SUBSTRATE TREATING APPARATUS, SUBSTRATE TREATING SYSTEM, AND SUBSTRATE TREATING METHOD

    公开(公告)号:US20230267603A1

    公开(公告)日:2023-08-24

    申请号:US18171135

    申请日:2023-02-17

    Inventor: Shinji SHIMIZU

    Abstract: Disclosed is a substrate treating apparatus for performing a predetermined treatment on a substrate. The apparatus includes: a recipe memory unit configured to store a recipe; an imaging unit provided at a predetermined location and configured to image the component as a real image at work; a normal image memory unit configured to simulate a condition in advance where the component normally operates in response to the recipe and store in advance a normal image at this time in a view from the location in accordance with three-dimensional design information of the substrate treating apparatus; an operation controller configured to cause the predetermined treatment to be performed; and an abnormality detecting unit configured to detect an abnormality in accordance with a difference between the normal image synchronized with operation of the recipe and the real image.

    PLASMA COATING METHOD AND APPARATUS FOR BIOLOGICAL SURFACE MODIFICATION

    公开(公告)号:US20230201870A1

    公开(公告)日:2023-06-29

    申请号:US17912788

    申请日:2021-03-17

    CPC classification number: B05D1/62 B05D5/08 C09D5/14

    Abstract: A method for providing a bio-active layer on a surface, includes the steps of: a) ionizing a plasma gas at low temperature of 150° C. or lower, and at about atmospheric pressure, thereby creating a plasma; b) introducing a precursor into the plasma; c) exposing the surface to the plasma comprising the precursor, thereby forming a coating onto the surface. The plasma gas is ionized by means of electrodes, wherein the plasma gas is ionized by the electrodes with a power of at most 10 Watt per cm2 of the electrode surface. The bio-active layer is an antibiofouling layer, an antibacterial layer, an antiviral layer and/or a microbial collecting layer, such that the plasma gas includes inert gas for at least 99% by volume. The inert gas is a non-noble gas.

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