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    Charged Particle Beam Device
    31.
    发明申请
    Charged Particle Beam Device 审中-公开
    带电粒子束装置

    公开(公告)号：US20160233049A1

    公开(公告)日：2016-08-11

    申请号：US15022662

    申请日：2014-05-02

    Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

    Inventor： Yuko SASAKI ,  Hiroyuki ITO

    IPC: H01J37/153 ,  H01J37/12

    CPC classification number: H01J37/153 ,  H01J37/12 ,  H01J37/141 ,  H01J37/147 ,  H01J2237/103 ,  H01J2237/1532 ,  H01J2237/1534

    Abstract: Provided is a multifunctional charged particle beam device capable of inclining a beam with little aberration. The aberration is corrected by forming a local divergent field with a multipole, parallel current lines, or the like, matching the beam axis with the local divergent field via a conventional rotationally symmetric lens, deflector or astigmatism corrector, and counteracting an aberration occurring from another rotationally symmetric convex lens field.

    Abstract translation: 提供了一种能够使几乎没有像差的光束倾斜的多功能带电粒子束装置。 通过用多极，平行电流线等形成局部发散场，通过常规旋转对称透镜，偏转器或像散校正器将光束轴与局部发散场匹配并抵消从另一个发生的像差来校正像差 旋转对称凸透镜场。

    Electron Microscope
    32.
    发明申请
    Electron Microscope 有权
    电子显微镜

    公开(公告)号：US20160196952A1

    公开(公告)日：2016-07-07

    申请号：US14916529

    申请日：2014-05-16

    Applicant: HIitachi High-Technologies Corporation

    Inventor： Hiroaki MATSUMOTO ,  Takeshi SATO ,  Yoshifumi TANIGUCHI ,  Ken HARADA

    IPC: H01J37/10 ,  H01J37/147 ,  H01J37/05 ,  H01J37/285

    CPC classification number: H01J37/10 ,  G01N23/20058 ,  G01N2223/418 ,  H01J37/04 ,  H01J37/05 ,  H01J37/09 ,  H01J37/147 ,  H01J37/1472 ,  H01J37/153 ,  H01J37/24 ,  H01J37/244 ,  H01J37/26 ,  H01J37/261 ,  H01J37/28 ,  H01J37/285 ,  H01J37/295 ,  H01J2237/21 ,  H01J2237/2614

    Abstract: The present invention relates to a lens-less Foucault method wherein a transmission electron microscope objective lens (5) is turned off, an electron beam crossover (11, 13) is matched with a selected area aperture (65), and the focal distance of a first imaging lens (61) can be changed to enable switching between a sample image observation mode and a sample diffraction pattern observation mode, characterized in that a deflector (81) is disposed in a stage following the first imaging lens (61), and conditions for an irradiating optical system (4) can be fixed after conditions for the imaging optical system have been determined. This allows a lens-less Foucault method to be implemented in a common general-use transmission electron microscope with no magnetic shielding lens equipped, without burdening the operator.

    Abstract translation: 本发明涉及一种无透镜Foucault方法，其中透射电子显微镜物镜（5）被关闭，电子束交叉（11,13）与所选区域孔径（65）匹配，并且焦距 可以改变第一成像透镜（61）以在样本图像观察模式和样本衍射图案观察模式之间切换，其特征在于，偏转器（81）设置在跟随第一成像透镜（61）的阶段中，以及 可以在确定成像光学系统的条件之后固定照射光学系统（4）的条件。 这样就可以在没有磁屏蔽透镜的公共通用透射电子显微镜中实现无镜头福柯方法，而不会对操作者造成负担。

    Multipole lens, aberration corrector, and electron microscope
    33.
    发明授权
    Multipole lens, aberration corrector, and electron microscope 有权
    多极透镜，像差校正器和电子显微镜

    公开(公告)号：US09349565B2

    公开(公告)日：2016-05-24

    申请号：US14688045

    申请日：2015-04-16

    Applicant: JEOL Ltd.

    Inventor： Hidetaka Sawada

    IPC: G21K5/04 ,  H01J37/141 ,  H01J37/06 ,  H01J37/26

    CPC classification number: H01J37/141 ,  H01J37/06 ,  H01J37/153 ,  H01J37/26 ,  H01J2237/063 ,  H01J2237/1415

    Abstract: A multipole lens (100) which can produce static magnetic fields showing different strengths in the direction of travel of an electron beam has lens subasssemblies (10a, 10b, 10c) stacked on top of each other. The lens subassemblies (10a, 10b, 10c) have yokes (14a, 14b, 14c), respectively, and polar elements (12a, 12b, 12c), respectively. The polar elements (12a, 12b, 12c) have base portions (13a, 13b, 13c), respectively, magnetically coupled to the yokes (14a, 14b, 14c), respectively, and front end portions (11a, 11b, 11c), respectively, magnetically coupled to the base portions (13a, 13b, 13c), respectively. Magnetic field separators (20, 22) made of a nonmagnetic material are mounted between the front end portions (11a, 11b, 11c) which are successively adjacent to each other in the direction of stacking of the lens subassemblies (10a, 10b, 10c).

    Abstract translation: 能够产生在电子束行进方向上具有不同强度的静磁场的多极镜（100）具有彼此堆叠的透镜子组件（10a，10b，10c）。 透镜组件（10a，10b，10c）分别具有轭（14a，14b，14c）和极性元件（12a，12b，12c）。 极性元件（12a，12b，12c）分别具有分别与轭（14a，14b，14c）磁接合的基部（13a，13b，13c）和前端部（11a，11b，11c） 分别磁耦合到基部（13a，13b，13c）。 由非磁性材料制成的磁场分离器（20,22）安装在沿着透镜组件（10a，10b，10c）堆叠方向相互相邻的前端部分（11a，11b，11c）之间， 。

    Charged particle beam device
    35.
    发明授权
    Charged particle beam device 有权
    带电粒子束装置

    公开(公告)号：US09312094B2

    公开(公告)日：2016-04-12

    申请号：US14235076

    申请日：2012-07-09

    Applicant: Hisanao Akima ,  Yoichi Hirayama

    Inventor： Hisanao Akima ,  Yoichi Hirayama

    IPC: H01J37/00 ,  H01J37/153 ,  H01J37/30

    CPC classification number: H01J37/153 ,  H01J37/3007

    Abstract: This charged particle beam device comprises: an electron beam source (1); a charged particle optical system that includes an object lens (9) and that irradiates a sample (10) with electrons emitted from the electron beam source (1) as an electron beam (2); an aberration corrector (6) that corrects aberrations in the charged particle optical system; and a control unit (24) that controls the components of the charged particle optical system and the aberration corrector (6). The charged particle beam device further comprises an automatic aberration-correcting device (17) that autonomously acquires, through leaning, optimum adjustment procedures in order to reduce the time required for correcting parasitic aberrations that arise in the aberration corrector (6).

    Abstract translation: 该带电粒子束装置包括：电子束源（1）; 带电粒子光学系统，其包括物镜，并且用电子束（2）将从电子束源（1）发射的电子照射在样品（10）上; 校正带电粒子光学系统中的像差的像差校正器（6）; 以及控制带电粒子光学系统的分量和像差校正器（6）的控制单元（24）。 带电粒子束装置还包括自动像差校正装置（17），其自动地通过倾斜获得最佳调节程序，以便减少校正在像差校正器（6）中出现的寄生像差所需的时间。

    DESKTOP ELECTRON MICROSCOPE AND COMBINED ROUND-MULTIPOLE MAGNETIC LENS THEREOF
    37.
    发明申请
    DESKTOP ELECTRON MICROSCOPE AND COMBINED ROUND-MULTIPOLE MAGNETIC LENS THEREOF 有权
    桌面电子显微镜及其组合圆形多功能磁性镜片

    公开(公告)号：US20160042911A1

    公开(公告)日：2016-02-11

    申请号：US14534815

    申请日：2014-11-06

    Applicant: NATIONAL TSING HUA UNIVERSITY

    Inventor： WEI-YU CHANG ,  FU-RONG CHEN ,  TE-HUI LEE ,  TSU-WEI HUANG

    IPC: H01J37/141 ,  H01J37/26

    CPC classification number: H01J37/153 ,  H01J37/14 ,  H01J37/141 ,  H01J37/1413 ,  H01J37/145 ,  H01J37/26 ,  H01J2237/141 ,  H01J2237/1415

    Abstract: A combined round-multipole magnetic lens comprises a coil bracket, a first pole piece and a second pole piece. At least a first pole shoe of the first pole piece on the coil support and at least a second pole shoe of the second pole piece under the coil support respectively extend towards the central axis. The first pole shoe and the second pole shoe are symmetric according to the central axis, or the first pole shoes and the second pole shoes are respectively symmetrically arranged, and the angle difference between the first pole shoe and the adjacent second pole shoes is 360/2N degrees. A magnetic circuit gap is formed between the first pole shoe and the adjacent second pole shoe, for generating a magnetic field distribution of multi-poles and reducing the volume and the number of power supplies.

    Abstract translation: 组合的圆形多极磁性透镜包括线圈支架，第一极靴和第二极靴。 线圈支撑件上的第一极靴的至少第一极靴和线圈支撑件下方的第二极靴的至少第二极靴分别朝向中心轴线延伸。 第一极靴和第二极靴根据中心轴对称，或第一极靴和第二极靴分别对称布置，第一极靴和相邻的第二极靴之间的角度差为360 / 2N度。 在第一极靴和相邻的第二极靴之间形成磁路间隙，用于产生多极的磁场分布并减小电源的体积和数量。

    CHARGED PARTICLE BEAM APPLICATION DEVICE
    40.
    发明申请
    CHARGED PARTICLE BEAM APPLICATION DEVICE 有权
    充电颗粒光束应用器件

    公开(公告)号：US20150364290A1

    公开(公告)日：2015-12-17

    申请号：US14741324

    申请日：2015-06-16

    Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

    Inventor： Momoyo ENYAMA ,  Akira IKEGAMI ,  Hideto DOHI ,  Hideyuki KAZUMI ,  Naomasa SUZUKI

    IPC: H01J37/147 ,  H01J37/06 ,  H01J37/141

    CPC classification number: H01J37/1478 ,  H01J37/153 ,  H01J37/28 ,  H01J2237/1534

    Abstract: The charged particle beam application device is provided with a charged particle source and an objective lens that converges charged particle beam generated by the charged particle source onto a sample. In this case, the charged particle beam application device is further provided with an aberration generating element installed between the charged particle beam source and the objective lens, a tilt-use deflector installed between the aberration generating element and the objective lens, a deflection aberration control unit for controlling the aberration generating element, a first electromagnetic field superposing multipole installed between the aberration generating element and the objective lens, and an electromagnetic field superposing multipole control unit for controlling the first electromagnetic field superposing multipole. The aberration generating element has such a function that when the charged particle beam is tilted relative to the sample by the tilt-use deflector, a plurality of resulting aberrations are cancelled with one another. Moreover, the first electromagnetic field superposing multipole has a function to change the orbit of a charged particle beam having energy different from that of the main charged particle beam in the charged particle beam.

    Abstract translation: 带电粒子束施加装置设置有带电粒子源和将由带电粒子源产生的带电粒子束会聚到样本上的物镜。 在这种情况下，带电粒子束施加装置还设置有安装在带电粒子束源和物镜之间的像差产生元件，安装在像差产生元件和物镜之间的倾斜用偏转器，偏转像差控制 用于控制像差产生元件的单元，安装在像差产生元件和物镜之间的第一电磁场叠加多极，以及用于控制第一电磁场叠加多极的电磁场叠加多极控制单元。 像差产生元件具有这样的功能：当通过倾斜使用偏转器使带电粒子束相对于样本倾斜时，多个得到的像差彼此抵消。 此外，第一电磁场叠加多极具有改变具有与带电粒子束中的主带电粒子束的能量不同的能量的带电粒子束的轨道的功能。

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