公开(公告)号：US09214314B1

公开(公告)日：2015-12-15

申请号：US14643666

申请日：2015-03-10

Applicant: Varian Semiconductor Equipment Associates, Inc.

Inventor： Jordan B. Tye ,  Jeffrey D. Susser ,  Sergio Alonso Gonzalez-Palavicini

IPC: H01J37/317 ,  H01J37/147

CPC classification number: H01J37/147 ,  H01J27/024 ,  H01J37/08 ,  H01J37/3171 ,  H01J2237/032 ,  H01J2237/065 ,  H01J2237/1502

Abstract: An ion beam manipulator including a suppression electrode, a ground electrode connected to the suppression electrode in a parallel, spaced-apart relationship therewith by three electrically insulating connectors, the connectors being spaced 120 degrees apart from one another around a circumference of the suppression electrode and the ground electrode, a plurality of linkages extending from the electrically insulating connectors, at least one of the linkages including a pair of parallel support arms connected at a first end to a corresponding one of the electrically insulating connecters by a first pair of universal joints and connected at a second end to a bracket by a second pair of universal joints, and a drive shaft extending from the bracket, the drive shaft coupled to an actuator configured to extend and retract the drive shaft along a longitudinal axis of the drive shaft.

Abstract translation: 一种离子束操纵器，包括抑制电极，接地电极，通过三个电绝缘连接器以平行的间隔关系连接到所述抑制电极，所述连接器围绕所述抑制电极的圆周彼此间隔开120度， 所述接地电极，从所述电绝缘连接器延伸的多个连接器，所述连杆中的至少一个包括一对平行的支撑臂，所述平行支撑臂通过第一对万向接头在第一端连接到相应的一个所述电绝缘连接器， 在第二端通过第二对万向接头连接到支架，以及驱动轴，其从支架延伸，所述驱动轴联接到致动器，所述致动器构造成沿着驱动轴的纵向轴线延伸和缩回驱动轴。

公开(公告)号：US09117630B2

公开(公告)日：2015-08-25

申请号：US14229038

申请日：2014-03-28

Applicant: SEN Corporation

Inventor： Masateru Sato ,  Hiroshi Matsushita

IPC: H01J37/08 ,  H01J37/317 ,  H01J37/248

CPC classification number: H01J37/3171 ,  H01J37/248 ,  H01J2237/032 ,  H01J2237/036 ,  H01J2237/038 ,  H01J2237/08

Abstract: An insulation structure of high voltage electrodes includes an insulator having an exposed surface and a conductor portion, which includes a joint region in contact with the insulator, and a heat-resistant portion provided, along at least part of an edge of the joint region, in such a manner as to be adjacent to the exposed surface of the insulator. The heat-resistant portion is formed of an electrically conductive material whose melting point is higher than that of the conductor portion. The heat-resistant portion may be so provided as to have a gap between the insulator and the exposed surface.

Abstract translation: 高电压电极的绝缘结构包括具有暴露表面的绝缘体和导体部分，导体部分包括与绝缘体接触的接合区域，以及沿着接合区域的边缘的至少一部分设置的耐热部分， 以与绝缘体的暴露表面相邻的方式。 耐热部由熔点高于导体部的导电性材料形成。 耐热部分可以设置成在绝缘体和暴露表面之间具有间隙。

公开(公告)号：US09117623B1

公开(公告)日：2015-08-25

申请号：US14243141

申请日：2014-04-02

Applicant: Carlos F. M. Borges ,  Manuel A. Jerez

Inventor： Carlos F. M. Borges ,  Manuel A. Jerez

IPC: H01J1/88 ,  H01J37/08 ,  H01J37/317

CPC classification number: H01J37/08 ,  H01J37/3171 ,  H01J2237/032 ,  H01J2237/061

Abstract: The filament clamp assembly has a pair of clamps to hold the connecting leads of a filament. Each clamp employs a locking pin within a longitudinally disposed bore that is moved into clamping engagement with a filament lead by rotation of a locking nut that moves a stud with a camming surface into the clamp to lift the locking pin via the camming surface.

Abstract translation: 灯丝夹具组件具有一对夹持件以保持灯丝的连接引线。 每个夹具在纵向设置的孔中使用锁定销，该锁定销通过锁定螺母的旋转而移动成与灯丝引线夹紧接合，该锁定螺母将具有凸轮表面的螺柱移动到夹具中，以经由凸轮表面提升锁定销。

公开(公告)号：US20150117617A1

公开(公告)日：2015-04-30

申请号：US14582782

申请日：2014-12-24

Applicant: Kabushiki Kaisha Toshiba ,  Toshiba Electron Tubes & Devices Co., Ltd.

Inventor： Tomonari ISHIHARA ,  Naoki Akahori ,  Hidero Anno

IPC: H01J35/14 ,  H05G1/10 ,  H01J35/10

CPC classification number: H01J35/06 ,  A61B6/44 ,  H01J1/16 ,  H01J1/18 ,  H01J1/88 ,  H01J3/06 ,  H01J3/18 ,  H01J19/10 ,  H01J19/42 ,  H01J23/04 ,  H01J23/083 ,  H01J29/04 ,  H01J29/50 ,  H01J29/62 ,  H01J35/14 ,  H01J37/065 ,  H01J2229/481 ,  H01J2229/4827 ,  H01J2229/4831 ,  H01J2229/50 ,  H01J2229/582 ,  H01J2229/5835 ,  H01J2235/06 ,  H01J2237/032 ,  H01J2237/049 ,  H01J2237/06375 ,  H01J2893/0005 ,  H01J2893/005 ,  H01J2893/0088 ,  H01J2893/0089 ,  H01J2893/0094

Abstract: According to one embodiment, an X-ray tube includes an anode target, a cathode including a filament and a convergence electrode which includes a groove portion, and an envelope. The groove portion includes a pair of first bottom surfaces which are located in the same plane as the filament and between which the filament is interposed in a width direction of the groove portion, and a pair of second bottom surfaces between which the filament and the pair of first bottom surfaces are interposed in a length direction of the groove portion and which are located closer to an opening of the groove portion than the pair of first bottom surfaces.

Abstract translation: 根据一个实施例，X射线管包括阳极靶，包括细丝的阴极和包括沟槽部分的会聚电极和外壳。 槽部包括一对第一底面，该第一底面位于与灯丝相同的平面上，并且灯丝沿沟槽部的宽度方向插入其间，一对第二底面之间形成有灯丝和一对 的第一底表面沿着槽部的长度方向设置，并且位于比一对第一底面更靠近槽部的开口部。

公开(公告)号：US20150008342A1

公开(公告)日：2015-01-08

申请号：US14314222

申请日：2014-06-25

Applicant: Carl Zeiss Microscopy, LLC

Inventor： John A. Notte, IV ,  Mark D. DiManna ,  Raymond Hill ,  Robert Conners ,  Alexander Groholski

IPC: H01J37/08

CPC classification number: H01J37/18 ,  G21K5/04 ,  H01J27/26 ,  H01J37/08 ,  H01J2237/002 ,  H01J2237/0216 ,  H01J2237/032 ,  H01J2237/0653 ,  H01J2237/0807 ,  H01J2237/1501 ,  H01J2237/1502 ,  H01J2237/1825 ,  H01J2237/188 ,  H01J2237/20207 ,  H01J2237/20214 ,  H01J2237/20221 ,  H01J2237/20235

Abstract: The present disclosure relates to a charged particle beam system comprising a charged particle beam source, a charged particle column, a sample chamber, a plurality of electrically powered devices arranged within or at either one of the charged particle column, the charged particle beam source and the sample chamber, and at least one first converter to convert an electrical AC voltage power into an electrical DC voltage. The first converter is positioned at a distance from either of the charged particle beam source, the charged particle column and the charged particle chamber, and all elements of the plurality of electrically powered devices, when operated during operation of the charged particle beam source, are configured to be exclusively powered by the DC voltage provided by the converter.

Abstract translation: 本发明涉及一种带电粒子束系统，其包括带电粒子束源，带电粒子柱，样品室，布置在带电粒子柱中的任一个中的多个电动设备，带电粒子束源和 样品室和至少一个第一转换器，以将电AC电压功率转换成电DC电压。 第一转换器位于与带电粒子束源，带电粒子柱和带电粒子室中的任一个相距一定距离处，并且当在带电粒子束源的操作期间操作时，多个电动装置的所有元件是 配置为由转换器提供的直流电压专门供电。

公开(公告)号：US20150008333A1

公开(公告)日：2015-01-08

申请号：US14314262

申请日：2014-06-25

Applicant: Carl Zeiss Microscopy, LLC

Inventor： John A. Notte, IV ,  Weijie Huang ,  FHM-Faridur Rahman ,  Shawn McVey

IPC: H01J37/08

CPC classification number: H01J37/18 ,  G21K5/04 ,  H01J27/26 ,  H01J37/08 ,  H01J2237/002 ,  H01J2237/0216 ,  H01J2237/032 ,  H01J2237/0653 ,  H01J2237/0807 ,  H01J2237/1501 ,  H01J2237/1502 ,  H01J2237/1825 ,  H01J2237/188 ,  H01J2237/20207 ,  H01J2237/20214 ,  H01J2237/20221 ,  H01J2237/20235

Abstract: The disclosure relates to a method of operating a gas field ion beam system in which the gas field ion beam system comprises an external housing, an internal housing, arranged within the external housing, an electrically conductive tip arranged within the internal housing, a gas supply for supplying one or more gases to the internal housing, the gas supply having a tube terminating within the internal housing, and an extractor electrode having a hole to permit ions generated in the neighborhood of the tip to pass through the hole into the external housing. The method comprises the step of regularly heating the external housing, the internal housing, the electrically conductive tip, the tube and the extractor electrode to a temperature of above 100° C.

Abstract translation: 本公开涉及一种操作气体场离子束系统的方法，其中气体场离子束系统包括外部壳体，布置在外部壳体内的内部壳体，布置在内部壳体内的导电尖端，气体源 用于将一个或多个气体供应到内部壳体，气体供应具有终止在内部壳体内的管，以及具有孔的提取器电极，其具有允许在尖端附近产生的离子通过孔进入外部壳体。 该方法包括将外部壳体，内部壳体，导电尖端，管子和提取器电极定期加热至高于100℃的温度。

公开(公告)号：US20150008332A1

公开(公告)日：2015-01-08

申请号：US14314317

申请日：2014-06-25

Applicant: Carl Zeiss Microscopy, LLC

Inventor： John A. Notte, IV ,  Weijie Huang ,  Raymond Hill ,  FHM-Faridur Rahman ,  Alexander Groholski ,  Shawn McVey

IPC: H01J37/08 ,  H01J27/26

CPC classification number: H01J37/18 ,  G21K5/04 ,  H01J27/26 ,  H01J37/08 ,  H01J2237/002 ,  H01J2237/0216 ,  H01J2237/032 ,  H01J2237/0653 ,  H01J2237/0807 ,  H01J2237/1501 ,  H01J2237/1502 ,  H01J2237/1825 ,  H01J2237/188 ,  H01J2237/20207 ,  H01J2237/20214 ,  H01J2237/20221 ,  H01J2237/20235

Abstract: The present disclosure relates to a gas field ion source having a gun housing, an electrically conductive gun can base attached to the gun housing, an inner tube mounted to the gun can base, the inner tube being made of an electrically isolating ceramic, an electrically conductive tip attached to the inner tube, an outer tube mounted to the gun can base, the outer tube being made of an electrically isolating ceramic, and an extractor electrode attached to the outer tube. The extractor electrode can have an opening for the passage of ions generated in proximity to the electrically conductive tip.

Abstract translation: 本发明涉及一种具有枪壳体的气体离子源，连接到枪壳体的导电枪壳底座，安装在枪壳底座上的内管，内管由电隔离陶瓷制成， 连接到内管的导电尖端，安装到枪罐底座的外管，外管由电绝缘陶瓷制成，以及附接到外管的提取器电极。 提取器电极可以具有用于通过在导电末端附近产生的离子的开口。

公开(公告)号：US08710461B2

公开(公告)日：2014-04-29

申请号：US13612498

申请日：2012-09-12

Applicant: Pieter Kappelhof

Inventor： Pieter Kappelhof

IPC: H01J3/14

CPC classification number: A47B55/00 ,  B82Y10/00 ,  B82Y40/00 ,  G21K1/065 ,  H01J37/023 ,  H01J37/26 ,  H01J37/3177 ,  H01J2237/032 ,  H01J2237/036

Abstract: The invention relates to an assembly, preferably for use in a lithography system or a microscopy system, for providing an accurately aligned stack of two or more modules in a stacking direction. Each of the two or more modules comprises three support members. The assembly comprises a frame comprising three planar alignment surfaces which extend in the stacking direction and which are angularly off-set with respect to each other. In addition each of the three support members of each one of the two or more modules, when arranged in said frame, abuts against a corresponding one of the three alignment surfaces. The frame is provided with an opening between two of the three planar alignment surfaces for inserting a module in the assembly, said two planar alignment surfaces on either side of the opening are arranged at least partially facing said opening.

Abstract translation: 本发明涉及一种组件，优选用于光刻系统或显微镜系统，用于在层叠方向上提供两个或多个模块的精确对准的堆叠。 两个或更多个模块中的每一个包括三个支撑构件。 组件包括框架，该框架包括在层叠方向上延伸并相对于彼此成角度偏移的三个平面对准表面。 此外，当布置在所述框架中时，两个或更多个模块中的每一个的三个支撑构件中的每一个抵靠三个对准表面中的对应的一个。 框架设置有三个平面对准表面中的两个之间的开口，用于将模块插入组件中，开口任一侧上的两个平面对准表面布置成至少部分地面对所述开口。

公开(公告)号：US20140014848A1

公开(公告)日：2014-01-16

申请号：US13946198

申请日：2013-07-19

Applicant: EBARA CORPORATION

Inventor： Masahiro Hatakeyama ,  Shoji Yoshikawa ,  Takeshi Murakami ,  Kenji Watanabe ,  Yoshihiko Naito ,  Yasushi Toma ,  Tsutomu Karimata ,  Takehide Hayashi ,  Kiwamu Tsukamoto ,  Tatsuya Kohama ,  Noboru Kobayashi

IPC: G01N23/22 ,  G01N23/223

CPC classification number: H01J37/073 ,  G01N23/22 ,  G01N23/223 ,  G01N23/2251 ,  G01N2223/611 ,  H01J1/34 ,  H01J37/09 ,  H01J37/10 ,  H01J37/20 ,  H01J37/222 ,  H01J37/244 ,  H01J37/265 ,  H01J37/28 ,  H01J37/29 ,  H01J2237/0048 ,  H01J2237/022 ,  H01J2237/032 ,  H01J2237/038 ,  H01J2237/045 ,  H01J2237/0458 ,  H01J2237/0473 ,  H01J2237/0492 ,  H01J2237/061 ,  H01J2237/06333 ,  H01J2237/166 ,  H01J2237/186 ,  H01J2237/2002 ,  H01J2237/2007 ,  H01J2237/2008 ,  H01J2237/2448 ,  H01J2237/2482 ,  H01J2237/2485 ,  H01J2237/2817 ,  H01J2237/2855 ,  H01J2237/2857

Abstract: An inspection device for inspecting a surface of an inspection object using a beam includes a beam generator capable of generating one of either charge particles or an electromagnetic wave as a beam, a primary optical system capable of guiding and irradiating the beam to the inspection object supported within a working chamber, a secondary optical system capable of including a first movable numerical aperture and a first detector which detects secondary charge particles generated from the inspection object, the secondary charge particles passing through the first movable numerical aperture, an image processing system capable of forming an image based on the secondary charge particles detected by the first detector; and a second detector arranged between the first movable numerical aperture and the first detector and which detects a location and shape at a cross over location of the secondary charge particles generated from the inspection object.

Abstract translation: 用于使用光束检查检查对象的表面的检查装置包括能够产生电荷粒子或电磁波之一作为光束的光束发生器，能够将所述光束引导并照射到被检查对象的主光学系统 在工作室内，能够包括第一可移动数值孔径的二次光学系统和检测从检查对象产生的二次电荷粒子的第一检测器，通过第一可移动数值孔径的二次电荷粒子，能够 基于由所述第一检测器检测到的次级电荷粒子形成图像; 以及第二检测器，其布置在第一可移动数值孔径和第一检测器之间，并且检测在从检查对象生成的次级充电颗粒的交叉位置处的位置和形状。

公开(公告)号：US20130337605A1

公开(公告)日：2013-12-19

申请号：US13972497

申请日：2013-08-21

Applicant: Samsung Display Co., Ltd.

Inventor： Tae-Wook KANG ,  Ou-Hyun Kim ,  Chang-Soon Jl ,  Hyun-Lae Cho ,  Chang-Guo An ,  Jeong-Yeol Lee ,  Jae-Mork Park

IPC: H01L51/00

CPC classification number: H01L51/0029 ,  H01J37/20 ,  H01J37/32091 ,  H01J37/32568 ,  H01J2237/024 ,  H01J2237/032 ,  H01J2237/038 ,  H01J2237/20235

Abstract: A substrate plasma-processing apparatus for plasma-processing a surface of an electrode of an organic light emitting device. The substrate plasma-processing apparatus may adjust the distance between a first electrode and a substrate and adjust the distance between a second electrode and the substrate.

Abstract translation: 一种用于等离子体处理有机发光器件的电极表面的衬底等离子体处理设备。 衬底等离子体处理设备可以调节第一电极和衬底之间的距离并且调整第二电极和衬底之间的距离。