公开(公告)号：US20160216155A1

公开(公告)日：2016-07-28

申请号：US15008856

申请日：2016-01-28

Applicant: Industry-Academic Cooperation Foundation, Yonsei University

Inventor： Ilgu YUN ,  Sang Myung LEE

IPC: G01J3/443 ,  C23C16/50 ,  H01J37/32

CPC classification number: G01J3/443 ,  G01J3/0208 ,  G01J3/0216 ,  G01J3/0218 ,  G01J3/0235 ,  H01J37/32935 ,  H01J37/32972

Abstract: Provided is an apparatus for optical emission spectroscopy. The apparatus for the optical emission spectroscopy includes a light collection unit configured to collect light within a plasma process chamber in which plasma is generated to process a substrate, a light transmission unit configured to transmit the collected light, and an analysis unit configured to analyze the light provided through the light transmission unit, thereby analyzing a plasma state. The light collection unit includes a light collection part configured to concentrate the light generated in the plasma process chamber and provide the concentrated light to the light transmission unit.

Abstract translation: 提供了一种用于光发射光谱的装置。 用于光发射光谱的装置包括：光收集单元，被配置为在等离子体处理室内聚集光，其中产生等离子体以处理衬底;光传输单元，被配置为透射所收集的光;以及分析单元，被配置为分析 通过光传输单元提供的光，从而分析等离子体状态。 光收集单元包括：光收集部，被配置为集中在等离子体处理室中产生的光并将集中的光提供给光传输单元。

公开(公告)号：US09347882B2

公开(公告)日：2016-05-24

申请号：US13737279

申请日：2013-01-09

Applicant: Molecular Devices, LLC

Inventor： Josef J. Atzler ,  Bernhard Schinwald

IPC: G01N21/76 ,  G01N21/64 ,  G01J3/02 ,  G01J3/10 ,  G01J3/427 ,  G01J3/44 ,  G01N21/17

CPC classification number: G01N21/64 ,  G01J3/02 ,  G01J3/0202 ,  G01J3/021 ,  G01J3/0218 ,  G01J3/0232 ,  G01J3/0235 ,  G01J3/0256 ,  G01J3/0291 ,  G01J3/10 ,  G01J3/427 ,  G01J3/4406 ,  G01N21/6408 ,  G01N21/6428 ,  G01N21/6445 ,  G01N21/645 ,  G01N21/763 ,  G01N2021/1738 ,  G01N2021/6415 ,  G01N2021/6419 ,  G01N2021/6441 ,  G01N2021/6482 ,  G01N2201/024 ,  G01N2201/0618 ,  G01N2201/062 ,  G01N2201/0621 ,  G01N2201/0692 ,  G01N2201/0696

Abstract: Systems and methods for measuring a target in a sample, the target being capable of generating an emitted light in response to an excitation light. In an example system, an excitation light source generates the excitation light along an excitation optical path. An attenuation filter arrangement selectively adds an attenuation filter to the excitation optical path. The attenuation filter attenuates the excitation light by a corresponding attenuation factor. The excitation light exits the attenuation filter arrangement along the excitation optical path to illuminate the sample. A light energy detector receives the emitted light generated in response to the excitation light, and outputs a measured signal level corresponding to an emitted light level. If the light energy detector indicates an overflow, signal measurement is repeated with attenuation filters of increasing attenuation factors until the measured signal level does not overflow.

Abstract translation: 用于测量样本中的目标的系统和方法，所述目标能够响应于激发光产生发射的光。 在示例性系统中，激发光源沿着激发光路产生激发光。 衰减滤波器装置选择性地将衰减滤波器添加到激励光路。 衰减滤波器通过相应的衰减因子衰减激发光。 激发光沿着激发光路离开衰减滤光器装置以照亮样品。 光能检测器接收响应于激发光产生的发射光，并且输出与发射的光级相对应的测量信号电平。 如果光能检测器指示溢出，则使用增加衰减因子的衰减滤波器重复信号测量，直到测量信号电平不会溢出。

公开(公告)号：US09182282B2

公开(公告)日：2015-11-10

申请号：US12447591

申请日：2007-11-01

Applicant: Michael L. Myrick ,  Robert P. Freese ,  David L. Perkins ,  Terrell Teague ,  William Soltmann

Inventor： Michael L. Myrick ,  Robert P. Freese ,  David L. Perkins ,  Terrell Teague ,  William Soltmann

IPC: G01N21/00 ,  G01J3/28 ,  G01J3/02 ,  G01J3/08 ,  G01J3/42 ,  G01J3/12

CPC classification number: G01J3/28 ,  G01J3/02 ,  G01J3/021 ,  G01J3/0229 ,  G01J3/0232 ,  G01J3/0235 ,  G01J3/0243 ,  G01J3/08 ,  G01J3/42 ,  G01J2003/1213 ,  G01N2201/128 ,  G01N2201/1293

Abstract: The present subject matter relates to methods of high-speed analysis of product samples. Light is directed to a portion of a product under analysis and reflected from or transmitted through the product toward an optical detector. Signals for the detector are compared with reference signals based on a portion of the illuminating light passing through a reference element to determine characteristics of the product under analysis. The products under analysis may be stationary, moved by an inspection point by conveyor or other means, or may be contained within a container, the container including a window portion through which the product illuminating light may pass.

Abstract translation: 本主题涉及产品样品的高速分析方法。 光被引导到被分析的产品的一部分，从产品反射或透过产品朝向光学检测器。 基于通过参考元件的照明光的一部分，将检测器的信号与参考信号进行比较，以确定被分析产品的特性。 被分析的产品可以是固定的，由检查点通过输送机或其他方式移动，或者可以容纳在容器内，该容器包括产品照明光通过的窗口部分。

公开(公告)号：US09157801B2

公开(公告)日：2015-10-13

申请号：US13529722

申请日：2012-06-21

Applicant: Ed Dottery ,  Kenneth Pohl ,  Darius Vunck ,  Robert Waterbury ,  Frank Vilardi

Inventor： Ed Dottery ,  Kenneth Pohl ,  Darius Vunck ,  Robert Waterbury ,  Frank Vilardi

IPC: G01J3/44 ,  G01J3/02 ,  G01N21/65 ,  G01N21/17

CPC classification number: G01J3/44 ,  G01J3/0235 ,  G01J3/0289 ,  G01N21/65 ,  G01N2021/1793

Abstract: A system comprises a processing system, a laser system, a telescope system, a detector system and optical systems operatively arranged such that the laser system may be capable of outputting multiple wavelengths to a common telescope system, and the detector system is capable of receiving signatures from the same telescope system, under the control of a control system. The processor system processes signals received from the detector system to determine substances identified by known signatures. For example, a plurality of detectors in the detector system each receive a range of wavelengths of the signatures received by the telescope system. For example, a variable beam diverger and variable beam expander operatively control expansion and divergence of the output the laser system. For example, a beam reducer and lenslet array may operatively transmit signatures via optical fiber bundle to one or more of the detectors.

Abstract translation: 系统包括处理系统，激光系统，望远镜系统，检测器系统和可操作地布置成使得激光系统能够将多个波长输出到公共望远镜系统的光学系统，并且检测器系统能够接收签名 从同一个望远镜系统，在一个控制系统的控制下。 处理器系统处理从检测器系统接收的信号以确定由已知签名识别的物质。 例如，检测器系统中的多个检测器各自接收由望远镜系统接收的签名的波长范围。 例如，可变光束分离器和可变光束扩展器可操作地控制激光系统的输出的扩展和发散。 例如，减光器和小透镜阵列可以经由光纤束将签名操作地传送到一个或多个检测器。

公开(公告)号：US20150276478A1

公开(公告)日：2015-10-01

申请号：US14267758

申请日：2014-05-01

Applicant: IMEC

Inventor： Bert Geelen ,  Andy Lambrechts ,  Klaas Tack

IPC: G01J3/26 ,  G01J3/28 ,  G01J3/02

CPC classification number: G01J3/26 ,  G01J3/02 ,  G01J3/0208 ,  G01J3/0235 ,  G01J3/0256 ,  G01J3/0259 ,  G01J3/2823 ,  G01J2003/2826

Abstract: A spectral camera for producing a spectral output is disclosed. The spectral camera has an objective lens for producing an image, a mosaic of filters for passing different bands of the optical spectrum, and a sensor array arranged to detect pixels of the image at the different bands passed by the filters, wherein for each of the pixels, the sensor array has a cluster of sensor elements for detecting the different bands, and the mosaic has a corresponding cluster of filters of different bands, integrated on the sensor element so that the image can be detected simultaneously at the different bands. Further, the filters are first order Fabry-Perot filters, which can give any desired passband to give high spectral definition. Cross talk can be reduced since there is no longer a parasitic cavity.

Abstract translation: 公开了一种用于产生光谱输出的光谱相机。 光谱相机具有用于产生图像的物镜，用于通过光谱的不同频带的滤波器的马赛克;以及传感器阵列，其布置成检测由滤色器通过的不同频带处的图像的像素，其中对于每个 传感器阵列具有用于检测不同频带的传感器元件簇，并且马赛克具有集成在传感器元件上的不同频带的相应的滤波器簇，使得可以在不同频带处同时检测图像。 此外，滤波器是第一级法布里 - 珀罗滤波器，其可以给出任何期望的通带以提供高光谱定义。 可以减少串扰，因为不再有寄生腔。

公开(公告)号：US09036147B2

公开(公告)日：2015-05-19

申请号：US13322019

申请日：2009-05-29

Applicant: Ryuji Funayama ,  Shinya Kawamata ,  Yasukata Yokochi ,  Masato Endo ,  Yasuhiro Yoshida ,  Kenichi Kitahama

Inventor： Ryuji Funayama ,  Shinya Kawamata ,  Yasukata Yokochi ,  Masato Endo ,  Yasuhiro Yoshida ,  Kenichi Kitahama

IPC: G01J3/28 ,  G01J3/02 ,  G01J3/04 ,  G01J3/32 ,  G01J3/36

CPC classification number: G01J3/0229 ,  G01J3/02 ,  G01J3/021 ,  G01J3/0235 ,  G01J3/0294 ,  G01J3/04 ,  G01J3/32 ,  G01J3/36

Abstract: Disclosed is a spectrum measuring apparatus for shortening such a measurement time period for an object being measured including two or more mutually different measurement portions as is required for the spectrum measurements of the lights from individual measurement portions. The spectrum measuring apparatus comprises a slit group having two or more slits, a spectroscope for separating the lights extracted by the slit group, for the individual slits, and a measuring unit for measuring the intensities of the individual components, which are separated by the spectroscope, for the slits. The individual slits extract such ones of the lights coming from an object being measured including two or more mutually different measurement portions, as come from the individual measurement portions.

Abstract translation: 本发明公开了一种频谱测量装置，用于根据来自各个测量部分的光的光谱测量所需的，缩短测量对象的测量时间段，包括两个或更多个相互不同的测量部分。 光谱测量装置包括具有两个或更多个狭缝的狭缝组，用于分离由狭缝组提取的光的分光镜，用于各狭缝的测量单元，以及用于测量由分光镜分离的各个部件的强度的测量单元 ，为狭缝。 各个狭缝从各个测量部分提取来自被测量物体的那些光，包括两个或更多个相互不同的测量部分。

公开(公告)号：US08873048B2

公开(公告)日：2014-10-28

申请号：US13518797

申请日：2010-12-13

Applicant: Stefan Florek ,  Michael Okruss ,  Helmut Becker-Ross

Inventor： Stefan Florek ,  Michael Okruss ,  Helmut Becker-Ross

IPC: G01J3/28 ,  G01J3/02 ,  G01J3/18 ,  G01J3/14

CPC classification number: G01J3/1809 ,  G01J3/02 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/0235 ,  G01J3/14 ,  G01J3/2803 ,  G01J2003/1828

Abstract: A spectrometer assembly (10), comprising an Echelle grating (18; 46) for dispersing radiation entering the spectrometer assembly (10) in a main dispersion direction, and a dispersion assembly (16; 40) for dispersing a parallel radiation bundle generated from the radiation entering the spectrometer assembly in a lateral dispersion direction, is characterized in that the dispersion assembly (16; 40) is reflective, and the dispersion assembly (16; 40) is arranged relative to the Echelle grating (18; 46) in such a way that the parallel radiation bundle is reflected in the direction of the Echelle grating. The Echelle grating (18; 46) may be arranged in such a way that the dispersed radiation is reflected back to the dispersion assembly (16; 40).

Abstract translation: 一种光谱仪组件（10），包括用于分散在主分散方向上进入光谱仪组件（10）的辐射的梯形光栅（18; 46）和用于分散从所述分散体组件（10; 40）产生的平行辐射束 辐射进入光谱仪组件的横向分散方向，其特征在于分散体组件（16; 40）是反射性的，分散体组件（16; 40）相对于Echelle光栅（18; 46） 平行辐射束在Echelle光栅的方向上反射的方式。 可以将梯形光栅（18; 46）布置成使得分散的辐射被反射回到分散体组件（16; 40）。

公开(公告)号：US08716651B2

公开(公告)日：2014-05-06

申请号：US13212875

申请日：2011-08-18

Applicant: Howard M. De Ruyter

Inventor： Howard M. De Ruyter

IPC: G01D18/00

CPC classification number: G01J5/522 ,  G01J1/0295 ,  G01J1/0411 ,  G01J1/0444 ,  G01J3/0202 ,  G01J3/021 ,  G01J3/0235 ,  G01J3/28 ,  G01J5/0809 ,  G01J5/084

Abstract: A calibration system for a detector includes a base member, a plurality of radiation sources fixedly attached to the base member, and a positioning mechanism attached to the base member. Each radiation source is maintained at a different temperature and is configured to emit electromagnetic radiation. The positioning mechanism includes a movable member having a single degree of freedom with respect to the base member, and a plurality of optical elements arranged on the movable member. Each optical element corresponds to one of the radiation sources and each optical element is configured to at least be movable between a calibration position and a non-calibration position. When the optical element is in the calibration position, the optical element is configured to receive the electromagnetic radiation from its corresponding radiation source and to reflect the electromagnetic radiation to a detector.

Abstract translation: 一种用于检测器的校准系统，包括基座部件，固定在基部部件上的多个辐射源，以及安装在基座部件上的定位机构。 每个辐射源被保持在不同的温度并被配置成发射电磁辐射。 定位机构包括相对于基底部件具有单一自由度的可动部件和布置在可动部件上的多个光学元件。 每个光学元件对应于一个辐射源，并且每个光学元件被配置为至少可以在校准位置和非校准位置之间移动。 当光学元件处于校准位置时，光学元件被配置为从其相应的辐射源接收电磁辐射并将电磁辐射反射到检测器。

公开(公告)号：US20140063299A1

公开(公告)日：2014-03-06

申请号：US13599633

申请日：2012-08-30

Applicant: Eric Fest ,  Michael P. Schaub ,  Page E. King

Inventor： Eric Fest ,  Michael P. Schaub ,  Page E. King

IPC: H04N9/04

CPC classification number: G01J4/04 ,  G01J3/0232 ,  G01J3/0235 ,  G01J3/36 ,  G01J3/513 ,  G01S3/78 ,  G01S3/7803 ,  G01S3/781 ,  G01S5/16 ,  G02B5/201 ,  G02B5/3025 ,  G02B26/007 ,  G02B26/023 ,  G02B27/285 ,  G02B27/286 ,  H04N5/2254 ,  H04N5/332 ,  H04N17/002

Abstract: An optical imaging system and method including a movable pixelated filter array, a shutter mechanism to which the pixelated filter array is attached, and a controller configured to implement a data reduction algorithm. The shutter mechanism is configured to move the pixelated filter array into and out of the optical path, and the data reduction algorithm allows the controller to account for axial and/or lateral misalignment of the filter array relative to the imaging detector array or its conjugate. In certain examples, the controller is further configured to use the data reduction algorithms also to perform wavefront sensing, for example to estimate wavefront error.

Abstract translation: 一种光学成像系统和方法，包括可移动像素化滤光器阵列，附接有像素化滤光器阵列的快门机构和被配置为实现数据简化算法的控制器。 快门机构被配置为将像素化过滤器阵列移入和移出光路，并且数据简化算法允许控制器考虑过滤器阵列相对于成像检测器阵列或其共轭物的轴向和/或横向偏移。 在某些示例中，控制器还被配置为使用数据简化算法来执行波前感测，例如来估计波前误差。

公开(公告)号：US20130293893A1

公开(公告)日：2013-11-07

申请号：US13932481

申请日：2013-07-01

Applicant: Pason Systems Corp.

Inventor： David Bonyuet ,  Vidi A. Saptari

IPC: G01J3/42

CPC classification number: G01J3/42 ,  G01J3/02 ,  G01J3/0235 ,  G01J3/06 ,  G01J3/32 ,  G01J2003/1247 ,  G01N21/274 ,  G01N21/314 ,  G01N21/33 ,  G01N21/3504 ,  G01N2021/3174 ,  G01N2201/129

Abstract: The invention relates to methods and systems for measuring and/or monitoring the chemical composition of a sample (e.g., a process stream), and/or detecting specific substances or compounds in a sample, using light spectroscopy such as absorption, emission and fluorescence spectroscopy. In certain embodiments, the invention relates to spectrometers with rotating narrow-band interference optical filter(s) to measure light intensity as a function of wavelength. More specifically, in certain embodiments, the invention relates to a spectrometer system with a rotatable filter assembly with a position detector rigidly attached thereto, and, in certain embodiments, the further use of various oversampling methods and techniques described herein, made particularly useful in conjunction with the rotatable filter assembly. In preferred embodiments, the rotatable filter is tilted with respect to the rotation axis, thereby providing surprisingly improved measurement stability and significantly improved control of the wavelength coverage of the filter spectrometer.

Abstract translation: 本发明涉及用于测量和/或监测样品（例如工艺流）的化学成分和/或检测样品中的特定物质或化合物的方法和系统，使用光谱如吸收，发射和荧光光谱法 。 在某些实施例中，本发明涉及具有旋转窄带干涉光学滤波器的光谱仪，以测量作为波长的函数的光强度。 更具体地说，在某些实施例中，本发明涉及一种具有可转动的过滤器组件的光谱仪系统，其中位置检测器与其刚性连接，并且在某些实施例中，进一步使用本文描述的各种过采样方法和技术，特别适用于组合 与可旋转的过滤器组件。 在优选实施例中，可旋转过滤器相对于旋转轴线倾斜，从而提供惊人的改进的测量稳定性并显着改进对过滤光谱仪的波长覆盖的控制。