公开(公告)号：US08519608B2

公开(公告)日：2013-08-27

申请号：US12680918

申请日：2008-10-03

Applicant: Ryozo Nonogaki ,  Yoshinori Terui

Inventor： Ryozo Nonogaki ,  Yoshinori Terui

IPC: H01J1/02 ,  H01J1/62 ,  H01J1/304

CPC classification number: H01J1/15 ,  B82Y10/00 ,  B82Y40/00 ,  H01J1/18 ,  H01J37/065 ,  H01J37/3174 ,  H01J2237/0216 ,  H01J2237/06316 ,  H01J2237/26 ,  H01J2237/28

Abstract: Provided is an electron source which outputs a stable electron beam even when vibration is applied from the external to an apparatus which uses the electron source. The electron source is provided with an insulator (5); two conductive terminals (4) arranged at an interval on the insulator (5); a long filament (3) stretched between the conductive terminals (4); and a needle-like cathode (1) having an electron emitting section attached to the filament (3). The vertical cross-section shape of the filament (3) in the axis direction has a long direction and a short direction, and the maximum length in the long direction is 1.5 times or more but not more than 5 times the maximum length in the short direction.

Abstract translation: 提供了即使从外部向使用电子源的装置施加振动时也输出稳定的电子束的电子源。 电子源设有绝缘体（5）; 在绝缘体（5）上间隔布置的两个导电端子（4）; 在导电端子（4）之间延伸的长丝（3）; 和具有连接到灯丝（3）上的电子发射部分的针状阴极（1）。 灯丝（3）在轴向上的垂直截面形状具有长方向和短方向，并且长度方向上的最大长度是短时间内的最大长度的1.5倍以上但不大于5倍 方向。

公开(公告)号：US20120145919A1

公开(公告)日：2012-06-14

申请号：US13369008

申请日：2012-02-08

Applicant: Adam V. Steele ,  Brenton J. Knuffman ,  Jabez J. McClelland

Inventor： Adam V. Steele ,  Brenton J. Knuffman ,  Jabez J. McClelland

IPC: H01J27/24 ,  H01J27/00

CPC classification number: H01J27/022 ,  G21K1/00 ,  H01J27/24 ,  H01J37/065 ,  H01J37/08 ,  H01J2237/061 ,  H01J2237/06333 ,  H01J2237/0815 ,  H05H3/02

Abstract: A system for producing a charged particle beam from a photoionized cold atom beam. A vapor of neutral atoms is generated. From these atoms, an atom beam having axial and transverse velocity distributions controlled by the application of laser light is produced. The produced atom beam is spatially compressed along each transverse axis, thus reducing the cross-sectional area of the produced beam and reducing a velocity spread of the produced beam along directions transverse to the beam's direction of propagation. Laser light is directed onto at least a portion of the neutral atoms in the atom beam, thereby producing ions and electrons. An electric field is generated at the location of the produced ions and electrons, thereby producing a beam of ions traveling in a first direction and electrons traveling in substantially the opposite direction. A vacuum chamber contains the atom beam, the ion beam and the electron beam.

Abstract translation: 用于从光电离冷原子束产生带电粒子束的系统。 产生中性原子的蒸汽。 由这些原子产生具有通过应用激光控制的轴向和横向速度分布的原子束。 所产生的原子束沿着每个横向轴线被空间压缩，从而减小所产生的光束的横截面面积，并减小所产生的光束沿横向于光束传播方向的方向的速度扩展。 激光被引导到原子束中的至少一部分中性原子，从而产生离子和电子。 在产生的离子和电子的位置处产生电场，从而产生沿第一方向行进的离子束和基本上相反方向行进的电子。 真空室包含原子束，离子束和电子束。

公开(公告)号：US20110240855A1

公开(公告)日：2011-10-06

申请号：US13133947

申请日：2009-12-04

Applicant: Takashi Ohshima ,  Satoshi Tomimatsu

Inventor： Takashi Ohshima ,  Satoshi Tomimatsu

IPC: H01J9/02 ,  H01J19/02 ,  H01J37/073

CPC classification number: H01J37/28 ,  H01J37/065 ,  H01J37/075 ,  H01J37/256 ,  H01J2237/06316

Abstract: To obtain a SEM capable of both providing high resolution at low acceleration voltage and allowing high-speed elemental distribution measurement, a SE electron source including Zr—O as a diffusion source is shaped so that the radius r of curvature of the tip is more than 0.5 μm and less than 1 μm, and the cone angle α of a conical portion at a portion in the vicinity of the tip at a distance of 3r to 8r from the tip, is more than 5° and less than (8/r)°. Another SE electron source uses Ba—O and includes a barium diffusion supply means composed of a sintered metal and a barium diffusion source containing barium oxide.

Abstract translation: 为了获得能够在低加速电压下提供高分辨率并允许高速元素分布测量的SEM，包括Zr-O作为扩散源的SE电子源被成形为使得尖端的曲率半径r大于 0.5μm以上且小于1μm，顶端附近的3r〜8r的尖部附近的圆锥部的锥角α大于5°且小于（8 / r） °。 另一个SE电子源使用Ba-O，并且包括由烧结金属和含有氧化钡的钡扩散源组成的钡扩散供给装置。

公开(公告)号：US07932477B2

公开(公告)日：2011-04-26

申请号：US12006316

申请日：2007-12-29

Applicant: Yang Wei ,  Liang Liu ,  Shou-Shan Fan

Inventor： Yang Wei ,  Liang Liu ,  Shou-Shan Fan

IPC: B82B1/00

CPC classification number: H01J1/304 ,  B82Y10/00 ,  B82Y30/00 ,  H01J37/065 ,  H01J37/073 ,  H01J37/305 ,  H01J2201/30469 ,  H01J2235/062 ,  H01J2237/06341 ,  H01J2237/317 ,  H05B2214/04 ,  Y10S977/742

Abstract: An electron beam heating system includes a cathode, an anode, a CNT string and a chamber. The CNT string includes an end portion and an emission portion, and the end portion is contacted with and electrically connected to the cathode. The cathode, the anode and CNT string are arranged in the chamber. The CNT string is composed of a plurality of CNT bundles packed closely, each of the CNT bundles comprises a plurality of CNTs, the CNTs are substantially parallel to each other and are joined by van der Waals attractive force. Electron beams emitted from the emission portion bombard and heat a predetermined point on the anode. The heating efficiency of the electron beam heating system is high.

Abstract translation: 电子束加热系统包括阴极，阳极，CNT串和腔室。 CNT串包括端部和发射部分，并且端部与阴极接触并电连接。 阴极，阳极和CNT串被布置在室中。 CNT串由多个紧密堆叠的CNT束组成，每个CNT束包括多个CNT，CNT基本上彼此平行并且通过范德华力吸引力连接。 从发射部分发射的电子束轰击并加热阳极上的预定点。 电子束加热系统的加热效率高。

公开(公告)号：US20100277053A1

公开(公告)日：2010-11-04

申请号：US12769393

申请日：2010-04-28

Applicant: Artush A. Abgaryan ,  Eli Levi

Inventor： Artush A. Abgaryan ,  Eli Levi

IPC: H01J29/46

CPC classification number: H01J29/62 ,  B82Y10/00 ,  B82Y40/00 ,  H01J3/18 ,  H01J35/14 ,  H01J37/063 ,  H01J37/065 ,  H01J37/3174 ,  H01J2237/0492 ,  H01J2237/0656 ,  H01J2237/28

Abstract: System that focuses electron beams in an electro-static area to a laminar flow of electrons with uniform distribution of current density and extraordinary demagnification includes a body that defines a boundary for an electric field, a field-forming cathode electrode system, a focusing electrode system, and at least one anode electrode system in the electro-static section and a second electric field-free section including an adjustable screen system arranged in an interior of the body. The field-forming near-cathode electrode system includes a cathode electrically connected to a flat part and a curvilinear part electrically connected to a cylindrical part. The anode electrode system includes an opening part, an anode electrically connected to a flat part and a curvilinear part electrically connected to a cylindrical part which is similar or identical to and symmetrical with the cathode electrode system. The system parameters are calculated and created due to the CGMR conceptual method.

Abstract translation: 将静电区域中的电子束聚焦到具有均匀分布的电流密度和非常缩小的电子层流的系统包括限定电场边界的体，场形成阴极电极系统，聚焦电极系统 以及电静电部分中的至少一个阳极电极系统和包括布置在主体内部的可调节屏幕系统的第二无电场部分。 场形成阴极电极系统包括电连接到平坦部分的阴极和与圆筒部分电连接的曲线部分。 阳极电极系统包括开口部分，电连接到平坦部分的阳极和电连接到与阴极电极系统相似或相似的圆柱形部分的曲线部分。 由于CGMR的概念方法，系统参数被计算和创建。

公开(公告)号：US20100187433A1

公开(公告)日：2010-07-29

申请号：US12523984

申请日：2008-01-24

Applicant: Derek Anthony Eastham

Inventor： Derek Anthony Eastham

IPC: H01J37/10 ,  H01J3/14

CPC classification number: H01J37/073 ,  B82Y15/00 ,  H01J37/065 ,  H01J37/12 ,  H01J37/28 ,  H01J2237/03 ,  H01J2237/0492 ,  H01J2237/062 ,  H01J2237/06341 ,  H01J2237/1205 ,  H01J2237/1207

Abstract: A particle beam generator comprising particle extraction means disposed adjacent a particle source and operable to extract particles from such a source into an extraction aperture of the extraction means to form a particle beam, particle accelerating means operable to accelerate the extracted particles to increase the energy of the beam, and focussing means operable to focus the particle beam, each of said extraction means, accelerating means and focussing means being arranged in sequence and having apertures therethrough and in alignment to define a passageway through which the particles are constrained to move, characterised in that the extraction means comprises a lens structure comprising at least a pair of electrodes separated by a layer of insulating material allowing the application of different potentials to each of the lens structure electrodes, one of said electrodes comprising an extraction plate having an extraction aperture formed therein, by means of which extraction plate particles may be drawn from the particle source and through the extraction aperture by means of a potential difference between the source and said extraction plate.

Abstract translation: 一种粒子束发生器，其包括与颗粒源相邻设置的颗粒提取装置，可操作以将颗粒从这种源提取到提取装置的提取孔中以形成粒子束，粒子加速装置可操作以加速提取的颗粒以增加能量 所述光束和聚焦装置可操作以聚焦所述粒子束，所述提取装置，加速装置和聚焦装置中的每一个按顺序布置并且具有贯穿其中的孔并且对齐以限定所述颗粒被约束以移动的通道，其特征在于 所述提取装置包括透镜结构，所述透镜结构包括至少一对电极，所述至少一对电极由绝缘材料层隔开，允许对每个所述透镜结构电极施加不同的电位，所述电极中的一个包括在其中形成有提取孔的提取板 ，通过其提取平台 e颗粒可以通过源和所述提取板之间的电位差从颗粒源和抽出孔中抽出。

公开(公告)号：US07710009B2

公开(公告)日：2010-05-04

申请号：US11650310

申请日：2007-01-05

Applicant: Stijn Willem Herman Karel Steenbrink ,  Pieter Kruit

Inventor： Stijn Willem Herman Karel Steenbrink ,  Pieter Kruit

IPC: H01J19/14 ,  H01J1/20 ,  H01J1/14 ,  H01J1/28

CPC classification number: H01J37/065 ,  B82Y10/00 ,  B82Y40/00 ,  H01J1/28 ,  H01J37/3177 ,  H01J2237/3175 ,  H01J2237/31754 ,  H01J2237/31774

Abstract: A dispenser cathode which comprises an emission surface, a reservoir for material releasing, when heated, work-function-lowering particles, and at least one passage for allowing diffusion of work-function-lowering particles from said reservoir to said emission surface, said emission surface comprising at least one emission area and at least one non-emission area covered with emission-suppressing material and surrounding each emission area, said non-emission area comprising at least one passage connecting said reservoir with said non-emission area and debouching within a diffusion length distance from an emission area for allowing diffusion of work-function-lowering particles from said reservoir to said emission area.

Abstract translation: 分配器阴极，其包括排放表面，用于材料释放的储存器，当被加热时，功能降低颗粒和至少一个通道，用于允许功能降低颗粒从所述储存器扩散到所述发射表面，所述发射 表面包括至少一个发射区域和至少一个覆盖有发射抑制材料并且围绕每个发射区域的非发射区域，所述非发射区域包括将所述储层与所述非发射区域连接的至少一个通道，并在 从放射区域的扩散长度距离，用于允许功能降低颗粒从所述储存器扩散到所述发射区域。

公开(公告)号：US20100078557A1

公开(公告)日：2010-04-01

申请号：US12570112

申请日：2009-09-30

Applicant: Volker Drexel ,  Ulrich Mantz ,  Bernd Irmer ,  Christian Penzkofer

Inventor： Volker Drexel ,  Ulrich Mantz ,  Bernd Irmer ,  Christian Penzkofer

IPC: G21K5/00 ,  G01N23/00 ,  C23C14/00 ,  C23C14/30

CPC classification number: H01J37/065 ,  H01J1/3044 ,  H01J37/06 ,  H01J2201/30415 ,  H01J2201/30446 ,  H01J2201/30476 ,  H01J2237/06316 ,  H01J2237/06375 ,  H01J2237/065 ,  Y10T29/49888

Abstract: A tip of an electron beam source includes a core carrying a coating. The coating is formed from a material having a greater electrical conductivity than a material forming the surface of the core.

Abstract translation: 电子束源的尖端包括承载涂层的芯。 该涂层由具有比形成芯的表面的材料更大的导电性的材料形成。

公开(公告)号：US20090315444A1

公开(公告)日：2009-12-24

申请号：US12145036

申请日：2008-06-24

Applicant: Zhong-Wei Chen ,  Juying Dou

Inventor： Zhong-Wei Chen ,  Juying Dou

IPC: H01J19/24

CPC classification number: H01J37/063 ,  H01J1/16 ,  H01J3/027 ,  H01J37/065 ,  H01J2237/06316 ,  H01J2237/06375

Abstract: A thermal field emission cathode which is employed in an electron microscope, a critical dimension examine tool, an electron beam lithograph machine, an electron beam tester and other electron beam related systems as an electron source is disclosed. Embodiments disclose changing coating shape, coating position and shorten emitter length to extend the lifetime of the field emission cathode.

Abstract translation: 公开了一种在电子显微镜中使用的热场发射阴极，临界尺寸检查工具，电子束光刻机，电子束测试仪和其他电子束相关系统作为电子源。 实施例公开了改变涂层形状，涂层位置和缩短发射极长度以延长场致发射阴极的寿命。

公开(公告)号：US07601971B2

公开(公告)日：2009-10-13

申请号：US11954401

申请日：2007-12-12

Applicant: Takeshi Tanaka ,  Hiroyasu Kaga

Inventor： Takeshi Tanaka ,  Hiroyasu Kaga

IPC: H01J37/073 ,  H01J49/08 ,  H01J49/10

CPC classification number: G01N23/2251 ,  H01J37/065 ,  H01J37/073 ,  H01J2237/006 ,  H01J2237/038 ,  H01J2237/06341

Abstract: The present invention provides a highly reliable charged beam gun designed in consideration for environmental protection, which prevents faulty insulation in a high-voltage connection. An insulating liquid is present in a gap formed between a connecting bushing and a receiving-side flange placed in a vacuum container, and the connecting bushing includes first piping and valve that provide communication between the gap and atmospheric air, and second piping and valve that provide communication between the gap and the atmospheric air, whereby the gap is cut off from the atmospheric air.

Abstract translation: 本发明提供了一种考虑到环境保护设计的高度可靠的带电束枪，其防止高压连接中的故障绝缘。 绝缘液体存在于布置在真空容器中的连接衬套和接收侧凸缘之间的间隙中，并且连接衬套包括提供间隙和大气之间的连通的第一管道和阀，以及第二管道和阀， 提供间隙和大气之间的通信，由此间隙与大气隔离。