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公开(公告)号:DE19524478C2
公开(公告)日:2002-03-14
申请号:DE19524478
申请日:1995-07-05
Applicant: INFINEON TECHNOLOGIES AG
Inventor: HOFMANN FRANZ , ROESNER WOLFGANG , KRAUTSCHNEIDER WOLFGANG , RISCH LOTHAR
IPC: H01L21/8247 , H01L27/115 , H01L27/11517 , H01L29/788 , H01L29/792
Abstract: PCT No. PCT/DE96/01117 Sec. 371 Date Dec. 8, 1997 Sec. 102(e) Date Dec. 8, 1997 PCT Filed Jun. 25, 1996 PCT Pub. No. WO97/02599 PCT Pub. Date Jan. 23, 1997An electrically writable and erasable read-only memory cell arrangement fabricated in a semiconductor substrate, preferably of monocrystalline silicon, or in a silicon layer of an SOI substrate. A cell array with memory cells is provided on a main surface of the semiconductor substrate. Each memory cell comprises an MOS transistor, vertical to the main surface and comprising, in addition to the source/drain region and a channel region arranged in-between, a first dielectric, a floating gate, a second dielectric and a control gate. A plurality of essentially parallel strip-shaped trenches are provided in the cell array. The vertical MOS transistors are arranged on the flanks of the trenches. The memory cells are in each case arranged on opposite flanks of the trenches.
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公开(公告)号:DE10030391A1
公开(公告)日:2002-01-17
申请号:DE10030391
申请日:2000-06-21
Applicant: INFINEON TECHNOLOGIES AG
Inventor: HARTWICH JESSICA , LUYKEN RICHARD JOHANNES , ROESNER WOLFGANG , SCHULZ THOMAS
IPC: H01L21/336 , H01L29/08 , H01L29/165 , H01L29/267 , H01L29/786 , H01L21/283
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公开(公告)号:DE10012112A1
公开(公告)日:2001-09-27
申请号:DE10012112
申请日:2000-03-13
Applicant: INFINEON TECHNOLOGIES AG
Inventor: HOFMANN FRANZ , ROESNER WOLFGANG , LUYKEN HANNES
IPC: H01L21/336 , H01L29/423 , H01L29/786 , H01L29/78
Abstract: Bar-type field effect transistor comprises a bar (103) formed on a substrate (101); and a gate (104) and a spacer (107, 108) formed over part of the bar. An Independent claim is also included for a process for the production of the bar-type field effect transistor comprising: (a) forming a bar on the substrate; (b) forming a gate layer over the substrate and over a part of the bar; (c) forming an insulating layer over the gate layer; (d) partially removing the gate layer below the insulating layer; and (e) forming a spacer below the insulating layer.
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公开(公告)号:DE50214710D1
公开(公告)日:2010-11-25
申请号:DE50214710
申请日:2002-05-16
Applicant: INFINEON TECHNOLOGIES AG
Inventor: GRAHAM ANDREW , HOFMANN FRANZ , KRETZ JOHANNES , KREUPL FRANZ , LUYKEN RICHARD JOHANNES , ROESNER WOLFGANG
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公开(公告)号:DE59814314D1
公开(公告)日:2008-12-11
申请号:DE59814314
申请日:1998-07-16
Applicant: INFINEON TECHNOLOGIES AG
Inventor: SCHULZ THOMAS , AEUGLE THOMAS , ROESNER WOLFGANG , RISCH LOTHAR
IPC: H01L29/78 , H01L21/336
Abstract: A spacer is used as a mask in an etching step during which a layer structure is produced for a channel layer and for a first source/drain region. After the layer structure has been produced, the first source/drain region and a second source/drain region can be produced by implantation. The second source/drain region is self-aligned on two mutually opposite flanks of the layer structure. A gate electrode can be produced in the form of a spacer on the two flanks. In order to avoid a capacitance formed by a first contact of the gate electrode and the first source/drain region, a part of the first source/drain region may be removed. If the layer structure is produced along edges of an inner area, then a third contact of the second source/drain region may be produced inside the inner area in order to reduce the surface area of the transistor.
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公开(公告)号:DE59914630D1
公开(公告)日:2008-03-13
申请号:DE59914630
申请日:1999-12-01
Applicant: INFINEON TECHNOLOGIES AG
Inventor: ROESNER WOLFGANG , RAMCKE TIES , RISCH LOTHAR
IPC: H01L21/768 , H01L27/06 , H01L21/8238 , H01L23/528 , H01L27/00 , H01L27/092 , H01L27/10 , H01L29/06 , H01L29/76
Abstract: At least one CMOS component which is configured in a semiconductor substrate is part of the inventive circuit assembly. An insulating layer is configured on the semiconductor substrate. The insulating layer covers the CMOS component. A nanoelectronic component is configured above the insulating layer. At least one conducting structure is configured in the insulating layer and serves to link the nanoelectronic component with the CMOS component. If several nanoelectronic components are provided, they are preferably grouped to nano-circuit blocks. Each of the nano-circuit blocks is so small that the RC times of their lines do not exceed 1 ns.
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公开(公告)号:DE102006003392A1
公开(公告)日:2007-05-03
申请号:DE102006003392
申请日:2006-01-24
Applicant: INFINEON TECHNOLOGIES AG
Inventor: ROESNER WOLFGANG , SPECHT MICHAEL , HOFMANN FRANZ , LUYKEN JOHANNES
IPC: H01L27/115 , H01L21/8247
Abstract: Non-volatile memory cells comprises cells (5) formed on a projection (10) of a semiconductor wafer. A transistor is formed having regions (30,32) with two connections (30,32) each comprising connecting regions (26,26') and charging layers (20,20') on an upper surface (12). A third region (34) has a gate electrode and a non-conductive gate layer (36) at least partly on the projection sidewalls with the gate electrode contacting both charging layers. An independent claim is also included for production processes for the above.
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公开(公告)号:DE102004033147B4
公开(公告)日:2007-05-03
申请号:DE102004033147
申请日:2004-07-08
Applicant: INFINEON TECHNOLOGIES AG
Inventor: ILICALI GUERKAN , LUYKEN JOHANNES R , ROESNER WOLFGANG
IPC: H01L21/336 , H01L29/78
Abstract: A method for fabricating a double-gate transistor including defining an active area on an SOI substrate, forming a first gate region on the SOI substrate, forming source/drain regions made of silicon-germanium in the active area, forming a channel region from the silicon layer of the SOI substrate, forming a layer having a planar surface above the SOI substrate, the source/drain regions, and the first gate region, bonding a second wafer to the planar surface, and forming a second gate region opposite the first gate region.
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公开(公告)号:DE10250829B4
公开(公告)日:2006-11-02
申请号:DE10250829
申请日:2002-10-31
Applicant: INFINEON TECHNOLOGIES AG
Inventor: LUYKEN R JOHANNES , SPECHT MICHAEL , LANDGRAF ERHARD , SCHULZ THOMAS , ROESNER WOLFGANG , GRAHAM ANDREW , HOFMANN FRANZ , HOENLEIN WOLFGANG , KRETZ JOHANNES , KREUPL FRANZ
IPC: H01L27/115 , G11C13/02 , H01L21/28 , H01L21/336 , H01L21/8246 , H01L21/8247 , H01L21/84 , H01L27/12 , H01L27/28 , H01L29/788 , H01L29/792 , H01L51/00 , H01L51/30
Abstract: A nonvolatile memory cell, memory cell arrangement, and method for production of a nonvolatile memory cell is disclosed. The nonvolatile memory cell includes a vertical field-effect transistor (FET). The FET contains a nanoelement arranged as a channel region and an electrically insulating layer. The electrically insulating layer at least partially surrounds the nanoelement and acts as a charge storage layer and as a gate-insulating layer. The electrically insulating layer is arranged such that electrical charge carriers may be selectively introduced into or removed from the electrically insulating layer and the electrical conductivity characteristics of the nanoelement may be influenced by the electrical charge carriers introduced into the electrically insulating layer.
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公开(公告)号:DE19935823B4
公开(公告)日:2006-07-13
申请号:DE19935823
申请日:1999-07-29
Applicant: INFINEON TECHNOLOGIES AG
Inventor: ROESNER WOLFGANG , RISCH LOTHAR
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