公开(公告)号：US08669525B2

公开(公告)日：2014-03-11

申请号：US12997686

申请日：2009-05-26

Applicant: Sybren Sijbrandij ,  John Notte, IV ,  William B. Thompson

Inventor： Sybren Sijbrandij ,  John Notte, IV ,  William B. Thompson

IPC: H01J37/26

CPC classification number: G01N23/2251 ,  G01N23/2208 ,  G01N23/2258 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/0807 ,  H01J2237/2441 ,  H01J2237/2444 ,  H01J2237/2445 ,  H01J2237/24475 ,  H01J2237/24485 ,  H01J2237/2449 ,  H01J2237/24585 ,  H01J2237/24592 ,  H01J2237/2803 ,  H01L22/12 ,  H01L2924/0002 ,  H01L2924/00

Abstract: The disclosure relates to sample inspection using an ion-beam microscope. In some embodiments, the disclosure involves the use of multiple detectors, each of which provides different information about a sample.

Abstract translation: 本公开涉及使用离子束显微镜的样品检查。 在一些实施例中，本公开涉及多个检测器的使用，每个检测器提供关于样品的不同信息。

公开(公告)号：US20110284744A1

公开(公告)日：2011-11-24

申请号：US12884001

申请日：2010-09-16

Applicant: Ahmed H. Zewail ,  Oh-Hoon Kwon ,  Omar Farghaly Mohammed Abdelsaboor ,  Ding-Shyue Yang

Inventor： Ahmed H. Zewail ,  Oh-Hoon Kwon ,  Omar Farghaly Mohammed Abdelsaboor ,  Ding-Shyue Yang

IPC: H01J37/28 ,  H01J37/26

CPC classification number: H01J37/28 ,  H01J37/228 ,  H01J37/285 ,  H01J2237/0432 ,  H01J2237/2004 ,  H01J2237/20207 ,  H01J2237/2065 ,  H01J2237/2611 ,  H01J2237/2803

Abstract: A 4D electron tomography system includes a stage having one or more degrees of freedom, an electron source, and electron optics operable to direct electron pulses to impinge on a sample supported on the stage. A pulse of the electron pulses impinges on the sample at a first time. The system also includes a laser system and optics operable to direct optical pulses to impinge on the sample. A pulse of the optical pulses impinges on the sample at a second time. The system further includes a detector operable to receive the electron pulses passing through the sample, a controller operable to independently modify an orientation of the stage and at least one of the first time or the second time, a memory operable to store sets of images, and a processor operable to form a 4D tomgraphic image set from the sets of images.

Abstract translation: 4D电子断层摄影系统包括具有一个或多个自由度的阶段，电子源和可操作以将电子脉冲引导到支撑在舞台上的样本上的电子光学器件。 电子脉冲的脉冲在第一次撞击样品。 该系统还包括激光系统和光学器件，其可操作以引导光脉冲撞击样品。 光脉冲的脉冲在第二次撞击样品。 该系统还包括可操作以接收通过样品的电子脉冲的检测器，可操作以独立地修改载物台的取向和第一时间或第二时间中的至少一个的控制器，可操作地存储图像集合的存储器， 以及处理器，可操作以从所述图像集合形成4D成像图像集。

公开(公告)号：US07915583B2

公开(公告)日：2011-03-29

申请号：US12234567

申请日：2008-09-19

Applicant: Ahmed Zewail ,  Vladimir Lobastov

Inventor： Ahmed Zewail ,  Vladimir Lobastov

IPC: H01J37/26 ,  H01J37/252

CPC classification number: H01J37/26 ,  H01J37/065 ,  H01J37/073 ,  H01J37/24 ,  H01J37/243 ,  H01J37/265 ,  H01J2237/0432 ,  H01J2237/06333 ,  H01J2237/06341 ,  H01J2237/206 ,  H01J2237/2065 ,  H01J2237/24585 ,  H01J2237/2482 ,  H01J2237/2803 ,  H01J2237/2809 ,  H01J2237/2813 ,  H01J2237/2855

Abstract: An ultrafast system (and methods) for characterizing one or more samples. The system includes a stage assembly, which has a sample to be characterized. The system has a laser source that is capable of emitting an optical pulse of less than 1 ps in duration. The system has a cathode coupled to the laser source. In a specific embodiment, the cathode is capable of emitting an electron pulse less than 1 ps in duration. The system has an electron lens assembly adapted to focus the electron pulse onto the sample disposed on the stage. The system has a detector adapted to capture one or more electrons passing through the sample. The one or more electrons passing through the sample is representative of the structure of the sample. The detector provides a signal (e.g., data signal) associated with the one or more electrons passing through the sample that represents the structure of the sample. The system has a processor coupled to the detector. The processor is adapted to process the data signal associated with the one or more electrons passing through the sample to output information associated with the structure of the sample. The system has an output device coupled to the processor. The output device is adapted to output the information associated with the structure of the sample.

Abstract translation: 用于表征一个或多个样品的超快系统（和方法）。 该系统包括具有要表征的样品的载物台组件。 该系统具有能够发射持续时间小于1ps的光脉冲的激光源。 该系统具有耦合到激光源的阴极。 在具体实施例中，阴极能够发射持续时间小于1ps的电子脉冲。 该系统具有适于将电子脉冲聚焦到设置在载物台上的样品上的电子透镜组件。 该系统具有适于捕获穿过样品的一个或多个电子的检测器。 通过样品的一个或多个电子代表样品的结构。 检测器提供与通过样品的一个或多个电子相关联的信号（例如，数据信号），其表示样品的结构。 该系统具有耦合到检测器的处理器。 处理器适于处理与通过样本的一个或多个电子相关联的数据信号，以输出与样本的结构相关联的信息。 该系统具有耦合到处理器的输出设备。 输出设备适于输出与样本结构相关联的信息。

公开(公告)号：US20110057101A1

公开(公告)日：2011-03-10

申请号：US12944434

申请日：2010-11-11

Applicant: Osamu KOMURO ,  Osamu Nasu

Inventor： Osamu KOMURO ,  Osamu Nasu

IPC: G01N23/227

CPC classification number: H01J37/268 ,  H01J2237/047 ,  H01J2237/2008 ,  H01J2237/2803

Abstract: A charged particle beam system wherein the output of the secondary electron detector is detected while the retarding voltage is varied between the values for which the secondary electrons do not reach the sample and the values for which the secondary electrons reach the sample, and the surface potential of the sample is determined on the basis of the relationship between the retarding voltage and the detected output of the secondary electron detector.

Abstract translation: 一种带电粒子束系统，其中在二次电子未到达样品的值和二次电子到达样品的值之间改变延迟电压并检测二次电子检测器的输出，并且表面电位 基于延迟电压与二次电子检测器的检测输出之间的关系来确定样品。

公开(公告)号：US07659506B2

公开(公告)日：2010-02-09

申请号：US11861206

申请日：2007-09-25

Applicant: Michal Avinun-Kalish ,  Jacob Levin ,  Dror Shemesh

Inventor： Michal Avinun-Kalish ,  Jacob Levin ,  Dror Shemesh

IPC: G01N23/22

CPC classification number: G01N23/2202 ,  H01J2237/2443 ,  H01J2237/24455 ,  H01J2237/245 ,  H01J2237/2802 ,  H01J2237/2803 ,  H01J2237/31745

Abstract: A system and method for generating a thin sample, the method includes: milling an intermediate section of a thin sample such as to enable an upper portion of the thin sample to tilt in relation to a lower portion of the thin sample; wherein the lower portion is connected to a wafer from which the thin sample was formed. A system and method for inspecting a thin sample, the method includes: A method for inspecting a thin sample, the method comprising: illuminating, by a charged particle beam, a tilted upper portion of a thin sample that is connected, via a milled intermediate section, to a lower portion of the thin sample; wherein the lower portion is connected to a wafer from which the thin sample was formed; and collecting particles and photons resulting from the illumination.

Abstract translation: 一种用于产生薄样品的系统和方法，所述方法包括：铣削薄样品的中间部分，使得薄样品的上部相对于薄样品的下部倾斜; 其中下部连接到形成薄样品的晶片。 一种用于检查薄样品的系统和方法，所述方法包括：一种用于检查薄样品的方法，所述方法包括：通过带电粒子束照射经过研磨的中间体连接的薄样品的倾斜上部分 到薄样品的下部; 其中所述下部连接到形成所述薄样品的晶片; 并收集由照明产生的颗粒和光子。

公开(公告)号：US07525090B1

公开(公告)日：2009-04-28

申请号：US11725022

申请日：2007-03-16

Applicant: Kenneth J. Krzeczowski

Inventor： Kenneth J. Krzeczowski

IPC: G01N23/00

CPC classification number: H01J37/28 ,  H01J37/222 ,  H01J37/244 ,  H01J37/263 ,  H01J37/265 ,  H01J2237/221 ,  H01J2237/226 ,  H01J2237/2446 ,  H01J2237/2448 ,  H01J2237/24495 ,  H01J2237/2803

Abstract: One embodiment relates to a method of behind-the-lens dark-field imaging using a scanning electron microscope apparatus. An incident beam is focused onto a specimen surface using an immersion objective lens, and the incident beam is deflected so as to scan the incident electron beam over a field of view of the specimen surface. A secondary electron beam is detected using a segmented detector to obtain a set of pixel data for each segment of the detector. Scan-dependent movement of the secondary electron beam over the segmented detector is compensated for by processing using a dynamic centering algorithm to generate a set of virtual pixel data for each segment of a virtual detector. At least one set of the virtual pixel data is used to generate a dark field image. Other embodiments, aspects, and features are also disclosed.

Abstract translation: 一个实施例涉及使用扫描电子显微镜装置的镜头后暗区成像的方法。 使用浸没物镜将入射光束聚焦在样本表面上，并且入射光束被偏转，以便在被检体表面的视野上扫描入射的电子束。 使用分段检测器检测二次电子束，以获得检测器的每个段的一组像素数据。 通过使用动态中心算法的处理来补偿二次电子束在分段检测器上的扫描依赖运动，以生成虚拟检测器的每个段的一组虚拟像素数据。 使用至少一组虚拟像素数据来生成暗场图像。 还公开了其它实施例，方面和特征。

公开(公告)号：US20090078867A1

公开(公告)日：2009-03-26

申请号：US11861206

申请日：2007-09-25

Applicant: Michal Avinun-Kalish ,  Jacob Levin ,  Dror Shemesh

Inventor： Michal Avinun-Kalish ,  Jacob Levin ,  Dror Shemesh

IPC: H01J37/26

CPC classification number: G01N23/2202 ,  H01J2237/2443 ,  H01J2237/24455 ,  H01J2237/245 ,  H01J2237/2802 ,  H01J2237/2803 ,  H01J2237/31745

Abstract: A system and method for generating a thin sample, the method includes: milling an intermediate section of a thin sample such as to enable an upper portion of the thin sample to tilt in relation to a lower portion of the thin sample; wherein the lower portion is connected to a wafer from which the thin sample was formed. A system and method for inspecting a thin sample, the method includes: A method for inspecting a thin sample, the method comprising: illuminating, by a charged particle beam, a tilted upper portion of a thin sample that is connected, via a milled intermediate section, to a lower portion of the thin sample; wherein the lower portion is connected to a wafer from which the thin sample was formed; and collecting particles and photons resulting from the illumination.

Abstract translation: 一种用于产生薄样品的系统和方法，所述方法包括：铣削薄样品的中间部分，使得薄样品的上部相对于薄样品的下部倾斜; 其中下部连接到形成薄样品的晶片。 一种用于检查薄样品的系统和方法，所述方法包括：一种用于检查薄样品的方法，所述方法包括：通过带电粒子束照射通过研磨的中间体连接的薄样品的倾斜上部 到薄样品的下部; 其中所述下部连接到形成所述薄样品的晶片; 并收集由照明产生的颗粒和光子。

公开(公告)号：US20240128050A1

公开(公告)日：2024-04-18

申请号：US18477251

申请日：2023-09-28

Applicant: FEI Company

Inventor： Yuchen DENG ,  Holger KOHR ,  Bart VAN KNIPPENBERG ,  Peter TIEMEIJER ,  Lingbo YU

IPC: H01J37/26 ,  H01J37/295

CPC classification number: H01J37/261 ,  H01J37/295 ,  H01J2237/2803 ,  H01J2237/2814

Abstract: A method of automated data acquisition for a transmission electron microscope, the method comprising: obtaining a reference image of a sample at a first magnification; for each of a first plurality of target locations identified in the reference image: steering an electron beam of the transmission electron microscope to the target location, obtaining a calibration image of the sample at a second magnification greater than the first magnification, and using image processing techniques to identify an apparent shift between an expected position of the target location in the calibration image and an observed position of the target location in the calibration image, training a non-linear model using the first plurality of target locations and the corresponding apparent shifts; based on the non-linear model, calculating a calibrated target location for a next target location; steering the electron beam to the calibrated target location and obtaining an image at a third magnification greater than the first magnification.

公开(公告)号：US11846736B2

公开(公告)日：2023-12-19

申请号：US17617277

申请日：2019-07-10

Applicant: Hitachi High-Tech Corporation

Inventor： Eri Takahashi ,  Shin Imamura ,  Makoto Suzuki ,  Shunsuke Mizutani

IPC: G01T1/202 ,  H01J37/244 ,  H01J49/02 ,  H01J37/28 ,  H01J49/26

CPC classification number: G01T1/2023 ,  H01J37/244 ,  H01J49/025 ,  H01J37/28 ,  H01J49/26 ,  H01J2237/2443 ,  H01J2237/2448 ,  H01J2237/2803

Abstract: The purpose of the present invention is to provide a scintillator for a charged particle beam device and a charged particle beam device which achieve both an increase in emission intensity and a reduction in afterglow intensity. This scintillator for a charged particle beam device is characterized by comprising a substrate (13), a buffer layer (14) formed on a surface of the substrate (13), a stack (12) of a light emitting layer (15) and a barrier layer (16) formed on a surface of the buffer layer (14), and a conductive layer (17) formed on a surface of the stack (12) and by being configured such that the light emitting layer (15) contains InGaN, the barrier layer (16) contains GaN, and the ratio b/a of the thickness b of the barrier layer (16) to the thickness a of the light emitting layer (15) is 11 to 25.

公开(公告)号：US20230145436A1

公开(公告)日：2023-05-11

申请号：US17905128

申请日：2021-03-01

Applicant: DIRECT ELECTRON, LP

Inventor： Benjamin BAMMES ,  Robert BILHORN

IPC: H01J37/295

CPC classification number: H01J37/2955 ,  H01J2237/2803 ,  H01J2237/2446 ,  H01J2237/24475 ,  H01J2237/24495

Abstract: A method of, and a detector for, performing energy sensitive imaging of ionizing radiation are provided, including acquiring a first frame having a plurality of pixels, each pixel of the plurality having an energy of detection and a location; grouping, into a cluster, pixels of the plurality having an energy of detection above a predetermined threshold and a location along with at least one other pixel also having an energy of detection above the predetermined threshold and being within a predetermined distance of the location; summing the energy of detection of all pixels within the grouped cluster to determine a cluster energy; determining a location of the cluster based on a distribution and an intensity of the summed energy of detection; and generating an image of the cluster based on the determined cluster energy and the determined location of the cluster.