公开(公告)号：US20190198281A1

公开(公告)日：2019-06-27

申请号：US16313051

申请日：2017-11-30

Applicant: ION LAB Co., Ltd.

Inventor： Masanobu NUNOGAKI

IPC: H01J27/22 ,  H01J27/08 ,  H01J27/16 ,  H01J27/04 ,  H01J37/08

CPC classification number: H01J27/22 ,  H01J27/04 ,  H01J27/08 ,  H01J27/16 ,  H01J27/20 ,  H01J37/08

Abstract: Metallic ion source for resolving the issue of not being able to produce high-density ions efficiently with small-scale ion sources in situations where an electron beam injecting scheme is employed as the evaporation source to evaporate a solid, and for producing high-density ions highly efficiently. Designed to be compact and lightweight, the metallic ion source also facilitates selection of the ion extraction direction. The ion source, structured exploiting the characteristic physical property that whether ionization takes place is dependent on the energy of the electron beam, is furnished with a dual evaporation-plasma chamber that inside the same chamber enables a high-speed electron beam, whose ionization efficiency is low, and low-speed electrons generated by electric discharge, whose ionization efficiency is high, to participate independently and simultaneously in, respectively, evaporation of precursor and ionization action.

公开(公告)号：US09941087B2

公开(公告)日：2018-04-10

申请号：US15410711

申请日：2017-01-19

Applicant: Axcelis Technologies, Inc.

Inventor： Neil K. Colvin ,  Tseh-Jen Hsieh ,  Paul b. Silverstein

IPC: H01J7/24 ,  H05B31/26 ,  H01J17/06 ,  H01J17/18 ,  H01J27/08 ,  H01J27/02

CPC classification number: H01J17/06 ,  H01J17/186 ,  H01J27/022 ,  H01J27/08 ,  H01J37/08 ,  H01J37/3171 ,  H01J2237/006 ,  H01J2237/061

Abstract: An ion source has an arc chamber having an arc chamber body. An electrode extends into an interior region of the arc chamber body, and a cathode shield has a body that is cylindrical having an axial hole. The axial hole is configured to pass the electrode therethrough. First and second ends of the body have respective first and second gas conductance limiters. The first gas conductance limiter extends from an outer diameter of the body and has a U-shaped lip. The second gas conductance limiter has a recess for a seal to protect the seal from corrosive gases and maintain an integrity of the seal. A gas source introduces a gas to the arc chamber body. A liner has an opening configured to pass the cathode shield therethrough, where the liner has a recess. A gap is defined between the U-shaped lip and the liner, wherein the U-shaped lip reduces a conductance of gas into the gap and the recess further reduces conductance of gas into the region.

公开(公告)号：US20170133201A1

公开(公告)日：2017-05-11

申请号：US15320104

申请日：2014-09-25

Applicant: Mitsubishi Electric Corporation

Inventor： Sunao AYA

IPC: H01J37/317 ,  H01J37/08 ,  H01J37/18

CPC classification number: H01J37/3171 ,  H01J27/08 ,  H01J37/08 ,  H01J37/18 ,  H01J2237/006 ,  H01J2237/08

Abstract: A vacuum is maintained inside a vacuum partition (1). The whole of the solid packed container (3) is disposed inside the vacuum partition (1). A heater (7) sublimates the aluminum chloride (8) packed in lid packed container (3) to generate an aluminum chloride gas (9). An arc chamber (6) ionizes the aluminum chloride gas (9) and emits an ion beam (11) of the ionized aluminum chloride gas (9). A gas supply nozzle (10) leads the aluminum oride gas (9) from the solid packed container (3) into the arc chamber (6). A supporting part (4) supports and fixes the solid packed container (3) on the vacuum partition (1). A thermal conductivity of the supporting part (4) is lower than thermal conductivities of the vacuum partition (1) and the solid packed container (3).

公开(公告)号：US09395721B2

公开(公告)日：2016-07-19

申请号：US14397818

申请日：2013-12-24

Applicant: Halliburton Energy Services, Inc.

Inventor： David L. Perkins ,  Robert Paul Freese ,  Christopher Michael Jones ,  Richard Neal Gardner

IPC: G01N37/00 ,  G05B19/418 ,  G01B11/06 ,  G01N21/84 ,  G01N21/21 ,  C23C14/30 ,  C23C14/54 ,  G01N21/25 ,  H01J27/02 ,  H01J27/08 ,  H01J37/34

CPC classification number: G05B19/41875 ,  C23C14/30 ,  C23C14/547 ,  G01B11/0625 ,  G01B11/0683 ,  G01N21/211 ,  G01N21/25 ,  G01N21/8422 ,  G01N2021/213 ,  G05B2219/32368 ,  H01J27/022 ,  H01J27/08 ,  H01J37/3488

Abstract: Techniques include receiving a design of an integrated computational element (ICE), the ICE design including specification of a substrate and a plurality of layers, their respective target thicknesses and complex refractive indices, complex refractive indices of adjacent layers being different from each other, and a notional ICE fabricated in accordance with the ICE design being related to a characteristic of a sample; forming at least some of the plurality of layers of the ICE in accordance with the ICE design; performing at least two different types of in-situ measurements; predicting, using results of the at least two different types of in situ measurements, performance of the ICE relative to the ICE design; and adjusting the forming of the layers remaining to be formed, at least in part, by updating the ICE design based on the predicted performance.

Abstract translation: 技术包括接收集成计算元件（ICE）的设计，ICE设计包括基板和多个层的规格，它们各自的目标厚度和复折射率，相邻层的复折射率彼此不同，以及 根据ICE设计制造的名义ICE与样品的特性相关; 根据ICE设计形成ICE的多个层中的至少一些层; 执行至少两种不同类型的原位测量; 使用至少两种不同类型的原位测量的结果来预测ICE相对于ICE设计的性能; 并且至少部分地通过基于预测的性能更新ICE设计来调整形成剩余的层的形成。

公开(公告)号：US20160086763A1

公开(公告)日：2016-03-24

申请号：US14960496

申请日：2015-12-07

Applicant: Infineon Technologies AG

Inventor： Frank GOERBING

IPC: H01J37/08 ,  H01J37/317 ,  H01L21/265

CPC classification number: H01J37/08 ,  H01J27/08 ,  H01J37/317 ,  H01J37/3171 ,  H01L21/265

Abstract: An ion source includes a chamber defining an interior cavity for ionization, an electron beam source at a first end of the interior cavity, an inlet for introducing ionizable gas into the chamber, and an arc slit for extracting ions from the chamber. The chamber includes an electrically conductive ceramic.

Abstract translation: 离子源包括限定用于电离的内腔的腔室，在内腔的第一端处的电子束源，用于将可电离气体引入腔室的入口和用于从腔室中提取离子的弧缝。 该腔室包括导电陶瓷。

公开(公告)号：US09287099B2

公开(公告)日：2016-03-15

申请号：US13973305

申请日：2013-08-22

Applicant: A SCHOOL CORPORATION KANSAI UNIVERSITY ,  CANON KABUSHIKI KAISHA

Inventor： Yoichi Otsuka ,  Ryuichi Arakawa

IPC: H01J49/10 ,  H01J49/00 ,  G01N30/72 ,  H01J49/04 ,  H01J49/16 ,  B01D59/44 ,  H01J27/08

CPC classification number: H01J49/0027 ,  B01D59/44 ,  G01N30/7266 ,  H01J27/08 ,  H01J49/0454 ,  H01J49/168

Abstract: To achieve soft ionization more easily when a slight amount of substance is ionized under an atmosphere pressure. An ionization method for a substance contained in a liquid, including: supplying the liquid to a substrate from a probe and forming a liquid bridge made of the liquid containing the substance dissolved therein, between the probe and the substrate; oscillating the probe; and generating an electric field between an electrically conductive portion of the probe in contact with the liquid and an ion extraction electrode.

Abstract translation: 当在大气压下离子化少量物质时，更容易实现软电离。 一种包含在液体中的物质的电离方法，包括：在探针和基底之间，将来自探针的液体供给到基底并形成由其中溶解有物质的液体制成的液体桥; 振荡探头; 以及在与液体接触的探针的导电部分和离子提取电极之间产生电场。

公开(公告)号：US09257285B2

公开(公告)日：2016-02-09

申请号：US13591291

申请日：2012-08-22

Applicant: Frank Goerbing

Inventor： Frank Goerbing

IPC: H01J17/26 ,  H01J61/28 ,  H01J1/14 ,  H01L21/265 ,  H01J37/08 ,  H01J37/317 ,  H01J27/08

CPC classification number: H01J37/08 ,  H01J27/08 ,  H01J37/317 ,  H01J37/3171 ,  H01L21/265

Abstract: An ion source includes a chamber defining an interior cavity for ionization, an electron beam source at a first end of the interior cavity, an inlet for introducing ionizable gas into the chamber, and an arc slit for extracting ions from the chamber. The chamber includes an electrically conductive ceramic.

Abstract translation: 离子源包括限定用于电离的内腔的腔室，在内腔的第一端处的电子束源，用于将可电离气体引入腔室的入口和用于从腔室中提取离子的弧缝。 该腔室包括导电陶瓷。

公开(公告)号：US09187832B2

公开(公告)日：2015-11-17

申请号：US13886683

申请日：2013-05-03

Applicant: Varian Semiconductor Equipment Associates, Inc.

Inventor： Costel Biloiu ,  David P. Sporleder ,  Jay Scheuer ,  Neil Bassom

IPC: H01J37/00 ,  C23F4/00 ,  H01J37/305 ,  H01J27/08 ,  H01J37/08

CPC classification number: C23F4/00 ,  H01J27/08 ,  H01J37/08 ,  H01J37/3053 ,  H01J2237/022 ,  H01J2237/3341

Abstract: An ion source includes an ion source chamber, a cathode disposed within the ion source chamber and configured to emit electrons to generate an arc plasma, and a repeller configured to repell electrons back into the arc plasma. The ion source chamber and cathode may comprise a refractory metal. The ion source chamber further includes a gas source configured to provide a halogen species to the ion source chamber. The reactive insert is interoperative with the halogen species to yield a first etch rate of the refractory metal material within the ion source chamber under a first set of operating conditions that is less than a second etch rate of the refractory metal material within the ion source chamber under the first set of operating conditions when the reactive insert is not disposed within the ion source chamber.

Abstract translation: 离子源包括离子源室，设置在离子源室内的并且被配置为发射电子以产生电弧等离子体的阴极，以及构造成将电子排斥回到电弧等离子体中的反射器。 离子源室和阴极可以包括难熔金属。 离子源室还包括被配置为向离子源室提供卤素物质的气体源。 反应性插入物与卤素物质相互作用，以在离子源室内的难熔金属材料的小于第二蚀刻速率的第一组操作条件下产生耐热金属材料在离子源室内的第一蚀刻速率 当反应性插入物未设置在离子源室内时，在第一组操作条件下。

公开(公告)号：US20130341279A1

公开(公告)日：2013-12-26

申请号：US13973305

申请日：2013-08-22

Applicant: CANON KABUSHIKI KAISHA ,  A SCHOOL CORPORATION KANSAI UNIVERSITY

Inventor： Yoichi Otsuka ,  Ryuichi Arakawa

IPC: H01J49/00 ,  B01D59/44 ,  H01J27/08

CPC classification number: H01J49/0027 ,  B01D59/44 ,  G01N30/7266 ,  H01J27/08 ,  H01J49/0454 ,  H01J49/168

Abstract: To achieve soft ionization more easily when a slight amount of substance is ionized under an atmosphere pressure. An ionization method for a substance contained in a liquid, including: supplying the liquid to a substrate from a probe and forming a liquid bridge made of the liquid containing the substance dissolved therein, between the probe and the substrate; oscillating the probe; and generating an electric field between an electrically conductive portion of the probe in contact with the liquid and an ion extraction electrode.

公开(公告)号：US20130299717A1

公开(公告)日：2013-11-14

申请号：US13990581

申请日：2011-08-29

Applicant: Yoshinari Fukada

Inventor： Yoshinari Fukada

IPC: H01J27/08

CPC classification number: H01J27/08 ,  F24F3/166 ,  H01T19/00 ,  H01T23/00

Abstract: In an ion generator, a flexible discharge electrode 44 composed of one wire is provided to a base 43, and a turning motion of a free end 44b of the discharge electrode 44 about a fixed end 44a of the discharge electrode 44 is performed by repulsive force of a corona discharge generated by supplying a high voltage to the fixed end 44a. Therefore, in comparison with a discharge electrode composed of a bundle of thin wires, it is possible to significantly reduce dust emission from the free end 44b of the discharge electrode 44, and to further improve the ion generator 30 in maintenance interval. Since the discharge electrode 44 is compose of one wire, it is possible to reduce the discharge electrode 44 in size, easily observe the state of the discharge electrode 44, and simplify its maintenance. Since the discharge electrode 44 performs a turning motion, it is possible to transport the generated air ions EI to a wide area of a packaging film 10, and to enhance ionizing efficiency.

Abstract translation: 在离子发生器中，将由一根导线构成的柔性放电电极44设置在基座43上，放电电极44的自由端44b围绕放电电极44的固定端44a的转动运动通过排斥力 通过向固定端44a提供高电压而产生的电晕放电。 因此，与由一束细线组成的放电电极相比，可以显着地减少来自放电电极44的自由端44b的灰尘的发射，并且在维护间隔中进一步改善离子发生器30。 由于放电电极44由一根导线组成，所以可以减小放电电极44的尺寸，容易观察放电电极44的状态，并简化其维护。 由于放电电极44进行转动运动，所以可以将产生的空气离子EI输送到包装膜10的广泛区域，并提高电离效率。