Abstract:
An electron gun having a cathode of a lanthanum hexaboride single crystal is disclosed in which the axis of the cathode is set to such a crystal orientation that the electron beam has two intensive emission regions which are asymmetrical with each other in intensity. In the electron gun, even at a low heating temperature of the cathode, a single spot of an image by the electron beam of a more intensive emission region since the electron beam of a weaker intensity emission region is blocked by an aperture.
Abstract:
A method and apparatus for regulating and determining the temperature of a heated cathode in an electron beam system to regulate the magnitude of the beam current both during operation and prior to turn on. This is accomplished by measuring the thermionic emission of a well defined area of the cathode, regardless of whether the electron beam is being drawn from the cathode, and utilizing this measured signal to control the temperature of the heated cathode.
Abstract:
An electronic bombardment gun comprising the emitting assembly of a goffered washer, an insulating spacer, a central electrode, a conical perforated filament, said filament being provided with a flange at its widest portion and with an emitting annular end portion pierced with an orifice at its narrowest part.
Abstract:
A method of assessing thermionic electron emitter quality, comprising heating a thermionic electron emitter to an emission temperature thereby causing the emitter to emit electrons, forming the electrons emitted by the emitter into an electron beam, directing the electron beam to an image detector thereby forming an image corresponding to electron emission from a surface of the emitter, and detecting a presence or absence in the image of a pair of intersecting bright band features, each band feature being formed from two parallel lines, the band features corresponding to crystal lattice planes of the emitter. The presence of one pair of intersecting bright band features indicates a single-crystal emitter. The absence of a pair of intersecting band features indicates an amorphous or contaminated emitter. The presence of more than a single pair of intersecting bright band features indicates a polycrystalline emitter. The method is particularly useful for rare-earth hexaboride emitters.
Abstract:
A finishing and coating apparatus combines finishing and coating optical components into one vacuum apparatus. The apparatus includes a vacuum system, a substrate holder, a finisher including a laser engine and a beam delivery apparatus, and a coating source. The finisher is configured to finish the optical components prior to coating the optical components. The finisher includes a laser engine and a laser beam delivery apparatus configured to direct a beam from the laser engine toward each of the optical components.
Abstract:
A new multi-beam apparatus with a total FOV variable in size, orientation and incident angle, is proposed. The new apparatus provides more flexibility to speed the sample observation and enable more samples observable. More specifically, as a yield management tool to inspect and/or review defects on wafers/masks in semiconductor manufacturing industry, the new apparatus provide more possibilities to achieve a high throughput and detect more kinds of defects.