公开(公告)号：US20120298861A1

公开(公告)日：2012-11-29

申请号：US13113770

申请日：2011-05-23

Applicant: Raymond Browning

Inventor： Raymond Browning

IPC: H01J40/00 ,  G01T1/20 ,  G01T1/16

CPC classification number: H01J37/141 ,  H01J37/285 ,  H01J2237/1035 ,  H01J2237/1415 ,  H01J2237/2855

Abstract: A photoelectron microscope uses the vector potential field as a spatial reference. The microscope can be used with a source of photons to image surface chemistry.

Abstract translation: 光电子显微镜使用矢量势场作为空间参考。 显微镜可以与光子源一起使用来成像表面化学。

公开(公告)号：US08288722B2

公开(公告)日：2012-10-16

申请号：US12926489

申请日：2010-11-22

Applicant: Masaki Hasegawa ,  Hiroya Ohta

Inventor： Masaki Hasegawa ,  Hiroya Ohta

IPC: H01J37/26

CPC classification number: G01N23/225 ,  H01J37/026 ,  H01J37/285 ,  H01J37/29 ,  H01J2237/0047 ,  H01J2237/221 ,  H01J2237/2446 ,  H01J2237/24495 ,  H01J2237/2482 ,  H01J2237/2855

Abstract: An electron beam inspection apparatus images reflected electrons and cancels negative charging derived from electron-beam irradiation. Ultraviolet rays are irradiated and an irradiated area of ultraviolet rays is displayed as a photoelectron image. The photoelectron image and a reflected-electron image are displayed on a monitor while being superposed on each other, to easily grasp the positional relationship between the images and the difference in size between them. Specifically, the shape of the irradiated area of an electron beam includes the shape of the irradiated area of ultraviolet rays on a display screen. The intensity of the ultraviolet rays in the irradiated area of the electron beam is adjusted while the reflected-electron imaging conditions for the reflected-electron image are sustained. Moreover, an amount-of-ultraviolet ray adjustment mechanism is controlled on the monitor so that an amount of the ultraviolet rays is adjusted while observing a reflected-electron image obtained during ultraviolet irradiation.

Abstract translation: 电子束检查装置对反射电子进行成像并消除由电子束照射产生的负电荷。 照射紫外线，照射紫外线的区域作为光电子图像显示。 光电子图像和反射电子图像在彼此重叠的状态下显示在监视器上，以容易地掌握图像之间的位置关系和它们之间的尺寸差异。 具体地，电子束的照射区域的形状包括在显示屏上照射的紫外线区域的形状。 调整电子束的照射区域中的紫外线的强度，同时维持反射电子图像的反射电子成像条件。 此外，在监视器上控制紫外线量调节机构，使得在观察紫外线照射期间获得的反射电子图像的同时调节紫外线的量。

公开(公告)号：US08164057B2

公开(公告)日：2012-04-24

申请号：US12446757

申请日：2007-10-23

Applicant: Dov Shachal

Inventor： Dov Shachal

IPC: G01N23/00

CPC classification number: H01J37/285 ,  H01J37/06 ,  H01J37/20 ,  H01J37/28 ,  H01J37/301 ,  H01J2237/006 ,  H01J2237/0458 ,  H01J2237/15 ,  H01J2237/164 ,  H01J2237/182 ,  H01J2237/2002 ,  H01J2237/2006 ,  H01J2237/2605 ,  H01J2237/28 ,  H01J2237/2801 ,  H01J2237/2806 ,  H01J2237/2807

Abstract: An interface, a scanning electron microscope and a method for observing an object that is positioned in a non-vacuum environment. The method includes: passing at least one electron beam that is generated in a vacuum environment through at least one aperture out of an aperture array and through at least one ultra thin membrane that seals the at least one aperture; wherein the at least one electron beam is directed towards the object; wherein the at least one ultra thin membrane withstands a pressure difference between the vacuum environment and the non-vacuum environment; and detecting particles generated in response to an interaction between the at least one electron beam and the object.

Abstract translation: 接口，扫描电子显微镜和用于观察位于非真空环境中的物体的方法。 该方法包括：使在真空环境中产生的至少一个电子束通过孔阵列中的至少一个孔并通过至少一个密封所述至少一个孔的超薄膜; 其中所述至少一个电子束被引向所述物体; 其中所述至少一个超薄膜承受真空环境和非真空环境之间的压力差; 以及检测响应于所述至少一个电子束和所述物体之间的相互作用而产生的微粒。

公开(公告)号：US20120080596A1

公开(公告)日：2012-04-05

申请号：US13227505

申请日：2011-09-08

Applicant: Wilfried Vandervorst

Inventor： Wilfried Vandervorst

IPC: H01J37/26

CPC classification number: H01J37/226 ,  H01J37/285 ,  H01J49/0004 ,  H01J2237/04 ,  H01J2237/05 ,  H01J2237/202 ,  H01J2237/248 ,  H01J2237/2855

Abstract: A laser atom probe system and a method for analysing a specimen by laser atom probe tomography are disclosed. The system includes a specimen holder whereon a specimen to be analyzed may be mounted, the specimen having a tip shape. The system further includes a detector, an electrode arranged between the specimen holder and the detector, and a voltage source configured to apply a voltage difference between the specimen tip and the electrode. The system also includes at least one laser system configured to direct a laser beam laterally at the specimen tip and a tip shape monitoring means configured to detect and monitor the tip shape, and/or a means for altering and/or controlling one or more laser parameters of said laser beam(s) so as to maintain, restore or control said specimen tip shape.

Abstract translation: 公开了一种激光原子探针系统和通过激光原子探针层析成像分析样品的方法。 该系统包括可以安装待分析样品的样品架，样品具有尖端形状。 所述系统还包括检测器，布置在所述检体保持器和检测器之间的电极，以及被配置为施加所述检测头和所述电极之间的电压差的电压源。 该系统还包括至少一个激光系统，其被配置为在激光束的侧面引导激光束，以及尖端形状监测装置，被配置为检测和监视尖端形状，和/或用于改变和/或控制一个或多个激光器 所述激光束的参数，以便维持，恢复或控制所述样品尖端形状。

公开(公告)号：US20110284744A1

公开(公告)日：2011-11-24

申请号：US12884001

申请日：2010-09-16

Applicant: Ahmed H. Zewail ,  Oh-Hoon Kwon ,  Omar Farghaly Mohammed Abdelsaboor ,  Ding-Shyue Yang

Inventor： Ahmed H. Zewail ,  Oh-Hoon Kwon ,  Omar Farghaly Mohammed Abdelsaboor ,  Ding-Shyue Yang

IPC: H01J37/28 ,  H01J37/26

CPC classification number: H01J37/28 ,  H01J37/228 ,  H01J37/285 ,  H01J2237/0432 ,  H01J2237/2004 ,  H01J2237/20207 ,  H01J2237/2065 ,  H01J2237/2611 ,  H01J2237/2803

Abstract: A 4D electron tomography system includes a stage having one or more degrees of freedom, an electron source, and electron optics operable to direct electron pulses to impinge on a sample supported on the stage. A pulse of the electron pulses impinges on the sample at a first time. The system also includes a laser system and optics operable to direct optical pulses to impinge on the sample. A pulse of the optical pulses impinges on the sample at a second time. The system further includes a detector operable to receive the electron pulses passing through the sample, a controller operable to independently modify an orientation of the stage and at least one of the first time or the second time, a memory operable to store sets of images, and a processor operable to form a 4D tomgraphic image set from the sets of images.

Abstract translation: 4D电子断层摄影系统包括具有一个或多个自由度的阶段，电子源和可操作以将电子脉冲引导到支撑在舞台上的样本上的电子光学器件。 电子脉冲的脉冲在第一次撞击样品。 该系统还包括激光系统和光学器件，其可操作以引导光脉冲撞击样品。 光脉冲的脉冲在第二次撞击样品。 该系统还包括可操作以接收通过样品的电子脉冲的检测器，可操作以独立地修改载物台的取向和第一时间或第二时间中的至少一个的控制器，可操作地存储图像集合的存储器， 以及处理器，可操作以从所述图像集合形成4D成像图像集。

公开(公告)号：US20110068267A1

公开(公告)日：2011-03-24

申请号：US12926489

申请日：2010-11-22

Applicant: Masaki HASEGAWA ,  Hiroya OHTA

Inventor： Masaki HASEGAWA ,  Hiroya OHTA

IPC: H01J37/26 ,  H01J37/29

CPC classification number: G01N23/225 ,  H01J37/026 ,  H01J37/285 ,  H01J37/29 ,  H01J2237/0047 ,  H01J2237/221 ,  H01J2237/2446 ,  H01J2237/24495 ,  H01J2237/2482 ,  H01J2237/2855

Abstract: An electron beam inspection apparatus images reflected electrons and cancels negative charging derived from electron-beam irradiation. Ultraviolet rays are irradiated and an irradiated area of ultraviolet rays is displayed as a photoelectron image. The photoelectron image and a reflected-electron image are displayed on a monitor while being superposed on each other, to easily grasp the positional relationship between the images and the difference in size between them. Specifically, the shape of the irradiated area of an electron beam includes the shape of the irradiated area of ultraviolet rays on a display screen. The intensity of the ultraviolet rays in the irradiated area of the electron beam is adjusted while the reflected-electron imaging conditions for the reflected-electron image are sustained. Moreover, an amount-of-ultraviolet ray adjustment mechanism is controlled on the monitor so that an amount of the ultraviolet rays is adjusted while observing a reflected-electron image obtained during ultraviolet irradiation.

公开(公告)号：US20100305747A1

公开(公告)日：2010-12-02

申请号：US12446376

申请日：2007-10-20

Applicant: Enrique Agorio ,  James Edgar Hudson ,  Gerhard Daniel ,  Michael Tanguay ,  Jason Arjavac

Inventor： Enrique Agorio ,  James Edgar Hudson ,  Gerhard Daniel ,  Michael Tanguay ,  Jason Arjavac

IPC: H01J37/20 ,  G06K9/00 ,  B25J19/04 ,  G05D3/12

CPC classification number: H01J37/20 ,  G01N1/286 ,  G01N1/32 ,  G01N2001/2873 ,  G01N2001/2886 ,  G01R31/2893 ,  H01J37/26 ,  H01J37/28 ,  H01J37/285 ,  H01J37/31 ,  H01J2237/202 ,  H01J2237/2802 ,  H01J2237/2812 ,  H01J2237/3109 ,  H01J2237/3114 ,  H01J2237/31745

Abstract: An improved method and apparatus for extracting and handling samples for S/TEM analysis. Preferred embodiments of the present invention make use of a micromanipulator and a hollow microprobe probe using vacuum pressure to adhere the microprobe tip to the sample. By applying a small vacuum pressure to the lamella through the microprobe tip, the lamella can be held more securely and its placement controlled more accurately than by using electrostatic force alone. By using a probe having a beveled tip and which can also be rotated around its long axis, the extracted sample can be placed down flat on a sample holder. This allows sample placement and orientation to be precisely controlled, thus greatly increasing predictability of analysis and throughput

Abstract translation: 一种用于提取和处理样品用于S / TEM分析的改进方法和装置。 本发明的优选实施例利用显微操纵器和使用真空压力的中空微探针探针将微针尖附着到样品上。 通过通过微针尖向薄片施加小的真空压力，可以比通过单独使用静电力更牢固地保持薄片并且其布置更准确。 通过使用具有倾斜尖端并且也可围绕其长轴旋转的探针，所提取的样品可以平放放置在样品架上。 这样可以精确控制样品放置和取向，从而大大提高分析和产量的可预测性

公开(公告)号：US20100294928A1

公开(公告)日：2010-11-25

申请号：US11720709

申请日：2005-12-20

Applicant: Joseph Hale Bunton ,  Thomas F. Kelly ,  Daniel R. Lenz ,  Scott Albert Wiener

Inventor： Joseph Hale Bunton ,  Thomas F. Kelly ,  Daniel R. Lenz ,  Scott Albert Wiener

IPC: G01N23/225

CPC classification number: H01J49/164 ,  B82Y35/00 ,  H01J37/285 ,  H01J49/0004 ,  H01J2237/2812 ,  H01J2237/2813

Abstract: An atom probe includes a specimen mount that can hold a specimen to be analyzed. A detector is spaced apart from the specimen mount. Between the detector and specimen mount Is a local electrode with an aperture. A laser is oriented to emit a laser beam toward the specimen mount at a nonzero angle with respect to the aperture plane, the aperture plane being oriented perpendicular to an ion travel path defined through the aperture between the specimen mount and detector.

Abstract translation: 原子探针包括可以容纳要分析的样品的样品座。 检测器与样品支架间隔开。 检测器和样品座之间是具有孔径的局部电极。 激光器被定向成相对于孔径平面以非零角度向激光束发射激光束，孔径平面垂直于通过样品座和检测器之间的孔限定的离子行进路径定向。

公开(公告)号：US20100282964A1

公开(公告)日：2010-11-11

申请号：US12676314

申请日：2008-08-27

Applicant: Joseph Hale Bunton ,  Jesse D. Olson ,  Roger Alvis ,  Daniel R. Lenz ,  Ed Oltman

Inventor： Joseph Hale Bunton ,  Jesse D. Olson ,  Roger Alvis ,  Daniel R. Lenz ,  Ed Oltman

IPC: H01J49/26 ,  H01J49/00

CPC classification number: H01J37/285 ,  B82Y15/00 ,  H01J37/265 ,  H01J2237/2445 ,  H01J2237/24465 ,  H01J2237/2482

Abstract: A method for aligning an energy beam to an object in an atom probe is disclosed. The method comprises monitoring at least one parameter indicative of an interaction between the energy beam and the object. A signal is generated in response to the interaction of the energy beam and the object. The signal is then used to effectuate control of the alignment of the energy beam to the object.

Abstract translation: 公开了一种用于将能量束对准原子探针中的物体的方法。 该方法包括监视指示能量束和物体之间的相互作用的至少一个参数。 响应于能量束和物体的相互作用产生信号。 然后该信号用于实现能量束对物体的对准的控制。

公开(公告)号：US07683318B2

公开(公告)日：2010-03-23

申请号：US10592661

申请日：2004-08-19

Applicant: Joseph H. Bunton ,  Thomas F. Kelly ,  Tye T. Gribb

Inventor： Joseph H. Bunton ,  Thomas F. Kelly ,  Tye T. Gribb

IPC: G01N23/00 ,  G21K7/00

CPC classification number: H01J37/285 ,  B82Y35/00 ,  H01J49/0004 ,  H01J49/067 ,  H01J49/164 ,  H01J2237/2855

Abstract: A laser atom probe (100) situates a counter electrode between a specimen mount and a detector (106), and provides a laser (116) having its beam (122) aligned to illuminate the specimen (104) through the aperture (110) of the counter electrode (108). The detector, specimen mount (102), and then be pulsed to bring the specimen to ionization. The timing of the laser pulses may be used to determine ion departure and arrival times allowing determination of the mass-to-charge ratios of the ions, thus their identities. Automated alignment methods are described wherein the laser is automatically directed to areas of interest.

Abstract translation: 激光原子探针（100）将对电极置于样品座和检测器（106）之间，并且提供其对准的光束（122）的激光器（116），以通过孔（110）的孔（110）照射样品 对电极（108）。 检测器，样品架（102），然后被脉冲以使样品电离。 激光脉冲的定时可用于确定离子离开和到达时间，从而确定离子的质荷比，因此确定它们的身份。 描述了自动对准方法，其中激光被自动导向到感兴趣的区域。