公开(公告)号：EP3226007A1

公开(公告)日：2017-10-04

申请号：EP16194689.2

申请日：2016-10-19

Applicant: STMicroelectronics S.r.l.

Inventor： TOCCHIO, Alessandro ,  GATTERE, Gabriele

IPC: G01P15/125 ,  G01P15/08

CPC classification number: G01P15/125 ,  B81B3/0021 ,  B81B2201/0235 ,  B81B2203/0181 ,  B81B2203/04 ,  G01P2015/0814 ,  G01P2015/0831

Abstract: A MEMS accelerometer, including: a support structure (3); a suspended region (2; 62; 92) made of semiconductor material, mobile with respect to the support structure; at least one modulation electrode (20; 68; 114), which is fixed to the support structure and is biased with an electrical modulation signal including at least one periodic component having a first frequency; at least one variable capacitor (30; 80; 130), formed by the suspended region and by the modulation electrode, in such a way that the suspended region is subjected to an electrostatic force that depends upon the electrical modulation signal; and a sensing assembly (12, 14, 16, 18, 5a; 12, 14, 16, 18, 65a; 102, 104, 95a), which generates, when the accelerometer is subjected to an acceleration, an electrical sensing signal, which indicates the position of the suspended region with respect to the support structure and includes a frequency-modulated component, which is a function of the acceleration and of the first frequency.

Abstract translation: 一种MEMS加速度计，包括：支撑结构（3）; 由半导体材料制成的悬置区域（2; 62; 92），所述悬置区域相对于所述支撑结构可移动; 至少一个调制电极（20; 68; 114），所述调制电极固定到所述支撑结构并且利用包括具有第一频率的至少一个周期性分量的电调制信号进行偏置; 至少一个由所述悬置区域和所述调制电极形成的可变电容器（30; 80; 130），使得所述悬置区域经受取决于所述电调制信号的静电力; 和感测组件（12,14,16,18,5a; 12,14,16,18,65a; 102,104,95a），当所述加速度计受到加速度时，所述感测组件产生电感测信号，所述电感测信号 指示悬置区域相对于支撑结构的位置并且包括作为加速度和第一频率的函数的频率调制分量。

公开(公告)号：EP4322410A1

公开(公告)日：2024-02-14

申请号：EP23188080.8

申请日：2023-07-27

Applicant: STMicroelectronics S.r.l.

Inventor： VERCESI, Federico ,  GATTERE, Gabriele ,  ALLEGATO, Giorgio ,  AZPEITIA URQUIA, Mikel ,  DANEI, Alessandro

IPC: H03K17/975

Abstract: A microelectromechanical button device (5) is provided with a detection structure (14) having: a substrate (22) of semiconductor material with a front surface (22a) and a rear surface (22b); a buried electrode (28) arranged on the substrate; a mobile electrode (32), arranged in a structural layer (30) overlying the substrate and elastically suspended above the buried electrode at a separation distance so as to form a detection capacitor (Cd); and a cap (46) coupled over the structural layer and having a first main surface (46a) facing the structural layer and a second main surface (46b) that is designed to be mechanically coupled to a deformable portion (3) of a case (2) of an electronic apparatus (1) of a portable or wearable type. The cap has, on its first main surface, an actuation portion (48) arranged over the mobile electrode and configured to cause, in the presence of a pressure applied on the second main surface, a deflection of the mobile electrode and its approach to the buried electrode, with a consequent capacitive variation of the detection capacitor, which is indicative of an actuation of the microelectromechanical button device.

公开(公告)号：EP4148382A1

公开(公告)日：2023-03-15

申请号：EP22191021.9

申请日：2022-08-18

Applicant: STMicroelectronics S.r.l.

Inventor： GUERINONI, Luca ,  GATTERE, Gabriele

IPC: G01C19/5649 ,  G01C25/00

Abstract: A gyroscopic sensor unit (101) detects a phase drift between a demodulated output signal and a demodulation signal during output of a quadrature test signal. A delay calculator (116) detects the phase drift based on changes in the demodulated output signal during application of the quadrature test signal. A delay compensation circuit (118) compensates for the phase drift by delaying the demodulation signal by the phase drift value.

公开(公告)号：EP3951403A1

公开(公告)日：2022-02-09

申请号：EP21190136.8

申请日：2021-08-06

Applicant: STMicroelectronics S.r.l.

Inventor： RIZZINI, Francesco ,  VALZASINA, Carlo ,  GATTERE, Gabriele

IPC: G01P15/125 ,  G01P15/08

Abstract: A microelectromechanical sensor device (20) has a detection structure (21) provided with: a substrate (24) having a top surface (24a) extending in a horizontal plane (xy); a mobile structure (22, 26), having an inertial mass (22) suspended above the substrate at a first area (24') of the surface so as to perform at least one inertial movement with respect to the substrate as a function of a quantity to be detected; and a fixed structure (27a, 27b), having fixed electrodes suspended above the substrate at the first area (24') of the surface and defining with the mobile structure a capacitive coupling to form at least one sensing capacitor, whose capacitance value is indicative of the quantity to be detected. A single mechanical-anchorage structure (32) provides anchoring of both the mobile structure and the fixed structure to the substrate at a second area (24") of the surface, distinct and separate from the first area (24'); connection elements (34a-34c) couple the mobile structure and the fixed structure mechanically to the single mechanical-anchorage structure.

公开(公告)号：EP3839520A1

公开(公告)日：2021-06-23

申请号：EP20212118.2

申请日：2020-12-07

Applicant: STMicroelectronics S.r.l.

Inventor： DARMANIN, Jean Marie ,  VALZASINA, Carlo ,  TOCCHIO, Alessandro ,  GATTERE, Gabriele

IPC: G01P15/125 ,  B81B3/00 ,  B81B5/00 ,  G01L1/14 ,  G01P15/08

Abstract: A micromechanical device (50) comprising: a semiconductor body (51); a first mobile structure (53; 253); an elastic assembly (57, 59; 259), coupled to the first mobile structure and to the semiconductor body (51) and adapted to undergo deformation in a direction (X) ; and at least one abutment element (66b; 66a). The elastic assembly (57, 59; 259) is configured to enable an oscillation of the first mobile structure (53; 253) as a function of a force applied thereto. The first mobile structure (53; 253), the abutment element (66b; 66a) and the elastic assembly (57, 59; 259) are arranged with respect to one another in such a way that: when said force is lower than a force threshold, the elastic assembly (57, 59; 259) operates with a first elastic constant (K 1 ; K 4 ); and when said force is greater than the threshold force, then the first mobile structure is in contact with the abutment element, and a deformation of the elastic assembly is generated, which operates with a second elastic constant (K 1 + K 2 ; K 5 ) different from the first elastic constant.
Main figure: Figure 2

公开(公告)号：EP3799311A1

公开(公告)日：2021-03-31

申请号：EP20196998.7

申请日：2020-09-18

Applicant: STMicroelectronics S.r.l.

Inventor： GATTERE, Gabriele ,  VALZASINA, Carlo ,  DUQI, Enri

IPC: H03K17/975

Abstract: A button device (6) includes a MEMS sensor (30), having a MEMS strain detection structure (42) and a deformable substrate (37) configured to undergo deformation under the action of an external force (F). In particular, the MEMS strain detection structure (42) includes a mobile element (62) carried by the deformable substrate (37) via at least a first and a second anchorage (67, 69), the latter fixed with respect to the deformable substrate (37) and are configured to displace and generate a deformation force (F t ) on the mobile element (62) in the presence of the external force (F); and stator elements (70, 72) capacitively coupled to the mobile element (62). The deformation of the mobile element (62) causes a capacitance variation (ΔC) between the mobile element (62) and the stator elements (70, 72). Furthermore, the MEMS sensor (30) is configured to generate detection signals (s C1 , S C2 ; S MEMS , s ref ) correlated to the capacitance variation (ΔC).

公开(公告)号：EP3346281A1

公开(公告)日：2018-07-11

申请号：EP17172105.3

申请日：2017-05-20

Applicant: STMicroelectronics S.r.l.

Inventor： LAGHI, Giacomo ,  LANGFELDER, Giacomo ,  GATTERE, Gabriele ,  TOCCHIO, Alessandro ,  PACI, Dario

IPC: G01R33/00

CPC classification number: G01R33/0206 ,  G01R33/0023 ,  G01R33/0286 ,  G01R33/038

Abstract: A MEMS triaxial magnetic sensor device (51) is provided with a sensing structure (2) having: a substrate (6); an outer frame (4), which internally defines a window (5) and is elastically coupled to first anchorages (7) fixed with respect to the substrate by means of first elastic elements (8); a mobile structure (10) arranged in the window, suspended above the substrate, which is elastically coupled to the outer frame by second elastic elements (12) and carries a conductive path (P) for flow of an electric current (I); and an elastic arrangement (22, 24) operatively coupled to the mobile structure. The mobile structure performs, due to the first and second elastic elements and of the arrangement of elastic elements, a first sensing movement in response to Lorentz forces originating from a first magnetic-field component (B x ), a second sensing movement in response to Lorentz forces originating from a second magnetic-field component (B y ), and a third sensing movement in response to Lorentz forces originating from a third magnetic-field component (B z ); the first, second, and third sensing movements are distinct and decoupled from one another.

公开(公告)号：EP3247134A1

公开(公告)日：2017-11-22

申请号：EP16206878.7

申请日：2016-12-23

Applicant: STMicroelectronics S.r.l.

Inventor： VARISCO, Igor ,  LAMAGNA, Luca ,  ADORNO, Silvia ,  PERLETTI, Matteo ,  GATTERE, Gabriele ,  VALZASINA, Carlo ,  CONTI, Sebastiano

IPC: H04R19/00 ,  H04R31/00 ,  B81C1/00

CPC classification number: H04R19/005 ,  B81B3/0021 ,  B81B2201/0257 ,  B81B2203/0127 ,  B81B2203/0136 ,  B81B2203/0315 ,  B81B2203/04 ,  B81B2203/053 ,  B81C1/00158 ,  B81C1/00166 ,  B81C2201/0109 ,  B81C2201/0111 ,  B81C2201/0133 ,  G01H11/06 ,  H04R31/00 ,  H04R2201/003 ,  H04R2201/023

Abstract: A MEMS acoustic transducer (20) provided with: a substrate (21) of semiconductor material, having a back surface (21b) and a front surface (21a) opposite with respect to a vertical direction (z); a first cavity (22) formed within the substrate (21), which extends from the back surface (21b) to the front surface (21a); a membrane (23) which is arranged at the upper surface (21a), suspended above the first cavity (22) and anchored along a perimeter thereof to the substrate (21); and a combfingered electrode arrangement (28) including a number of mobile electrodes (29) coupled to the membrane (23) and a number of fixed electrodes (30) coupled to the substrate (21) and facing respective mobile electrodes (29) for forming a sensing capacitor, wherein a deformation of the membrane (23) as a result of incident acoustic pressure waves causes a capacitive variation (ΔC) of the sensing capacitor. In particular, the combfingered electrode arrangement lies vertically with respect to the membrane (23) and extends parallel thereto.

Abstract translation: 一种MEMS声换能器（20），其设置有：半导体材料的衬底（21），其具有相对于竖直方向（z）相对的后表面（21b）和前表面（21a）; 形成在所述基板（21）内的从所述背面（21b）延伸到所述前表面（21a）的第一空腔（22）; 设置在所述上​​表面（21a）处并悬挂在所述第一腔体（22）上方并沿其周边锚定到所述基底（21）的膜（23）; 以及包括耦合到所述膜（23）的多个可动电极（29）和耦合到所述衬底（21）并且面向相应的可动电极（29）以形成的多个固定电极（30）的梳状指状电极布置 感测电容器，其中由于入射声压波导致膜（23）的变形导致感测电容器的电容变化（ΔC）。 特别地，梳形电极装置相对于膜（23）垂直放置并且与其平行地延伸。

公开(公告)号：EP4321876A1

公开(公告)日：2024-02-14

申请号：EP23185740.0

申请日：2023-07-17

Applicant: STMicroelectronics S.r.l.

Inventor： GATTERE, Gabriele ,  DARMANIN, Jean Marie ,  RIZZINI, Francesco

IPC: G01P15/125 ,  G01P21/00 ,  G01P15/08 ,  B81B3/00

Abstract: A microelectromechanical sensor device having a sensing structure (1) with: a substrate (2); an inertial mass (3), suspended above the substrate (2) and elastically coupled to a rotor anchoring structure (6) by elastic coupling elements (8), to perform at least one inertial movement due to a quantity to be sensed; first sensing electrodes (9), integrally coupled to the inertial mass (3) to be movable due to the inertial movement; and second sensing electrodes (12), fixed with respect to the quantity to be sensed, facing and capacitively coupled to the first sensing electrodes (9) to form sensing capacitances having a value that is indicative of the quantity to be sensed. The second sensing electrodes (12) are arranged in a suspended manner above the substrate (2) and a compensation structure (20) is configured to move the second sensing electrodes (12) with respect to the first sensing electrodes (9) and vary a facing distance thereof, in the absence of the quantity to be sensed, in order to compensate for a native offset of the sensing structure (1).

公开(公告)号：EP4300040A1

公开(公告)日：2024-01-03

申请号：EP23180883.3

申请日：2023-06-22

Applicant: STMicroelectronics S.r.l.

Inventor： FALORNI, Luca Giuseppe ,  FEDELI, Patrick ,  GATTERE, Gabriele ,  VALZASINA, Carlo ,  CARULLI, Paola

IPC: G01C19/5747

Abstract: MEMS gyroscope (350), having a first movable mass (303, 403) configured to move with respect to a fixed structure along a first drive direction and along a first sense direction, transverse to the first drive direction; a first drive assembly (310), coupled to the first movable mass and configured to generate a first alternate drive movement; a first drive elastic structure (320), coupled to the first movable mass and to the first drive assembly, rigid in the first drive direction and compliant in the first sense direction; a second movable mass (303, 403), configured to move with respect to the fixed structure in a second drive direction parallel to the first drive direction and in a second sense direction parallel to the first sense direction; a second drive assembly (311), coupled to the second movable mass and configured to generate a second alternate drive movement in the second drive direction; and a second drive elastic structure (320), coupled to the second movable mass and to the second drive assembly, rigid in the second drive direction and compliant in the second sense direction.