公开(公告)号：US20170199131A1

公开(公告)日：2017-07-13

申请号：US15314346

申请日：2015-05-27

Applicant: Japan Science and Technology Agency

Inventor： Hiroyuki Yoshida

IPC: G01N21/71 ,  G01J3/02 ,  H01J37/244 ,  G01J3/443

CPC classification number: G01N21/71 ,  G01J3/0208 ,  G01J3/443 ,  G01N21/62 ,  G01N23/2254 ,  G01N2201/0638 ,  G01N2201/068 ,  G01N2223/6116 ,  H01J3/02 ,  H01J3/18 ,  H01J37/244 ,  H01J37/252 ,  H01J2237/06308 ,  H01J2237/06375 ,  H01J2237/2445

Abstract: An inverse photoemission spectroscopy apparatus is configured to detect a light generated by the relaxation of electrons to an unoccupied state of a sample. The apparatus includes an electron source for generating electrons with which a sample is irradiated, a wavelength selector for extracting a light having a certain wavelength from the light generated in the sample, a photodetector for detecting the light extracted by the wavelength selector; and a focusing optics disposed between the sample and the photodetector. The electron source contains yttrium oxide as a thermionic emission material.

公开(公告)号：US09502202B2

公开(公告)日：2016-11-22

申请号：US13338925

申请日：2011-12-28

Applicant: Moe J. Arman ,  Charles Chase

Inventor： Moe J. Arman ,  Charles Chase

IPC: H01J3/02 ,  G21K1/08

CPC classification number: H01J3/02 ,  G21K1/08

Abstract: Systems and methods for generating a coherent matterwave beam are provided. In some aspects, a system includes a plurality of beam generating units. Each of the plurality of beam generating units is configured to generate a stream of charged particles. The system also includes a magnetic field generator configured to expose the plurality of streams to a magnetic field such that (i) the charged particles of the plurality of streams undergo phase synchronization with one another in response to a vector potential associated with the magnetic field and (ii) the plurality of streams is directed along one or more channels to combine with one another and produce a coherent matterwave beam.

Abstract translation: 提供了用于产生一致的物质波束的系统和方法。 在一些方面，系统包括多个光束产生单元。 多个光束产生单元中的每一个被配置为产生带电粒子流。 该系统还包括磁场发生器，其被配置为将多个流暴露于磁场，使得（i）响应于与磁场相关联的向量电位，多个流中的带电粒子彼此相位同步，以及 （ii）多个流沿着一个或多个通道引导以彼此结合并产生一个相干物质波束。

公开(公告)号：US09018596B2

公开(公告)日：2015-04-28

申请号：US14366564

申请日：2012-12-19

Applicant: Universiteit Antwerpen

Inventor： Johan Verbeeck ,  Gustaaf Van Tendeloo

IPC: H01J37/04 ,  H01J37/26 ,  H01J3/02 ,  H01J37/06 ,  H01J37/08 ,  H01J37/256

CPC classification number: H01J37/04 ,  H01J3/02 ,  H01J3/021 ,  H01J37/06 ,  H01J37/08 ,  H01J37/256 ,  H01J37/261 ,  H01J2237/06383 ,  H01J2237/2614

Abstract: A device for imparting an orbital angular momentum to a charged particle wave propagating along a beam axis in a charged particle beam generating apparatus is described. The device comprises a support element having a target region adapted for transmitting a charged particle wave propagating along a beam axis and an induction means for inducing a magnetic flux along an elongated profile having a free end portion located in the target region and the induction means is adapted for providing a magnetic flux in the elongated profile in order to induce an angular gradient, relative to the beam axis, of the phase of the charged particle wave when transmitted through the target region. A corresponding method is also disclosed, as well as the use thereof in electron microscopy.

Abstract translation: 描述了一种用于对带电粒子束产生装置中沿着光束轴传播的带电粒子波进行轨道角动量的装置。 该装置包括支撑元件，该支撑元件具有适于传输沿着光束轴传播的带电粒子波的目标区域和用于沿着具有位于目标区域中的自由端部分的细长轮廓感应磁通量的感应装置，并且感应装置是 适于在细长轮廓中提供磁通量，以便当透射通过目标区域时引起带电粒子波相位相对于光束轴的角度梯度。 还公开了相应的方法，以及其在电子显微镜中的应用。

公开(公告)号：US08803411B2

公开(公告)日：2014-08-12

申请号：US13812700

申请日：2011-06-15

Applicant: Shunichi Watanabe ,  Takashi Onishi ,  Minoru Kaneda ,  Hisaya Murakoshi

Inventor： Shunichi Watanabe ,  Takashi Onishi ,  Minoru Kaneda ,  Hisaya Murakoshi

IPC: H01J29/84 ,  H01J29/48 ,  H01J3/40 ,  H01J3/02 ,  H01J37/02

CPC classification number: H01J29/484 ,  H01J3/02 ,  H01J3/027 ,  H01J3/40 ,  H01J29/488 ,  H01J37/026 ,  H01J37/073 ,  H01J37/248 ,  H01J2237/038 ,  H01J2237/06341 ,  H01J2237/0802

Abstract: In an accelerating tube which uses a conductive insulator, there is a possibility that the dopant concentration on a surface of the conductive insulator becomes non-uniform so that the surface resistance of the conductive insulator becomes non-uniform. Accordingly, a circumferential groove is formed on the inner surface of the conductive insulator accelerating tube in plural stages, and metal is metalized along inner portions of the grooves. When the resistance of a specific portion on the surface of the accelerating tube differs from the resistance of an area around the specific portion, the potential of the metalized region on the inner surface of the accelerating tube becomes a fixed value and hence, the potential distribution on the inner surface of the accelerating tube in the vertical direction can be maintained substantially equal without regard to the circumferential direction.

Abstract translation: 在使用导电绝缘体的加速管中，导电绝缘体的表面上的掺杂剂浓度有可能变得不均匀，使得导电绝缘体的表面电阻变得不均匀。 因此，在导电绝缘体加速管的内表面上形成有多个周向槽，并且金属沿着槽的内部被金属化。 当加速管表面上的特定部分的电阻与特定部分周围的区域的电阻不同时，加速管内表面上的金属化区域的电位变为固定值，因此电位分布 在加速管的内表面上，在垂直方向上可以保持基本上相等于圆周方向。

公开(公告)号：US20130284587A1

公开(公告)日：2013-10-31

申请号：US13993594

申请日：2011-12-16

Applicant: Kaveh Bakhtari

Inventor： Kaveh Bakhtari

IPC: B01J19/08

CPC classification number: B01J19/085 ,  C01B13/10 ,  H01J3/02 ,  H01J33/00 ,  H01J37/3233 ,  H01J37/32357 ,  H01J37/32816

Abstract: This invention proposes, among other things, systems and methods for providing ozone generators or plasma generators that generate an electric field in an electron generation chamber that is separate from a reaction chamber. An electron beam emitter in an electron generation chamber is configured to emit a beam of electrons and is separated from the reaction chamber by an electron permeable barrier that provides a window through which the beam of electrons passes. The electrons are accelerated to the required energy in the electron generation chamber and transmitted through the barrier to the reaction chamber, where an input gas source introduces an input gas into the reaction chamber. The input gas may react with the beam of electrons inside the reaction chamber to form an output gas comprising a plasma or a concentration of ozone, and the output gas passes from the reaction chamber to a wafer processing chamber.

Abstract translation: 本发明尤其提出了用于提供在与反应室分离的电子发生室中产生电场的臭氧发生器或等离子体发生器的系统和方法。 电子发生室中的电子束发射器被配置为发射电子束，并且通过电子可透过屏障与反应室分离，所述电子透过屏障提供电子束通过的窗口。 电子被加速到电子发生室中所需的能量，并通过势垒传递到反应室，其中输入气体源将输入气体引入反应室。 输入气体可以与反应室内的电子束反应形成包含等离子体或浓度的臭氧的输出气体，并且输出气体从反应室通到晶片处理室。

公开(公告)号：US20130140987A1

公开(公告)日：2013-06-06

申请号：US13308614

申请日：2011-12-01

Applicant: Chih-Hong Hwang ,  Chun-Lin Chang ,  Nai-Han Cheng ,  Chi-Ming Yang ,  Chin-Hsiang Lin

Inventor： Chih-Hong Hwang ,  Chun-Lin Chang ,  Nai-Han Cheng ,  Chi-Ming Yang ,  Chin-Hsiang Lin

IPC: H01J37/06

CPC classification number: H01J37/026 ,  H01J3/02 ,  H01J3/022 ,  H01J3/26 ,  H01J37/06 ,  H01J37/3171 ,  H01J2237/0041 ,  H01J2237/31705

Abstract: The present disclosure provides for various advantageous methods and apparatus of controlling electron emission. One of the broader forms of the present disclosure involves an electron emission element, comprising an electron emitter including an electron emission region disposed between a gate electrode and a cathode electrode. An anode is disposed above the electron emission region, and a voltage set is disposed above the anode. A first voltage applied between the gate electrode and the cathode electrode controls a quantity of electrons generated from the electron emission region. A second voltage applied to the anode extracts generated electrons. A third voltage applied to the voltage set controls a direction of electrons extracted through the anode.

Abstract translation: 本公开提供了控制电子发射的各种有利的方法和装置。 本公开的更广泛形式之一涉及电子发射元件，其包括电子发射器，其包括设置在栅电极和阴极之间的电子发射区。 阳极设置在电子发射区域的上方，并且在阳极上设置电压组。 施加在栅电极和阴极之间的第一电压控制从电子发射区产生的电子量。 施加到阳极的第二电压提取产生的电子。 施加到电压组的第三电压控制通过阳极提取的电子的方向。

公开(公告)号：USRE44240E1

公开(公告)日：2013-05-28

申请号：US12189817

申请日：2008-08-12

Applicant: Marco Jan-Jaco Wieland ,  Bert Jan Kampherbeek ,  Alexander Hendrik Vincent Van Veen ,  Pieter Kruit

Inventor： Marco Jan-Jaco Wieland ,  Bert Jan Kampherbeek ,  Alexander Hendrik Vincent Van Veen ,  Pieter Kruit

IPC: H01J37/30 ,  H01J37/304

CPC classification number: H01J3/02 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/06 ,  H01J37/3177 ,  H01J2237/0435 ,  H01J2237/06308 ,  H01J2237/06375 ,  H01J2237/3045

Abstract: The invention relates to an electron beam exposure apparatus for transferring a pattern onto the surface of a target, comprising: a beamlet generator for generating a plurality of electron beamlets; a modulation array for receiving said plurality of electron beamlets, comprising a plurality of modulators for modulating the intensity of an electron beamlet; a controller, connected to the modulation array for individually controlling the modulators, an adjustor, operationally connected to each modulator, for individually adjusting the control signal of each modulator; a focusing electron optical system comprising an array of electrostatic lenses wherein each lens focuses a corresponding individual beamlet, which is transmitted by said modulation array, to a cross section smaller than 300 nm, and a target holder for holding a target with its exposure surface onto which the pattern is to be transferred in the first focal plane of the focusing electron optical system.

Abstract translation: 本发明涉及一种用于将图案转印到目标表面上的电子束曝光装置，包括：用于产生多个电子束的小波发生器; 用于接收所述多个电子子束的调制阵列，包括用于调制电子束的强度的多个调制器; 连接到用于单独控制调制器的调制阵列的控制器，可操作地连接到每个调制器的调节器，用于单独调整每个调制器的控制信号; 一种聚焦电子光学系统，包括静电透镜阵列，其中每个透镜将由所述调制阵列传输的相应单独的子束聚焦成小于300nm的横截面，以及用于将其曝光表面保持在其上的靶保持器 其图案将在聚焦电子光学系统的第一焦平面中转印。

公开(公告)号：US20120229024A1

公开(公告)日：2012-09-13

申请号：US13045124

申请日：2011-03-10

Applicant: Terry Arthur Large

Inventor： Terry Arthur Large

IPC: H05H9/00 ,  H01J29/48

CPC classification number: H01J25/34 ,  H01J3/02 ,  H01J23/075 ,  H05H9/048 ,  H05H2007/084

Abstract: The present invention provides an electron gun comprising a cathode, for generating electrons; an anode; an intermediate electrode, located between the cathode and the anode; and a controller. The controller applies an electrical potential to said intermediate electrode, analysing a resultant electrical parameter to determine the integrity of said intermediate electrode; and controls the electron gun to emit a pulse of electrons.

Abstract translation: 本发明提供一种电子枪，其包括用于产生电子的阴极; 阳极; 位于阴极和阳极之间的中间电极; 和控制器。 控制器向所述中间电极施加电势，分析所得的电参数以确定所述中间电极的完整性; 并控制电子枪发射电子脉冲。

公开(公告)号：US20120133281A1

公开(公告)日：2012-05-31

申请号：US13122109

申请日：2010-08-10

Applicant: Yong Woon Park ,  Sung Ju Park ,  In Soo Ko ,  Chang Bum Kim ,  Ju Ho Hong ,  Sung Ik Moon

Inventor： Yong Woon Park ,  Sung Ju Park ,  In Soo Ko ,  Chang Bum Kim ,  Ju Ho Hong ,  Sung Ik Moon

IPC: H01J29/80

CPC classification number: H01J3/02

Abstract: An apparatus for generating an electron beam is disclosed to reduce emittance of an electron beam. The apparatus includes: a housing including a rear portion where an electron beam is generated, a front portion having an electron beam discharge hole for discharging the electron beam to the exterior, and a side portion connecting the rear portion and the front portion, the side portion having a first hole and an opposite side portion, facing the first hole, having a second hole in order to reduce asymmetry of an electric field caused by the first hole; and a waveguide installed on the side portion to supply an electromagnetic wave to the interior of the housing through the first hole, wherein the electron beam is generated by laser incident to the interior of the housing and accelerated by the electromagnetic wave supplied to the interior of the housing.

Abstract translation: 公开了一种用于产生电子束的装置，以减少电子束的发射。 该装置包括：壳体，其包括产生电子束的后部，具有用于将电子束排出到外部的电子束排出孔的前部和连接后部和前部的侧部， 具有第一孔和与第一孔相对的相对侧部的部分具有第二孔，以减少由第一孔引起的电场的不对称性; 以及安装在所述侧部上的波导，以通过所述第一孔向所述壳体的内部提供电磁波，其中所述电子束通过入射到所述壳体的内部的激光产生并且被提供给所述壳体内部的电磁波加速 住房。

公开(公告)号：US20080191144A1

公开(公告)日：2008-08-14

申请号：US11968833

申请日：2008-01-03

Applicant: Ronak J. Bhatt ,  Chiping Chen ,  Jing Zhou

Inventor： Ronak J. Bhatt ,  Chiping Chen ,  Jing Zhou

IPC: H01J1/50 ,  H05H7/00

CPC classification number: H01J27/02 ,  G21K1/093 ,  H01J3/02 ,  H01J3/12 ,  H01J3/20 ,  H01J29/64

Abstract: The charged-particle beam system includes a non-axisymmetric diode forms a non-axisymmetric beam having an elliptic cross-section. A focusing element utilizes a magnetic field for focusing and transporting the non-axisymmetric beam, wherein the non-axisymmetric beam is approximately matched with the channel of the focusing element.

Abstract translation: 带电粒子束系统包括非轴对称二极管形成具有椭圆截面的非轴对称束。 聚焦元件利用磁场来聚焦和传送非轴对称光束，其中非轴对称光束与聚焦元件的通道近似匹配。