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    SEMICONDUCTOR PROCESSING APPARATUS WITH IMPROVED UNIFORMITY
    2.
    发明申请
    SEMICONDUCTOR PROCESSING APPARATUS WITH IMPROVED UNIFORMITY 有权

    公开(公告)号：US20210066039A1

    公开(公告)日：2021-03-04

    申请号：US16988466

    申请日：2020-08-07

    Applicant: Applied Materials, Inc.

    Inventor： Jian LI ,  Viren KALSEKAR ,  Paul BRILLHART ,  Juan Carlos ROCHA-ALVAREZ ,  Vinay K. PRABHAKAR

    IPC: H01J37/32 ,  H01L21/67 ,  H01L21/683 ,  C23C16/505 ,  C23C16/458 ,  C23C16/46

    Abstract: One or more embodiments described herein generally relate to a semiconductor processing apparatus that utilizes high radio frequency (RF) power to improve uniformity. The semiconductor processing apparatus includes an RF powered primary mesh and an RF powered secondary mesh, which are disposed in a substrate supporting element. The secondary RF mesh is positioned underneath the primary RF mesh. A connection assembly is configured to electrically couple the secondary mesh to the primary mesh. RF current flowing out of the primary mesh is distributed into multiple connection junctions. As such, even at high total RF power/current, a hot spot on the primary mesh is prevented because the RF current is spread to the multiple connection junctions. Accordingly, there is less impact on substrate temperature and film non-uniformity, allowing much higher RF power to be used without causing a local hot spot on the substrate being processed.

    THERMAL COUPLED QUARTZ DOME HEAT SINK
    5.
    发明申请
    THERMAL COUPLED QUARTZ DOME HEAT SINK 有权
    热耦合QUARTZ DOME HEAT SINK

    公开(公告)号：US20140254150A1

    公开(公告)日：2014-09-11

    申请号：US14175459

    申请日：2014-02-07

    Applicant: Applied Materials, Inc.

    Inventor： Joseph M. RANISH ,  Mehmet Tugrul SAMIR ,  Paul BRILLHART

    IPC: F21V15/01

    CPC classification number: H01L21/67115 ,  C23C16/4411 ,  C23C16/463

    Abstract: Embodiments described herein generally relate to apparatus for processing substrates. The apparatus generally include a process chamber having a substrate support therein. A plurality of lamps are positioned to provide radiant energy through an optically transparent window to a substrate positioned on the substrate support. The plurality of lamps are positioned in a lamp housing. A cooling channel is formed in the lamp housing. A surface of the lamp housing is spaced a distance from the optically transparent window to form a gap therebetween. The gap functions as a fluid channel and is adapted to contain a fluid therein to facilitate cooling of the optically transparent window. Turbulence inducing features, such as openings, formed in the surface of the lamp housing induce a turbulent flow of the cooling fluid, thus improving heat transfer between the optically transparent window and the lamp housing.

    Abstract translation: 本文描述的实施例一般涉及用于处理衬底的设备。 该设备通常包括其中具有衬底支撑件的处理室。 定位多个灯以通过光学透明的窗口将辐射能提供给位于基板支撑件上的基板。 多个灯被定位在灯壳体中。 在灯壳中形成冷却通道。 灯壳的表面与光学透明窗口间隔一段距离，以在它们之间形成间隙。 间隙用作流体通道并且适于在其中容纳流体以便于光学透明窗的冷却。 在灯壳表面形成的诸如开口的湍流诱发特征引起冷却流体的湍流，从而改善了光学透明窗和灯壳之间的热传递。

    THERMAL COUPLED QUARTZ DOME HEAT SINK
    6.
    发明申请
    THERMAL COUPLED QUARTZ DOME HEAT SINK 审中-公开

    公开(公告)号：US20170338135A1

    公开(公告)日：2017-11-23

    申请号：US15673801

    申请日：2017-08-10

    Applicant: Applied Materials, Inc.

    Inventor： Joseph M. RANISH ,  Mehmet Tugrul SAMIR ,  Paul BRILLHART

    IPC: H01L21/67 ,  C23C16/46 ,  C23C16/44

    CPC classification number: H01L21/67115 ,  C23C16/4411 ,  C23C16/463

    Abstract: Embodiments described herein generally relate to apparatus for processing substrates. The apparatus generally include a process chamber having a substrate support therein. A plurality of lamps are positioned to provide radiant energy through an optically transparent window to a substrate positioned on the substrate support. The plurality of lamps are positioned in a lamp housing. A cooling channel is formed in the lamp housing. A surface of the lamp housing is spaced a distance from the optically transparent window to form a gap therebetween. The gap functions as a fluid channel and is adapted to contain a fluid therein to facilitate cooling of the optically transparent window. Turbulence inducing features, such as openings, formed in the surface of the lamp housing induce a turbulent flow of the cooling fluid, thus improving heat transfer between the optically transparent window and the lamp housing.

    RECURSIVE PUMPING MEMBER
    8.
    发明申请
    RECURSIVE PUMPING MEMBER 审中-公开
    循环泵送会员

    公开(公告)号：US20160033070A1

    公开(公告)日：2016-02-04

    申请号：US14550723

    申请日：2014-11-21

    Applicant: Applied Materials, Inc.

    Inventor： Paul BRILLHART ,  Edric TONG ,  Anzhong CHANG ,  David K. CARLSON ,  Errol Antonio C. SANCHEZ ,  James Francis MACK ,  Kin Pong LO ,  Zhiyuan YE

    IPC: F16L55/00

    CPC classification number: H01L21/67115 ,  C23C16/4412 ,  C23C16/45565 ,  C23C16/45574 ,  C23C16/481

    Abstract: Embodiments of the disclosure relate to a perimeter pumping member for a processing chamber. The perimeter pumping member comprises a ring-shaped body having a first curved channel along an arc within the ring-shaped body, a first inner channel connecting a first region of the first curved channel to a first region of an inner surface of the ring-shaped body, a plurality of second inner channels connecting a second region of the first curved channel to a second region of the inner surface, and a first outer channel connecting the first region of the first curved channel to an outer surface of the ring-shaped body, wherein the second inner channels are each sized such that, when a fluid is pumped out of the perimeter pumping member via the first outer channel, the fluid flows through the first inner channel and the second inner channels at a uniform flow rate.

    Abstract translation: 本公开的实施例涉及用于处理室的周边泵送构件。 周边泵送构件包括环形体，其具有沿环形体内的弧形的第一弯曲通道，将第一弯曲通道的第一区域连接到环形体的内表面的第一区域的第一内部通道， 多个第二内部通道，将第一弯曲通道的第二区域连接到内表面的第二区域;以及第一外部通道，其将第一弯曲通道的第一区域连接到环形体的外表面 其中所述第二内部通道的尺寸设计成使得当流体经由所述第一外部通道从所述周边泵送构件泵出时，所述流体以均匀的流速流过所述第一内部通道和所述第二内部通道。

    ONE-PIECE INJECTOR ASSEMBLY AND ONE-PIECE EXHAUST LINER
    9.
    发明申请
    ONE-PIECE INJECTOR ASSEMBLY AND ONE-PIECE EXHAUST LINER 审中-公开
    一体式注射器组件和一体式排气衬管

    公开(公告)号：US20150368830A1

    公开(公告)日：2015-12-24

    申请号：US14737974

    申请日：2015-06-12

    Applicant: Applied Materials, Inc.

    Inventor： Paul BRILLHART ,  Kin Pong LO ,  Edric TONG ,  Satheesh KUPPURAO ,  Balasubramanian RAMACHANDRAN

    IPC: C30B25/14 ,  C30B25/08

    CPC classification number: C30B25/14 ,  C23C16/4412 ,  C23C16/45504 ,  C23C16/45563 ,  C30B25/08 ,  Y10T428/218

    Abstract: Embodiments of the disclosure relate to a one-piece injector assembly. The injector assembly includes a plurality of channels for introducing process gas into a processing chamber while keeping the gas flow of each channel separate from the gas flow in each other channel. In addition, embodiments of the disclosure relate to upper and lower liners accommodating the one-piece injector assembly, methods for installing the injector assembly, and a processing chamber utilizing the one-piece injector assembly.

    Abstract translation: 本公开的实施例涉及一体式喷射器组件。 喷射器组件包括多个通道，用于将处理气体引入处理室，同时保持每个通道的气流与每个通道中的气流隔开。 此外，本公开的实施例涉及容纳一体式喷射器组件的上部衬垫和下部衬套，用于安装喷射器组件的方法以及利用一体式喷射器组件的处理室。

    CARBON FIBER RING SUSCEPTOR
    10.
    发明申请
    CARBON FIBER RING SUSCEPTOR 审中-公开
    碳纤维环戒指

    公开(公告)号：US20150083046A1

    公开(公告)日：2015-03-26

    申请号：US14495654

    申请日：2014-09-24

    Applicant: Applied Materials, Inc.

    Inventor： Joseph M. RANISH ,  Paul BRILLHART ,  Mehmet Tugrul SAMIR ,  Shu-Kwan LAU ,  Surajit KUMAR

    IPC: C23C16/458 ,  C23C16/48 ,  C23C16/46

    CPC classification number: C23C16/4581 ,  C23C16/4408 ,  C23C16/4584 ,  C23C16/4585 ,  C23C16/46 ,  C23C16/481

    Abstract: Embodiments described herein generally relate to an apparatus for heating substrates. In one embodiment, a susceptor comprises a ring shaped body having a central opening and a lip extending from an edge of the body that circumscribes the central opening. The susceptor comprises carbon fiber or graphene. In another embodiment, a method for forming a susceptor comprises molding carbon fiber with an organic binder into a shape of a ring susceptor and firing the organic binder. In yet another embodiment, a method for forming a susceptor comprises layering graphene sheets into a shape of a ring susceptor.

    Abstract translation: 本文描述的实施例通常涉及用于加热基板的装置。 在一个实施例中，感受器包括具有中心开口的环形主体和从该主体的边缘延伸以限制中心开口的唇缘。 感受体包括碳纤维或石墨烯。 在另一个实施例中，用于形成基座的方法包括将具有有机粘合剂的碳纤维模制成环形基座的形状并烧制有机粘合剂。 在另一个实施例中，形成基座的方法包括将石墨烯片层压成环形基座的形状。

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