Abstract:
본 발명은 하기 화학식 1로 표시되는 주석 전구체에 관한 것으로, 상기 주석 전구체는 황을 포함하고 있는 전구체로서 박막 제조 중에 별도의 황을 첨가시키지 않아도 되는 장점이 있고 열적 안정성이 향상되어 양질의 황을 포함하는 주석 박막을 형성할 수 있다. [화학식 1]
(상기 식에서, R 1 , R 2 는 각각 독립적으로 C1-C10의 선형 또는 분지형 알킬기이고, R 3 , R 4 는 각각 독립적으로 C1-C10의 선형 또는 분지형의 알킬기 또는 C1-C10의 선형 또는 분지형의 플루오르화 알킬기이며, E는 S, Se 또는 Te이고, n은 1 내지 3 범위의 정수에서 선택된다.)
Abstract:
The present invention relates to a ruthenium precursor represented by Chemical Formula 1. The ruthenium precursor has improved thermal stability and volatility and does not have to use oxygen during the deposition of a thin film so that a good quality ruthenium thin film can be produced. [Chemical Formula 1](In Formula, R1-R12 are independently H, or C1-C4 linear or branched alkyl groups.).
Abstract:
PURPOSE: Provided are a graphene compound wherein an amine group is introduced to easily and efficiently manufacture a graphene which is stable and well dispersed in a solvent, and a manufacturing method therefor, and a dispersion solution including the same. CONSTITUTION: A method for manufacturing a graphene compound wherein an amine group is introduced comprises the steps of: manufacturing graphene oxide having a group selected from a group consisting of an epoxy group, an OH group and a COOH group from graphite; and reacting the graphene oxide with a primary amine or a secondary amine.
Abstract:
PURPOSE: A novel tungsten silylamide compound is provided to have thermal stability and high volatility, thereby easily manufacturing a thin film containing high quality tungsten. CONSTITUTION: A tungsten compound is denoted by chemical formula 1. A method for preparing the tungsten compound of chemical formula 1 comprises the step of reacting a compound of chemical formula 2 and a compound of chemical formula 3. A thin film containing tungsten is grown by chemical vapor deposition (CVD) or atomic layer deposition (ALD) using the tungsten compound.
Abstract:
PURPOSE: A method for manufacturing a zinc tin oxide thin film is provided to form various zinc tin oxide thin films by controlling compositions. CONSTITUTION: A substrate is introduced into a deposition chamber. A zinc tin oxide thin film is manufactured by supplying tin, oxygen, and zinc. The zinc tin oxide thin film is manufactured by a chemical vapor deposition method or an atomic layer deposition method. The tin, the oxygen, and the zinc are supplied at the same time in the chemical vapor deposition method. The tin, the oxygen, and the zinc are alternatively supplied in the atomic layer deposition method.
Abstract:
PURPOSE: A pressure vessel for growing a single crystal is provided to easily replace a liner by including a constant taper part in the inner wall of an external vessel and an outer wall of an inner liner. CONSTITUTION: A pressure vessel body(120) is made of heat resistant alloy. A liner(110) is made of corrosion resistant materials and is inserted into the pressure vessel body. A lower support stand(130) passes through the lower side of the pressure vessel body and supports the lower side of the liner. A liner is separated from the pressure vessel body by upwardly pushing and raising the lower support stand.
Abstract:
PURPOSE: A method for manufacturing a tin oxide thin film is provided to improve electrical characteristics by using a tin source in which fluorine pollution material is eliminated and to produce a thin film in which thickness is uniform. CONSTITUTION: A tin amino alkoxide is provided to an atomic layer deposition reactor. A tin chemical species is absorbed on a substrate. An oxygen source is provided to the atomic layer deposition reactor. An oxygen chemical species is absorbed on the substrate which absorbs the tin chemical species.
Abstract:
A composition for forming a spherical resin used in the toner for developing an electrostatic image is provided to improve concentration of image by controlling the distribution of particle size of spherical resin particles to be narrow. A composition for forming a spherical resin is obtained by water-dispersion suspension polymerizing a monomer mixture comprising 100 parts by weight of a lipophilic monomer which is polymerized to impart charge characteristics and 0.05-2 parts by weight of an acrylate-based polar monomer which imparts surface polarity in an aqueous medium containing a crosslinking agent and a dispersion stabilizer. Preferably the lipophilic monomer comprises styrene and at least two compounds selected from n-butyl acrylate, isobutyl acrylate, n-octyl acrylate, dodecyl acrylate, 2-ethylhexyl (meth)acrylate and stearyl (meth)acrylate.