Optical module of micro spectrometer with tapered slit and slit structure thereof

    公开(公告)号:US09746616B2

    公开(公告)日:2017-08-29

    申请号:US13642828

    申请日:2010-04-29

    Applicant: Cheng-Hao Ko

    Inventor: Cheng-Hao Ko

    Abstract: An optical module of a micro spectrometer with tapered slit and slit structure thereof. The optical module includes an input section and a micro diffraction grating. The input section includes a slit structure, which receives a first optical signal and outputs a second optical signal travelling along a first optical path. The slit structure includes a substrate and a slit, which penetrates through the substrate and has a gradually reduced dimension from a first surface of the substrate to a second surface of the substrate. The micro diffraction grating, disposed on the first optical path, receives the second optical signal and separates the second optical signal into a plurality of spectrum components travelling along a second optical path. The optical module of the micro spectrometer with the tapered slit and slit structure thereof according to the embodiment of the invention can be manufactured in a mass-production manner using the semiconductor manufacturing processes, so that the cost can be decreased, and the slit can have a smooth surface, which avoids the negative effect on the incident light.

    Spectrometer and image forming apparatus having the same
    45.
    发明授权
    Spectrometer and image forming apparatus having the same 有权
    光谱仪和具有该光谱仪的图像形成装置

    公开(公告)号:US09217667B2

    公开(公告)日:2015-12-22

    申请号:US13845578

    申请日:2013-03-18

    Abstract: There is provided is a spectrometer having a concave reflection type diffraction element, wherein, among surfaces other than a diffraction surface of the diffraction element, non-diffraction surfaces which are located outside the diffraction surface at the same side as the diffraction surface are a glossy surface, the spectrometer includes a light detection unit which is located at an imaging position of a first-order diffracted light diffracted by the diffraction element to receive the first-order diffracted light, and the light detection unit is disposed inside optical paths of light beams regularly reflected on the non-diffraction surfaces outside the diffraction surface. Accordingly, it is possible to effectively suppress a stray light reflected on the surfaces other the diffraction surface from being incident into the light detection unit and to detect the light spectrally diffracted by the diffraction surface at high accuracy.

    Abstract translation: 提供了具有凹面反射型衍射元件的光谱仪,其中除了衍射元件的衍射面以外的表面中,位于与衍射面同侧的衍射面外侧的非衍射面为光泽 光谱仪包括光检测单元,其位于由衍射元件衍射的一级衍射光的成像位置以接收一级衍射光,并且光检测单元设置在光束的光路内 经常在衍射表面外的非衍射表面反射。 因此,能够有效地抑制在其他衍射面的表面上反射的杂散光入射到光检测单元中,并以高精度检测由衍射面衍射的光。

    Curved grating spectrometer and wavelength multiplexer or demultiplexer with very high wavelength resolution
    46.
    发明授权
    Curved grating spectrometer and wavelength multiplexer or demultiplexer with very high wavelength resolution 有权
    弯曲光栅光谱仪和具有非常高波长分辨率的波长多路复用器或解复用器

    公开(公告)号:US08854620B2

    公开(公告)日:2014-10-07

    申请号:US13911847

    申请日:2013-06-06

    Applicant: Seng-Tiong Ho

    Abstract: The present application discloses a system comprising a compact curved grating (CCG) and its associated compact curved grating spectrometer (CCGS) or compact curved grating wavelength multiplexer/demultiplexer (WMDM) module and a method for making the same. The system is capable of achieving a very small (resolution vs. size) RS factor. In the invention, the location of the entrance slit and detector can be adjusted in order to have the best performance for a particular design goal. The initial groove spacing is calculated using a prescribed formula dependent on operation wavelength. The location of the grooves is calculated based on two conditions. The first one being that the path-difference between adjacent grooves should be an integral multiple of the wavelength in the medium to achieve aberration-free grating focusing at the detector or output slit (or output waveguide) even with large beam diffraction angle from the entrance slit or input slit (or input waveguide). The second one being specific for a particular design goal of a curved-grating spectrometer. In an embodiment, elliptical mirrors each with focal points at the slit and detector are used for each groove to obtain aberration-free curved mirrors.

    Abstract translation: 本申请公开了一种包括紧凑弯曲光栅(CCG)及其相关联的紧凑弯曲光栅光谱仪(CCGS)或紧凑弯曲光栅波长多路复用器/解复用器(WMDM)模块的系统及其制造方法。 该系统能够实现非常小的(分辨率vs.尺寸)RS因子。 在本发明中,可以调整入口狭缝和检测器的位置,以便为特定设计目标具有最佳性能。 使用取决于工作波长的规定公式计算初始槽间距。 基于两个条件计算凹槽的位置。 第一个是相邻槽之间的路径差应该是介质中的波长的整数倍,以便即使在入口处具有大的光束衍射角,也可以在检测器或输出狭缝(或输出波导)处聚焦的无像差光栅 狭缝或输入狭缝(或输入波导)。 第二个特定于曲面光栅光谱仪的特定设计目标。 在一个实施例中,每个具有狭缝和检测器处的​​焦点的椭圆镜用于每个凹槽,以获得无像差的曲面镜。

    Near infrared chemical imaging microscope

    公开(公告)号:US07123360B2

    公开(公告)日:2006-10-17

    申请号:US11257219

    申请日:2005-10-24

    CPC classification number: G01N21/359 G01J3/2823 G02B21/0016 G02B21/06

    Abstract: A chemical imaging system is provided which uses a near infrared radiation microscope. The system includes an illumination source which illuminates an area of a sample using light in the near infrared radiation wavelength and light in the visible wavelength. A multitude of spatially resolved spectra of transmitted, reflected, emitted or scattered near infrared wavelength radiation light from the illuminated area of the sample is collected and a collimated beam is produced therefrom. A near infrared imaging spectrometer is provided for selecting a near infrared radiation image of the collimated beam. The filtered images are collected by a detector for further processing. The visible wavelength light from the illuminated area of the sample is simultaneously detected providing for the simultaneous visible and near infrared chemical imaging analysis of the sample. Two efficient means for performing three dimensional near infrared chemical imaging microscopy are provided.

    Apparatus for rapid and accurate analysis of the composition of samples
    48.
    发明授权
    Apparatus for rapid and accurate analysis of the composition of samples 失效
    用于快速准确分析样品组成的装置

    公开(公告)号:US5489980A

    公开(公告)日:1996-02-06

    申请号:US439436

    申请日:1995-05-11

    Inventor: Michael Anthony

    CPC classification number: G01J3/06 G01J3/2889 G01J2003/2866

    Abstract: An apparatus comprising two light sources, a composite detector, a fixed grating, two independent slits and a mask with a multiplicity of slits analyzes the spectral composition of samples rapidly and accurately and can transmit such information to other locations by modem. A first light source produces a spectrum with broad spectral range, a second light source produces a spectrum with multiple sharp spectral features. The first and second light sources are used to produce a sample spectrum and a reference spectrum respectively. A portion of the light from each of the two sources is used to calibrate the intensity of the instrument at each wavelength measurement. Rapid scanning is achieved by continuous multiplexing of each wavelength of light to the detector using a rotating mask with a multiplicity of slits. Continuous wavelength calibration is achieved by using the reference spectrum to encode a wavelength scale as spectrum is acquired. The spectral data can be transmitted by the said apparatus to other locations by modem. The said modem enables a multiplicity of the said apparatus to be used at various locations to perform a common analysis function. For example, a city wide medical network of analyzers may be set up to communicate with a central data base, where analyses on clinical assays may be performed by powerful dedicated computers. In another example, a network of the said apparatus may be set up in an integrated manufacturing environment such as a tobacco manufacturing plant or pharmaceutical manufacturing plant, to accumulate data at several points in the manufacturing process. The apparatus, may be used to rapidly scan and analyze discrete moving samples for composition analyses, density determination, moisture determination, color, and surface uniformity.

    Abstract translation: 包括两个光源的装置,复合检测器,固定光栅,两个独立狭缝和具有多个狭缝的掩模快速且准确地分析样品的光谱组成,并且可以通过调制解调器将这些信息发送到其他位置。 第一光源产生具有宽光谱范围的光谱,第二光源产生具有多个清晰光谱特征的光谱。 第一和第二光源分别用于产生样品光谱和参考光谱。 来自两个源中的每一个的一部分光用于在每个波长测量时校准仪器的强度。 通过使用具有多个狭缝的旋转掩模将每个波长的光连续复用到检测器来实现快速扫描。 通过使用参考光谱在获取光谱时对波长尺度进行编码来实现连续波长校准。 频谱数据可以由所述装置通过调制解调器发送到其他位置。 所述调制解调器使得能够在各个位置使用多个所述装置来执行公共分析功能。 例如,可以设置全市范围的分析仪医疗网络与中央数据库通信,其中临床测定的分析可以由强大的专用计算机执行。 在另一示例中,所述装置的网络可以在诸如烟草制造工厂或药物制造工厂的集成制造环境中建立,以在制造过程的多个点积累数据。 该装置可用于快速扫描和分析用于组分分析,密度测定,水分测定,颜色和表面均匀性的离散移动样品。

    Multiplex spectroscopy
    49.
    发明授权
    Multiplex spectroscopy 失效
    多重光谱学

    公开(公告)号:US5485268A

    公开(公告)日:1996-01-16

    申请号:US33339

    申请日:1993-03-18

    Inventor: Reginald Tobias

    CPC classification number: G01J3/32 G01J2003/326 G01J3/20

    Abstract: Method and apparatus for analyzing energy emanating from a source by converting energy from the source into spectral components distributed according to frequency along a flat field, combining the spectral components into a beam, detecting the beam which combines the spectral components and demodulating the spectral components.

    Abstract translation: 用于分析从源发出的能量的方法和装置,其将来自源的能量转换为沿着平坦场的频率分布的频谱分量,将频谱分量组合成波束,检测组合频谱分量的波束和解调频谱分量。

    Spectroscopic analysis
    50.
    发明授权
    Spectroscopic analysis 失效
    光谱分析

    公开(公告)号:US5436723A

    公开(公告)日:1995-07-25

    申请号:US27209

    申请日:1993-03-05

    Abstract: A spectroanalytical system with radiation dispersing apparatus for dispersing radiation into a spectrum for concurrent application to an array of exit ports; sample excitation apparatus for exciting sample material to be analyzed to spectroemissive levels for generating a beam of radiation for dispersion by the dispersing structure; the exit port array including a corresponding array of detectors including a first detector positioned adjacent a first exit port positioned to sense first order radiation from an element of interest and a second detector positioned adjacent a second exit port to sense second order radiation from the same element of interest; and processing apparatus for responding to outputs of the first and second detectors to provide a compensated output as a function of the quantity of the element of interest in the sample material.

    Abstract translation: 一种具有辐射分散装置的分光系统,用于将辐射分散到光谱中以同时应用于出口阵列; 样品激发装置,用于激发要分析的样品材料的分光发射水平,以产生用于通过分散结构分散的辐射束; 所述出口端口阵列包括相应的检测器阵列,所述检测器阵列包括邻近第一出口处定位的第一检测器,所述第一检测器定位成感测来自感兴趣元件的一级辐射,以及邻近所述第二出口定位的第二检测器,以感测来自所述相同元件的二阶辐射 出于兴趣; 以及用于响应于第一和第二检测器的输出的处理装置,以提供作为样品材料中感兴趣元素的量的函数的补偿输出。

Patent Agency Ranking