公开(公告)号：CA3066546A1

公开(公告)日：2018-12-20

申请号：CA3066546

申请日：2018-06-08

Applicant: ASML NETHERLANDS BV

Inventor： VLES DAVID FERDINAND ,  ANDE CHAITANYA KRISHNA ,  DE GROOT ANTONIUS FRANCISCUS JOHANNES ,  GIESBERS ADRIANUS JOHANNES MARIA ,  JANSSEN JOHANNES JOSEPH ,  JANSSEN PAUL ,  KLOOTWIJK JOHAN HENDRIK ,  KNAPEN PETER SIMON ANTONIUS ,  KURGANOVA EVGENIA ,  MEIJER MARCEL PETER ,  MEIJERINK WOUTER ROGIER ,  NASALEVICH MAXIM ALEKSANDROVICH ,  NOTENBOOM ARNOUD WILLEM ,  OLSMAN RAYMOND ,  PATEL HRISHIKESH ,  PETER MARIA ,  VAN DEN BOSCH GERRIT ,  VAN DEN EINDEN WILHELMUS THEODORUS ANTHONIUS JOHANNES ,  VAN DER ZANDE WILLEM JOAN ,  VAN ZWOL PIETER-JAN ,  VERMEULEN JOHANNES PETRUS MARTINUS BERNARDUS ,  VOORTHUIJZEN WILLEM-PIETER ,  WONDERGEM HENDRIKUS JAN ,  ZDRAVKOV ALEXANDAR NIKOLOV

IPC: G03F1/62 ,  G03F1/64

Abstract: The invention relates to a pellicle assembly comprising a pellicle frame defining a surface onto which a pellicle is attached. The pellicle assembly comprises one or more three-dimensional expansion structures that allow the pellicle to expand under stress. The invention also relates to a pellicle assembly for a patterning device comprising one or more actuators for moving the pellicle assembly towards and way from the patterning device.