公开(公告)号：US10561060B2

公开(公告)日：2020-02-18

申请号：US16106201

申请日：2018-08-21

Applicant: TOPCON CORPORATION

Inventor： Taichi Yuasa

IPC: G01J3/02 ,  A01C21/00 ,  G01J3/10 ,  G01J3/427 ,  G01N21/3563 ,  G01N21/31 ,  G01N21/359 ,  G01N21/17

Abstract: A light source section configured to couple a plurality of laser beams having different wavelengths and emit measuring light; an illuminating section configured to illuminate a measurement target at a predetermined angle; a light receiving section configured to receive reflected measuring light from the measurement target; and a controlling section configured to compute a reflectance at each of the wavelengths, based on a light receiving result. The light source section includes: a first and a second light source configured to emit each laser beams having different wavelengths; and a dichroic mirror disposed in optical axes of the laser beams intersected, configured to combine the laser beams. The light receiving section includes: a first, a second and a third light receiving unit configured to receive the reflected measuring light from different distance. The controlling section is configured to select which of results from each light receiving unit to use.

公开(公告)号：US20190137337A1

公开(公告)日：2019-05-09

申请号：US16095323

申请日：2017-04-13

Applicant: Apple Inc.

Inventor： Trent D. RIDDER ,  Mark Alan ARBORE ,  Gary SHAMBAT ,  Robert CHEN ,  David I. SIMON ,  Miikka M. KANGAS

IPC: G01J3/427 ,  G01J3/28 ,  G01J3/10 ,  G01N21/35

Abstract: Methods and systems for measuring one or more properties of a sample are disclosed. The methods and systems can include multiplexing measurements of signals associated with a plurality of wavelengths without adding any signal independent noise and without increasing the total measurement time. One or more levels of encoding, where, in some examples, a level of encoding can be nested within one or more other levels of encoding. Multiplexing can include wavelength, position, and detector state multiplexing. In some examples, SNR can be enhanced by grouping together one or more signals based on one or more properties including, but not limited to, signal intensity, drift properties, optical power detected, wavelength, location within one or more components, material properties of the light sources, and electrical power. In some examples, the system can be configured for optimizing the conditions of each group individually based on the properties of a given group.

公开(公告)号：US20190025207A1

公开(公告)日：2019-01-24

申请号：US16056531

申请日：2018-08-07

Applicant: Airware, Inc.

Inventor： Jacob Y. Wong ,  Thomas Campbell

IPC: G01N21/59 ,  G01N33/49 ,  G01J3/427

Abstract: For determining concentration of targeted molecules MG in a liquid sample admixed with interfering molecules MJ which overlap their absorption band, a special NDIR sampling and calibration technique is employed. Besides the signal source, a reference and one or more interference sources are added. The selection of the wavelength for the interference sources enables its measured transmittance value to be used for deciding the validity of the calibration curve for molecules MG in the liquid sample. This value can further be used to adjust the calibration curve via a parameter linking the transmittances measured at the signal and interference wavelength channels in order to assure its validity.

公开(公告)号：US10101266B2

公开(公告)日：2018-10-16

申请号：US15023721

申请日：2014-09-17

Applicant: Vaisala Oyj

Inventor： Veli-Pekka Viitanen

IPC: G01N21/25 ,  G01N21/31 ,  G01J3/26 ,  G01J3/427 ,  G01N21/3504 ,  G01N33/28 ,  G01J3/42 ,  G01N21/27

Abstract: The present invention concerns a method and system for gas concentration measurement of gas or gas mixtures dissolved in liquids. A gas or gas mixture dissolved in a liquid sample is extracted from the liquid sample using an extraction system and conducted into a measurement chamber. Then a measurement signal is generated by means of a radiant source and the measurement signal is directed to a measurement object in a measurement chamber containing the gas or gas mixture to be measured. The measurement signal is filtered using at least two wavelengths, whereupon the filtering is preferably implemented by means of an electrically tunable, short-resonator Fabry-Perot interferometer. Then the filtered measurement signals are detected my means of a detector.

公开(公告)号：US10101202B2

公开(公告)日：2018-10-16

申请号：US15598152

申请日：2017-05-17

Applicant: University of Maribor

Inventor： Denis Donlagic ,  Simon Pevec

IPC: G01D5/353 ,  G01J3/02 ,  G01J3/28 ,  G01J3/10 ,  G01L9/00 ,  G01J3/26 ,  G01J3/32 ,  G01J3/42 ,  G01J3/427

Abstract: An optical system having an optical sensor with an ultra-short FP cavity, and a low-resolution optical interrogation system coupled to the optical sensor and operational to send light signals and receive light signals to and from the optical sensor is disclosed. The optical system may operate in a wavelength range including the visible and near-infrared range. Optical assemblies and methods of interrogating optical sensors are provided, as are numerous other aspects.

公开(公告)号：US10060793B2

公开(公告)日：2018-08-28

申请号：US15000488

申请日：2016-01-19

Applicant: Xerox Corporation

Inventor： David C. Craig ,  Robert P. Herloski ,  David A. Mantell ,  Douglas E. Proctor ,  Jonathan B. Hunter ,  Stuart Schweid

IPC: G01J3/02 ,  G01J3/427 ,  G01J3/10 ,  G01J3/28

CPC classification number: G01J3/0297 ,  G01J3/027 ,  G01J3/10 ,  G01J3/28 ,  G01J3/2803 ,  G01J3/427 ,  G01J3/513 ,  G01J3/524 ,  G01J2003/2806

Abstract: A method of spatially and spectrally calibrating a spectrophotometer including: a) emitting a white light illumination output from a full width illumination source; b) illuminating a test patch with the white light illumination output; c) reflecting a portion of the white light illumination output from the test patch to form a white light reflected illumination output; d) receiving the white light reflected illumination output at first, second and third rows of photosensitive elements to form a first calibration data set; e) emitting a cyan light illumination output from the full width illumination source; f) illuminating the test patch with the cyan light illumination output; g) reflecting a portion of the cyan light illumination output from the test patch to form a cyan light reflected illumination output; and, h) receiving the cyan light reflected illumination output at the second and third rows of photosensitive elements to form a second calibration data set.

公开(公告)号：US09921152B2

公开(公告)日：2018-03-20

申请号：US15336705

申请日：2016-10-27

Applicant: KLA-Tencor Corporation

Inventor： Shankar Krishnan ,  David Y. Wang

IPC: G01J3/40 ,  G01N21/3563 ,  G01N21/21 ,  G01J3/18 ,  G01J3/427

CPC classification number: G01N21/3563 ,  G01J3/0224 ,  G01J3/18 ,  G01J3/2803 ,  G01J3/36 ,  G01J3/427 ,  G01J2003/4275 ,  G01N21/211 ,  G01N21/31 ,  G01N21/9501 ,  G01N2021/213 ,  G01N2021/3568

Abstract: Methods and systems for performing simultaneous spectroscopic measurements of semiconductor structures at ultraviolet, visible, and infrared wavelengths are presented herein. In another aspect, wavelength errors are reduced by orienting the direction of wavelength dispersion on the detector surface perpendicular to the projection of the plane of incidence onto the detector surface. In another aspect, a broad range of infrared wavelengths are detected by a detector that includes multiple photosensitive areas having different sensitivity characteristics. Collected light is linearly dispersed across the surface of the detector according to wavelength. Each different photosensitive area is arranged on the detector to sense a different range of incident wavelengths. In this manner, a broad range of infrared wavelengths are detected with high signal to noise ratio by a single detector. These features enable high throughput measurements of high aspect ratio structures with high throughput, precision, and accuracy.

公开(公告)号：US09829380B2

公开(公告)日：2017-11-28

申请号：US14427481

申请日：2014-06-20

Applicant: Panasonic Intellectual Property Management Co., Ltd.

Inventor： Tatsuo Itoh ,  Koichi Kusukame ,  Aki Yoneda

IPC: G01J4/00 ,  G01J3/46 ,  G01J3/427 ,  G01N21/359 ,  G01J3/02 ,  G01J3/433 ,  G01J3/10 ,  G01J3/28 ,  G01J3/32 ,  G01J3/42 ,  G01J3/06 ,  G01J1/42

CPC classification number: G01J3/427 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/0224 ,  G01J3/0237 ,  G01J3/0243 ,  G01J3/0278 ,  G01J3/0289 ,  G01J3/10 ,  G01J3/2803 ,  G01J3/32 ,  G01J3/42 ,  G01J3/433 ,  G01J2001/4242 ,  G01J2003/064 ,  G01J2003/102 ,  G01J2003/104 ,  G01J2003/106 ,  G01N21/359

Abstract: A light radiating portion radiates light with wavelength λ1 having predetermined absorptivity for an object and light with wavelength λ2 having smaller absorptivity for the object than the wavelength λ1, to a target, so as to scan in 2-dimensional directions. A light receiving portion receives scattered lights reflected by the target based on light with wavelength λ1 and light with wavelength λ2. A measuring portion generates information used for detection of the object at the target, based on difference between the two scattered lights with wavelength λ1 and wavelength λ2 received by the light receiving portion. An output portion outputs whether or not the object is present at the target, by 2-dimensional area information, based on scanning by the light radiating portion and information generated by the measuring portion.

公开(公告)号：US20170205342A1

公开(公告)日：2017-07-20

申请号：US15336705

申请日：2016-10-27

Applicant: KLA-Tencor Corporation

Inventor： Shankar Krishnan ,  David Y. Wang

IPC: G01N21/3563 ,  G01J3/18 ,  G01J3/427 ,  G01N21/21

CPC classification number: G01N21/3563 ,  G01J3/0224 ,  G01J3/18 ,  G01J3/2803 ,  G01J3/36 ,  G01J3/427 ,  G01J2003/4275 ,  G01N21/211 ,  G01N21/31 ,  G01N21/9501 ,  G01N2021/213 ,  G01N2021/3568

Abstract: Methods and systems for performing simultaneous spectroscopic measurements of semiconductor structures at ultraviolet, visible, and infrared wavelengths are presented herein. In another aspect, wavelength errors are reduced by orienting the direction of wavelength dispersion on the detector surface perpendicular to the projection of the plane of incidence onto the detector surface. In another aspect, a broad range of infrared wavelengths are detected by a detector that includes multiple photosensitive areas having different sensitivity characteristics. Collected light is linearly dispersed across the surface of the detector according to wavelength. Each different photosensitive area is arranged on the detector to sense a different range of incident wavelengths. In this manner, a broad range of infrared wavelengths are detected with high signal to noise ratio by a single detector. These features enable high throughput measurements of high aspect ratio structures with high throughput, precision, and accuracy.

公开(公告)号：US09448112B2

公开(公告)日：2016-09-20

申请号：US13931091

申请日：2013-06-28

Applicant: Spectro Scientific, Inc.

Inventor： James Greer ,  Robert J. Guthrie ,  John Coates

IPC: G01N21/00 ,  G01J3/42 ,  G01J3/02 ,  G01J3/10 ,  G01J3/427 ,  G01N21/03 ,  G01N21/31 ,  G01N21/3577 ,  G01N21/33

CPC classification number: G01J3/42 ,  G01J3/0218 ,  G01J3/0264 ,  G01J3/027 ,  G01J3/0291 ,  G01J3/0294 ,  G01J3/10 ,  G01J3/427 ,  G01J2003/106 ,  G01N21/0303 ,  G01N21/31 ,  G01N21/33 ,  G01N21/3577

Abstract: A simple and compact apparatus, and a method, for determining the characteristics of a number of fluids used in the truck and automotive industries including coolant, bio-diesel, gas-ethanol and diesel engine fluid (DEF). The apparatus includes a sample container providing optical paths of different lengths for making measurements on a sample. The dual path length design allows the apparatus to capture both NIR and UV spectral ranges. The qualitative and quantitative properties of the fluid under test are compared to test results under normal conditions or to the properties of unused fluid. Two light sources are used within a spectrometer with each source being associated with a different optical path length.

Abstract translation: 用于确定卡车和汽车工业中使用的许多流体的特性的简单且紧凑的装置和方法，包括冷却剂，生物柴油，汽油 - 乙醇和柴油机流体（DEF）。 该装置包括提供不同长度的光路以便对样品进行测量的样品容器。 双路径长度设计允许设备捕获NIR和UV光谱范围。 将待测流体的定性和定量性质与正常条件下的试验结果或未使用流体的性质进行比较。 在光谱仪中使用两个光源，每个光源与不同的光路长度相关联。