2챔버를 갖는 가스 방전 레이저 시스템을 위한 타이밍 제어방법
    25.
    发明公开
    2챔버를 갖는 가스 방전 레이저 시스템을 위한 타이밍 제어방법 有权
    两台气体放电激光系统的时序控制

    公开(公告)号:KR1020060025234A

    公开(公告)日:2006-03-20

    申请号:KR1020067003552

    申请日:2002-10-23

    Abstract: Feedback timing control equipment and process for an injection seeded modular gas discharge laser (11). A preferred embodiment is a system capable of producing high quality pulsed laser beams at pulse rates of about 4,000 Hz or greater and at pulse energies of about 5 to 10 mJ or greater for integrated outputs of about 20 to 40 Watts or greater. The feedback timing control is programmed to permit in some circumstances discharges timed so that no significant laser energy is output from the system. Use of this technique permits burst mode operation in which the first discharge of a burst is a no- output discharge so that timing parameters for each of the two chambers can be monitored before the first laser output pulse of the burst. Two separate discharge chambers are provided, one of which is a part of a master oscillator producing a very narrow band seed beam which is amplified in the second discharge chamber. The chambers can be controlled separately permitting optimization of wavelength parameters in the master oscillator and optimization of pulse energy parameters in the amplifying chamber.

    Abstract translation: 反馈定时控制设备和注射种子模块化气体放电激光器的工艺(11)。 优选的实施方案是能够以大约4,000Hz或更大的脉冲速率产生高质量脉冲激光束并且在约20至40瓦或更大的集成输出的脉冲能量为约5至10mJ或更大的系统。 反馈定时控制被编程为允许在某些情况下放电定时,使得不会从系统输出显着的激光能量。 使用这种技术允许突发模式操作,其中突发的第一次放电是无输出放电,使得可以在突发的第一激光输出脉冲之前监视两个室中的每一个的定时参数。 提供两个单独的放电室,其中之一是主振荡器的一部分,其产生在第二放电室中放大的非常窄的带状晶体束。 可以单独控制室,允许在主振荡器中优化波长参数并优化放大室中的脉冲能量参数。

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