公开(公告)号：US20170323784A1

公开(公告)日：2017-11-09

申请号：US15587570

申请日：2017-05-05

Applicant: Tokyo Electron Limited

Inventor： Jacques Faguet ,  Bruce A. Altemus ,  Kazuya Ichiki

IPC: H01L21/02 ,  C23C16/48 ,  C23C16/56

CPC classification number: H01L21/02271 ,  B05D1/60 ,  B05D3/066 ,  B05D3/067 ,  C23C16/48 ,  C23C16/56 ,  H01L21/02118 ,  H01L21/02205 ,  H01L21/02321

Abstract: A method is provided for depositing a planarization layer over features on a substrate using sequential polymerization chemical vapor deposition. According to one embodiment, the method includes providing a substrate containing a plurality of features with gaps between the plurality of features, delivering precursor molecules by gas phase exposure to the substrate, adsorbing the precursor molecules on the substrate to at least substantially fill the gaps with a layer of the adsorbed precursor molecules, and reacting the precursor molecules to form a polymer layer that at least substantially fills the gaps.

公开(公告)号：US20150118404A1

公开(公告)日：2015-04-30

申请号：US14382696

申请日：2013-04-02

Applicant: Sika Technology AG

Inventor： Elyes Jendoubi ,  Carine Kerber

IPC: E04D5/10 ,  B05D3/02 ,  B05D1/36

CPC classification number: E04D5/10 ,  B05D3/0254 ,  B05D3/0406 ,  B05D3/0413 ,  B05D3/0473 ,  B05D3/065 ,  B05D3/066 ,  B05D7/544 ,  B05D7/546 ,  C08J7/042 ,  C08J7/047 ,  C08J2327/06 ,  C08J2429/04 ,  C08J2475/04 ,  Y10T428/3158 ,  B05D2503/00 ,  B05D2425/01 ,  B05D2520/10 ,  B05D2425/02

Abstract: The present invention relates to a membrane comprising a bulkhead layer, wherein more than 50% by weight of the bulkhead layer is composed of PVC, and a barrier layer. The barrier layer can, on the one hand, be a barrier layer S1, wherein the barrier layer S1 has a polyvinyl alcohol layer comprising more than 50% by weight of copolymer PA, which is connected to the bulkhead layer by a polyurethane layer, wherein more than 10% by weight of the polyurethane layer is composed of polyurethane PUR. The barrier layer can, on the other hand, be a barrier layer S2, wherein the barrier layer S2 has a composition comprising 5-50% by weight of polyurethane PUR and 50-95% by weight of copolymer PA. The membranes according to the invention have significantly lower plasticizer migration compared to the membranes of the prior art and are distinguished by improved resistance to aging, particularly as regards the adherence of the barrier layer on the bulkhead layer, and imperviousness to damp.

Abstract translation: 本发明涉及一种包括隔板层的膜，其中隔板层的重量大于50％由PVC构成，并且阻挡层。 一方面，阻挡层可以是阻挡层S1，其中阻挡层S1具有包含大于50重量％的共聚物PA的聚乙烯醇层，其通过聚氨酯层连接到隔板层，其中 聚氨酯层的10重量％以上由聚氨酯PUR组成。 另一方面，阻挡层可以是阻挡层S2，其中阻挡层S2具有包含5-50重量％的聚氨酯PUR和50-95重量％的共聚物PA的组成。 根据本发明的膜与现有技术的膜相比具有显着更低的增塑剂迁移，并且通过改善耐老化性，特别是关于隔板层上的隔离层的粘附和防潮性的差异来区分。

公开(公告)号：US20110162226A1

公开(公告)日：2011-07-07

申请号：US13062990

申请日：2009-08-25

Applicant: Claudia Witt

Inventor： Claudia Witt

IPC: F26B3/34

CPC classification number: B05D3/067 ,  B05D3/0209 ,  B05D3/0254 ,  B05D3/066 ,  B05D7/14 ,  F26B3/28 ,  F26B15/10 ,  F26B25/06 ,  F26B2210/12

Abstract: The invention relates to an exposure chamber (10) for hardening radiation-curable coatings on components (14) having surfaces which are oriented in different directions. The invention also relates to an exposure chamber (10) for hardening motor vehicle bodies coated with UV-paints by means of UV-lamps. According to the invention, at least one reflector (20) is arranged in an inner chamber (18) of the exposure chamber (10). Said type of reflector (20) is preferably spherical or alternatively can be pivoted about three spatial axes in a cardanic manner such that, owing to this reflector (20), shadow zones of the vehicle body which are normally exposed inadequately can be uniformly illuminated. The invention further relates to a hardening system (42, 42′) for motor vehicle bodies which comprises said type of exposure chamber.

Abstract translation: 本发明涉及一种用于将辐射固化涂层固化在具有不同方向取向的表面的部件（14）上的曝光室（10）。 本发明还涉及用于通过UV灯来硬化用UV涂料涂覆的机动车辆车身的曝光室（10）。 根据本发明，至少一个反射器（20）布置在曝光室（10）的内室（18）中。 所述类型的反射器（20）优选地是球形的，或者可以以主要方式围绕三个空间轴线枢转，使得由于该反射器（20），通常暴露不充分的车体的阴影区域可以被均匀地照亮。 本发明还涉及一种用于机动车体的硬化系统（42,42'），其包括所述类型的曝光室。

公开(公告)号：US20100173167A1

公开(公告)日：2010-07-08

申请号：US12598087

申请日：2008-04-30

Applicant: Klaus-Dieter Vissing ,  Christopher Dölle ,  Matthias Ott

Inventor： Klaus-Dieter Vissing ,  Christopher Dölle ,  Matthias Ott

IPC: B32B27/28 ,  C08F2/48 ,  C08F2/46

CPC classification number: B05D3/145 ,  B05D3/06 ,  B05D3/066 ,  B05D5/08 ,  B05D2202/00 ,  B05D2202/25 ,  B05D2203/30 ,  B05D2601/20 ,  Y10T428/31663

Abstract: The invention relates to a coating method comprising the following steps a) providing a mixture or a pure substance comprising or consisting of inactive, liquid precursors, b) applying a liquid layer made up of the mixture or the pure substance to a surface to be coated, c) crosslinking the liquid precursors by means of radiation having a wavelength of ≦250 nm, so that a solid layer is produced from the mixture and the layer comprises ≧10 atomic % of C, based on the quantity of the atoms contained in the layer without H and F, and so that the C contained in the layer is at most 50 atomic % of the C, based on the quantity of the C atoms contained in the layer, constituent of a methoxy group. The invention further relates to layers which can be produced or are generated by means of this method and the uses thereof and also to corresponding coated items and the uses thereof.

Abstract translation: 本发明涉及一种包括以下步骤的涂覆方法：a）提供包含或由无活性的液体前体组成的混合物或纯物质，b）将由混合物或纯物质组成的液体层施加到待涂覆的表面 ，c）通过波长为＆nlE; 250nm的辐射使液体前体交联，使得从混合物产生固体层，并且该层包含≥10原子％的C，基于包含在 不含H和F的层，并且使得包含在该层中的C为基于层中所含的C原子数量为至多50原子％的甲氧基的组分。 本发明还涉及可以通过该方法及其用途以及相应的涂覆物品及其用途产生或产生的层。

公开(公告)号：US09428912B2

公开(公告)日：2016-08-30

申请号：US14382696

申请日：2013-04-02

Applicant: Sika Technology AG

Inventor： Elyes Jendoubi ,  Carine Kerber

IPC: C08J7/04 ,  E04D5/06 ,  E04D5/10 ,  B05D7/04 ,  B05D3/04 ,  B05D3/06 ,  B05D7/00 ,  B05D3/02

CPC classification number: E04D5/10 ,  B05D3/0254 ,  B05D3/0406 ,  B05D3/0413 ,  B05D3/0473 ,  B05D3/065 ,  B05D3/066 ,  B05D7/544 ,  B05D7/546 ,  C08J7/042 ,  C08J7/047 ,  C08J2327/06 ,  C08J2429/04 ,  C08J2475/04 ,  Y10T428/3158 ,  B05D2503/00 ,  B05D2425/01 ,  B05D2520/10 ,  B05D2425/02

Abstract: The present invention relates to a membrane comprising a bulkhead layer, wherein more than 50% by weight of the bulkhead layer is composed of PVC, and a barrier layer. The barrier layer can, on the one hand, be a barrier layer S1, wherein the barrier layer S1 has a polyvinyl alcohol layer comprising more than 50% by weight of copolymer PA, which is connected to the bulkhead layer by a polyurethane layer, wherein more than 10% by weight of the polyurethane layer is composed of polyurethane PUR. The barrier layer can, on the other hand, be a barrier layer S2, wherein the barrier layer S2 has a composition comprising 5-50% by weight of polyurethane PUR and 50-95% by weight of copolymer PA. The membranes according to the invention have significantly lower plasticizer migration compared to the membranes of the prior art and are distinguished by improved resistance to aging, particularly as regards the adherence of the barrier layer on the bulkhead layer, and imperviousness to damp.

Abstract translation: 本发明涉及一种包括隔板层的膜，其中隔板层的重量大于50％由PVC构成，并且阻挡层。 一方面，阻挡层可以是阻挡层S1，其中阻挡层S1具有包含大于50重量％的共聚物PA的聚乙烯醇层，其通过聚氨酯层连接到隔板层，其中 聚氨酯层的10重量％以上由聚氨酯PUR组成。 另一方面，阻挡层可以是阻挡层S2，其中阻挡层S2具有包含5-50重量％的聚氨酯PUR和50-95重量％的共聚物PA的组成。 根据本发明的膜与现有技术的膜相比具有显着更低的增塑剂迁移，并且通过改善的耐老化性，特别是关于隔板层上的隔离层在隔板层上的粘附以及防潮性的差异。

公开(公告)号：US08753449B2

公开(公告)日：2014-06-17

申请号：US13904468

申请日：2013-05-29

Applicant: Applied Materials, Inc.

Inventor： Mahendra Chhabra ,  Scott A. Hendrickson ,  Sanjeev Baluja ,  Tsutomu Kiyohara ,  Juan Carlos Rocha-Alvarez ,  Alexandros T. Demos

IPC: C25C1/00 ,  C23C16/44 ,  C23C14/00 ,  B05D3/06 ,  H01L21/67 ,  G02B1/00

CPC classification number: C23C16/4405 ,  B05D3/066 ,  C23C14/00 ,  C23C16/56 ,  G02B1/00 ,  H01L21/02126 ,  H01L21/02203 ,  H01L21/02337 ,  H01L21/02348 ,  H01L21/67115 ,  H01L21/6719 ,  H01L21/76825

Abstract: Embodiments of the invention provide methods for curing an ultra low-k dielectric film within a UV processing chamber. In one embodiment, the method includes depositing an ultra low-k dielectric layer on a substrate in a deposition chamber, and subjecting the deposited ultra low-k dielectric layer to a UV curing processes in a UV processing chamber. The method includes stabilizing the UV processing chamber by flowing an oxygen gas and a purge gas into the UV processing chamber at a flow ratio of about 1:50000 to about 1:100. While flowing the oxygen-doped purge gas, the substrate is exposed to UV radiation to cure the deposited ultra low-k dielectric layer. The inventive oxygen-doped purge curing process provides an alternate pathway to build silicon-oxygen network of the ultra low-k dielectric material, thereby accelerating cross-linking efficiency without significantly affecting the film properties of the deposited ultra low-k dielectric material.

Abstract translation: 本发明的实施例提供了在UV处理室内固化超低k电介质膜的方法。 在一个实施例中，该方法包括在沉积室中的衬底上沉积超低k电介质层，以及在UV处理室中对沉积的超低k电介质层进行UV固化过程。 该方法包括通过以约1：50000至约1:100的流量比将氧气和净化气体流入UV处理室来稳定UV处理室。 在流过氧掺杂的净化气体的同时，衬底暴露于UV辐射以固化沉积的超低k电介质层。 本发明的氧掺杂清洗固化方法提供构建超低k电介质材料的硅 - 氧网络的替代途径，从而加速交联效率而不显着影响沉积的超低k电介质材料的膜性质。

公开(公告)号：US20130177706A1

公开(公告)日：2013-07-11

申请号：US13719047

申请日：2012-12-18

Applicant: Sanjeev Baluja ,  Alexandros T. Demos ,  Bo Xie ,  Juan Carlos Rocha-Alvarez

Inventor： Sanjeev Baluja ,  Alexandros T. Demos ,  Bo Xie ,  Juan Carlos Rocha-Alvarez

IPC: B05D3/06

CPC classification number: B05D3/066 ,  C23C16/4404 ,  C23C16/4405

Abstract: Methods for depositing a carbon-based seasoning layer on exposed surfaces of the optical components within a UV processing chamber are disclosed. In one embodiment, the method includes flowing a carbon-containing precursor radially inwardly across exposed surfaces of optical components within the thermal processing chamber from a circumference of the optical components, exposing the carbon-containing precursor to a thermal radiation emitted from a heating source to form a carbon-based seasoning layer on the exposed surfaces of the optical components, exposing the carbon-based seasoning layer to ozone, wherein the ozone is introduced into the processing chamber by flowing the ozone radially inwardly across exposed surfaces of optical components from the circumference of the optical components, heating the optical components to a temperature of about 400° C. or above while flowing the ozone to remove the carbon-based seasoning layer from exposed surfaces of the optical components.

Abstract translation: 公开了在UV处理室内的光学部件的暴露表面上沉积碳基调味剂层的方法。 在一个实施例中，该方法包括使含碳前驱体从光学部件的圆周径向向内流过热处理室内的光学部件的暴露表面，将含碳前体暴露于从加热源发射的热辐射至 在光学部件的暴露表面上形成碳基调味剂层，将碳基调味剂层暴露于臭氧，其中臭氧通过径向向内流过来自圆周的光学部件的暴露表面而将臭氧引入处理室 的光学部件，将光学部件加热至约400℃以上的温度，同时使臭氧流动，以从光学部件的露出表面除去碳基调味剂层。

公开(公告)号：US20110159178A1

公开(公告)日：2011-06-30

申请号：US12647053

申请日：2009-12-24

Applicant: Peter Haslov ,  Kariofilis Konstadinidis ,  Harry Garner

Inventor： Peter Haslov ,  Kariofilis Konstadinidis ,  Harry Garner

IPC: B05B13/00 ,  B05D5/06

CPC classification number: C03C25/6226 ,  B05D3/0466 ,  B05D3/066 ,  B05D3/067 ,  B05D2203/35 ,  B05D2256/00 ,  F26B3/283 ,  F26B13/002 ,  F26B21/14

Abstract: Certain embodiments of the invention may include systems and methods curing a coated optical fiber. The method includes drawing the coated optical fiber through a gas chamber filled with a predetermined gas, drawing the fiber through a cure tube coupled to the gas chamber, and purging at least a portion of an inner surface of the cure tube with a purge gas as the coated optical fiber is drawn through the cure tube.

Abstract translation: 本发明的某些实施例可以包括固化涂覆的光纤的系统和方法。 该方法包括通过填充有预定气体的气室来绘制涂覆的光纤，通过耦合到气室的固化管将纤维拉出，并用吹扫气体吹扫固化管的内表面的至少一部分， 涂覆的光纤通过固化管被拉出。

公开(公告)号：US20080311309A1

公开(公告)日：2008-12-18

申请号：US11629195

申请日：2005-06-17

Applicant: Andreas Daiss ,  Erich Beck ,  Manfred Biehler

Inventor： Andreas Daiss ,  Erich Beck ,  Manfred Biehler

IPC: B05D3/06 ,  B01J19/12

CPC classification number: G21K5/02 ,  B05D3/0254 ,  B05D3/0486 ,  B05D3/066 ,  B05D3/067 ,  B05D3/068

Abstract: The invention relates to an apparatus and a method of producing molding materials and coatings on substrates by curing radiation-curable materials under an inert gas atmosphere by exposure to high-energy radiation.

Abstract translation: 本发明涉及通过暴露于高能量辐射下在惰性气体气氛下固化可辐射固化材料的方法来在基底上生产模塑材料和涂层的装置和方法。

公开(公告)号：US11866335B2

公开(公告)日：2024-01-09

申请号：US16928459

申请日：2020-07-14

Applicant: Chongqing Institute of East China Normal University ,  East China Normal University

Inventor： Heping Zeng ,  Yanwei Huang ,  Jiayang He

IPC: C01B32/198 ,  C01B32/194 ,  B01J13/00 ,  B05D1/00 ,  B05D3/06

CPC classification number: C01B32/198 ,  B01J13/0008 ,  B05D1/005 ,  B05D3/066 ,  C01B32/194 ,  B05D2202/25 ,  C01P2006/90

Abstract: A method for preparing a graphene based composite wave-absorbing material includes: dissolving a water soluble barium salt and a water soluble iron salt into deionized water, respectively; mixing barium salt solution and iron salt solution according to a molar ratio of Ba:Fe of 1:12 to obtain a precursor solution; dispersing a graphene material in deionized water to form a graphene dispersion; adding citric acid, nitric acid and the graphene dispersion into the precursor solution in sequence to form a mixture solution; stirring the mixture solution at a temperature of 50 to 75° C. to obtain a sol; coating and drying aged sol on a substrate to obtain a coating layer; and sintering the coating layer by a laser irradiation.