公开(公告)号：US20110228269A1

公开(公告)日：2011-09-22

申请号：US13129785

申请日：2009-12-04

Applicant: Francois Vincent ,  Jean-Pierre Sola ,  Gilbert Wuethrich

Inventor： Francois Vincent ,  Jean-Pierre Sola ,  Gilbert Wuethrich

IPC: G01J3/30

CPC classification number: G01J3/443 ,  H03K3/57

Abstract: The invention provides a spark generator for generating a spark for optical emission spectroscopy (OES), wherein the spark has a current waveform comprising a first modulated portion which comprises a plurality of relatively high current and high gradient peaks of variable amplitude and/or inter-peak duration and a second modulated portion of relatively low current and low gradient which is substantially without modulated peaks. The spark is preferably generated from two or more programmable current sources. The invention also provides an optical emission spectrometer comprising the spark generator and a method of optical emission spectroscopy using the spark generator.

Abstract translation: 本发明提供了一种用于产生用于光发射光谱（OES）的火花的火花发生器，其中所述火花具有包括第一调制部分的电流波形，所述第一调制部分包括可变幅度和/或相互间的多个相对高的电流和高梯度峰值， 峰值持续时间和基本上没有调制峰值的相对低电流和低梯度的第二调制部分。 火花优选由两个或多个可编程电流源产生。 本发明还提供了包括火花发生器的光发射光谱仪和使用火花发生器的光发射光谱法。

公开(公告)号：US20110199609A1

公开(公告)日：2011-08-18

申请号：US12682268

申请日：2008-10-10

Applicant: Vincent Couderc ,  Philippe LeProux ,  Laurent LeFort ,  David Bouyge ,  Christelle Lesvigne-Buy ,  Aurelian Crunteanu Stanescu

Inventor： Vincent Couderc ,  Philippe LeProux ,  Laurent LeFort ,  David Bouyge ,  Christelle Lesvigne-Buy ,  Aurelian Crunteanu Stanescu

IPC: G01N21/63

CPC classification number: G01J3/443 ,  G01J3/4406 ,  G01N21/645

Abstract: A method and device is provided for characterizing microscopic elements. A source signal may be chopped by means of microsystems of opto-electromechanical elements (MOEMS), which gives rise to temporal modulation of the excitation signals. The method of characterizing microscopic elements involves propagating a dispersed light source signal, spatially chopping the spectrum of the source signal into at least two excitation signals having predetermined wavelengths λi, coding the excitation signals, focusing the excitation signals in order to generate a sensor signal propagated towards a measurement zone, and analyzing an interaction signal issuing from the interaction of the sensor signal with the microscopic elements situated in the measuring space. The spatial chopping of the spectrum of the source light signal is performed by a microsystem of opto-electromechanical elements (MOEMS).

Abstract translation: 提供了表征微观元素的方法和装置。 源信号可以通过光电机械元件（MOEMS）的微系统来切割，这导致激励信号的时间调制。 表征微观元素的方法涉及传播分散的光源信号，将源信号的光谱空间斩波成具有预定波长λi的至少两个激励信号，对激发信号进行编码，聚焦激励信号以产生传播的信号 朝向测量区域，并且分析从传感器信号与位于测量空间中的微观元件的相互作用发出的相互作用信号。 源光信号的光谱的空间斩波由光机电元件（MOEMS）的微系统执行。

公开(公告)号：US20110040508A1

公开(公告)日：2011-02-17

申请号：US12772565

申请日：2010-05-03

Applicant: Kang LEE ,  Sang Jeen HONG ,  Sang Youl LEE ,  Jong Hwan AHN

Inventor： Kang LEE ,  Sang Jeen HONG ,  Sang Youl LEE ,  Jong Hwan AHN

IPC: G06F19/00 ,  G01J3/46 ,  G08B21/00

CPC classification number: G01J3/51 ,  G01J3/02 ,  G01J3/0264 ,  G01J3/443 ,  G01J3/513 ,  H01J37/32935

Abstract: The apparatus for detecting arc occurred in chamber for plasma treatment used for manufacturing semiconductor or LCD panel comprises, a sensor module for sensing the arc; a processor module for processing data from the sensor module; wherein the sensor module includes RGB color sensor for sensing color data of the arc occurred in the chamber, the RGB color sensor is a sensor sensable at least one of red color or green color or blue color of the arc, the apparatus detects the arc by sensing data of color and chroma and brightness of the arc.

Abstract translation: 在用于制造半导体或LCD面板的等离子体处理室中检测电弧的装置包括：用于感测电弧的传感器模块; 处理器模块，用于处理来自传感器模块的数据; 其中传感器模块包括RGB颜色传感器，用于感测在室中发生的电弧的颜色数据，RGB颜色传感器是可感测到电弧的红色或绿色或蓝色中的至少一种的传感器，该装置通过 感测电弧的颜色和色度和亮度的数据。

公开(公告)号：US20100328661A1

公开(公告)日：2010-12-30

申请号：US12918376

申请日：2009-02-20

Applicant: Sébastien Blais-Ouellette ,  Daniel Gagnon ,  Simon Lessard

Inventor： Sébastien Blais-Ouellette ,  Daniel Gagnon ,  Simon Lessard

IPC: G01J3/28

CPC classification number: G01N21/718 ,  G01J3/02 ,  G01J3/0208 ,  G01J3/0294 ,  G01J3/18 ,  G01J3/443

Abstract: A laser induced breakdown spectroscopy (LIBS) system uses discrete optical filters for isolated predetermined spectral components from plasma light created by ablation of a sample. Independent detection elements may be used for detecting the magnitude for each spectral component. A first spectral component may include a characteristic wavelength of the sample, while a second spectral component may be a portion of a background continuum. The filters may include volume Bragg gratings and the detectors may be photodiodes. A detector that detects plasma light remaining after the isolation of the predetermined spectral components may be used together with a signal acquisition controller to precisely control the initiation and termination of signal acquisition from each of the detection elements. The system may also have optics including a collimating lens through which passes both the initial plasma light and the isolated spectral components.

Abstract translation: 激光诱导击穿光谱（LIBS）系统使用离散光学滤波器用于通过样品消融产生的等离子体光的隔离的预定光谱分量。 独立检测元件可用于检测每个光谱分量的幅度。 第一光谱分量可以包括样本的特征波长，而第二光谱分量可以是背景连续谱的一部分。 滤波器可以包括体积布拉格光栅，并且检测器可以是光电二极管。 检测器在检测到隔离预定频谱分量之后剩余的等离子体光可以与信号采集控制器一起使用，以精确地控制从每个检测元件开始和终止信号采集。 该系统还可以具有包括准直透镜的光学器件，通过该准直透镜通过初始等离子体光和隔离的光谱分量。

公开(公告)号：US20100177308A1

公开(公告)日：2010-07-15

申请号：US12602902

申请日：2008-06-06

Applicant: Wolfram Bohle ,  Ulrich Heynen

Inventor： Wolfram Bohle ,  Ulrich Heynen

IPC: G01J3/40 ,  G01J3/36 ,  G01J3/443

CPC classification number: G01J3/443 ,  G01J3/02 ,  G01J3/021 ,  G01J3/04 ,  G01J3/1804 ,  G01J3/2803

Abstract: The invention relates to a spectrometer for analysing the optical emission of a sample by means of pulsed excitation of an optical spectral emission, having an excitation source, a gap arrangement, at least one dispersive element and having detectors for the emitted spectrum, in which two beam paths are provided with two dispersive elements, the first dispersive element of which images the spectrum of the emission onto a number of spatially resolving detectors and the second dispersive element of which images the spectrum of the emission onto a number of time-resolving detectors.

Abstract translation: 本发明涉及一种用于通过脉冲激发光谱发射来分析样品的光发射的光谱仪，其具有激发源，间隙布置，至少一个色散元件并且具有用于发射光谱的检测器，其中两个 光束路径设置有两个色散元件，其第一色散元件将发射光谱图像到多个空间分辨检测器，并且其第二色散元件将发射光谱图像到多个时间分辨检测器上。

公开(公告)号：US20100171951A1

公开(公告)日：2010-07-08

申请号：US12639393

申请日：2009-12-16

Applicant: Anupam Kumar MISRA ,  Shiv Kumar SHARMA ,  Paul Grandmont LUCEY

Inventor： Anupam Kumar MISRA ,  Shiv Kumar SHARMA ,  Paul Grandmont LUCEY

IPC: G01J3/44

CPC classification number: G01J3/44 ,  G01J3/02 ,  G01J3/0208 ,  G01J3/0227 ,  G01J3/0289 ,  G01J3/10 ,  G01J3/443

Abstract: An spectrometer including Raman and LIBS spectroscopy capabilities is disclosed. The spectrometer includes a laser source configurable to produce a lased light directable towards a target substance, the laser source having a single wavelength and having sufficient power to cause a portion of the target to emit Raman scattering and sufficient to ablate a portion of the target substance to produce a plasma plume. A separate remote light collector is optically configurable to collect light emitted from the portion of the target emitting Raman scattering and from the portion of the target producing the plasma plume. A filter is optically coupled to the remote light collector to remove reflected light and Rayleigh-scattered light, and a spectroscope is optically coupled to the filter and configured to separate the collected and filtered light into a frequency spectrum comprising a Raman spectrum and a laser-induced breakdown spectrum. Finally, an electronic light sensor is used to record the frequency spectrum.

Abstract translation: 公开了包括拉曼和LIBS光谱能力的光谱仪。 光谱仪包括可配置为产生可朝向目标物质定向的激光的激光源，激光源具有单一波长并具有足够的功率以使靶的一部分发射拉曼散射并足以消除目标物质的一部分 以产生等离子体羽流。 单独的远程收光器是可光学配置的，以收集从发射拉曼散射的目标的部分和从产生等离子体羽流的目标的部分发射的光。 滤光器光耦合到远程光收集器以去除反射光和瑞利散射光，并且光谱仪光学耦合到滤光器并且被配置为将收集的和经过滤光的光分离成包括拉曼光谱和激光 - 诱发击穿光谱。 最后，使用电子光传感器来记录频谱。

公开(公告)号：US07705973B2

公开(公告)日：2010-04-27

申请号：US12151516

申请日：2008-05-07

Applicant: Keun-Hee Bai ,  Yong-Jin Kim

Inventor： Keun-Hee Bai ,  Yong-Jin Kim

IPC: G01J3/443 ,  H05H1/00

CPC classification number: G01J3/443 ,  H01J37/32935 ,  H01J37/32972

Abstract: Provided are methods and systems for monitoring a state of a plasma chamber. In the method, an optical characteristic of plasma generated in a plasma chamber including a window is measured in a predetermined measurement wavelength band. A process status index (PSI) is extracted from the measured optical characteristic. A state of the plasma chamber is evaluated by analyzing the extracted PSI. The optical characteristic of the plasma is measured in the predetermined measurement wavelength band in which a transmittance of light passing through the window is substantially independent of a wavelength of the light.

Abstract translation: 提供了用于监测等离子体室的状态的方法和系统。 在该方法中，在预定的测量波长带中测量在包括窗口的等离子体室中产生的等离子体的光学特性。 从测量的光学特性中提取过程状态指数（PSI）。 通过分析所提取的PSI来评估等离子体室的状态。 在通过窗口的光的透射率基本上与光的波长无关的预定测量波长带中测量等离子体的光学特性。

公开(公告)号：US07688443B2

公开(公告)日：2010-03-30

申请号：US11548678

申请日：2006-10-11

Applicant: Harry Rieger

Inventor： Harry Rieger

IPC: G01J3/30

CPC classification number: G01J3/10 ,  G01J3/443 ,  G01N21/718 ,  H01S3/08054 ,  H01S3/10038 ,  H01S3/10046 ,  H01S3/107 ,  H01S3/1103 ,  H01S3/115 ,  H01S3/127 ,  H01S3/2316 ,  H01S3/2341 ,  H01S3/2383

Abstract: A sample analysis system comprises a laser unit and a spectrometer unit. The laser unit emits a first laser pulse and a second laser pulse towards the sample with a pulse separation time of between about 1 microsecond to 20 microseconds. The laser unit includes an oscillator unit which is configured to generate the first laser pulse and the second laser pulse. A pre-amplifier unit is configured to receive the first laser pulse and the second laser pulse and increase the energy levels of each pulse prior to the pulses being emitted from the laser unit. The spectrometer unit captures emissions generated by the sample after the sample is stuck by the first and second laser pulses and identifies the elemental constituents of the sample using the emissions.

Abstract translation: 样品分析系统包括激光单元和光谱仪单元。 激光单元以约1微秒至20微秒之间的脉冲间隔时间向样品发射第一激光脉冲和第二激光脉冲。 激光单元包括被配置为产生第一激光脉冲和第二激光脉冲的振荡器单元。 预放大器单元被配置为在从激光单元发射脉冲之前接收第一激光脉冲和第二激光脉冲并增加每个脉冲的能级。 在样品被第一和第二激光脉冲粘附之后，光谱仪单元捕获样品产生的发射，并使用排放物识别样品的元素成分。

公开(公告)号：US07652253B2

公开(公告)日：2010-01-26

申请号：US11835152

申请日：2007-08-07

Applicant: Xi-Cheng Zhang ,  Jianming Dai ,  Xu Xie

Inventor： Xi-Cheng Zhang ,  Jianming Dai ,  Xu Xie

IPC: G01J5/02

CPC classification number: G01J3/42 ,  G01J3/443 ,  G01N21/3581 ,  G01N21/718 ,  G01N2021/1761 ,  G01N2021/1795 ,  G01N2201/0697

Abstract: A method of analyzing a remotely-located object includes the step of illuminating at least a portion of a targeted object with electromagnetic radiation to induce a phase transformation in the targeted object, wherein the phase transformation produces an emitter plasma, which emits terahertz radiation. The method also includes the step of ionizing a volume of an ambient gas to produce a sensor plasma by focusing an optical probe beam in the volume and the step of detecting an optical component of resultant radiation produced from an interaction of the focused optical probe beam and the terahertz radiation in the sensor plasma. Detecting an optical component of the resultant radiation emitted by the sensor plasma facilitates detection of a characteristic fingerprint of the targeted object imposed onto the terahertz radiation produced as a result of the induced phase transformation.

Abstract translation: 分析遥远物体的方法包括用电磁辐射照射目标物体的至少一部分以引起目标物体中的相变的步骤，其中相变产生发射太赫兹辐射的发射体等离子体。 该方法还包括使体积的环境气体电离以通过将光学探针束聚焦在体积中来产生传感器等离子体的步骤，以及检测由聚焦的光学探针光束和 传感器等离子体中的太赫兹辐射。 检测由传感器等离子体发射的所得辐射的光学部件有助于检测施加在由感应相变所产生的太赫兹辐射上的目标物体的特征指纹。

公开(公告)号：US20090030632A1

公开(公告)日：2009-01-29

申请号：US11829762

申请日：2007-07-27

Applicant: SAIRAJU TALLAVARJULA ,  Aaron M. Hunter ,  Joseph M. Ranish ,  Johanes Swenberg ,  Robert M. Haney

Inventor： SAIRAJU TALLAVARJULA ,  Aaron M. Hunter ,  Joseph M. Ranish ,  Johanes Swenberg ,  Robert M. Haney

IPC: G06F19/00

CPC classification number: G01N21/73 ,  G01J3/443 ,  G01J2003/2866 ,  G01N21/274

Abstract: Methods for matching semiconductor plasma processing chambers using a calibrated spectrometer are disclosed. In one embodiment, plasma attributes are measured for a process in a reference chamber and a process in a sample chamber. Measuring the plasma attributes during process perturbations allows for the correlation of process parameters to the plasma optical emission spectra. The process parameters can then be adjusted to yield a processed substrate which matches that of the reference chamber. Methods for monitoring the stability of a plasma processing chamber using a calibrated spectrometer are also disclosed.

Abstract translation: 公开了使用校准的光谱仪来匹配半导体等离子体处理室的方法。 在一个实施例中，测量参考室中的过程和样品室中的过程的等离子体属性。 在处理扰动期间测量等离子体属性允许工艺参数与等离子体发射光谱的相关性。 然后可以调整工艺参数以产生与参考室的处理参数相匹配的经处理的衬底。 还公开了使用校准的光谱仪监测等离子体处理室的稳定性的方法。