along different directions in the horizontal direction, so that distribution of the required ions in the broadband ion beam (100) when emitted out of the calibration magnetic field (2) from an emergence face (202) thereof is the same as the distribution when being emitted into the analyzing magnetic field.

Abstract translation: 用于传输宽带离子束（100）和离子注入机的方法采用分析磁场（1），校准磁场（2）和分析光栅（6）来传输宽带离子束。 如果分析磁场（1）使得从其入射面（101）发射到分析磁场中的宽带离子束（100）在水平方向上逆时针偏转，则校准磁场（2）能够使离子束 在通过分析光栅（6）之后再次扩散以在水平方向上顺时针偏转; 如果分析磁场（1）使得从其入射面（101）发射到分析磁场中的宽带离子束（100）能够在水平方向上顺时针偏转，则校准磁场（2）能够使离子束 在通过分析光栅（6）之后再次扩散，以在水平方向上逆时针方向偏转。 分析磁场（1）和校准磁场（2）使得离子束沿水平方向沿着不同的方向偏转，使得当宽带离子束（100）中发射出来时，所需离子在宽带离子束（100）中的分布 来自其出射面（202）的校准磁场（2）与发射到分析磁场中时的分布相同。

公开(公告)号：US08963107B2

公开(公告)日：2015-02-24

申请号：US13348855

申请日：2012-01-12

Applicant: Edward C. Eisner ,  Bo H. Vanderberg

Inventor： Edward C. Eisner ,  Bo H. Vanderberg

IPC: G01K5/00 ,  H01J37/147

CPC classification number: H01J37/147 ,  G01K5/00 ,  H01J37/05 ,  H01J37/16 ,  H01J37/3171 ,  H01J2237/0213 ,  H01J2237/022 ,  H01J2237/31705

Abstract: Methods and apparatus for reducing energy contamination can be provided to a beam line assembly for ion implantation. Protrusions comprising surface areas and grooves therebetween can face neutral trajectories within a line of sight view from the workpiece within the beam line assembly. The protrusions can alter the course of the neutral trajectories away from the workpiece or cause alternate trajectories for further impacting before hitting a workpiece, and thereby, further reduce energy contamination for more sensitive implants.

Abstract translation: 可以将用于减少能量污染的方法和装置提供给用于离子注入的束线组件。 包括其间的表面区域和凹槽的突起可以在来自光束线组件内的工件的视线范围内面对中性轨迹。 突起可以改变中性轨迹离开工件的过程，或者在撞击工件之前引起交替的轨迹以进一步冲击，从而进一步减少更敏感的植入物的能量污染。

公开(公告)号：US20150029593A1

公开(公告)日：2015-01-29

申请号：US14338542

申请日：2014-07-23

Applicant: JEOL Ltd.

Inventor： Hidetaka Sawada ,  Yu Jimbo

IPC: G02B27/00

CPC classification number: G02B27/0037 ,  G01N23/20 ,  G02B27/42 ,  G02B27/4205 ,  G21K1/08 ,  H01J3/04 ,  H01J3/12 ,  H01J3/26 ,  H01J37/05 ,  H01J37/147 ,  H01J37/1472 ,  H01J37/153 ,  H01J37/28 ,  H01J2237/1532 ,  H01J2237/1534

Abstract: A spherical aberration corrector is offered which permits a correction of deviation of the circularity of at least one of an image and a diffraction pattern and a correction of on-axis aberrations to be carried out independently. The spherical aberration corrector (100) is for use with a charged particle beam instrument (1) for obtaining the image and the diffraction pattern and has a hexapole field generating portion (110) for producing plural stages of hexapole fields, an octopole field superimposing portion (120) for superimposing an octopole on at least one of the plural stages of hexapole fields to correct deviation of the circularity of at least one of the image and diffraction pattern, and a deflection portion (130) for deflecting a charged particle beam.

Abstract translation: 提供了一种球面像差校正器，其允许校正图像和衍射图案中的至少一个的圆度的偏差和单独进行的轴上像差校正。 球面像差校正器（100）用于带电粒子束仪器（1），用于获得图像和衍射图案，并具有用于产生多级六极场的六极场产生部分（110），八极场叠加部分 （120），用于将至少一个六极场中的至少一个叠加八极杆，以校正图像和衍射图案中的至少一个的圆度的偏差，以及用于偏转带电粒子束的偏转部分（130）。

公开(公告)号：US08941077B2

公开(公告)日：2015-01-27

申请号：US13280162

申请日：2011-10-24

Applicant: Nicholas White ,  Zhimin Wan ,  Erik Collart

Inventor： Nicholas White ,  Zhimin Wan ,  Erik Collart

IPC: H01J1/88 ,  H01J3/26 ,  H01J3/04 ,  H01J37/317

CPC classification number: H01J37/05 ,  H01J3/04 ,  H01J3/26 ,  H01J37/1472 ,  H01J37/3007 ,  H01J37/3171 ,  H01J2237/04756 ,  H01J2237/053 ,  H01J2237/057 ,  H01J2237/151 ,  H01J2237/303 ,  H01J2237/31701

Abstract: A deceleration apparatus capable of decelerating a short spot beam or a tall ribbon beam is disclosed. In either case, effects tending to degrade the shape of the beam profile are controlled. Caps to shield the ion beam from external potentials are provided. Electrodes whose position and potentials are adjustable are provided, on opposite sides of the beam, to ensure that the shape of the decelerating and deflecting electric fields does not significantly deviate from the optimum shape, even in the presence of the significant space-charge of high current low-energy beams of heavy ions.

Abstract translation: 公开了一种减速装置，能够使短点光束或高色带光束减速。 在任一种情况下，都会控制趋向于降低光束轮廓形状的效果。 提供了用于将离子束屏蔽到外部电位的盖子。 其位置和电位可调的电极设置在梁的相对两侧，以确保减速和偏转电场的形状不会显着偏离最佳形状，即使存在显着的空间电荷高 目前低能量的重离子束。

公开(公告)号：US20150020735A1

公开(公告)日：2015-01-22

申请号：US14341450

申请日：2014-07-25

Applicant: Peter F. Vandermeulen

Inventor： Peter F. Vandermeulen

IPC: H01J37/32

CPC classification number: H01J37/32229 ,  C23C16/511 ,  C23C16/513 ,  H01J37/05 ,  H01J37/08 ,  H01J37/32192 ,  H01J37/32201 ,  H01J37/3244 ,  H01J37/32669 ,  H01J2237/057 ,  H01J2237/0817 ,  H01J2237/3323 ,  H01P3/12 ,  H01P3/127 ,  H01Q21/0043

Abstract: This application is directed to an apparatus for creating microwave radiation patterns for an object detection system. The apparatus includes a waveguide conduit having first slots at one side of the conduit and corresponding second slots at an opposite side of the conduit. The waveguide conduit is coupled to a microwave source for transmitting microwaves from the microwave source through the plurality of first slots. A plunger is moveably positioned in the waveguide conduit from one end thereof. The plunger allows the waveguide conduit to be tuned to generally optimize the power of the microwaves exiting the first slots. Secondary plungers are each fitted in one of the second slots to independently tune or detune microwave emittance through a corresponding first slot.

公开(公告)号：US08927942B2

公开(公告)日：2015-01-06

申请号：US14124408

申请日：2012-06-05

Applicant: Jacques Gierak ,  Nicolas Allemandou ,  Klaus Hasselbach ,  Jean-Paul Leggeri ,  Guillaume Donnier-Valentin ,  Stephen Purcell ,  Pauline Gavand

Inventor： Jacques Gierak ,  Nicolas Allemandou ,  Klaus Hasselbach ,  Jean-Paul Leggeri ,  Guillaume Donnier-Valentin ,  Stephen Purcell ,  Pauline Gavand

IPC: H01J27/00 ,  H01J37/08 ,  H01J27/02 ,  H01J27/22 ,  H01J3/18 ,  H01J3/26 ,  H01J37/05 ,  H01J37/317

CPC classification number: H01J37/08 ,  H01J3/18 ,  H01J3/26 ,  H01J27/022 ,  H01J27/024 ,  H01J27/22 ,  H01J37/05 ,  H01J37/317 ,  H01J37/3174 ,  H01J2237/0807 ,  H01J2237/0815 ,  H01J2237/0827

Abstract: A ion source comprises: a chamber, an injection to inject matter into the chamber, wherein said matter comprises at least a first species, a tip with an apex located in the chamber, wherein the apex has a surface made of a metallic second species, a generator to generate ions of said species, and a regulation system adapted to set operative conditions of the chamber to alternatively generate ions from the gaseous first species, and ions from the non-gaseous metallic second species.

Abstract translation: 离子源包括：腔室，用于将物质注入到腔室中的注射器，其中所述物质包括至少第一物质，具有位于所述腔室中的顶点的尖端，其中所述顶点具有由金属第二物质制成的表面， 用于产生所述物质的离子的发生器，以及调节系统，其适于设置所述腔室的操作条件以交替地从所述气态第一物质产生离子，以及从所述非气态金属第二物质产生离子。

公开(公告)号：US08913841B2

公开(公告)日：2014-12-16

申请号：US13574129

申请日：2011-02-14

Applicant: Takeo Suga

Inventor： Takeo Suga

IPC: G06K9/40 ,  H01J37/28 ,  H01J49/00 ,  G06T5/00 ,  H01J37/05 ,  G06T5/20 ,  H01J37/22

CPC classification number: H01J37/28 ,  G06T5/003 ,  G06T5/20 ,  G06T2207/10061 ,  G06T2207/20008 ,  G06T2207/30024 ,  H01J37/05 ,  H01J37/22 ,  H01J49/0004 ,  H01J49/0036

Abstract: Image blurring of a mass spectrum image obtained by the signal intensity for each mass/charge ratio from the obtained two-dimensional mass spectrum is reduced by image restoration using a blurring function. The blurring function expresses a two dimensional distribution of transferred energy related to the distance from a point of primary ion incidence limited by a region exceeding desorption energy of a molecule.

Abstract translation: 通过使用模糊功能的图像恢复，通过从获得的二维质谱中获得的每个质量/电荷比的信号强度获得的质谱图像的图像模糊减少。 模糊函数表示与从分子超过解吸能的区域限制的从一次离子入射点的距离相关的转移能量的二维分布。

公开(公告)号：US20140326877A1

公开(公告)日：2014-11-06

申请号：US14271298

申请日：2014-05-06

Applicant: FEI Company

Inventor： Brian Roberts Routh, JR.

IPC: H01J37/26 ,  G01T1/28 ,  H01J37/30

CPC classification number: H01J37/285 ,  G01T1/28 ,  H01J27/16 ,  H01J37/05 ,  H01J37/077 ,  H01J37/08 ,  H01J37/10 ,  H01J37/1471 ,  H01J37/265 ,  H01J37/30 ,  H01J37/304 ,  H01J37/305 ,  H01J37/3056 ,  H01J2237/0817 ,  H01J2237/24415 ,  H01J2237/2445 ,  H01J2237/24475 ,  H01J2237/2448 ,  H01J2237/31749

Abstract: A single column charged particle source with user selectable configurations operates in ion-mode for FIB operations or electron mode for SEM operations. Equipped with an x-ray detector, energy dispersive x-ray spectroscopy analysis is possible. A user can selectively configure the source to prepare a sample in the ion-mode or FIB mode then essentially flip a switch selecting electron-mode or SEM mode and analyze the sample using EDS or other types of analysis.

Abstract translation: 具有用户可选择配置的单列带电粒子源以离子模式进行FIB操作或SEM操作的电子模式。 配备了X射线检测器，可进行能量色散X射线光谱分析。 用户可以选择性地配置源以在离子模式或FIB模式下准备样品，然后基本上翻转开关选择电子模式或SEM模式，并使用EDS或其他类型的分析来分析样品。

公开(公告)号：US08859966B2

公开(公告)日：2014-10-14

申请号：US13106726

申请日：2011-05-12

Applicant: Peter Christiaan Tiemeijer ,  Bert Henning Freitag ,  Sorin Lazar

Inventor： Peter Christiaan Tiemeijer ,  Bert Henning Freitag ,  Sorin Lazar

IPC: H01J37/26 ,  H01J37/28 ,  H01J37/05

CPC classification number: H01J37/05 ,  H01J37/28 ,  H01J2237/057 ,  H01J2237/2802 ,  H01J2237/2804

Abstract: The invention provides multiple detectors that detect electrons that have passed through a sample. The detectors preferably detect electrons after the electrons have been passed through a prism that separates electrons according to their energies. Electrons in different energy ranges are then detected by different detectors, with preferably at least one of the detectors measuring the energy lost by the electrons as they pass through the sample. One embodiment of the invention provides EELS on core-loss electrons while simultaneously providing a bright-field STEM signal from low-loss electrons.

Abstract translation: 本发明提供了多个检测器，其检测已经通过样品的电子。 检测器优选在电子通过通过根据其能量分离电子的棱镜之后检测电子。 不同能量范围的电子然后由不同的检测器检测，优选地，至少一个检测器测量当电子通过样品时由电子损失的能量。 本发明的一个实施例为核心损耗电子提供EELS，同时从低损耗电子提供亮场STEM信号。