High-Brightness, Long Life Thermionic Cathode and Methods of its Fabrication
    23.
    发明申请
    High-Brightness, Long Life Thermionic Cathode and Methods of its Fabrication 有权
    高亮度,长寿命热电阴极及其制作方法

    公开(公告)号:US20140097736A1

    公开(公告)日:2014-04-10

    申请号:US13644281

    申请日:2012-10-04

    Inventor: Victor Katsap

    Abstract: An improved cathode comprises a cone-shaped emitter with a carbon-based coating applied to the emitter cone surface, in which there is a narrow annular gap between the emitter body and the carbon coating. The gap prevents direct contact between the carbon coating and the crystalline emitting material, thereby preventing damaging interactions and extending the useful lifetime of the cathode.

    Abstract translation: 改进的阴极包括锥形发射器,其具有施加到发射体锥表面的碳基涂层,其中在发射体和碳涂层之间存在窄的环形间隙。 间隙防止碳涂层和结晶发射材料之间的直接接触,从而防止损坏相互作用并延长阴极的使用寿命。

    Electron emission materials and components
    26.
    发明授权
    Electron emission materials and components 失效
    电子发射材料和组件

    公开(公告)号:US5911919A

    公开(公告)日:1999-06-15

    申请号:US925842

    申请日:1997-09-08

    CPC classification number: H01J1/148 H01B1/06 H01J1/142 H01J1/144 H01J1/304

    Abstract: Electron emission materials consisting of carbides, borides, and oxides, and related mixtures and compounds, of Group IVB metals Hf, Zr, and Ti, Group IIA metals Be, Mg, Ca, Sr, and Ba, and Group IIIB metals Sc, Y and lanthanides La through Lu are used in electrodes. These electron emission materials are typically contained in a refractory metal matrix formed of tungsten, tantalum, rhenium, and their alloys, but may also be used by themselves. These materials and electrodes have high melting points, low vapor pressures, low work functions, high electrical and thermal conductivity, and high thermionic electron emission and field emission properties.

    Abstract translation: 由ⅣB族金属Hf,Zr和Ti,IIA族金属Be,Mg,Ca,Sr和Ba以及IIIB族金属组成的由碳化物,硼化物和氧化物组成的电子发射材料及相关混合物和化合物Sc,Y 镧系元素La,Lu用于电极。 这些电子发射材料通常包含在由钨,钽,铼及其合金形成的难熔金属基体中,但也可以自己使用。 这些材料和电极具有高熔点,低蒸汽压力,低功函数,高导热性和高热电子发射和场发射性能。

    Electron beam exposing apparatus
    29.
    发明授权
    Electron beam exposing apparatus 失效
    电子束曝光装置

    公开(公告)号:US4430570A

    公开(公告)日:1984-02-07

    申请号:US213026

    申请日:1980-12-04

    CPC classification number: H01J1/16 H01J1/148 H01J3/021 H01J37/06

    Abstract: A variable shaping type electron beam exposing apparatus is provided which comprises an electron gun which irradiates an electron beam from the front end of a cathode chip; shaping plates having openings of variable shapes for shaping the electron beam irradiated from the electron gun into the shapes of these openings; and an objective lens for focusing the electron beam passed through the shaping plates into a predetermined shape on a sample. In this apparatus, the cathode chip is made of single-crystal lanthanum hexaboride whose axial orientation is , the front end of it is formed into a circular conical shape, and half the vertical angle of the front end is set to be between 60.degree. and 85.degree.. The maximum area of the image on the sample is between 2 to 50 .mu.m.sup.2.

    Abstract translation: 提供了一种可变整形型电子束曝光装置,其包括从阴极芯片的前端照射电子束的电子枪; 具有可变形状的开口的成形板,用于将从电子枪照射的电子束成形为这些开口的形状; 以及用于将通过成形板的电子束聚焦到样品上的预定形状的物镜。 在该装置中,阴极芯片由轴向取向为<310>的单晶镧六硼化物制成,其前端形成圆锥形,前端的一半垂直角设定在 60°和85°。 样品上图像的最大面积在2到50平方米之间。

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