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公开(公告)号：KR1020140028677A
公开(公告)日：2014-03-10
申请号：KR1020120095459
申请日：2012-08-30
Applicant: 한국전기연구원
IPC: H01L21/027
CPC classification number: H01L21/0273 , B82B1/001 , B82B3/0019
Abstract: The present invention relates to a method of manufacturing a mold for forming a nano-micro composite pattern, and provides a method of manufacturing a mold for forming a nano-micro composite pattern at a low process cost without an exposure process. The present invention provides a method of manufacturing a mold used to form a nano-pattern and a micro pattern, the method including: manufacturing a substrate for a mold having the micro pattern; manufacturing a nano-pattern substrate having a nano-pattern; forming a nano-pattern mold layer by coating a resin on the nano-pattern of the nano-pattern substrate and curing the resulting structure to laminate an adhesive layer on the nano-pattern mold layer; bonding the nano-pattern mold layer of the nano-pattern substrate onto the micro pattern of a substrate for the mold using the adhesive layer; and manufacturing a mold for forming a nano-composite pattern of a nan-pattern mold layer on a micro pattern region on the substrate for the mold by separating the nano-pattern substrate from the nano-pattern mold layer to remove the separated nano-pattern substrate. [Reference numerals] (AA) Manufacture substrate (for mold) of master pattern having micro pattern; (BB) Align nano-pattern substrate on micro pattern; (CC) Bond nano-pattern mold layer; (DD) Remove nano-pattern substrate-complete master mold; (EE) Coat polymer resin on master mold and transfer pattern; (FF) Remove master mold-complete polymer mold; (GG) Manufacture nano-pattern substrate having nano-pattern; (HH) Form nano-pattern mold layer; (II) Laminate nano-pattern mold layer
Abstract translation: 本发明涉及一种制造用于形成纳米微复合图案的模具的方法，并且提供了一种在没有曝光工艺的情况下以低工艺成本制造用于形成纳米微复合图案的模具的方法。 本发明提供一种制造用于形成纳米图案和微图案的模具的方法，该方法包括：制造具有微图案的模具的基板; 制造具有纳米图案的纳米图案基板; 通过在纳米图案衬底的纳米图案上涂覆树脂并固化所得结构以在纳米图案模制层上层压粘合剂层来形成纳米图案模制层; 使用粘合剂层将纳米图案基板的纳米图案模制层结合到用于模具的基板的微图案上; 并且通过从纳米图案模制层分离纳米图案衬底来制造用于在用于模具的衬底上的微图案区域上形成纳米图案模制层的纳米复合图案的模具，以去除分离的纳米图案 基质。 （附图标记）（AA）具有微图案的主图案的制造用基板（用于模具） （BB）微纳米图案衬底对准; （CC）Bond纳米图案模层; （DD）去除纳米图案基材完整的母模; （EE）在模具和转印图案上涂覆聚合物树脂; （FF）去除模具成型聚合物模具; （GG）制造具有纳米图案的纳米图案基板; （HH）形式纳米图案模层; （II）层压纳米图案模层
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公开(公告)号：KR1020130128117A
公开(公告)日：2013-11-26
申请号：KR1020120051921
申请日：2012-05-16
Applicant: 한국전기연구원
IPC: H01L21/677 , B65G49/07 , B65G54/02 , B60L13/10
CPC classification number: H01L21/67712 , B60L13/10 , B65G54/02 , F16H49/005 , H01L21/67784
Abstract: The present invention relates to a noncontact magnetic levitation stage for transferring a substrate, and, more specifically, to a noncontact magnetic levitation stage for transferring a substrate to guide the rise and propulsion of a vehicle at a constant speed loaded with substrates vertically and horizontally stood. The present invention is contrived to solve the problems of dust and vibration inside a vacuum chamber of process equipment in the industrial fields of displays and semiconductors and to improve production efficiency by achieving the objective of an inline method since the high precision stage position is controllable. The present invention provides a noncontact magnetic levitation stage for transferring a substrate to guide and propel a vehicle at a constant speed loaded with substrates vertically and horizontally erected by using a magnetic levitation method guiding and rotating an object which is risen by the magnetic force generated by electromagnets or permanent magnets without outgasing even in a deposition process implemented in a high vacuum condition. [Reference numerals] (AA) Depositing material
Abstract translation: 本发明涉及一种用于转移衬底的非接触磁悬浮台，更具体地涉及用于传送衬底以引导车辆的升高和推进的非接触磁悬浮台，该载体以恒定速度加载垂直和水平的衬底 。 本发明旨在解决显示器和半导体工业领域的工艺设备的真空室内的灰尘和振动问题，并且通过实现高精度级位置可控制的在线方法的目的来提高生产效率。 本发明提供了一种非接触式磁悬浮台，用于传送基板，以一定的速度引导和推进车辆，该载荷通过使用引导和旋转物体的磁悬浮方法垂直和水平地架设，所述磁悬浮方法引导和旋转由由 电磁体或永磁体，即使在高真空条件下实施的沉积工艺中也不会出现异常现象。 （附图标记）（AA）沉积材料
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公开(公告)号：KR1020120065015A
公开(公告)日：2012-06-20
申请号：KR1020100126316
申请日：2010-12-10
Applicant: 한국전기연구원
CPC classification number: G03F7/0035 , B29C59/04 , B29C59/16 , B82B3/0009 , G03F7/0002 , G03F7/20
Abstract: PURPOSE: An anti fingerprint film with nano-pattern and method for fabricating the same are provided to prevent bodily secretions from remaining on the surface of a film. CONSTITUTION: An anti fingerprint film with nano-pattern and a method for fabricating the same formed are as follows. An UV(Ultraviolet) imprint roll-to-roll process is performed by using a cylindrical mold of nanostructure. A nano pattern(300) corresponding to the nanostructure is formed in the surface of a film. The nanostructure of the surface of the cylindrical mold is formed by a plasma treatment in a vacuum chamber.
Abstract translation: 目的：提供具有纳米图案的防指纹膜及其制造方法，以防止身体分泌物残留在膜的表面上。 构成：具有纳米图案的防指纹膜及其制造方法如下。 通过使用纳米结构的圆柱形模具进行UV（UV）压印卷对卷工艺。 在膜的表面形成对应于纳米结构的纳米图案（300）。 圆柱形模具的表面的纳米结构通过在真空室中进行等离子体处理而形成。
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公开(公告)号：KR101048057B1
公开(公告)日：2011-07-11
申请号：KR1020090113633
申请日：2009-11-24
Applicant: 한국전기연구원
IPC: H01L21/3065 , H01L21/302 , H01L21/02
CPC classification number: H01J37/08 , C23C14/48 , H01J37/305 , H01J37/32009
Abstract: 본 발명은 가속 이온을 이용한 저온 플라즈마 잠입 이온으로 다양한 종류의 시편을 가공 처리하는 장치와 방법에 관한 것이다.
본 발명의 플라즈마 잠입 이온을 이용한 가공장치는 챔버 내부에 원통형 가공물이 놓여짐과 아울러 원통형 가공물 주위로 저온 플라즈마가 둘러싸게 되고, 다중 슬롯을 갖는 가공물 덮개가 원통형 가공물 주위에 씌워지면서 플라즈마로부터 분리시키게 되며, 스퍼터링을 유발시키기에 충분한 음전위가 원통형 가공물과 가공물 덮개에 부가됨으로써, 플라즈마로부터 나온 이온이 덮개와 플라즈마 사이에 형성된 쉬스층 안으로 가속되고, 슬롯을 통과하여 원통형 가공물에 충돌하게 되어 원통형 가공물의 표면 거칠기를 감소시키는 방식으로 이루어진다.
이러한 본 발명의 가공 장치 및 방법은 대면적의 원통형 기판, 특히 마이크로 또는 나노 패턴 전사 기술을 위한 기판의 표면을 수 나노 미터의 표면 거칠기로 만드는데 효과가 있다.
그리고, 본 발명의 방법은 단일 또는 다중 챔버 내에서 플라즈마 세정, 표면 활성, 표면 연마, 건식 식각, 증착, 플라즈마 잠입 이온 주입 및 증착 등의 공정을 수행할 수 있다.
플라즈마, 잠입, 이온, 표면처리, 스퍼터링, 챔버, 가공물 덮개, 슬롯, 가속, 가공Abstract translation: 本发明涉及使用加速离子使用低温等离子体流入离子处理各种样品的设备和方法。
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公开(公告)号：KR1020110067790A
公开(公告)日：2011-06-22
申请号：KR1020090124537
申请日：2009-12-15
Applicant: 한국전기연구원
IPC: H01L21/68 , H01L21/027 , G03F7/20
CPC classification number: G03F7/70716 , G03F7/24 , G03F7/703 , G03F7/70725 , G03F7/70758 , G03F7/70791 , G03F7/70816 , G03F7/70825 , G03F7/70841 , H01L21/68 , G03F7/709
Abstract: PURPOSE: A cylindrical magnetic levitation stage and a lithography are provided to efficiency process a pattern of a nano size on the surface of a cylinder by actively controlling the position of the device with error tolerance of several nano meters. CONSTITUTION: In a cylindrical magnetic levitation stage and a lithography, a rotation cylindrical driving unit and a liner transfer cylinder driving unit(13) support a cylindrical mold from both sides and is rotated or linearly moved through a magnetic levitation force and magnetic transfer force. a rotation cylindrical fixing unit and a liner transfer cylinder fixing unit are arranged under the rotation cylindrical driving unit and a liner transfer cylinder driving unit and supports the cylindrical driving unit with contactless. A magnet array and an electromagnetic array are mutually reacted to generate the magnetic levitation force and magnetic transfer force.
Abstract translation: 目的：提供圆柱形磁悬浮台和光刻技术，以通过主动控制具有几纳米误差的装置的位置来有效地处理气缸表面上的纳米尺寸图案。 构成：在圆柱形磁悬浮台和光刻中，旋转圆柱形驱动单元和衬垫传动滚筒驱动单元（13）从两侧支撑圆柱形模具，并通过磁悬浮力和磁力传递力旋转或线性移动。 旋转圆柱形固定单元和衬里传送圆筒固定单元布置在旋转圆柱形驱动单元和衬垫传送滚筒驱动单元的下面，并且支撑具有非接触式的圆柱形驱动单元。 磁体阵列和电磁阵列相互反应，产生磁悬浮力和磁力传递力。
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Patent Agency Ranking
公开(公告)号：KR1020100062330A
公开(公告)日：2010-06-10
申请号：KR1020080120921
申请日：2008-12-02
Applicant: 한국전기연구원
CPC classification number: B66B7/044 , B66B11/002
Abstract: PURPOSE: A magnetically-guided lift with improved external disturbance rejection characteristics is provided to minimize influence on the displacement of an electromagnet of another corner from disturbance. CONSTITUTION: A magnetically-guided lift with improved external disturbance rejection characteristics comprises a first rail(61), a second rail(62), a storage box(70), and a lift frame(80). The loading box ascends and descends along the first and the second rail. An X-axis electromagnet supporting the power of the X-axis direction in the front and the rear side of the first and the second rail is arranged in each corner of the magnetism guideline lift. A Y-axis electromagnet, supporting the power of the Y-axis direction, is arranged in the inner side of the first and the second rail. Electromagnets are assembled by electromagnet frames.
Abstract translation: 目的：提供具有改进的外部干扰抑制特性的磁力导向电梯，以最小化对另一个角落的电磁铁的位移对干扰的影响。 构成：具有改善的外部干扰抑制特性的磁力导向升降机包括第一轨道（61），第二轨道（62），存储箱（70）和升降机架（80）。 装载箱沿第一和第二轨道上升和下降。 在磁性导向升降机的每个角落处，配置有支撑第一和第二导轨的前侧和后侧的X轴方向的功率的X轴电磁体。 支撑Y轴方向的功率的Y轴电磁铁设置在第一和第二导轨的内侧。 电磁铁由电磁铁架组装。
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公开(公告)号：KR1020100003750A
公开(公告)日：2010-01-12
申请号：KR1020080063731
申请日：2008-07-02
Applicant: 한국전기연구원
CPC classification number: B66C9/16 , B66C13/18 , B66C2700/082
Abstract: PURPOSE: A guideline control system of a magnetism guideline lift is provided to improve reliability by reducing the number of control channels. CONSTITUTION: A guideline control system of a magnetism guideline lift comprises a loading box(80), a frame(70), a first and a second guide rail(10a,10b), a gap sensor(30a-30e), first top and bottom magnet modules(40,42), and second top and bottom magnet modules(41,43). The loading box moves vertically by a rope positioned on the upper part. The frame is positioned to surround the loading box. The first and the second guide rail are installed on left side and right side of the frame vertically. The gap sensor measures the gap between the magnet module left and right sides and the first and second guide rails. The first top and bottom magnet module are respectively installed at the upper part and the lower part of the left side of frame.
Abstract translation: 目的：通过减少控制通道的数量，提供磁力指导升降机的指导控制系统，以提高可靠性。 构成：磁力导向升降机的导向控制系统包括一个装载箱（80），一个框架（70），一个和第二个导轨（10a，10b），一个间隙传感器（30a-30e），第一个顶部和 底部磁体模块（40,42）和第二顶部和底部磁体模块（41,43）。 装载箱通过位于上部的绳索垂直移动。 框架定位成围绕装载箱。 第一和第二导轨垂直安装在框架的左侧和右侧。 间隙传感器测量磁体模块左侧和右侧之间的间隙以及第一和第二导轨。 第一顶部和底部磁体模块分别安装在框架左侧的上部和下部。
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公开(公告)号：KR100877117B1
公开(公告)日：2009-01-07
申请号：KR1020070063484
申请日：2007-06-27
Applicant: 한국전기연구원
IPC: G05B6/00
CPC classification number: G05B6/00 , B65G49/061 , H01L21/68742
Abstract: A guidance control system of maglev lift is provided to maintain the magnetic gap between left and right regardless of the change of a guide rail constant by using a local and global corner gap signal through a proportional-integral control. A guidance control system of maglev lift(23) is driven according to the control signal of the local control system(20). A sensor(25) senses the gap current of the magnetic levitation lift. A local control system is fed back to the gap current. A local control system comprises the local gap controller(21) and global gap controller(24). The output of the global gap controller and global gap controller are added in the adder(26), and the output of the adder is amplified through the chopper(22). The output of sensor is fed back to the bidirectional of the global gap controller and global gap controller.
Abstract translation: 提供磁悬浮升降机的引导控制系统，通过使用局部和全局角间隙信号通过比例积分控制来保持左右之间的磁隙，而不管导轨常数的变化如何。 磁悬浮升降机（23）的引导控制系统根据本地控制系统（20）的控制信号进行驱动。 传感器（25）感测磁悬浮电梯的间隙电流。 将本地控制系统反馈到间隙电流。 本地控制系统包括局部间隙控制器（21）和全局间隙控制器（24）。 全局间隙控制器和全局间隙控制器的输出加在加法器（26）中，加法器的输出通过斩波器（22）放大。 传感器的输出反馈到全局间隙控制器和全局间隙控制器的双向。
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公开(公告)号：KR100714418B1
公开(公告)日：2007-05-07
申请号：KR1020040091549
申请日：2004-11-10
Applicant: 한국전기연구원
IPC: B60L13/04
Abstract: 본 발명은 자기부상 이송시스템에 관한 것으로,
보다 상세하게는 기존의 종자속 자기부상 이송시스템의 전자석과 레일에 복수의 치(齒)와 슬롯(slot)을 채용하여 안내력을 증가시킨 개선된 종자속형 자기부상 이송시스템에 관한 것이다.
상기 목적을 달성하기 위해 본 발명에 따른 안내력을 증가시킨 종자속형 자기부상 이송시스템은
상기 전자석은 “ ” 형상의 철심과; 상기 철심의 양 자극부가 내부에 각각 삽입되는 중공부를 갖는 1쌍의 환형 권선을 포함하되 상기 자극부의 단부는 복수의 치(齒)를 형성하고 치와 치 사이는 슬롯(slot)을 형성하며,
상기 레일은 상기 전자석의 자극부와 마주하는 단부에 복수(2개 이상)의 치(齒)를 형성하고 치와 치 사이에 슬롯(slot)을 형성하는 것을 특징으로 한다.
자기부상, 전자석, 안내력, 종자속, 치, 슬롯-
公开(公告)号：KR1020030073788A
公开(公告)日：2003-09-19
申请号：KR1020020013521
申请日：2002-03-13
Applicant: 한국전기연구원
IPC: H04Q1/18
Abstract: PURPOSE: A duplex control method in a hierarchical control system and an apparatus therefor are provided to drive a large scale power converting apparatus at a rated capacity without reducing the capacity of the large scale power converting apparatus although failure is generated in a random controller of a lower layer under the hierarchical control system of the large scale power converting apparatus. CONSTITUTION: A plurality of optical receiving circuit units(301,302) receive HB(Heart Beat) signals and firing pulse signals from unit controllers(101,102), respectively. An EPLD(Erasable Programmable Logic Device)(303) receives the HB signals and the firing pulse signals, which are received through the optical receiving circuit units(301,302), and judges whether the unit controller(101,102) are normal by the period measurement of the HB signals. If the unit controller(101,102) are normal, the EPLD(303) transmits the firing pulse signals inputted from the unit controllers(101,102), to corresponding unit controllers(101,102) again. If the random unit controller fails, the EPLD simultaneously transmits the firing pulse signal inputted from the normal unit controller, to the abnormal unit controller and the normal unit controller.
Abstract translation: 目的：提供分层控制系统及其装置中的双工控制方法，以在不降低大规模功率转换装置的容量的情况下以额定容量驱动大规模功率转换装置，尽管在随机控制器中产生故障 大规模电力转换装置分级控制系统下层。 构成：多个光接收电路单元（301,302）分别从单元控制器（101,102）接收HB（Heart Beat）信号和点火脉冲信号。 EPLD（可擦除可编程逻辑器件）（303）接收通过光接收电路单元（301,302）接收的HB信号和点火脉冲信号，并通过周期测量来判断单元控制器（101,102）是否正常 HB信号。 如果单元控制器（101,102）正常，则EPLD（303）将从单元控制器（101,102）输入的点火脉冲信号再次发送到相应的单元控制器（101,102）。 如果随机单元控制器出现故障，则EPLD同时将从正常单元控制器输入的点火脉冲信号发送到异常单元控制器和正常单元控制器。
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