公开(公告)号：US20150270096A1

公开(公告)日：2015-09-24

申请号：US14665391

申请日：2015-03-23

Applicant: HITACHI HIGH-TECH SCIENCE CORPORATION

Inventor： Makoto SATO ,  Tatsuya ASAHATA ,  Masahiro KIYOHARA ,  Ikuko NAKATANI

IPC: H01J37/28 ,  H01J37/244 ,  H01J37/22 ,  H01J37/20

CPC classification number: H01J37/28 ,  H01J37/265 ,  H01J2237/30438

Abstract: A charged particle beam apparatus is provided with a controller configured to control other components and perform operations including: an irradiating operation to irradiate a first position of a sample with a charged particle beam while gradually changing a scan range of the charged particle beam to move from a first position; a first image acquiring operation to acquire an image of each portion where the charged particle beam moves; an indicator forming operation to form an indicator at a second position by the charged particle beam when the scan range of the charged particle beam reaches the second position; a second image acquiring operation to acquire an image of the second position in a state where the indicator is formed; and an adjusting operation to adjust relative position between the stage and the scan range of the charged particle beam.

Abstract translation: 带电粒子束装置设置有控制器，其被配置为控制其他部件并执行操作，包括：照射操作，用于在逐渐改变带电粒子束的扫描范围以从 第一职位 第一图像获取操作，用于获取所述带电粒子束移动的每个部分的图像; 指示器形成操作，当带电粒子束的扫描范围达到第二位置时，通过带电粒子束在第二位置形成指示器; 第二图像获取操作，用于在形成指示器的状态下获取第二位置的图像; 以及调整操作，以调整带电粒子束的阶段和扫描范围之间的相对位置。

公开(公告)号：US09136089B2

公开(公告)日：2015-09-15

申请号：US14379659

申请日：2013-02-18

Applicant: Hitachi High-Technologies Corporation

Inventor： Zhigang Wang

IPC: G01N23/00 ,  H01J37/26 ,  H01J37/22 ,  G06K9/32 ,  G06K9/62 ,  H01J37/28

CPC classification number: H01J37/265 ,  G06K9/3216 ,  G06K9/6202 ,  H01J37/222 ,  H01J37/28 ,  H01J2237/24578 ,  H01J2237/2806 ,  H01J2237/2809 ,  H01J2237/2817

Abstract: The present invention aims at providing a pattern dimension measuring device that realizes the measurement of a dimension of a pattern difficult to set up a measurement box, or between patterns away from each other with high precision. In order to achieve the above object, a pattern dimension measuring device is proposed which moves a field of view with reference to a first pattern formed on the specimen on the basis of predetermined first distance information, acquires a first image, executes template matching with the use of the first image and a matching template, and calculates a distance between a second pattern included in the first image and the first pattern on the basis of second distance information obtained by the template matching, and the first distance information.

Abstract translation: 本发明的目的在于提供一种图形尺寸测量装置，该图案尺寸测量装置实现了难以设置测量盒的图案的尺寸或者以高精度彼此远离的图案的尺寸的测量。 为了实现上述目的，提出了一种图案尺寸测量装置，其基于预定的第一距离信息参考在样本上形成的第一图案移动视场，获取第一图像，执行与第一图像匹配的模板 使用第一图像和匹配模板，并且基于通过模板匹配获得的第二距离信息和第一距离信息来计算包括在第一图像中的第二图案与第一图案之间的距离。

公开(公告)号：US09123502B2

公开(公告)日：2015-09-01

申请号：US13237426

申请日：2011-09-20

Applicant: Billy W. Ward

Inventor： Billy W. Ward

IPC: H04N7/18 ,  H01J37/26 ,  H01J37/28

CPC classification number: H01J37/265 ,  H01J37/28 ,  H01J2237/22

Abstract: In general, in one aspect, the disclosure features a method and system for imaging of samples, for example, imaging samples with charged particles.

Abstract translation: 通常，在一个方面，本公开的特征在于用于对样品成像的方法和系统，例如，带有带电粒子的成像样品。

公开(公告)号：US20150235800A1

公开(公告)日：2015-08-20

申请号：US14181321

申请日：2014-02-14

Applicant: LAWRENCE LIVERMORE NATIONAL SECURITY, LLC

Inventor： Bryan W. REED ,  William J. DEHOPE ,  Glenn HUETE ,  Thomas B. LAGRANGE ,  Richard M. SHUTTLESWORTH

IPC: H01J37/075 ,  H01J37/147 ,  H01J37/26

CPC classification number: H01J37/075 ,  H01J37/1472 ,  H01J37/22 ,  H01J37/244 ,  H01J37/26 ,  H01J37/265 ,  H01J2237/0432 ,  H01J2237/06333 ,  H01J2237/15 ,  H01J2237/151 ,  H01J2237/24455 ,  H01J2237/2447 ,  H01J2237/2449 ,  H01J2237/24495

Abstract: An electron microscope is disclosed which has a laser-driven photocathode and an arbitrary waveform generator (AWG) laser system (“laser”). The laser produces a train of temporally-shaped laser pulses of a predefined pulse duration and waveform, and directs the laser pulses to the laser-driven photocathode to produce a train of electron pulses. An image sensor is used along with a deflector subsystem. The deflector subsystem is arranged downstream of the target but upstream of the image sensor, and has two pairs of plates arranged perpendicular to one another. A control system controls the laser and a plurality of switching components synchronized with the laser, to independently control excitation of each one of the deflector plates. This allows each electron pulse to be directed to a different portion of the image sensor, as well as to be provided with an independently set duration and independently set inter-pulse spacings.

Abstract translation: 公开了一种具有激光驱动光电阴极和任意波形发生器（AWG）激光系统（“激光”）的电子显微镜。 激光器产生预定的脉冲持续时间和波形的时间激光脉冲串，并将激光脉冲引导到激光驱动的光电阴极以产生一系列电子脉冲。 图像传感器与偏转器子系统一起使用。 偏转器子系统布置在目标的下游，但是在图像传感器的上游，并且具有彼此垂直布置的两对板。 控制系统控制激光器和与激光器同步的多个切换部件，以独立地控制每个偏转板的激励。 这允许每个电子脉冲被引导到图像传感器的不同部分，并且被提供有独立设置的持续时间并且独立设置脉冲间隔。

公开(公告)号：US20150228450A1

公开(公告)日：2015-08-13

申请号：US14617259

申请日：2015-02-09

Applicant: HITACHI HIGH-TECH SCIENCE CORPORATION

Inventor： Atsushi UEMOTO ,  Tatsuya ASAHATA ,  Hidekazu SUZUKI ,  Yo YAMAMOTO

IPC: H01J37/20 ,  H01J37/28 ,  H01J37/22 ,  H01J37/18

CPC classification number: H01J37/20 ,  H01J37/023 ,  H01J37/18 ,  H01J37/222 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/063 ,  H01J2237/14 ,  H01J2237/182 ,  H01J2237/206 ,  H01J2237/208 ,  H01J2237/2448 ,  H01J2237/2806 ,  H01J2237/2813 ,  H01J2237/31749

Abstract: A charged particle beam apparatus includes: a charged particle beam column; a detector configured to detect secondary charged particles; an image processor; a display device; a needle arranged in an irradiation area of charged particle beam; a needle actuator; a user interface; and a controller configured to control the needle actuator to actuate the needle in accordance with a target position that is set by the user interface. The controller controls the needle actuator to move the needle to track a change of the target position that is set by the user interface.

Abstract translation: 带电粒子束装置包括：带电粒子束柱; 检测器，被配置为检测次级带电粒子; 图像处理器 显示装置; 布置在带电粒子束的照射区域中的针; 针式致动器; 用户界面; 以及控制器，其被配置为根据由用户界面设置的目标位置来控制针致动器致动针。 控制器控制针致动器移动针以跟踪由用户界面设置的目标位置的变化。

公开(公告)号：US09105444B2

公开(公告)日：2015-08-11

申请号：US14096361

申请日：2013-12-04

Applicant: Ebara Corporation

Inventor： Kenji Watanabe ,  Masahiro Hatakeyama ,  Yoshihiko Naito ,  Tatsuya Kohama ,  Kenji Terao ,  Takeshi Murakami ,  Takehide Hayashi ,  Kiwamu Tsukamoto ,  Hiroshi Sobukawa ,  Norio Kimura

IPC: H01J37/24 ,  H01J37/02 ,  H01J37/22 ,  H01J37/26 ,  H01J37/29

CPC classification number: H01J37/22 ,  H01J37/265 ,  H01J37/29 ,  H01J2237/004 ,  H01J2237/022 ,  H01J2237/24495 ,  H01J2237/24564 ,  H01J2237/2817

Abstract: An electro-optical inspection apparatus is provided that is capable of preventing adhesion of dust or particles to the sample surface as much as possible. A stage (100) on which a sample (200) is placed is disposed inside a vacuum chamber (112) that can be evacuated to vacuum, and a dust collecting electrode (122) is disposed to surround a periphery of the sample (200). The dust collecting electrode (122) is applied with a voltage having the same polarity as a voltage applied to the sample (200) and an absolute value that is the same or larger than an absolute value of the voltage. Thus, because dust or particles such as particles adhere to the dust collecting electrode (122), adhesion of the dust or particles to the sample surface can be reduced. Instead of using the dust collecting electrode, it is possible to form a recess on a wall of the vacuum chamber containing the stage, or to dispose on the wall a metal plate having a mesh structure to which a predetermined voltage is applied. In addition, adhesion of dust or particles can be further reduced by disposing a gap control plate (124) having a through hole (124a) at the center above the sample (200) and the dust collecting electrode (122).

Abstract translation: 提供一种电光检查装置，其能够尽可能地防止灰尘或颗粒附着到样品表面。 将其上放置有样品（200）的载物台（100）设置在能够抽真空的真空室（112）的内部，并且设置集尘电极（122）以包围样品（200）的周围， 。 集尘电极（122）施加与施加到样品（200）的电压相同极性的电压和与电压的绝对值相同或更大的绝对值。 因此，由于灰尘或颗粒例如颗粒附着在集尘电极122上，所以可以降低灰尘或颗粒对样品表面的粘附。 代替使用集尘电极，可以在包含载物台的真空室的壁上形成凹部，或者在壁上配置具有施加了预定电压的网状结构的金属板。 此外，通过在样品（200）上方的中心和集尘电极（122）设置具有通孔（124a）的间隙控制板（124），可以进一步减少灰尘或颗粒的附着。

公开(公告)号：US09082585B2

公开(公告)日：2015-07-14

申请号：US13143345

申请日：2009-11-27

Applicant: Go Kotaki ,  Atsushi Miyamoto ,  Ryo Nakagaki ,  Takehiro Hirai

Inventor： Go Kotaki ,  Atsushi Miyamoto ,  Ryo Nakagaki ,  Takehiro Hirai

IPC: H04N7/18 ,  H01J37/22 ,  G06T7/00 ,  H01J37/26 ,  H01J37/28 ,  H01L21/66

CPC classification number: H01J37/222 ,  G06T7/001 ,  G06T2207/10061 ,  G06T2207/30148 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/2817 ,  H01L22/12

Abstract: An imaging region of a high-magnification reference image capable of being acquired in a low-magnification field without moving a stage from a position at which a defective region has been imaged at a low magnification is searched for and if the search is successful, an image of the imaging region itself is acquired and the high-magnification reference image is acquired. If the search is unsuccessful, the imaging scheme is switched to that in which the high-magnification reference image is acquired from a chip adjacent to the defective region.

Abstract translation: 搜索能够在低放大倍率领域中获取的高倍率参考图像的成像区域，而不将舞台从低倍率下的缺陷区域成像的位置移动，并且如果搜索成功，则 获取成像区域本身的图像并获取高倍率参考图像。 如果搜索不成功，则将成像方案切换到从与缺陷区相邻的芯片获取高倍率参考图像的方案。

公开(公告)号：US20150179402A1

公开(公告)日：2015-06-25

申请号：US14572626

申请日：2014-12-16

Applicant: FEI Company

Inventor： Ronald Kelley ,  Michael Moriarty ,  Stacey Stone ,  Jeffrey Blackwood

IPC: H01J37/305 ,  C23C14/30

CPC classification number: H01J37/3053 ,  B05D3/044 ,  C23C14/30 ,  G01N1/286 ,  G01N1/32 ,  G01N2001/2886 ,  H01J37/265 ,  H01J37/3056 ,  H01J2237/31745 ,  H01J2237/3348 ,  H01L21/02318

Abstract: A method and apparatus is provided for preparing samples for observation in a charged particle beam system in a manner that reduces or prevents artifacts. Material is deposited onto the sample using charged particle beam deposition just before or during the final milling, which results in an artifact-free surface. Embodiments are useful for preparing cross sections for SEM observation of samples having layers of materials of different hardnesses. Embodiments are useful for preparation of thin TEM samples.

Abstract translation: 提供了一种方法和装置，用于以减少或防止伪影的方式制备用于在带电粒子束系统中观察的样品。 在最终研磨之前或期间，使用带电粒子束沉积将材料沉积到样品上，这导致无伪影的表面。 实施例对于制备具有不同硬度的材料层的样品的SEM观察的截面是有用的。 实施例可用于制备薄TEM样品。

公开(公告)号：US09058959B2

公开(公告)日：2015-06-16

申请号：US14363252

申请日：2012-11-08

Applicant: Hitachi High-Technologies Corporation

Inventor： Yoshimi Kawanami ,  Yoichi Ose

IPC: H01J37/26 ,  H01J37/28 ,  H01J37/244 ,  H01J37/22 ,  H01J37/20

CPC classification number: H01J37/28 ,  H01J37/20 ,  H01J37/222 ,  H01J37/244 ,  H01J37/265 ,  H01J37/317 ,  H01J2237/0473 ,  H01J2237/0807 ,  H01J2237/2806 ,  H01J2237/2807

Abstract: The present invention is provided to enable a detailed inspection of a specimen and preventing a distortion of an observation image even when a specimen containing an insulating material is partially charged. For a scanning ion microscope utilizing a gas field ionization ion source, a thin film is disposed between an ion optical system and a specimen, and an ion beam is applied to and transmitted through this thin film in order to focus a neutralized beam on the specimen. Furthermore, an electrode for regulating secondary electrons discharged from this thin film is provided in order to eliminate mixing of noises into an observation image.

Abstract translation: 提供本发明，以便即使当含有绝缘材料的样本被部分充电时，也能够对样本进行详细检查并防止观察图像的变形。 对于使用气体电离离子源的扫描离子显微镜，在离子光学系统和样品之间设置薄膜，并且将离子束施加并透过该薄膜，以将中和的光束聚焦在样品上 。 此外，设置用于调节从该薄膜排出的二次电子的电极，以消除噪声对观察图像的混合。

公开(公告)号：US20150136980A1

公开(公告)日：2015-05-21

申请号：US14509402

申请日：2014-10-08

Applicant: JEOL Ltd.

Inventor： Hirofumi Iijima

IPC: H01J37/21 ,  H01J37/22 ,  H01J37/26

CPC classification number: H01J37/21 ,  H01J37/226 ,  H01J37/26 ,  H01J37/263 ,  H01J37/265 ,  H01J2237/0492 ,  H01J2237/10 ,  H01J2237/1534 ,  H01J2237/2007 ,  H01J2237/21 ,  H01J2237/2602 ,  H01J2237/2614

Abstract: An image acquisition method and system for use in transmission electron microscopy and capable of providing information about a wide range of frequency range. The method is initiated with setting at least one of the spherical aberration coefficient and chromatic aberration coefficient of the imaging system of the microscope to suppress attenuation of a contrast transfer function due to an envelope function. Then, an image is obtained by the imaging system placed in defocus conditions.

Abstract translation: 一种用于透射电子显微镜的图像采集方法和系统，能够提供有关宽范围频率范围的信息。 通过设置显微镜的成像系统的球面像差系数和色差系数中的至少一个来开始该方法，以抑制由于包络函数引起的对比度传递函数的衰减。 然后，通过放置在散焦条件下的成像系统获得图像。