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    Aberration correction apparatus that corrects spherical aberration of charged particle apparatus
    71.
    发明申请
    Aberration correction apparatus that corrects spherical aberration of charged particle apparatus 有权
    校正带电粒子装置的球面像差的畸变校正装置

    公开(公告)号：US20090230317A1

    公开(公告)日：2009-09-17

    申请号：US12379442

    申请日：2009-02-23

    Applicant: Yoichi Hirayama ,  Takaho Yoshida

    Inventor： Yoichi Hirayama ,  Takaho Yoshida

    IPC: H01J3/14

    CPC classification number: H01J3/12 ,  H01J37/153 ,  H01J37/26 ,  H01J2237/1534 ,  H01J2237/28

    Abstract: To provide an aberration correction configuration that can realize both an aberration correction function for a long focus and an aberration correction function for a short focus. While having a conventional aberration correction apparatus configuration that has two rotationally symmetric lenses arranged between two multiple lenses, three rotationally symmetric lenses are disposed between an objective lens and a multiple lens instead of the conventional arrangement in which two rotationally symmetric lenses are disposed therebetween. When using the objective lens with a long focal length, aberrations are corrected using two rotationally symmetric lenses among three rotationally symmetric lenses disposed between the objective lens and the multiple lens. When using the objective lens with a short focal length, e.g. for high resolution observation, aberrations are corrected using two rotationally symmetric lenses of a different combination to those used for a long focus, among the three rotationally symmetric lenses disposed between the objective lens and the multiple lens.

    Abstract translation: 提供能够实现长焦点的像差校正功能和短焦点的像差校正功能的像差校正配置。 虽然具有布置在两个多个透镜之间的两个旋转对称透镜的常规像差校正装置配置，但是在物镜和多个透镜之间设置三个旋转对称透镜，而不是其中设置两个旋转对称透镜的传统布置。 当使用具有长焦距的物镜时，在设置在物镜和多透镜之间的三个旋转对称透镜之中使用两个旋转对称透镜校正像差。 当使用具有短焦距的物镜时，例如， 对于高分辨率观察，在物镜和多透镜之间设置的三个旋转对称透镜之中，使用与用于长焦距的不同组合的两个旋转对称透镜来校正像差。

    NON-AXISYMMETRIC CHARGED-PARTICLE BEAM SYSTEM
    72.
    发明申请
    NON-AXISYMMETRIC CHARGED-PARTICLE BEAM SYSTEM 失效
    非轴对称粒子束系统

    公开(公告)号：US20080191144A1

    公开(公告)日：2008-08-14

    申请号：US11968833

    申请日：2008-01-03

    Applicant: Ronak J. Bhatt ,  Chiping Chen ,  Jing Zhou

    Inventor： Ronak J. Bhatt ,  Chiping Chen ,  Jing Zhou

    IPC: H01J1/50 ,  H05H7/00

    CPC classification number: H01J27/02 ,  G21K1/093 ,  H01J3/02 ,  H01J3/12 ,  H01J3/20 ,  H01J29/64

    Abstract: The charged-particle beam system includes a non-axisymmetric diode forms a non-axisymmetric beam having an elliptic cross-section. A focusing element utilizes a magnetic field for focusing and transporting the non-axisymmetric beam, wherein the non-axisymmetric beam is approximately matched with the channel of the focusing element.

    Abstract translation: 带电粒子束系统包括非轴对称二极管形成具有椭圆截面的非轴对称束。 聚焦元件利用磁场来聚焦和传送非轴对称光束，其中非轴对称光束与聚焦元件的通道近似匹配。

    Aberration corrector for correcting spherical aberration of charged particle apparatus
    79.
    发明专利
    Aberration corrector for correcting spherical aberration of charged particle apparatus 有权
    用于校正充电颗粒装置的球状脱落的校正校正

    公开(公告)号：JP2009224067A

    公开(公告)日：2009-10-01

    申请号：JP2008064717

    申请日：2008-03-13

    Applicant: Hitachi Ltd ,  Okinawa Institute Of Science & Technology ,  株式会社日立製作所 ,  独立行政法人沖縄科学技術研究基盤整備機構

    Inventor： HIRAYAMA YOICHI ,  YOSHIDA TAKAO

    IPC: H01J37/153

    CPC classification number: H01J3/12 ,  H01J37/153 ,  H01J37/26 ,  H01J2237/1534 ,  H01J2237/28

    Abstract: PROBLEM TO BE SOLVED: To provide an aberration correcting structure enabling both a long-focus aberration correcting function and a short-focus aberration correcting function.
    SOLUTION: By using a conventional aberration corrector structure disposing two rotation-symmetry lenses between two multi-pole lenses, this aberration corrector disposes three rotation symmetry lenses between an objective lens and the multi-pole lens instead of the conventional arrangement in which two rotationally symmetric lenses are disposed therebetween. When the focal length of the objective lens is long, a set of two of the three rotation symmetry lenses disposed between the objective lens and the multi-pole lens is used for correction of aberration. Further, when the focal length of the objective lens is short for high resolution observation, etc, another set of two of the three rotation symmetry lenses disposed between the objective lens and the multi-pole lens which is different from the set of two rotation symmetry lenses used for longer focal length is used for correction of aberration.
    COPYRIGHT: (C)2010,JPO&INPIT

    Abstract translation: 要解决的问题：提供能够实现长焦像差校正功能和短焦像差校正功能的像差校正结构。 解决方案：通过使用在两个多极透镜之间设置两个旋转对称透镜的常规像差校正器结构，该像差校正器在物镜和多极透镜之间配置三个旋转对称透镜，而不是常规布置，其中 两个旋转对称透镜位于它们之间。 当物镜的焦距长时，设置在物镜和多极透镜之间的三个旋转对称透镜中的两个被用于校正像差。 此外，当物镜的焦距对于高分辨率观察等是短的时，另外一组三个旋转对称透镜中的两个设置在物镜和多极透镜之间，其不同于两组旋转对称 用于较长焦距的透镜用于校正像差。 版权所有（C）2010，JPO＆INPIT

    전자빔 확산 단면 수정 장치 및 방법
    80.
    发明授权
    전자빔 확산 단면 수정 장치 및 방법 有权
    电子束扩散和交叉形成方法和装置

    公开(公告)号：KR101681000B1

    公开(公告)日：2016-11-29

    申请号：KR1020157037295

    申请日：2014-10-17

    Applicant: 화중과기대

    Inventor： 후앙,지앙 ,  판,밍우 ,  유,티아오친 ,  장,리게 ,  주오,첸 ,  양,준 ,  시옹,용치안 ,  리우,카이펭 ,  우,제랄드에프. ,  카오,레이

    IPC: G21K5/04 ,  G21K1/093

    CPC classification number: H01J37/143 ,  G21K1/093 ,  G21K5/04 ,  H01J3/12 ,  H01J33/00 ,  H01J37/3178 ,  H01J2237/0835 ,  H01J2237/1405 ,  H01J2237/152

    Abstract: 본발명은일의종전자빔확산단면수정장치및 그방법을제공하는바, 구체적으로: 2개조의영구자성철을포함한다. 제1조영구자성철로구성된자기장이전자빔을근사한타원형으로확산시키고, 제2조영구자성철로구성된자기장은전자빔변두리에대한수정을하여근사한직사각형을형성한다. 4개의종향포지션연결장치에대한조작을통해제1조영구자성철의상, 하마그네틱요크를그들사이의중심을향해동기화로이동시키고, 타원형과근사한전자빔에대한 1차종향압축을하며, 이어서제2조영구자성철의상, 하마그네틱요크를그들사이의중심을향해동기화로이동시키고, 직사각형과근사한전자빔에대해전자빔종향사이즈가 80mm로압축될때까지 2차종향압축을계속한다. 본발명은확산후의전자빔종향사이즈에대한합리한압축을통해최고의조사균일도와조사효율을보장하는외에종래의티타늄윈도우의설정범위내에서유지할수도있다.

    Abstract translation: 本发明提供一种用于优化电子束的扩散部分的装置，包括两组永久磁体，由四个磁极形成的磁场，其沿纵向方向延伸电子束，并且沿横向压缩电子束，因此 电子束变成近似椭圆; 由八个磁极形成的另一个磁场将分散的电子束束的边缘优化成近似矩形; 通过控制四个纵向连接机构，使得第一组永磁体的上磁轭和下磁轭同步向其中心移动，从而纵向压缩近似椭圆形的电子束，并且上磁轭 并且第二组永磁体的下磁轭朝向其中心同步移动，从而纵向压缩大致矩形的电子束，并且重复纵向压缩的过程，直到电子束束的纵向尺寸 减至80毫米。 本发明能够将扩散后的电子束束的纵向尺寸合理地压缩至大约80mm，这确保了最佳的照射均匀性和效率，并且使纵向尺寸在常规的钛合金窗口的范围内，

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