公开(公告)号：US20170352521A1

公开(公告)日：2017-12-07

申请号：US15170570

申请日：2016-06-01

Applicant: Veeco Instruments Inc.

Inventor： Boris Druz ,  Rustam Yevtukhov ,  Robert Hieronymi ,  Alan V. Hayes ,  Mathew Levoso ,  Peter Porshnev

IPC: H01J37/305 ,  H01J37/08

CPC classification number: H01J37/3053 ,  H01J27/18 ,  H01J37/08 ,  H01J2237/0802

Abstract: The presently disclosed ion sources include one or more electromagnets for changing the distribution of plasma within a discharge space of an ion source. At least one of the electromagnets is oriented about an outer periphery of a tubular sidewall of the ion source and changes a distribution of the plasma in a peripheral region of the discharge space.

公开(公告)号：US08835884B2

公开(公告)日：2014-09-16

申请号：US13994812

申请日：2011-12-08

Applicant: Noriaki Arai

Inventor： Noriaki Arai

IPC: H01J37/06 ,  H01J49/00 ,  H01J29/00 ,  H01J49/26 ,  H01J27/02

CPC classification number: H01J27/022 ,  H01J29/00 ,  H01J37/06 ,  H01J37/08 ,  H01J49/26 ,  H01J2237/002 ,  H01J2237/022 ,  H01J2237/06341 ,  H01J2237/0802

Abstract: A charged particle beam apparatus including a charged particle emission gun with which cleaning of a tip is possible without stopping the operation of the charged particle emission gun for a long time and without heating the tip. The charged particle emission gun includes a cleaning photo-irradiation apparatus that generates ultraviolet light or infrared light to irradiate a tip, and an optical fiber for guiding the ultraviolet light or the infrared light toward the tip. The cleaning photo-irradiation apparatus generates ultraviolet light or an infrared light with a predetermined wavelength and intensity to desorb a molecule adsorbed on the tip through photon stimulated desorption, or to desorb a molecule adsorbed on the tip through photon stimulated desorption and ionize the desorbed molecule.

Abstract translation: 一种带电粒子束装置，包括带电粒子发射枪，可以在不停止长时间的带电粒子发射枪的操作的情况下清洁尖端而不加热尖端。 带电粒子发射枪包括产生紫外光或红外光以照射尖端的清洁光照射装置，以及用于将紫外线或红外光引向尖端的光纤。 清洗光照射装置产生具有预定波长和强度的紫外光或红外光，以通过光子激发解吸解吸附在尖端上的分子，或通过光子激发解吸解吸附在尖端上的分子，并将解吸的分子 。

公开(公告)号：US08564225B1

公开(公告)日：2013-10-22

申请号：US13585832

申请日：2012-08-15

Applicant: Kim L. Hailey ,  Robert O. Conn

Inventor： Kim L. Hailey ,  Robert O. Conn

IPC: H05H7/00

CPC classification number: H01J37/302 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/045 ,  H01J37/08 ,  H01J37/3007 ,  H01J37/3177 ,  H01J2237/002 ,  H01J2237/0432 ,  H01J2237/0437 ,  H01J2237/04735 ,  H01J2237/061 ,  H01J2237/0802 ,  H01J2237/0815 ,  H01J2237/20228 ,  H01J2237/30416 ,  H01J2237/31749 ,  H01J2237/31755 ,  H01J2237/31766 ,  H05H9/042

Abstract: An accelerator assembly includes an acceleration channel that passes in a straight line through a plurality of accelerator cells. Each cell includes an acceleration region and a drift region. The drift region includes a high voltage plate and a grid electrode, where the grid electrode is disposed between the high voltage plate and the channel. In each cell, a large DC voltage is present on the high voltage plate. A voltage on the grid electrode is controlled such that at a first time an ion in the channel is attracted toward the high voltage plate, and such that at a second time the ion is shielded and is not attracted toward the high voltage plate. In one specific example, the assembly is part of a Direct Write On Wafer (DWOW) printing system that can direct write an image onto a 300 mm diameter wafer in one minute.

Abstract translation: 加速器组件包括加速通道，其以直线通过多个加速器单元。 每个单元包括加速区和漂移区。 漂移区域包括高压板和栅格电极，其中格栅电极设置在高压板和通道之间。 在每个电池中，在高压板上存在大的直流电压。 控制栅电极上的电压，使得第一次将通道中的离子吸引到高压板，并且在第二时间离子被屏蔽并且不被吸引到高压板。 在一个具体的示例中，组件是直接写入晶圆（DWOW）打印系统的一部分，可以在一分钟内直接将图像写入到300mm直径的晶片上。

公开(公告)号：US20130264496A1

公开(公告)日：2013-10-10

申请号：US13994812

申请日：2011-12-08

Applicant: Noriaki Arai

Inventor： Noriaki Arai

IPC: H01J27/02 ,  H01J29/00

CPC classification number: H01J27/022 ,  H01J29/00 ,  H01J37/06 ,  H01J37/08 ,  H01J49/26 ,  H01J2237/002 ,  H01J2237/022 ,  H01J2237/06341 ,  H01J2237/0802

Abstract: Provided is a charged particle emission gun with which cleaning of a tip is possible without stopping the operation of the charged particle emission gun for a long time and without heating the tip. The charged particle emission gun includes a cleaning photo-irradiation apparatus that generates ultraviolet light or infrared light to irradiate a tip, and an optical fiber for guiding the ultraviolet light or the infrared light toward the tip. The cleaning photo-irradiation apparatus generates ultraviolet light or an infrared light with a predetermined wavelength and intensity to desorb a molecule adsorbed on the tip through photon stimulated desorption, or to desorb a molecule adsorbed on the tip through photon stimulated desorption and ionize the desorbed molecule.

Abstract translation: 提供了一种带电粒子发射枪，可以在不停止长时间的带电粒子发射枪的操作并且不加热尖端的情况下清洁尖端。 带电粒子发射枪包括产生紫外光或红外光以照射尖端的清洁光照射装置，以及用于将紫外线或红外光引向尖端的光纤。 清洁光照射装置产生具有预定波长和强度的紫外光或红外光，以通过光子激发解吸解吸附在尖端上的分子，或通过光子激发解吸解吸附在尖端上的分子，并将解吸的分子 。

公开(公告)号：US08541757B1

公开(公告)日：2013-09-24

申请号：US13585829

申请日：2012-08-14

Applicant: Kim L. Hailey ,  Robert O. Conn

Inventor： Kim L. Hailey ,  Robert O. Conn

IPC: H01H1/54

CPC classification number: H01J37/3174 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/08 ,  H01J37/09 ,  H01J37/3177 ,  H01J2237/0437 ,  H01J2237/0802 ,  H01J2237/31755

Abstract: An assembly includes a cold ion source and a chip. The cold ion source is fixed to the chip so that ions from the ion source can enter an acceleration channel in the chip. In one specific example, the ion source includes an ion exchange membrane that produces cold ions in that the ions as produced have an energy of less than 30 eV. The chip includes a substrate (such as a semiconductor substrate or a glass substrate) and a dielectric layer disposed on substrate, where the acceleration channel is a channel formed into the dielectric layer. In one specific example, the assembly is part of a Direct Write On Wafer (DWOW) printing system. The DWOW printing system is useful in semiconductor processing in that it can direct write an image onto a 300 mm diameter wafer in one minute.

Abstract translation: 组件包括冷离子源和芯片。 冷离子源固定在芯片上，使得离子源的离子能够进入芯片中的加速通道。 在一个具体实例中，离子源包括产生冷离子的离子交换膜，因为产生的离子具有小于30eV的能量。 该芯片包括衬底（诸如半导体衬底或玻璃衬底）以及设置在衬底上的电介质层，其中加速通道是形成在电介质层中的通道。 在一个具体示例中，组件是直接写入晶圆（DWOW）打印系统的一部分。 DWOW打印系统在半导体处理中是有用的，因为它可以在一分钟内直接将图像写入到300mm直径的晶片上。

公开(公告)号：US20130140977A1

公开(公告)日：2013-06-06

申请号：US13812700

申请日：2011-06-15

Applicant: Shunichi Watanabe ,  Takashi Onishi ,  Minoru Kaneda ,  Hisaya Murakoshi

Inventor： Shunichi Watanabe ,  Takashi Onishi ,  Minoru Kaneda ,  Hisaya Murakoshi

IPC: H01J29/48

CPC classification number: H01J29/484 ,  H01J3/02 ,  H01J3/027 ,  H01J3/40 ,  H01J29/488 ,  H01J37/026 ,  H01J37/073 ,  H01J37/248 ,  H01J2237/038 ,  H01J2237/06341 ,  H01J2237/0802

Abstract: In an accelerating tube which uses a conductive insulator, there is a possibility that the dopant concentration on a surface of the conductive insulator becomes non-uniform so that the surface resistance of the conductive insulator becomes non-uniform. Accordingly, a circumferential groove is formed on the inner surface of the conductive insulator accelerating tube in plural stages, and metal is metalized along inner portions of the grooves. When the resistance of a specific portion on the surface of the accelerating tube differs from the resistance of an area around the specific portion, the potential of the metalized region on the inner surface of the accelerating tube becomes a fixed value and hence, the potential distribution on the inner surface of the accelerating tube in the vertical direction can be maintained substantially equal without regard to the circumferential direction.

Abstract translation: 在使用导电绝缘体的加速管中，导电绝缘体的表面上的掺杂剂浓度有可能变得不均匀，使得导电绝缘体的表面电阻变得不均匀。 因此，在导电绝缘体加速管的内表面上形成有多个周向槽，并且金属沿着槽的内部被金属化。 当加速管表面上的特定部分的电阻与特定部分周围的区域的电阻不同时，加速管内表面上的金属化区域的电位变为固定值，因此电位分布 在加速管的内表面上，在垂直方向上可以保持基本上相等于圆周方向。

公开(公告)号：US20090121148A1

公开(公告)日：2009-05-14

申请号：US11909903

申请日：2006-03-29

Applicant: Dieter Pohl ,  Hans-Werner Fink ,  Julien Toquant ,  Conrad Escher ,  Sandra Thomann ,  Cornel Andreoli

Inventor： Dieter Pohl ,  Hans-Werner Fink ,  Julien Toquant ,  Conrad Escher ,  Sandra Thomann ,  Cornel Andreoli

IPC: H01J3/14 ,  H01J27/00

CPC classification number: H01J27/26 ,  H01J37/08 ,  H01J2237/0802 ,  H01J2237/31749

Abstract: Ion sources or generators for focused ion beam emission (FIB) applications emitting ion beams into vacuum or a gas are used in industry and research for the characterization and processing of surfaces. With appropriate focusing, such ion beams can be confined to diameters of a few nanometers. The tip of technical FIB generators for producing such focused beams consists of a liquid metal, gallium in general, which tends to fluctuate during operation. This has a negative influence on the stability of the emission current and the focus definition. It is also possible to generate an FIB with solid tips, consisting of a solid metal, but such tips deteriorate rapidly during operation due to erosion of material from the tip apex. The present invention concerns a novel FIB source generating free space ion beams from a solid source but does not exhibit the above-mentioned erosion effect at the apex. The novel FIB generator consists of a combination of two essentially unitary bodies, a solid electrolyte body with a sharp tip and a solid ion reservoir body, both bodies having close contact with each other. The reservoir is made of or contains the same material, in general a metal as the mobile ions. Loss of ions from the electrolyte body due to emission is compensated by an inflow of ions from the reservoir body during operation. This practically preserves electro-neutrality which is a precondition for continuous mode operation. Erosion of the tip of the electrolyte body does not occur since the counter ions form a solid matrix and the emitted ions are replenished during operation.

Abstract translation: 用于将离子束发射到真空或气体中的聚焦离子束发射（FIB）应用的离子源或发生器用于表面的表征和处理的工业和研究。 通过适当的聚焦，这种离子束可以限制在几纳米的直径。 用于生产这种聚焦光束的技术FIB发生器的尖端通常由液态金属镓组成，其通常在操作期间波动。 这对发射电流的稳定性和焦点定义有负面影响。 也可以产生具有由固体金属组成的固体尖端的FIB，但是由于来自顶端尖端的材料的侵蚀，在操作期间这些尖端会迅速恶化。 本发明涉及一种从固体源产生自由空间离子束的新型FIB源，但是在顶点处不产生上述侵蚀效应。 新型FIB发生器由两个基本上单体的组合组成，具有尖锐尖端的固体电解质体和固体离子储存体，两个体彼此紧密接触。 储存器由或含有相同的材料制成，通常为与移动离子一样的金属。 由于排放而导致的电解质体离子的损失由操作期间来自储存体的离子的流入来补偿。 这实际上保持了电中性，这是连续模式操作的前提条件。 由于反离子形成固体基体并且在运行期间补充发射的离子，因此不会发生电解质体的尖端的侵蚀。

公开(公告)号：US20190157036A1

公开(公告)日：2019-05-23

申请号：US16257786

申请日：2019-01-25

Applicant: Massachusetts Institute of Technology

Inventor： Paulo C. Lozano ,  Steven Mark Arestie

IPC: H01J37/08 ,  B01L3/00 ,  C25F3/14 ,  H01J49/04 ,  H01J1/05 ,  H01J9/02

CPC classification number: H01J37/08 ,  B01L3/502715 ,  C25F3/14 ,  H01J1/05 ,  H01J9/02 ,  H01J49/0445 ,  H01J2237/0802 ,  H01J2237/317

Abstract: An ionic liquid ion source can include a microfabricated body including a base and a tip. The body can be formed of a porous material compatible with at least one of an ionic liquid or room-temperature molten salt. The body can have a pore size gradient that decreases from the base of the body to the tip of the body, such that the at least one of an ionic liquid or room-temperature molten salt is capable of being transported through capillarity from the base to the tip.

公开(公告)号：US20170110284A1

公开(公告)日：2017-04-20

申请号：US15272574

申请日：2016-09-22

Applicant: Massachusetts Institute of Technology

Inventor： Paulo C. Lozano ,  Steven Mark Arestie

IPC: H01J37/08

CPC classification number: H01J37/08 ,  B01L3/502715 ,  C25F3/14 ,  H01J1/05 ,  H01J9/02 ,  H01J49/0445 ,  H01J2237/0802 ,  H01J2237/317

Abstract: An ionic liquid ion source can include a microfabricated body including a base and a tip. The body can be formed of a porous material compatible with at least one of an ionic liquid or room-temperature molten salt. The body can have a pore size gradient that decreases from the base of the body to the tip of the body, such that the at least one of an ionic liquid or room-temperature molten salt is capable of being transported through capillarity from the base to the tip.

公开(公告)号：US20170076901A1

公开(公告)日：2017-03-16

申请号：US15361911

申请日：2016-11-28

Applicant: Gregory Hirsch

Inventor： Gregory Hirsch

IPC: H01J9/02 ,  C23C14/24 ,  C23C14/16 ,  C25D3/50 ,  B21C1/16 ,  C25D17/00 ,  H01J37/073 ,  H01J37/08 ,  H05G2/00 ,  C23C14/58 ,  C25D5/50

CPC classification number: H01J9/025 ,  B21C1/16 ,  C23C14/16 ,  C23C14/24 ,  C23C14/5806 ,  C25D3/50 ,  C25D5/50 ,  C25D17/00 ,  H01J1/3044 ,  H01J37/073 ,  H01J37/08 ,  H01J37/3178 ,  H01J2201/30411 ,  H01J2209/0226 ,  H01J2237/0802 ,  H01J2237/0805 ,  H05G2/005

Abstract: Optimization techniques are disclosed for producing sharp and stable tips/nanotips relying on liquid Taylor cones created from electrically conductive materials with high melting points. A wire substrate of such a material with a preform end in the shape of a regular or concave cone, is first melted with a focused laser beam. Under the influence of a high positive potential, a Taylor cone in a liquid/molten state is formed at that end. The cone is then quenched upon cessation of the laser power, thus freezing the Taylor cone. The tip of the frozen Taylor cone is reheated by the laser to allow its precise localized melting and shaping. Tips thus obtained yield desirable end-forms suitable as electron field emission sources for a variety of applications. In-situ regeneration of the tip is readily accomplished. These tips can also be employed as regenerable bright ion sources using field ionization/desorption of introduced chemical species.

Abstract translation: 公开了优化技术，用于产生依赖于由具有高熔点的导电材料产生的液体泰勒锥的尖锐和稳定的尖端/纳米片。 首先用聚焦激光束熔化这种具有预制件端部为规则的或凹形的形状的材料的线基材。 在高正电位的影响下，在此端形成液态/熔融状态的泰勒锥。 然后在停止激光功率时，锥体被淬火，从而冻结泰勒锥。 冷冻泰勒锥的尖端被激光器重新加热，以允许其精确的局部熔化和成型。 如此获得的提示产生适合作为各种应用的电子场发射源的期望的终端形式。 尖端的原位再生容易实现。 这些尖端也可以用作引入化学物质的场电离/解吸的可再生的明亮离子源。