公开(公告)号：EP1153291A4

公开(公告)日：2004-08-11

申请号：EP00923060

申请日：2000-01-12

Applicant: ADVANCED TECH MATERIALS

Inventor： DIMEO FRANK JR ,  BHANDARI GAUTAM

IPC: G01N21/59 ,  G01N21/75 ,  G01N21/78 ,  G01N27/04 ,  G01N27/12 ,  G01N27/22 ,  G01N33/00

CPC classification number: G01N27/128 ,  G01N21/59 ,  G01N21/783 ,  G01N27/12 ,  G01N33/0014 ,  G01N33/005 ,  G01N2291/02863 ,  Y10T436/22

Abstract: A hydrogen sensor including a thin film sensor element formed, e.g., by metalorganic chemical vapor deposition (MOCVD) or physical vapor deposition (PVD), on a micro-hotplate structure. The thin film sensor element includes a film of a hydrogen-interactive metal film that reversibly interacts with hydrogen to provide a correspondingly altered response characteristic, such as optical transmissivity, electrical conductance, electrical resistance, electrical capacitance, magnetoresistance, photoconductivity, etc., relative to the response characteristic of the film in the absence of hydrogen. The hydrogen-interactive metal film may be overcoated with a thin film hydrogen-permeable barrier layer to protect the hydrogen-interactive film from deleterious interaction with non-hydrogen species. The hydrogen sensor of the invention may be usefully employed for the detection of hydrogen in an environment susceptible to the incursion or generation of hydrogen and may be conveniently configured as a hand-held apparatus.

公开(公告)号：EP2021528A4

公开(公告)日：2011-03-23

申请号：EP07761374

申请日：2007-04-26

Applicant: ADVANCED TECH MATERIALS

Inventor： DIMEO FRANK JR ,  DIETZ JAMES ,  OLANDER W KARL ,  KAIM ROBERT ,  BISHOP STEVEN E ,  NEUNER JEFFREY W ,  ARNO JOSE I ,  MARGANSKI PAUL J ,  SWEENEY JOSEPH D ,  ELDRIDGE DAVID ,  YEDAVE SHARAD ,  BYL OLEG ,  STAUF GREGORY T

IPC: C25B7/00

CPC classification number: C23C14/564 ,  C23C16/4405 ,  H01J37/32412 ,  H01J37/32862

公开(公告)号：EP1384059A4

公开(公告)日：2005-02-16

申请号：EP02731257

申请日：2002-04-05

Applicant: ADVANCED TECH MATERIALS

Inventor： DIMEO FRANK JR ,  BAUM THOMAS H

IPC: G01N27/12 ,  G01N21/59 ,  G01N21/75 ,  G01N21/78 ,  G01N27/04 ,  G01N27/22 ,  G01N33/00 ,  G01N7/00

CPC classification number: G01N27/12 ,  G01N21/59 ,  G01N21/783 ,  G01N27/128 ,  G01N33/0014 ,  G01N33/005 ,  G01N2291/02863 ,  Y10T436/175383 ,  Y10T436/22

Abstract: A gas sensor (10) having multiple deposited metal layers (14, 16, 18, 20, 22, 24, 26).

公开(公告)号：EP1812965A4

公开(公告)日：2012-04-18

申请号：EP05815611

申请日：2005-10-24

Applicant: ADVANCED TECH MATERIALS

Inventor： DIETZ JAMES ,  BISHOP STEVEN E ,  MCMANUS JAMES V ,  LURCOTT STEVEN M ,  WODJENSKI MICHAEL J ,  KAIM ROBERT ,  DIMEO FRANK JR

IPC: H01L21/44 ,  B67D7/06 ,  B67D99/00 ,  C23C16/30 ,  F17C11/00 ,  G01F22/02 ,  G01M3/32 ,  H01L21/31

CPC classification number: G01N33/00 ,  F17C11/00 ,  G01F15/063 ,  G01F22/02 ,  G01F23/0076 ,  G01M3/32 ,  G01M3/3236 ,  G06Q10/087 ,  G06Q30/04 ,  G06Q50/04 ,  H01L21/561 ,  H01L21/568 ,  H01L21/6835 ,  H01L22/10 ,  H01L23/5389 ,  H01L24/24 ,  H01L24/48 ,  H01L24/82 ,  H01L25/03 ,  H01L25/0652 ,  H01L25/16 ,  H01L2224/16225 ,  H01L2224/16227 ,  H01L2224/24011 ,  H01L2224/2518 ,  H01L2224/48091 ,  H01L2224/48227 ,  H01L2924/00014 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01013 ,  H01L2924/01023 ,  H01L2924/01027 ,  H01L2924/01033 ,  H01L2924/01058 ,  H01L2924/01076 ,  H01L2924/01078 ,  H01L2924/01082 ,  H01L2924/014 ,  H01L2924/09701 ,  H01L2924/14 ,  H01L2924/19042 ,  H05K1/185 ,  H05K3/4602 ,  H05K2203/0165 ,  H05K2203/085 ,  H05K2203/1469 ,  Y02P90/30 ,  Y10T29/4913 ,  Y10T29/49133 ,  Y10T29/49165 ,  Y10T29/53183 ,  H01L2224/45099

公开(公告)号：EP1861868A4

公开(公告)日：2010-11-24

申请号：EP06738395

申请日：2006-03-15

Applicant: ADVANCED TECH MATERIALS

Inventor： CHEN ING-SHIN ,  NEUNER JEFFREY W ,  DIMEO FRANK JR ,  CHEN PHILIP S H ,  WELCH JAMES ,  ROEDER JEFFREY F

IPC: H01L21/302

CPC classification number: B81C1/00587 ,  B81C99/0065 ,  B81C2201/0138 ,  C23C16/4405 ,  G01N27/16 ,  H01J37/32935