公开(公告)号：US09947504B2

公开(公告)日：2018-04-17

申请号：US15180735

申请日：2016-06-13

Applicant: Carl Zeiss Microscopy GmbH

Inventor： Klaus Hegele ,  Edgar Fichter ,  Michel Aliman ,  Dirk Preikszas ,  Christian Hendrich ,  Momme Mommsen ,  Michael Schnell ,  Kai Schubert

IPC: H01J37/24 ,  H01J37/28 ,  H01J37/147 ,  H01J37/30 ,  H01J37/141 ,  H01J37/21 ,  H01J37/26

CPC classification number: H01J37/1477 ,  H01J37/141 ,  H01J37/147 ,  H01J37/21 ,  H01J37/24 ,  H01J37/265 ,  H01J37/28 ,  H01J37/3007 ,  H01J2237/103 ,  H01J2237/1504 ,  H01J2237/151 ,  H01J2237/152

Abstract: The system described herein relates to a particle beam apparatus for analyzing and/or for processing an object and to a method for operating a particle beam apparatus. The particle beam apparatus is designed for example as an electron beam apparatus and/or an ion beam apparatus. The particle beam apparatus comprises a beam deflection device, for example an objective lens, which is provided with a first coil and a second coil. The first coil is operated with a first coil current. The second coil is operated with a second coil current. The first coil current and/or the second coil current may always be controlled in such a way that the sum of the first coil current and the second coil current (the summation current) or the difference between the first coil current and the second coil current (the difference current) is controlled to a setpoint value.

公开(公告)号：US20170263413A1

公开(公告)日：2017-09-14

申请号：US15066816

申请日：2016-03-10

Applicant: ICT INTEGRATED CIRCUIT TESTING GESELLSCHAFT FÜR HALBLEITERPRÜFTECHNIK MBH

Inventor： Jürgen Frosien

IPC: H01J37/12 ,  H01J37/21 ,  H01J37/28 ,  H01J37/147

CPC classification number: H01J37/12 ,  H01J37/1474 ,  H01J37/21 ,  H01J37/28 ,  H01J2237/1516 ,  H01J2237/152 ,  H01J2237/24475 ,  H01J2237/2448

Abstract: A multi-beam lens device is described, which includes: a first beam passage for a first charged particle beam formed along a first direction between a first beam inlet of the first beam passage and a first beam outlet of the first beam passage; a second beam passage for a second charged particle beam formed along a second direction between a second beam inlet of the second beam passage and a second beam outlet of the second beam passage, wherein the first direction and the second direction are inclined with respect to each other by an angle (α) of 5° or more such that the first beam passage approaches the second beam passage toward the first beam outlet; and a common excitation coil or a common electrode arrangement configured for focussing the first charged particle beam and the second charged particle beam. Further, a charged particle beam device as well as a method of operating a multi-beam lens device are described.

公开(公告)号：US20170236683A1

公开(公告)日：2017-08-17

申请号：US15180735

申请日：2016-06-13

Applicant: Carl Zeiss Microscopy GmbH

Inventor： Klaus Hegele ,  Edgar Fichter ,  Michel Aliman ,  Dirk Preikszas ,  Christian Hendrich ,  Momme Mommsen ,  Michael Schnell ,  Kai Schubert

IPC: H01J37/147 ,  H01J37/30 ,  H01J37/24 ,  H01J37/28

CPC classification number: H01J37/1477 ,  H01J37/141 ,  H01J37/147 ,  H01J37/21 ,  H01J37/24 ,  H01J37/265 ,  H01J37/28 ,  H01J37/3007 ,  H01J2237/103 ,  H01J2237/1504 ,  H01J2237/151 ,  H01J2237/152

Abstract: The system described herein relates to a particle beam apparatus for analyzing and/or for processing an object and to a method for operating a particle beam apparatus. The particle beam apparatus is designed for example as an electron beam apparatus and/or an ion beam apparatus. The particle beam apparatus comprises a beam deflection device, for example an objective lens, which is provided with a first coil and a second coil. The first coil is operated with a first coil current. The second coil is operated with a second coil current. The first coil current and/or the second coil current may always be controlled in such a way that the sum of the first coil current and the second coil current (the summation current) or the difference between the first coil current and the second coil current (the difference current) is controlled to a setpoint value.

公开(公告)号：US09443703B2

公开(公告)日：2016-09-13

申请号：US14362397

申请日：2012-10-17

Applicant: Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.

Inventor： Henry Morgner ,  Gösta Mattausch ,  Christoph Metzner ,  Michael Junghähnel ,  Rainer Labitzke ,  Lars Klose ,  Torsten Werner ,  Jörg Kubusch

IPC: H01J7/24 ,  H01J37/32 ,  H05H1/48

CPC classification number: H01J37/32568 ,  H01J37/32055 ,  H01J37/32064 ,  H01J37/32596 ,  H01J37/32669 ,  H01J37/32807 ,  H01J2237/0822 ,  H01J2237/152 ,  H01J2237/327 ,  H05H1/48

Abstract: An apparatus for generating a hollow cathode arc discharge plasma, including two plasma sources, each including a hollow cathode and an electrode which is associated with the hollow cathode and which has an opening that extends through the electrode, wherein the hollow cathodes of the two plasma sources are connected to a pulse generator which generates a bipolar, medium-frequency pulsed voltage between the two hollow cathodes. Here, in each of the two plasma sources, the hollow cathode is connected in an electrically conducting manner, directly or with interconnection of at least one current direction limiting component, to the associated electrode.

Abstract translation: 一种用于产生中空阴极电弧放电等离子体的装置，包括两个等离子体源，每个等离子体源包括空心阴极和与中空阴极相关联的电极，并且具有延伸穿过电极的开口，其中两个等离子体的中空阴极 源极连接到在两个空心阴极之间产生双极，中频脉冲电压的脉冲发生器。 这里，在两个等离子体源中的每一个中，空心阴极直接地或与至少一个电流方向限制部件的互连连接到相关联的电极。

公开(公告)号：US09177708B2

公开(公告)日：2015-11-03

申请号：US13966611

申请日：2013-08-14

Applicant: Varian Semiconductor Equipment Associates, Inc.

Inventor： Scott Barraclough ,  James S. Buff

IPC: H01J1/50 ,  H01F7/20 ,  H01J37/147 ,  H01J37/317 ,  H01F27/10

CPC classification number: H01J37/3007 ,  H01F7/20 ,  H01F27/10 ,  H01J37/1472 ,  H01J37/1475 ,  H01J37/3171 ,  H01J2237/002 ,  H01J2237/152 ,  H01J2237/1526 ,  H01J2237/303 ,  H01J2237/31701 ,  H05K7/20

Abstract: A magnet having an annular coolant fluid passage is generally described. Various examples provide a magnet including a first magnet and a second magnet disposed around an ion beam coupler with an aperture there through. Each of the first and second magnets including a metal core having a cavity therein, one or more conductive wire wraps disposed around the metal core, and an annular core element configured to be inserted into the cavity, wherein an annular coolant fluid passage is formed between the cavity and the annular core element. Furthermore, each annular core element may have a first diameter and a middle section having a second diameter, the second diameter being less than the first diameter. Other embodiments are disclosed and claimed.

Abstract translation: 通常描述具有环形冷却剂流体通道的磁体。 各种实施例提供一种包括第一磁体和设置在离子束耦合器周围的第二磁体的磁体，其中具有通孔。 所述第一和第二磁体中的每一个包括其中具有空腔的金属芯，设置在所述金属芯周围的一个或多个导电线圈，以及被构造成插入所述空腔中的环形芯体元件，其中环形冷却剂流体通道形成在 空腔和环形芯元件。 此外，每个环形芯元件可以具有第一直径和具有第二直径的中间部分，第二直径小于第一直径。 公开和要求保护其他实施例。

公开(公告)号：US20150056366A1

公开(公告)日：2015-02-26

申请号：US14463041

申请日：2014-08-19

Applicant: SEN Corporation

Inventor： Hiroyuki Kariya

IPC: H01J37/24 ,  H01J37/147 ,  C23C14/48 ,  H01J37/317 ,  G01R33/07 ,  C23C14/54

CPC classification number: H01J37/243 ,  G01R33/07 ,  G01R33/072 ,  H01J37/05 ,  H01J37/147 ,  H01J37/3171 ,  H01J2237/055 ,  H01J2237/057 ,  H01J2237/152 ,  H01J2237/24514 ,  H01J2237/248 ,  H01J2237/3045

Abstract: An ion implanter includes an energy analyzer electromagnet provided between an ion source and a processing chamber. The energy analyzer electromagnet includes a Hall probe configured to generate a measurement output in response to a deflecting magnetic field and an NMR probe configured to generate an NMR output. A control unit of the ion implanter includes a magnetic field measurement unit configured to measure the deflecting magnetic field in accordance with a known correspondence between the deflecting magnetic field and the measurement output, a magnetic field determination unit configured to determine the deflecting magnetic field from the NMR output, and a Hall probe calibration unit configured to update the known correspondence by using the deflecting magnetic field determined from the NMR output and a new measurement output of the Hall probe corresponding to the determined deflecting magnetic field.

Abstract translation: 离子注入机包括设置在离子源和处理室之间的能量分析仪电磁体。 能量分析仪电磁体包括霍尔探针，其被配置为响应于偏转磁场产生测量输出，并且NMR探针被配置为产生NMR输出。 离子注入机的控制单元包括磁场测量单元，其被配置为根据偏转磁场和测量输出之间的已知对应度来测量偏转磁场;磁场确定单元，被配置为确定偏转磁场的偏转磁场， NMR输出以及霍尔探头校准单元，其被配置为通过使用从NMR输出确定的偏转磁场和对应于所确定的偏转磁场的霍尔探头的新测量输出来更新已知对应关系。

公开(公告)号：US20140354149A1

公开(公告)日：2014-12-04

申请号：US14362397

申请日：2012-10-17

Applicant: Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.

Inventor： Henry Morgner ,  Gösta Mattausch ,  Christoph Metzner ,  Michael Junghähnel ,  Rainer Labitzke ,  Lars Klose ,  Torsten Werner ,  Jörg Kubusch

IPC: H01J37/32

CPC classification number: H01J37/32568 ,  H01J37/32055 ,  H01J37/32064 ,  H01J37/32596 ,  H01J37/32669 ,  H01J37/32807 ,  H01J2237/0822 ,  H01J2237/152 ,  H01J2237/327 ,  H05H1/48

Abstract: An apparatus for generating a hollow cathode arc discharge plasma, including two plasma sources, each including a hollow cathode and an electrode which is associated with the hollow cathode and which has an opening that extends through the electrode, wherein the hollow cathodes of the two plasma sources are connected to a pulse generator which generates a bipolar, medium-frequency pulsed voltage between the two hollow cathodes. Here, in each of the two plasma sources, the hollow cathode is connected in an electrically conducting manner, directly or with interconnection of at least one current direction limiting component, to the associated electrode.

Abstract translation: 一种用于产生中空阴极电弧放电等离子体的装置，包括两个等离子体源，每个等离子体源包括空心阴极和与中空阴极相关联的电极，并且具有延伸穿过电极的开口，其中两个等离子体的中空阴极 源极连接到在两个空心阴极之间产生双极，中频脉冲电压的脉冲发生器。 这里，在两个等离子体源中的每一个中，空心阴极直接地或与至少一个电流方向限制部件的互连连接到相关联的电极。

公开(公告)号：US20140261173A1

公开(公告)日：2014-09-18

申请号：US14217064

申请日：2014-03-17

Applicant: GLENN LANE FAMILY LIMITED LIABILITY LIMITED PARTNERSHIP

Inventor： GLENN E. LANE

IPC: H01J37/08 ,  H01J37/317

CPC classification number: H01J37/3007 ,  C23C14/48 ,  C23C14/54 ,  H01J37/08 ,  H01J37/09 ,  H01J37/3171 ,  H01J49/062 ,  H01J49/26 ,  H01J2237/0213 ,  H01J2237/04 ,  H01J2237/0455 ,  H01J2237/152 ,  H01J2237/31701 ,  H01L21/265

Abstract: Embodiments of the invention relate to a mass resolving aperture that may be used in an ion implantation system that selectively exclude ions species based on charge to mass ratio (and/or mass to charge ratio) that are not desired for implantation, in an ion beam assembly. Embodiments of the invention relate to a mass resolving aperture that is segmented, adjustable, and/or presents a curved surface to the oncoming ion species that will strike the aperture. Embodiments of the invention also relate to the filtering of a flow of charged particles through a closed plasma channel (“CPC”) superconductor, or boson energy transmission system.

Abstract translation: 本发明的实施例涉及可用于离子注入系统中的质量分辨孔径，该离子注入系统在离子束中基于质量比（和/或质量与电荷比）不理想地选择性地排除离子种类 部件。 本发明的实施例涉及一种质量分辨孔径，该质量分辨孔径被分段，可调节和/或呈现出将撞击孔的迎面而来的离子物质的曲面。 本发明的实施例还涉及通过封闭等离子体通道（“CPC”）超导体或玻色子能量传输系统对带电粒子的流过滤。

公开(公告)号：US20140254766A1

公开(公告)日：2014-09-11

申请号：US14123791

申请日：2012-06-08

Applicant: Soriba Franciszek (François) Sylla ,  Victor Armand Malka ,  Alessandro Federico Flacco ,  Mina Ivanova Veltcheva ,  Subhendu Kahaly

Inventor： Soriba Franciszek (François) Sylla ,  Victor Armand Malka ,  Alessandro Federico Flacco ,  Mina Ivanova Veltcheva ,  Subhendu Kahaly

IPC: H05G2/00 ,  B05B12/06 ,  B05B1/08

CPC classification number: H05G2/006 ,  A61B6/40 ,  H01J37/32009 ,  H01J37/32669 ,  H01J2237/152 ,  H01J2893/0063 ,  H05G2/00 ,  H05G2/001 ,  H05G2/003 ,  H05G2/008 ,  H05H1/22 ,  H05H1/54 ,  H05H2277/10 ,  H05H2277/11 ,  H05H2277/113

Abstract: A method and apparatus for generating a pulsed jet of fluid, and transforming the jet into a plasma. The method includes using a high-pressure rapid solenoid valve, and a pipe mounted on an outlet opening of the solenoid valve to produce a pulsed fluid jet which is sub-millimetric in size, and the atomic density of which is more than 1020 cm−3.

Abstract translation: 一种用于产生脉冲射流的方法和装置，并将射流转换成等离子体。 该方法包括使用高压快速电磁阀和安装在电磁阀的出口上的管道，以产生尺寸为亚毫米的脉冲流体射流，其原子密度大于1020cm- 3。

公开(公告)号：US08071955B2

公开(公告)日：2011-12-06

申请号：US12600266

申请日：2008-05-15

Applicant: Ho Seob Kim ,  Young Chul Kim

Inventor： Ho Seob Kim ,  Young Chul Kim

IPC: H01J3/26 ,  H01J37/14 ,  H01J37/147

CPC classification number: H01J37/147 ,  H01J37/153 ,  H01J37/28 ,  H01J2237/1205 ,  H01J2237/152 ,  H01J2237/1532

Abstract: The present invention relates, in general, to a deflector for microcolumns for generating electron beams, and, more particularly, to a deflector capable of scanning or shifting electron beams or functioning as a stigmator using a magnetic field. The deflector (100) according to the present invention includes one or more deflector electrodes. Each of the deflector electrodes includes a core (12) made of a conductor or a semiconductor, and a coil (11) wound around the core (12).

Abstract translation: 本发明一般涉及用于产生电子束的微柱偏转器，更具体地，涉及一种能够扫描或移动电子束或用作使用磁场的标称器的偏转器。 根据本发明的偏转器（100）包括一个或多个偏转器电极。 每个偏转器电极包括由导体或半导体制成的芯体（12）和缠绕在芯部（12）上的线圈（11）。