21.
    发明专利
    未知

    公开(公告)号:DE10255117A1

    公开(公告)日:2004-06-17

    申请号:DE10255117

    申请日:2002-11-26

    Abstract: A semiconductor memory device with a phase transformation memory effect includes at least one memory element in a semiconductor substrate, and a cavity arrangement including at least one cavity in spatial proximity to the respective memory element. The cavity is in spatial arrangement with the respective memory element so as to reduce thermal coupling of the respective memory element to the areas surrounding the memory element, which also reduces the thermal conductivity between memory element and the areas surrounding the memory element.

    25.
    发明专利
    未知

    公开(公告)号:FR2828759A1

    公开(公告)日:2003-02-21

    申请号:FR0210405

    申请日:2002-08-20

    Abstract: A memory element includes a number of material areas isolated from one another to form at least one area with changed electrical and/or magnetic characteristics in an isolation area, which material areas have or form free charge carriers. An information unit can correspondingly be written to, deleted, and/or read from by influencing the material areas by applying an electrical potential to line devices that are provided in areas.

    29.
    发明专利
    未知

    公开(公告)号:DE102006003393A1

    公开(公告)日:2007-04-12

    申请号:DE102006003393

    申请日:2006-01-24

    Abstract: A method is provided for fabricating stacked non-volatile memory cells. A semiconductor wafer is provided having a plurality of diffusion regions forming buried bit lines. A charge-trapping layer and a conductive layer are deposited on the surface of the semiconductor wafer. Using a mask layer on top of the conductive layer, contact holes are formed wherein an insulating layer is formed. An etch stop layer is deposited on the surface of the semiconductor wafer. Above the etch stop layer, a dielectric layer is deposited and is patterned so as to form contact holes. Subsequently, the contact holes are enlarged through the etch stop layer and the insulating layer to the buried bit lines.

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