91.
    发明专利
    未知

    公开(公告)号:AT230520T

    公开(公告)日:2003-01-15

    申请号:AT99308122

    申请日:1999-10-14

    Applicant: IBM SIEMENS AG

    Abstract: A semiconductor structure comprises first gate conductors which wrap around N-wells (301) of buried-channel P-type metal oxide semiconductor field effect transistors and second gate conductors which do not wrap around P-wells (300) of surface-channel N-type metal oxide semiconductor field effect transistors and a method of manufacturing the same comprises forming insulators (302) adjacent each of the N-wells and the P-wells, protecting the N-wells with a patterned mask, forming first divots (320) in areas of the insulators adjacent the N-wells and forming second divots in areas of the insulators adjacent P-wells, wherein the first divots have a greater depth than the second divots.

    STRUCTURES AND METHODS OF ANTI-FUSE FORMATION IN SOI

    公开(公告)号:MY134452A

    公开(公告)日:2007-12-31

    申请号:MYPI20054051

    申请日:2001-05-23

    Applicant: IBM

    Abstract: AN ANTI-FUSE STRUCTURE THAT CAN BE PROGRAMMED AT LOW VOLTAGE AND CURRENT AND WHICH POTENTIALLY CONSUMES VERY LITTLE CHIP SPACES AND CAN BE FORMED INTERSTITIALLY BETWEEN ELEMENTS SPACED BY A MINIMUM LITHOGRAPHIC FEATURE SIZE IS FORMED ON A COMPOSITE SUBSTRATE SUCH AS A SILICON-ONINSULATOR WAFER BY ETCHING A CONTACT THROUGH AN INSULATOR TO A SUPPORT SEMICONDUCTOR LAYER, PREFERABLY IN COMBINATION WITH FORMATION OF A CAPACITOR-LIKE STRUCTURE REACHING TO OR INTO THE SUPPORT LAYER. THE ANTI-FUSE MAY BE PROGRAMMED EITHER BY THE SELECTED LOCATION OF CONDUCTOR FORMATION AND/OR DAMAGING A DIELECTRIC OF THE CAPACITOR-LIKE STRUCTURE. AN INSULATING COLLAR (38, 90) IS USED TO SURROUND A PORTION OF EITHER THE CONDUCTOR (42, 100) OR THE CAPACITOR-LIKE STRUCTURE TO CONFINE DAMAGE TO THE DESIRED LOCATION.HEATING EFFECTS VOLTAGE AND NOISE DUE TO PROGRAMMING CURRENTS ARE EFFECTIVELY ISOLATED TO THE BULK SILICON LAYER, PERMITTING PROGRAMMING DURING NORMAL OPERATION OF THE DEVICE. THUS THE POTENTIAL FOR SELF-REPAIR WITHOUT INTERRUPTION OF OPERATION IS REALIZED.(FIG 6)

    93.
    发明专利
    未知

    公开(公告)号:DE10344862B4

    公开(公告)日:2007-12-20

    申请号:DE10344862

    申请日:2003-09-26

    Abstract: A trench capacitor memory cell structure is provided with includes a vertical collar region that suppresses current leakage of an adjacent vertical parasitic transistor that exists between the vertical MOSFET and the underlying trench capacitor. The vertical collar isolation, which has a vertical length of about 0.50 mum or less, includes a first portion that is present partially outside the trench and a second portion that is present inside the trench. The first portion of the collar oxide is thicker than said second portion oxide thereby reducing parasitic current leakage.

    94.
    发明专利
    未知

    公开(公告)号:DE69934357T2

    公开(公告)日:2007-09-20

    申请号:DE69934357

    申请日:1999-06-17

    Applicant: SIEMENS AG IBM

    Abstract: Trench capacitors are fabricated utilizing a method which results in a refractory metal salicide as a component of the trench electrode in a lower region of the trench. The salicide-containing trench electrode exhibits reduced series resistance compared to conventional trench electrodes of similar dimensions, thereby enabling reduced ground rule memory cell leats and/or reduced cell access time. The trench capacitors of the invention are especially useful as components of DRAM memory cells.

    HIGH PERFORMANCE EMBEDDED DRAM TECHNOLOGY WITH STRAINED SILICON

    公开(公告)号:AU2003202254A1

    公开(公告)日:2004-08-10

    申请号:AU2003202254

    申请日:2003-01-08

    Applicant: IBM

    Abstract: Semiconductor devices are fabricated in a strained layer region and strained layer-free region of the same substrate. A first semiconductor device, such as a memory cell, e.g. a deep trench storage cell, is formed in a strained layer-free region of the substrate. A strained layer region is selectively formed in the same substrate. A second semiconductor device ( 66, 68, 70 ), such as an FET, e.g. an MOSFET logic device, is formed in the strained layer region.

    98.
    发明专利
    未知

    公开(公告)号:DE69904690D1

    公开(公告)日:2003-02-06

    申请号:DE69904690

    申请日:1999-10-14

    Applicant: SIEMENS AG IBM

    Abstract: A semiconductor structure comprises first gate conductors which wrap around N-wells (301) of buried-channel P-type metal oxide semiconductor field effect transistors and second gate conductors which do not wrap around P-wells (300) of surface-channel N-type metal oxide semiconductor field effect transistors and a method of manufacturing the same comprises forming insulators (302) adjacent each of the N-wells and the P-wells, protecting the N-wells with a patterned mask, forming first divots (320) in areas of the insulators adjacent the N-wells and forming second divots in areas of the insulators adjacent P-wells, wherein the first divots have a greater depth than the second divots.

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