公开(公告)号：US2986037A

公开(公告)日：1961-05-30

申请号：US69882557

申请日：1957-11-25

Applicant: PHILIPS CORP

Inventor： WRIGHT ROBINSON NORMAN

IPC: G01L21/00 ,  H01J41/02

CPC classification number: H01J41/02 ,  G01L21/00

公开(公告)号：US12027346B2

公开(公告)日：2024-07-02

申请号：US17386464

申请日：2021-07-27

Applicant: TOKYO ELECTRON LIMITED

Inventor： Nobutaka Sasaki ,  Shin Matsuura

IPC: H01J37/32 ,  H01J41/02 ,  H01L21/67

CPC classification number: H01J37/32477 ,  H01J37/32449 ,  H01J37/32513 ,  H01J37/32651 ,  H01J37/32816 ,  H01J37/32834 ,  H01J41/02 ,  H01L21/67253 ,  H01J2237/166 ,  H01J2237/334

Abstract: A substrate processing apparatus includes a chamber including a processing room for processing of a substrate using an introduced gas and an exhaust room for exhausting the gas in the processing room, a shield member provided near a side wall of the chamber to separate the processing room and the exhaust room and including a hole allowing the processing room and the exhaust room to communicate with each other, the shield member being driven in a vertical direction, and a hollow relay member connected to a pipe connected to an instrument outside the chamber and configured to be driven in a horizontal direction. When the shield member reaches an upper position, the relay member is driven inwardly of the chamber to be connected to the shield member at its inward end to allow the processing room and the pipe to communicate with each other through the hole.

公开(公告)号：US09952113B2

公开(公告)日：2018-04-24

申请号：US15421805

申请日：2017-02-01

Applicant: MKS Instruments, Inc.

Inventor： Gerardo A. Brucker

IPC: G01L21/30 ,  G01L21/32 ,  H01J41/04 ,  G01L19/06 ,  H01J1/52 ,  H01J41/02

CPC classification number: G01L21/32 ,  G01L19/0627 ,  G01L21/30 ,  H01J1/52 ,  H01J41/02 ,  H01J41/04

Abstract: An ionization gauge to measure pressure, while controlling the location of deposits resulting from sputtering when operating at high pressure, includes at least one electron source that emits electrons, and an anode that defines an ionization volume. The ionization gauge also includes a collector electrode that collects ions formed by collisions between the electrons and gas molecules and atoms in the ionization volume, to provide a gas pressure output. The electron source can be positioned at an end of the ionization volume, such that the exposure of the electron source to atom flux sputtered off the collector electrode and envelope surface is minimized. Alternatively, the ionization gauge can include a first shade outside of the ionization volume, the first shade being located between the electron source and the collector electrode, and, optionally, a second shade between the envelope and the electron source, such that atoms sputtered off the envelope are inhibited from depositing on the electron source.

公开(公告)号：US09625325B2

公开(公告)日：2017-04-18

申请号：US14624907

申请日：2015-02-18

Applicant: GLOBALFOUNDRIES INC.

Inventor： Jeanne P. Bickford ,  Nazmul Habib ,  Baozhen Li ,  Tad J. Wilder

IPC: G01R31/26 ,  G01K7/16 ,  G01L21/30 ,  G01R31/00 ,  G01N27/64 ,  G01N27/62 ,  G01N17/00 ,  G01N27/82 ,  G01R33/12 ,  G01N27/74 ,  H01J41/02 ,  H01J41/00

CPC classification number: G01K7/16 ,  G01L21/30 ,  G01N17/00 ,  G01N27/62 ,  G01N27/64 ,  G01R31/00 ,  H01J41/00 ,  H01J41/02 ,  H01L23/34

Abstract: Aspects of the present disclosure include a computer-implemented method for identifying an operating temperature of an integrated circuit (IC), the method including using a computing device for: applying a test voltage to a test circuit embedded within the IC, the test circuit including a phase shift memory (PSM) element therein, wherein the PSM element crystallizes at a crystallization temperature from an amorphous phase having a first electrical resistance into a crystalline phase having a second electrical resistance, the second electrical resistance being less than the first electrical resistance; and identifying the IC as having operated above the crystallization temperature in response to a resistance of the test circuit at the test voltage being outside of the target operating range.

公开(公告)号：US20170097438A1

公开(公告)日：2017-04-06

申请号：US15311937

申请日：2015-05-22

Applicant: Gerd REIME

Inventor： Gerd REIME

IPC: G01V3/10 ,  G01N27/02

CPC classification number: G01V3/10 ,  G01N27/028 ,  G01N27/62 ,  G01N27/64 ,  G01R27/00 ,  G01R27/26 ,  G01R27/2611 ,  G01R27/267 ,  H01J41/00 ,  H01J41/02

Abstract: In a method for determining at least one physical parameter, a sensor unit which is activated by at least one periodic excitation (1.4) is provided, wherein the sensor unit has at least one detection region in which changes of the parameter in the surroundings of the sensor unit lead to output signal (1.7) from the sensor unit. The sensor unit is wired such that if there are no changes of the parameter in the detection region the output signal (1.7) is a zero signal or virtually a zero signal at the output of the sensor unit, whereas if there are changes of the parameter in the detection region the output signal (1.7) is a signal that is not zero and has a specific amplitude and phase. In a closed control loop, the non-zero signal in the receive path is adjusted to zero using a control signal to achieve an adjusted state even in the presence of changes of the parameter in the detection region. The control signal is evaluated in order to determine the physical parameter. The output signal (1.7) from the sensor unit is reduced substantially to the fundamental wave of the excitation (1.4) and the output signal (1.7) is controlled to zero in the entire phase space by means of at least one pulse width modulation. A temperature-stable, fully digital measuring system is provided as a result of the fact that the at least one pulse width modulation itself generates a correction signal with a variable pulse width and possibly a variable phase which is then added to the output signal (1.7) from the sensor unit and the output signal is thereby controlled to zero in the entire phase space, wherein the pulse width of the correction signal and/or the phase of the correction signal is/are determined by the deviations of the output signal (1.7) from zero.

公开(公告)号：US09588004B2

公开(公告)日：2017-03-07

申请号：US14536102

申请日：2014-11-07

Applicant: MKS Instruments, Inc.

Inventor： Gerardo A. Brucker ,  Scott C. Heinbuch

IPC: G01L21/34 ,  G01L21/32 ,  G01L21/30 ,  H05B31/26 ,  H01J37/04 ,  H01J41/02 ,  H01J41/06 ,  H01J41/00 ,  H01J37/08 ,  H01J27/00 ,  H01J27/02

CPC classification number: G01L21/34 ,  G01L21/30 ,  G01L21/32 ,  H01J27/00 ,  H01J27/02 ,  H01J37/04 ,  H01J37/08 ,  H01J41/00 ,  H01J41/02 ,  H01J41/06

Abstract: A Long Lifetime Cold Cathode Ionization Vacuum Gauge Design with an extended anode electrode having an axially directed tip, a cathode electrode, and a baffle structure. The axially directed tip of the anode electrode can have a rounded exterior with a diameter at least 10% greater than the diameter of the anode electrode.

Abstract translation: 长寿命冷阴极电离真空计设计具有带有轴向引导尖端的延伸阳极电极，阴极电极和挡板结构。 阳极电极的轴向定向的尖端可以具有圆形的外部，其直径比阳极电极的直径大至少10％。

公开(公告)号：US20150137001A1

公开(公告)日：2015-05-21

申请号：US14526582

申请日：2014-10-29

Applicant: JEOL Ltd.

Inventor： Yasushi Hiroki ,  Mitsuaki Ohsaki

IPC: H01J37/18 ,  H01J37/20 ,  H01J41/02

CPC classification number: H01J37/18 ,  H01J37/20 ,  H01J41/02 ,  H01J2237/182 ,  H01J2237/2002 ,  H01J2237/2605

Abstract: A charged particle beam instrument is offered which can easily perform an in situ observation in a gaseous atmosphere. The charged particle beam instrument (100) is used to perform an observation of a specimen (S) placed in a gaseous atmosphere and has a specimen chamber (2), a gas supply portion (6) for supplying a gas into the specimen chamber (2), a venting portion (7) for venting the specimen chamber (2), a gaseous environment adjuster (4), and a gas controller (812) for controlling the gaseous environment adjuster (4). This adjuster (4) has a gas inflow rate adjusting valve (40) for adjusting the flow rate of the gas supplied into the specimen chamber (2) and a first vacuum gauge (CG1) for measuring the pressure of the gas supplied into the specimen chamber (2). The gas controller (812) sets a target value of pressure for the gas supplied into the specimen chamber (2) based on a predetermined relational expression indicating a relationship between the reading of the first vacuum gauge (CG1) and the pressure inside the specimen chamber (2) and on a corrective coefficient for correcting the reading of the first vacuum gauge (CG1) according to the species of the gas supplied into the specimen chamber (2) and controls the gas inflow rate adjusting valve (40) such that the reading of the first vacuum gauge (CG1) reaches the target value of pressure.

Abstract translation: 提供了一种带电粒子束仪器，可以在气体气氛中轻松进行原位观察。 带电粒子束仪器（100）用于对放置在气体气氛中的样本（S）进行观察，并具有样本室（2），用于向样本室供给气体的气体供给部（6） 2），用于排出样品室（2）的排气部分（7），气体环境调节器（4）和用于控制气体环境调节器（4）的气体控制器（812）。 该调节器（4）具有用于调节供给到试样室（2）的气体的流量的气体流入量调节阀（40）和用于测定供给到试样室内的气体的压力的第一真空计（CG1） 室（2）。 气体控制器（812）基于表示第一真空计（CG1）的读数与试样室内的压力之间的关系的预定关系式，设定供给到试样室（2）的气体的目标值 （2），以及根据供给到试样室（2）的气体的种类来校正第一真空计（CG1）的读数的校正系数，并控制气体流入速率调节阀（40），使得读数 的第一个真空计（CG1）达到目标压力值。

公开(公告)号：US20150108993A1

公开(公告)日：2015-04-23

申请号：US14582750

申请日：2014-12-24

Applicant: MKS Instruments, Inc.

Inventor： Larry K. Carmichael ,  Jesse A. Weber ,  John H. Henry ,  Michael N. Schott ,  Gerardo A. Brucker

IPC: G01L21/30

CPC classification number: G01L21/30 ,  G01L21/32 ,  G01N27/60 ,  G01N27/62 ,  H01J41/02

Abstract: An ionization gauge that measures pressure has an electron source that emits electrons, and an anode that defines an ionization space. The gauge also includes a collector electrode to collect ions formed by an impact between the electrons and a gas and to measure pressure based on the collected ions. The electron source is dynamically varied in emission current between a plurality of emission levels dependent on pressure and a second parameter other than pressure. The ionization gauge may also vary various operating parameters of the gauge components according to parameters stored in a non-volatile memory and selected by a user.

Abstract translation: 测量压力的电离计具有发射电子的电子源和限定电离空间的阳极。 该量规还包括收集电极以收集由电子和气体之间的冲击形成的离子，并且基于收集的离子来测量压力。 电子源在取决于压力的多个排放水平和除压力之外的第二参数的发射电流之间动态变化。 电离计还可以根据存储在非易失性存储器中并由用户选择的参数来改变量规组件的各种操作参数。

公开(公告)号：US07768267B2

公开(公告)日：2010-08-03

申请号：US11827370

申请日：2007-07-11

Applicant: Richard A. Knott ,  Gerardo A. Brucker ,  Paul C. Arnold

Inventor： Richard A. Knott ,  Gerardo A. Brucker ,  Paul C. Arnold

IPC: G01L21/30 ,  G01L21/32 ,  H05B31/26

CPC classification number: G01L21/34 ,  H01J41/02

Abstract: An ionization gauge that eliminates a hot cathode or filament, but maintains a level of precision of gas density measurements approaching that of a hot cathode ionization gauge. The ionization gauge includes a collector electrode disposed in an ionization volume, an electron source without a heated cathode, and an electrostatic shutter that regulates the flow of electrons between the electron source and the ionization volume. The electrostatic shutter controls the flow of electrons based on feedback from an anode defining the ionization volume. The electron source can be a Penning or glow discharge ionization gauge.

Abstract translation: 一种电离计，消除热阴极或灯丝，但保持接近热阴极电离计的气体密度测量精度水平。 电离计包括设置在离子化体积中的集电极，不具有加热阴极的电子源和调节电子源与电离体积之间的电子流的静电快门。 基于来自限定电离体积的阳极的反馈，静电快门控制电子流。 电子源可以是Penning或辉光放电电离计。

公开(公告)号：US20100076712A1

公开(公告)日：2010-03-25

申请号：US12595821

申请日：2008-04-02

Applicant: Junji Aoki ,  Hirokazu Kitaura ,  Boumsellek Said

Inventor： Junji Aoki ,  Hirokazu Kitaura ,  Boumsellek Said

IPC: B01D59/44 ,  H01J49/00 ,  G01L27/00

CPC classification number: H01J49/0009 ,  G01L21/30 ,  H01J41/02 ,  H01J41/10 ,  H01J49/0027

Abstract: A gas analyzer using a quadrupole mass spectrometric method etc. is provided with an ionizer 211 to ionize a sample gas, a first ion detector 212 and a second ion detector 213 each configured to detect a respective ion from ionizer 211, and each being disposed a respective distance from the ionizer 211 on an opposite side of the ionizer 211, the respective distances being different from each other, a filter 214 interposed between the ionizer 211 and the first ion detector 212 to selectively allow ions from the ionizer 211 to pass therethrough, and an arithmetic device 3 to correct a partial pressure PP1 of a specific component obtained from the first ion detector 212 and selected by the filter 214 by using a first total pressure TP1 of the sample gas obtained from the first ion detector 212 and a second total pressure TP2 of the sample gas obtained from the second ion detector 213.

Abstract translation: 使用四极质谱法的气体分析仪等设置有离子化器211以离子化样品气体，第一离子检测器212和第二离子检测器213，每个被配置为检测来自离子发生器211的各离子，并且每个离子化 在离子交换器211的相对侧上离离电离器211的相应距离，各自的距离彼此不同，插入在离子发生器211和第一离子检测器212之间的滤波器214，以选择性地允许来自离子发生器211的离子通过， 以及算术装置3，其通过使用从第一离子检测器212获得的样品气体的第一总压TP1和第二总量来校正由第一离子检测器212获得并由过滤器214选择的特定成分的分压PP1， 从第二离子检测器213获得的样品气体的压力TP2。