公开(公告)号：US08829469B2

公开(公告)日：2014-09-09

申请号：US13813818

申请日：2011-08-02

Applicant: John Damiano, Jr. ,  David P. Nackashi ,  Stephen E. Mick

Inventor： John Damiano, Jr. ,  David P. Nackashi ,  Stephen E. Mick

IPC: G21K5/08

CPC classification number: H01J37/20 ,  H01J37/16 ,  H01J37/18 ,  H01J37/26 ,  H01J37/29 ,  H01J37/30 ,  H01J2237/2002 ,  H01J2237/2003 ,  H01J2237/2007

Abstract: A novel sample holder for specimen support devices for insertion in electron microscopes. The novel sample holder of the invention allows for the introduction of gases or liquids to specimens for in situ imaging, as well as electrical contacts for electrochemical or thermal experiments.

Abstract translation: 用于插入电子显微镜的样品支撑装置的新型样品架。 本发明的新型样品保持器允许将气体或液体引入用于原位成像的样品，以及用于电化学或热学实验的电触点。

公开(公告)号：US08790863B2

公开(公告)日：2014-07-29

申请号：US13881504

申请日：2011-10-26

Applicant: Daniel Branton ,  Anpan Han ,  Jene A. Golovchenko

Inventor： Daniel Branton ,  Anpan Han ,  Jene A. Golovchenko

IPC: G03F7/38 ,  B82B3/00 ,  G03F7/16

CPC classification number: G03F7/2059 ,  B81C1/00531 ,  B81C2201/0143 ,  B81C2201/0159 ,  B82Y10/00 ,  B82Y40/00 ,  G01N23/2251 ,  H01J37/3174 ,  H01J2237/004 ,  H01J2237/022 ,  H01J2237/2002 ,  H01J2237/2803 ,  H01J2237/2809 ,  H01J2237/31796 ,  H01L21/0331 ,  H01L22/12 ,  H01L51/0014 ,  H01L51/0048

Abstract: In a method for imaging a solid state substrate, a vapor is condensed to an amorphous solid water condensate layer on a surface of a solid state substrate. Then an image of at least a portion of the substrate surface is produced by scanning an electron beam along the substrate surface through the water condensate layer. The water condensate layer integrity is maintained during electron beam scanning to prevent electron-beam contamination from reaching the substrate during electron beam scanning. Then one or more regions of the layer can be locally removed by directing an electron beam at the regions. A material layer can be deposited on top of the water condensate layer and any substrate surface exposed at the one or more regions, and the water condensate layer and regions of the material layer on top of the layer can be removed, leaving a patterned material layer on the substrate.

Abstract translation: 在固态基板成像方法中，将蒸气冷凝成固态基板表面的无定形固体水凝结物层。 然后通过沿着衬底表面扫描电子束通过水凝结层产生衬底表面的至少一部分的图像。 在电子束扫描期间维持水凝结层的完整性，以防止电子束扫描期间电子束污染到达衬底。 然后可以通过在该区域处引导电子束来局部地去除该层的一个或多个区域。 材料层可以沉积在水冷凝物层的顶部和在一个或多个区域暴露的任何基底表面，并且水凝结物层和该层顶部上的材料层的区域可以被去除，留下图案化的材料层 在基板上。

公开(公告)号：US20140117232A1

公开(公告)日：2014-05-01

申请号：US13663684

申请日：2012-10-30

Applicant: B-NANO LTD.

Inventor： Dov SHACHAL ,  Rafi DE PICCIOTTO

IPC: H01J37/04 ,  H01J37/147 ,  H01J37/28

CPC classification number: H01J37/28 ,  H01J37/18 ,  H01J37/20 ,  H01J37/244 ,  H01J2237/164 ,  H01J2237/182 ,  H01J2237/184 ,  H01J2237/188 ,  H01J2237/2002 ,  H01J2237/24495 ,  H01J2237/2605

Abstract: An interface, a scanning electron microscope and a method for observing an object that is positioned in a non-vacuum environment. The method includes: generating an electron beam in the vacuum environment; scanning a region of the object with the electron beam while the object is located below an object holder; wherein the scanning comprises allowing the electron beam to pass through an aperture of an aperture array, pass through an ultra thin membrane that seals the aperture, and pass through the object holder; wherein the ultra thin membrane withstands a pressure difference between the vacuum environment and the non-vacuum environment; and detecting particles generated in response to an interaction between the electron beam and the object.

Abstract translation: 接口，扫描电子显微镜和用于观察位于非真空环境中的物体的方法。 该方法包括：在真空环境中产生电子束; 当物体位于物体保持器下方时用电子束扫描物体的区域; 其中所述扫描包括允许所述电子束穿过孔阵列的孔，穿过密封所述孔的超薄膜并穿过所述物体保持器; 其中所述超薄膜承受所述真空环境和所述非真空环境之间的压力差; 以及检测响应于电子束和物体之间的相互作用而产生的微粒。

公开(公告)号：US08658004B2

公开(公告)日：2014-02-25

申请号：US12470689

申请日：2009-05-22

Applicant: Leonard M. Weinstein ,  Karen M. Taminger

Inventor： Leonard M. Weinstein ,  Karen M. Taminger

IPC: C23C14/00

CPC classification number: H01J37/16 ,  H01J37/18 ,  H01J2237/002 ,  H01J2237/006 ,  H01J2237/182 ,  H01J2237/188 ,  H01J2237/2002

Abstract: A system includes a collimated beam source within a vacuum chamber, a condensable barrier gas, cooling material, a pump, and isolation chambers cooled by the cooling material to condense the barrier gas. Pressure levels of each isolation chamber are substantially greater than in the vacuum chamber. Coaxially-aligned orifices connect a working chamber, the isolation chambers, and the vacuum chamber. The pump evacuates uncondensed barrier gas. The barrier gas blocks entry of atmospheric vapor from the working chamber into the isolation chambers, and undergoes supersonic flow expansion upon entering each isolation chamber. A method includes connecting the isolation chambers to the vacuum chamber, directing vapor to a boundary with the working chamber, and supersonically expanding the vapor as it enters the isolation chambers via the orifices. The vapor condenses in each isolation chamber using the cooling material, and uncondensed vapor is pumped out of the isolation chambers via the pump.

Abstract translation: 系统包括在真空室内的准直光束源，可冷凝阻挡气体，冷却材料，泵以及由冷却材料冷却以隔离阻挡气体的隔离室。 每个隔离室的压力水平基本上大于真空室中的压力水平。 同轴对齐的孔连接工作室，隔离室和真空室。 泵排出未凝结的阻挡气体。 阻挡气体阻止大气蒸气从工作室进入隔离室，并且在进入每个隔离室时经历超音速流动膨胀。 一种方法包括将隔离室连接到真空室，将蒸汽引导到与工作室的边界，以及当蒸气通过孔口进入隔离室时使其蒸气膨胀。 蒸汽在每个隔离室中使用冷却材料冷凝，未冷凝的蒸汽通过泵从隔离室泵出。

公开(公告)号：US08653472B2

公开(公告)日：2014-02-18

申请号：US12854262

申请日：2010-08-11

Applicant: Ken Harada ,  Akira Sugawara ,  Noboru Moriya

Inventor： Ken Harada ,  Akira Sugawara ,  Noboru Moriya

IPC: G21K5/04

CPC classification number: H01J37/20 ,  H01J37/09 ,  H01J37/26 ,  H01J2237/2002 ,  H01J2237/206

Abstract: The present invention is based on the property that the electric and magnetic fields are independent of each other and normal to each other and the property that the deflection of a charged particle beam by the electromagnetic field follows the rule of linear combination. The present invention employs a system that creates a region in which there exist both electromagnetic field and controls the deflection of a charged particle beam in each of the electric and magnetic fields.

Abstract translation: 本发明是基于电场和磁场彼此独立并且彼此正常的特性以及通过电磁场的带电粒子束的偏转遵循线性组合规则的性质。 本发明采用一种系统，其产生存在电磁场的区域，并控制每个电场和磁场中的带电粒子束的偏转。

公开(公告)号：US20130288182A1

公开(公告)日：2013-10-31

申请号：US13881504

申请日：2011-10-26

Applicant: Daniel Branton ,  Anpan Han ,  Jene A. Golovchenko

Inventor： Daniel Branton ,  Anpan Han ,  Jene A. Golovchenko

IPC: G03F7/20

CPC classification number: G03F7/2059 ,  B81C1/00531 ,  B81C2201/0143 ,  B81C2201/0159 ,  B82Y10/00 ,  B82Y40/00 ,  G01N23/2251 ,  H01J37/3174 ,  H01J2237/004 ,  H01J2237/022 ,  H01J2237/2002 ,  H01J2237/2803 ,  H01J2237/2809 ,  H01J2237/31796 ,  H01L21/0331 ,  H01L22/12 ,  H01L51/0014 ,  H01L51/0048

Abstract: In a method for imaging a solid state substrate, a vapor is condensed to an amorphous solid water condensate layer on a surface of a solid state substrate. Then an image of at least a portion of the substrate surface is produced by scanning an electron beam along the substrate surface through the water condensate layer. The water condensate layer integrity is maintained during electron beam scanning to prevent electron-beam contamination from reaching the substrate during electron beam scanning. Then one or more regions of the layer can be locally removed by directing an electron beam at the regions. A material layer can be deposited on top of the water condensate layer and any substrate surface exposed at the one or more regions, and the water condensate layer and regions of the material layer on top of the layer can be removed, leaving a patterned material layer on the substrate.

Abstract translation: 在固态基板成像方法中，将蒸气冷凝成固态基板表面的无定形固体水凝结物层。 然后通过沿着衬底表面扫描电子束通过水凝结层产生衬底表面的至少一部分的图像。 在电子束扫描期间维持水凝结层的完整性，以防止电子束扫描期间电子束污染到达衬底。 然后可以通过在该区域处引导电子束来局部地去除该层的一个或多个区域。 材料层可以沉积在水冷凝物层的顶部和在一个或多个区域暴露的任何基底表面，并且水凝结物层和该层顶部上的材料层的区域可以被去除，留下图案化的材料层 在基板上。

公开(公告)号：US20130091875A1

公开(公告)日：2013-04-18

申请号：US13439346

申请日：2012-04-04

Applicant: Cheryl Hartfield

Inventor： Cheryl Hartfield

IPC: F25D3/10

CPC classification number: F25D3/107 ,  G01N1/42 ,  H01J37/20 ,  H01J2237/2002 ,  H01J2237/208 ,  H01J2237/31745

Abstract: A method for attaching a frozen specimen to a manipulator probe tip typically inside a charged-particle beam microscope. The method comprises cooling the probe tip to a temperature at or below that of the frozen specimen, where the temperature of the frozen specimen is preferably at or below the vitrification temperature of water; bringing the probe tip into contact with the frozen specimen, and bonding the probe tip to the frozen specimen by flowing water vapor onto the region of contact between the probe tip and the frozen specimen. The bonded probe tip and specimen may be moved to a support structure such as a TEM grid and bonded to it by similar means. The probe tip can then be disconnected by heating the probe tip or applying a charged-particle beam.

Abstract translation: 通常在带电粒子束显微镜内部将冷冻样品附着到机械手探针尖端的方法。 该方法包括将探针尖端冷却至等于或低于冷冻样品的温度，其中冷冻样品的温度优选在水或玻璃化温度以下; 使探针尖端与冷冻的样品接触，并且通过将水蒸气流到探针尖端和冷冻样品之间的接触区域将探针尖端结合到冷冻样品。 结合的探针尖端和样本可以移动到诸如TEM格栅的支撑结构，并通过类似的方式结合到支架结构。 然后可以通过加热探针尖端或施加带电粒子束来断开探针尖端。

公开(公告)号：US08178851B2

公开(公告)日：2012-05-15

申请号：US12847167

申请日：2010-07-30

Applicant: Pushkarraj V. Deshmukh ,  Jeffrey J. Gronsky ,  Paul E. Fischione

Inventor： Pushkarraj V. Deshmukh ,  Jeffrey J. Gronsky ,  Paul E. Fischione

IPC: G01N1/28 ,  G01N1/44 ,  G01N1/00

CPC classification number: G01N21/0303 ,  H01J37/20 ,  H01J37/228 ,  H01J2237/2002 ,  H01J2237/2003 ,  H01J2237/206 ,  H01J2237/2065

Abstract: An in situ optical specimen holder is disclosed which may be utilized for imaging and analysis during dynamic experimentation. This holder assembly includes a set of focusing and reflection optics along with an environmental cell. Electromagnetic radiation can be used to optically excite the specimen in the presence or absence of fluid. A highly reflective mirror may be used to focus the radiation on to the specimen without the presence of any heating components within the cell. The spot size of the irradiation at the specimen surface can be varied, thus exciting only a specific region on the specimen. The window type cell provides a variable fluid path length ranging from the specimen thickness to 500 μm. The holder has the provision to continuously circulate fluids over the specimen. The pressure within the cell can be regulated by controlling the flow rate of the fluids and the speed of the pumps.

Abstract translation: 公开了一种在动态实验中可用于成像和分析的原位光学样本保持器。 该支架组件包括一组聚焦和反射光学器件以及环境细胞。 在存在或不存在流体的情况下，电磁辐射可用于光学激发样品。 可以使用高反射镜来将辐射聚焦在样品上，而不会在电池内存在任何加热组分。 样品表面的照射点尺寸可以变化，从而仅激发样品上的特定区域。 窗型细胞提供从样品厚度到500μm的可变流体路径长度。 支架具有使流体在试样上连续循环的条件。 可以通过控制流体的流量和泵的速度来调节电池内的压力。

公开(公告)号：US20110073759A1

公开(公告)日：2011-03-31

申请号：US12854262

申请日：2010-08-11

Applicant: Ken HARADA ,  Akira Sugawara ,  Noboru Moriya

Inventor： Ken HARADA ,  Akira Sugawara ,  Noboru Moriya

IPC: H01J3/14

CPC classification number: H01J37/20 ,  H01J37/09 ,  H01J37/26 ,  H01J2237/2002 ,  H01J2237/206

Abstract: The present invention is based on the property that the electric and magnetic fields are independent of each other and normal to each other and the property that the deflection of a charged particle beam by the electromagnetic field follows the rule of linear combination. The present invention employs a system that creates a region in which there exist both electromagnetic field and controls the deflection of a charged particle beam in each of the electric and magnetic fields.

Abstract translation: 本发明是基于电场和磁场彼此独立并且彼此正常的特性以及通过电磁场的带电粒子束的偏转遵循线性组合规则的性质。 本发明采用一种系统，其产生存在电磁场的区域，并控制每个电场和磁场中的带电粒子束的偏转。

公开(公告)号：US20110049361A1

公开(公告)日：2011-03-03

申请号：US12804507

申请日：2010-07-22

Applicant: Dirk Preikszas ,  Michael Albiez

Inventor： Dirk Preikszas ,  Michael Albiez

IPC: G01N23/00 ,  G21K1/08

CPC classification number: H01J37/09 ,  H01J37/15 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/0455 ,  H01J2237/0492 ,  H01J2237/14 ,  H01J2237/2002 ,  H01J2237/26 ,  H01J2237/31749

Abstract: A particle beam apparatus includes a first aperture unit having an adjustable aperture opening. The particle beam apparatus may include a first condenser lens having a first pole shoe and a second pole shoe. Both the first pole shoe and the second pole shoe may be adjustable relative to a second aperture unit independently of each other. The second aperture unit may be designed as a pressure stage aperture separating a first area having a vacuum at a first pressure, and a second area having a vacuum at a second pressure. Additionally, a method for adjusting a beam current in a particle beam apparatus is provided.

Abstract translation: 粒子束装置包括具有可调开口开口的第一孔单元。 粒子束装置可以包括具有第一极靴和第二极靴的第一聚光透镜。 第一极靴和第二极靴都可以相对于第二孔单元彼此独立地调节。 第二孔单元可以被设计为在第一压力下分离具有真空的第一区域和在第二压力下具有真空的第二区域的压力级孔。 此外，提供了一种用于调整粒子束装置中的束电流的方法。