Abstract:
PURPOSE: A bellows valve having a lever type steering wheel, capable of immediately distinguishing the opening and closing state of a valve without additional operation, is provided to perform the opening and closing of a valve using a reduced amount of power from an operator by handle manipulation. CONSTITUTION: A bellows valve having a lever type steering wheel comprises a body(11), a tube member, a stem(12), a stem bed(13), a bellows(14), a pin member(15) and a handle(16). The flow path is formed inside the body. An influx passage, in which the fluid of a flow path flows, is formed on the lower-part of the tube member. An exhaust path discharging the fluid flowing in into the influx passage is formed on the side of the tube member. The stem can ascend and descend corresponding to the tube member. The stem bed opens and closes the flow path by ascending and descending the stem. The bellows is formed in the outer circumference of the stem. The pin member is combined to on the top of the stem in a direction crossing with the longitudinal direction of the stem at a right angle. The handle is pivotally connected to the body. The guide unit guiding the pin member to slide is formed on the handle. The handle moves up and down the stem according to the rotation of the body.
Abstract:
PURPOSE: A manufacturing method of a thin film transistor is provided to easily manufacture a thin film transistor with low costs by forming a source/drain electrode by using a self-assembled monolayer without an additional mask process. CONSTITUTION: A gate is formed on a substrate(100). A gate insulating layer(110), which covers the gate, is formed in the top of the substrate. An oxide semiconductor active layer(120) is formed on the gate insulating layer. A hydrophobicity self-assembled monolayer(210) is formed on the oxide semiconductor active layer by irradiating a ultraviolet ray to the oxide semiconductor active layer. A source/drain electrode is formed on the oxide semiconductor active layer.
Abstract:
PURPOSE: A floating gate, method of forming floating gate, method of fabricating non-volatile memory device using the same and non-volatile memory device are provided to secure the thermal stability of the metal nano crystal by the chemical vapor deposition. CONSTITUTION: A floating gate, method of forming floating gate, method of fabricating non-volatile memory device using the same and non-volatile memory device comprises as follows. The tunneling oxide film(12) is formed on the semiconductor substrate(10). A binder is provided that is bonded with the metal nano crystal and ionic bond in the tunneling oxide film. The seed layer(14) for preventing the diffusion of tunneling oxide film is formed on the metal nano crystal(16). The metal nano crystal for storing the electric charge is formed.
Abstract:
본 발명은 나노 크기의 금속 나노 크리스탈을 이용하는 다층 전하저장층을 형성하여 메모리 장치의 전하저장능력을 향상시킬 수 있는 다층의 전하저장층을 가지는 플로팅 게이트, 플로팅 게이트의 제조방법, 이를 이용한 비휘발성 메모리 장치 및 그 제조방법에 관한 것이다. 본 발명의 플로팅 게이트는 터널 산화막 상에 적층되고, 전하를 띄고 있으며 각 단마다 각각 적어도 하나의 박막이 적층된 적어도 하나의 단으로 이루어진 고분자 전해질막과; 각각 상기 고분자 전해질막의 각단 상부면에 자기 조립되어 전하를 트랩하는 다수의 금속 나노 크리스탈이 부착된 적어도 하나의 금속 나노 크리스탈층을 포함하는 것을 특징으로 한다. 또한, 상기 플로팅 게이트는 고분자 전해질에 금속 나노 크리스탈을 자기 조립방법으로 형성하므로 고온의 열처리 공정 없이 제조될 수 있다. 비휘발성 메모리, 플로팅 게이트, 전하저장, 고분자 전해질, 금속 나노 크리스탈, 자기 조립
Abstract:
본 발명은 포토 리소그래피 공정을 사용하지 않고, 정밀한 패턴을 형성할 수 있는 자기조립단분자막을 이용한 패턴 형성 방법에 관한 것이다. 본 발명에 따른 자기조립단분자막을 이용한 패턴 형성방법은, 기판 상에 소수성을 가지는 소수성 자기조립단분자막 패턴을 형성하는 단계; 상기 기판 중 상기 소수성 자기조립단분자막 패턴이 형성된 영역 이외의 영역에 친수성을 가지는 친수성 자기조립단분자막 패턴을 형성하는 단계; 상기 소수성 자기조립단분자막 패턴 및 친수성 자기조립단분자막 패턴이 형성된 기판 상에 촉매제막을 형성하는 단계; 상기 자기조립단분자막 상에 전도성 폴리머막을 형성하는 단계를 포함한다.
Abstract:
A method for forming a metal interconnection is provided to guarantee a simplified process by forming a low-resistive multilayered thin film of a Cu/Co structure while using an ALD or MOCVD method of a Co thin film and a Cu thin film and a micro contact printing method. Metal is deposited on a substrate by a micro contact printing method wherein OTS(octadecyltrichlorosilane) of a second pattern made of a reverse pattern of a desired first pattern is formed. A Co thin film(24) is deposited on the front surface of the substrate. A Co thin film is selectively deposited only in a region where OTS(22a) is not formed, made of the same pattern as the first pattern. The substrate region of the first pattern in which the OTS is not formed is a hydrophilic region where a nucleus can easily be generated. The substrate region of the second pattern in which the OTS is formed is a hydrophobic region where a nucleus is difficult to generate.