公开(公告)号：US07397560B2

公开(公告)日：2008-07-08

申请号：US11397064

申请日：2006-04-04

Applicant: Karen L. Seaward ,  David T. Dutton

Inventor： Karen L. Seaward ,  David T. Dutton

IPC: G01J3/443 ,  G01N21/73 ,  G01N21/94

CPC classification number: G01J3/443 ,  G01J3/02 ,  G01J3/0272 ,  G01N21/67 ,  G01N21/94

Abstract: A contamination detector in accordance with one embodiment of the invention includes a plasma generation system operable to direct an atmospheric plasma discharge towards a surface. The contamination detector further includes a light capture system to capture light generated by interaction of the atmospheric plasma discharge with the surface. The light capture system guides the captured light to an optical detection system configured to detect a contaminant.

Abstract translation: 根据本发明的一个实施例的污染检测器包括等离子体产生系统，其可操作以将大气等离子体放电引向表面。 污染检测器还包括光捕获系统，以捕获由大气等离子体放电与表面的相互作用产生的光。 光捕获系统将捕获的光引导到被配置为检测污染物的光学检测系统。

公开(公告)号：US20080094624A1

公开(公告)日：2008-04-24

申请号：US11686820

申请日：2007-03-15

Applicant: KEVIN HARSH ,  BRIAN SCHAIBLE ,  WENGE ZHANG ,  WILLIAM GARRETT ,  CHRISTOPHER P. MATTISON

Inventor： KEVIN HARSH ,  BRIAN SCHAIBLE ,  WENGE ZHANG ,  WILLIAM GARRETT ,  CHRISTOPHER P. MATTISON

IPC: G01J3/443

CPC classification number: G01J3/02 ,  G01J3/0208 ,  G01J3/0262 ,  G01J3/0291 ,  G01J3/44 ,  G01J3/443 ,  G01N21/274 ,  G01N21/6428

Abstract: An improved optical sensor and methods for measuring the presence of various materials or constituents in a fluid sample uses one or more reactive materials in a fluid environment. The reactive materials have optical properties that change in the presence of one or more target materials that may be present in the environment. One or more optical emitters generate light that is directed to the reactive material(s), and one or more optical detectors receive light from the reactive material(s), and the presence or absence of the target material is determined based on the light received at the optical detector(s). The reactive material(s), emitter(s), and detector(s) are selected based on the desired target material to be sensed.

Abstract translation: 用于测量流体样品中各种材料或组分的存在的改进的光学传感器和方法使用流体环境中的一种或多种反应性材料。 反应性材料具有在可能存在于环境中的一种或多种目标材料存在下变化的光学性质。 一个或多个光学发射器产生被引导到反应性材料的光，并且一个或多个光学检测器接收来自反应性材料的光，并且基于所接收的光来确定目标材料的存在或不存在 在光学检测器处。 反应性材料，发射器和检测器基于要感测的期望目标材料来选择。

公开(公告)号：US07336354B2

公开(公告)日：2008-02-26

申请号：US10546886

申请日：2004-02-27

Applicant: Yin Sheng Sun ,  Martin Keith Masters

Inventor： Yin Sheng Sun ,  Martin Keith Masters

IPC: G01J3/42 ,  G01J3/32 ,  G01J3/443

CPC classification number: G01J3/10 ,  G01J3/02 ,  G01J3/0208 ,  G01J3/0224 ,  G01J3/42 ,  G01J3/44 ,  G01N21/253

Abstract: A spectrophotometer having an optical system for directing a beam of substantially monochromatic excitation light to a liquid sample contained in a well (3) of a well plate for interaction with the sample for absorption or emission measurements to analyse the sample. The optical system includes two apertures (46, 28) for establishing a Kohler illumination region outside the well, that is an excitation beam region between conjugate images (18, 21) of the two apertures. This excitation beam region is then demagnified and imaged (10, 9) into the well (3). The invention provides for the shape of the Kohler illumination region to correspond to the shape of the well space so that all of the liquid sample is uniformly illuminated without the well obstructing any portion of the illuminating excitation beam of light. Advantages of the invention are that the Kohler illumination region of the excitation beam is convenient for insertion of filters (20), apertures and polarisers (19) into the excitation optical system and permits use of small and thus cheaper filters and polarisers. Also the invention provides for accurate absorption or emission measurements from a liquid sample in a well notwithstanding that the sample may only partially fill the well.

Abstract translation: 一种分光光度计，其具有用于将基本上单色的激发光束射入包含在孔板的孔（3）中的液体样品的光学系统，用于与样品相互作用以进行吸收或发射测量以分析样品。 光学系统包括用于在井外建立科勒照明区域的两个孔（46,28），即两个孔的共轭图像（18,21）之间的激发束区域。 然后将该激发束区域缩小并成像（10,9）到井（3）中。 本发明提供了科勒照明区域的形状以对应于井的空间形状，使得所有的液体样品均匀地被照射，而不会妨碍照射激发光束的任何部分。 本发明的优点是激发光束的科勒照明区域便于将滤光器（20），孔径和偏光镜（19）插入激发光学系统中，并且允许使用小且因此更便宜的滤光器和偏振器。 此外，本发明提供了从井中的液体样品进行精确的吸收或发射测量，尽管样品可能仅部分填充井。

公开(公告)号：US06975393B2

公开(公告)日：2005-12-13

申请号：US10386584

申请日：2003-03-11

Applicant: Jacob Mettes

Inventor： Jacob Mettes

IPC: G01N21/68 ,  G01J3/443

CPC classification number: H01J37/32981 ,  G01N21/68 ,  H01J37/32935

Abstract: Afterglow spectroscopy allows observing light emission of gaseous species in absence of direct plasma light. This absence avoids the creation of a background spectrum obscuring weak emission from trace species. The invention describes a flowing afterglow version monitoring in-situ the cleanup of vacuum tools during pump/purge cycles. The invention also describes an intermittent afterglow version suitable for trace gas analysis at atmospheric pressure.

Abstract translation: 余辉光谱法允许在没有直接等离子体光的情况下观察气态物质的发光。 这种缺陷避免了产生背景光谱，掩盖了微量物质的弱发射。 本发明描述了在泵/清洗循环期间原位监测真空工具的流动余辉版本。 本发明还描述了适用于大气压力下的痕量气体分析的间歇余辉型。

公开(公告)号：US20050218319A1

公开(公告)日：2005-10-06

申请号：US11089023

申请日：2005-03-25

Applicant: Dmitry Bandura ,  Vladimir Baranov ,  Scott Tanner

Inventor： Dmitry Bandura ,  Vladimir Baranov ,  Scott Tanner

IPC: G01J3/443 ,  G01N15/00 ,  G01N15/14 ,  H01J49/00 ,  H01J49/04 ,  H01J49/10 ,  H01J49/16 ,  H01J49/26 ,  H01J49/40

CPC classification number: G01N15/1404 ,  G01N2015/0065 ,  G01N2458/15 ,  H01J49/004 ,  H01J49/04 ,  H01J49/0431

Abstract: An apparatus (100) for sequentially analyzing particles such as single cells or single beads, by spectrometry. The apparatus, an elemental flow cytometer, includes means (102) for sequential particle introduction, means (104) to vaporize, atomize and excite or ionize the particles, or an elemental tag associated with an analyte on the particles, and means (106) to analyze the elemental composition of the vaporized, atomized and excited or ionized particles, or an elemental tag associated with the particles. Methods for sequentially analyzing particles such as singe cells or single beads by spectrometry are also described.

Abstract translation: 一种用于通过光谱法顺序分析诸如单细胞或单珠的颗粒的装置（100）。 装置，元件流式细胞仪，包括用于顺序颗粒引入的装置（102），用于蒸发，雾化和激发或电离颗粒的装置（104）或与颗粒上的分析物相关联的元素标签，以及装置（106） 分析蒸发的，雾化的和激发的或离子化的颗粒或与颗粒相关的元素标签的元素组成。 还描述了通过光谱法顺序分析诸如单细胞或单个珠粒子的方法。

公开(公告)号：US20050190364A1

公开(公告)日：2005-09-01

申请号：US11064484

申请日：2005-02-24

Applicant: Gloria Sogan ,  Julien Bounouar ,  Jean-Pierre Desbiolles ,  Isabelle Gaurand

Inventor： Gloria Sogan ,  Julien Bounouar ,  Jean-Pierre Desbiolles ,  Isabelle Gaurand

IPC: G01J3/443 ,  G01N21/27 ,  G01N21/68 ,  G01N21/73 ,  G01J3/30

CPC classification number: G01J3/443 ,  G01N21/274 ,  G01N21/68 ,  G01N2201/121 ,  G01N2201/1218 ,  G01N2201/127

Abstract: The invention provides a method and apparatus for detecting minority gaseous species in a mixture by light-emission spectroscopy by means of an optical spectrometer (8), in which the radiation emitted by a plasma (4) present in the gas mixture for analysis is used and, in the spectrum of said radiation, lines are identified of a majority gaseous species that present amplitudes that are sensitive to the presence of a minority species, and information about the concentration of a minority gaseous species is deduced from the amplitude(s) of said sensitive line(s). This makes it possible to monitor minority gaseous species in real time.

Abstract translation: 本发明提供了一种用于通过光谱仪（8）通过发光光谱检测混合物中的少数气态物质的方法和装置，其中使用由用于分析的气体混合物中存在的等离子体（4）发射的辐射 并且在所述辐射的光谱中，识别出存在对少数物种的存在敏感的振幅的多数气态物种的品系，并且关于少数种类的浓度的信息是从 说敏感线。 这使得可以实时监测少数气态物质。

公开(公告)号：US20050078310A1

公开(公告)日：2005-04-14

申请号：US10682017

申请日：2003-10-09

Applicant: Neal Rueger ,  Kevin Hamer

Inventor： Neal Rueger ,  Kevin Hamer

IPC: G01J3/30 ,  G01J3/443 ,  G01N21/68

CPC classification number: G01J3/443 ,  G01N21/68

Abstract: A method and system are presented for monitoring the optical emissions associated a plasma used in integrated circuit fabrication. The optical emissions may be processed by an optical spectrometer to obtain a spectrum. The spectrum may be analyzed to determine the presence of particular disassociated species which are indicative of the presence of a suitable plasma and which may be desired for a deposition, etching, or cleaning process.

Abstract translation: 提出了一种用于监测与集成电路制造中使用的等离子体相关的光发射的方法和系统。 光发射可由光谱仪处理以获得光谱。 可以分析光谱以确定指示合适的等离子体的存在并且其可能对于沉积，蚀刻或清洁过程是期望的特定解离物种的存在。

公开(公告)号：US20050046825A1

公开(公告)日：2005-03-03

申请号：US10897314

申请日：2004-07-22

Applicant: Gary Powell ,  Herbert Litvak

Inventor： Gary Powell ,  Herbert Litvak

IPC: G01J20060101 ,  G01J3/443 ,  G01N21/00 ,  G01N21/73

CPC classification number: G01N21/73 ,  Y10T436/106664

Abstract: The present invention relates to monitoring chemicals in a process chamber using a spectrometer having a plasma generator, based on patterns over time of chemical consumption. The relevant patterns may include a change in consumption, reaching a consumption plateau, absence of consumption, or presence of consumption. In some embodiments, advancing to a next step in forming structures on the workpiece depends on the pattern of consumption meeting a process criteria. In other embodiments, a processing time standard is established, based on analysis of the relevant patterns. Yet other embodiments relate to controlling work on a workpiece, based on analysis of the relevant patterns. The invention may be either a process or a device including logic and resources to carry out a process.

Abstract translation: 本发明涉及使用具有等离子体发生器的光谱仪的处理室中的化学品监测，其基于化学消耗时间的图形。 相关模式可能包括消费变化，达到消费高原，消费消费或消费存在。 在一些实施例中，前进到在工件上形成结构的下一步骤取决于符合工艺标准的消耗模式。 在其他实施例中，基于相关模式的分析来建立处理时间标准。 其他实施例涉及基于相关模式的分析来控制工件上的工作。 本发明可以是包括用于执行过程的逻辑和资源的过程或设备。

公开(公告)号：US6090302A

公开(公告)日：2000-07-18

申请号：US65006

申请日：1998-04-23

Applicant: Michael Lane Smith, Jr. ,  Joel O'Don Stevenson ,  Pamela Peardon Denise Ward

Inventor： Michael Lane Smith, Jr. ,  Joel O'Don Stevenson ,  Pamela Peardon Denise Ward

IPC: G01J3/00 ,  G01J3/28 ,  G01J3/443 ,  C23F1/00

CPC classification number: G01J3/443 ,  G01J3/28 ,  G01J2003/2866

Abstract: The invention generally relates to various aspects of a plasma process, and more specifically the monitoring of such plasma processes. One aspect relates in at least some manner to calibrating or initializing a plasma monitoring assembly. This type of calibration may be used to address wavelength shifts, intensity shifts, or both associated with optical emissions data obtained on a plasma process. A calibration light may be directed at a window through which optical emissions data is being obtained to determine the effect, if any, that the inner surface of the window is having on the optical emissions data being obtained therethrough, the operation of the optical emissions data gathering device, or both. Another aspect relates in at least some manner to various types of evaluations which may be undertaken of a plasma process which was run, and more typically one which is currently being run, within the processing chamber. Plasma health evaluations and process identification through optical emissions analysis are included in this aspect. Yet another aspect associated with the present invention relates in at least some manner to the endpoint of a plasma process (e.g., plasma recipe, plasma clean, conditioning wafer operation) or discrete/discernible portion thereof (e.g., a plasma step of a multiple step plasma recipe). A final aspect associated with the present invention relates to how one or more of the above-noted aspects may be implemented into a semiconductor fabrication facility, such as the distribution of wafers to a wafer production system.

公开(公告)号：US6069695A

公开(公告)日：2000-05-30

申请号：US194590

申请日：1998-11-30

Applicant: Klaus Rohr ,  Jochen Eicher ,  Norbert Muller

Inventor： Klaus Rohr ,  Jochen Eicher ,  Norbert Muller

IPC: G01N21/63 ,  G01N21/39 ,  G01N21/71 ,  G01J3/30 ,  G01J3/443

CPC classification number: G01N21/718

Abstract: A pulsed laser is employed for quantitative spectral analysis of halogen-containing, nonmetallic or at most partially metallic materials in combination with an image recorder, a spectrometer and a CCD camera, by detecting, summing and analysing the luminous intensity of at least a volume slice from the expansion cone of the plasma, this making it possible, advantageously, for temperature and density gradients to be measured.

Abstract translation: PCT No.PCT / EP97 / 03360 Sec。 371日期：1998年11月30日 102（e）日期1998年11月30日PCT提交1997年6月26日PCT公布。 出版物WO98 / 00702 日期1998年1月8日采用脉冲激光器对含卤素，非金属或至多部分金属材料进行定量光谱分析，结合图像记录仪，光谱仪和CCD照相机，通过检测，求和分析发光强度 至少从等离子体的膨胀锥体的体积切片，这使得有可能有​​利地测量温度和密度梯度。