公开(公告)号：US07569834B1

公开(公告)日：2009-08-04

申请号：US11550762

申请日：2006-10-18

Applicant: Neil Richardson

Inventor： Neil Richardson

IPC: H01J37/14 ,  H01J37/20

CPC classification number: H01J37/145 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/21 ,  H01J37/3177 ,  H01J2237/0453 ,  H01J2237/04922 ,  H01J2237/04924 ,  H01J2237/04926 ,  H01J2237/1405 ,  H01J2237/24592

Abstract: A charged particle optic apparatus for improvement in resolution of an electrostatic, multi-beam column is disclosed. The charged particle optic apparatus includes an electrostatic lens array having a first plurality of apertures and a first magnetic pole piece disposed proximate the electrostatic lens array. The first magnetic pole piece includes a second plurality of apertures. The charged particle optic apparatus also includes a second magnetic pole piece disposed proximate the electrostatic lens array such that the electrostatic lens array is between the first magnetic pole piece and the second magnetic pole piece. The second magnetic pole piece includes a third plurality of apertures. The first, second and third pluralities of apertures are aligned with each other. The charged particle optic apparatus may be implemented in a charged particle beam system.

Abstract translation: 公开了一种用于提高静电多光束柱分辨率的带电粒子光学装置。 带电粒子装置包括具有第一多个孔的静电透镜阵列和靠近静电透镜阵列设置的第一磁极片。 第一磁极片包括第二多个孔。 带电粒子装置还包括靠近静电透镜阵列设置的第二磁极片，使得静电透镜阵列位于第一磁极片和第二磁极片之间。 第二磁极片包括第三多个孔。 第一，第二和第三多个孔彼此对准。 带电粒子光学装置可以在带电粒子束系统中实现。

公开(公告)号：US20080067396A1

公开(公告)日：2008-03-20

申请号：US11749181

申请日：2007-05-16

Applicant: Takashi Ohshima ,  Mitsugu Sato ,  Yutaka Kaneko ,  Souichi Katagiri ,  Koichiro Takeuchi

Inventor： Takashi Ohshima ,  Mitsugu Sato ,  Yutaka Kaneko ,  Souichi Katagiri ,  Koichiro Takeuchi

IPC: H01J1/50

CPC classification number: H01J37/143 ,  H01J37/28 ,  H01J2237/1405 ,  H01J2237/2813 ,  H01J2237/31749

Abstract: The present invention provides a compact electron lens causing little aberration, and a charged particle beam apparatus such as a scanning electron microscope that is super compact and offers a high resolution. An upper magnetic pole and a sample-side magnetic pole are magnetically coupled to the respective poles of a permanent magnet that is made of a highly strong magnetic material such as a rare-earth cobalt system or a neodymium-iron-boron system, that is axially symmetrical, and that has a hole in the center thereof. An inner gap is created on the side of a center axis. Thus, a magnetic lens is formed axially. Moreover, a semi-stationary magnetic path that shields an outside magnetic field and has the magnetic reluctance thereof regulated is disposed outside. The sample-side magnetic pole and magnetic path defines a region where magnetic reluctance is the highest outside the permanent magnet. A space defined by the permanent magnet, upper magnetic pole, sample-die magnetic pole, and semi-stationary magnetic path is filled with a filling made of a non-magnetic material. Thus, an objective lens is constructed.

Abstract translation: 本发明提供一种产生很小像差的小型电子透镜，以及诸如扫描电子显微镜的带电粒子束装置，其具有超级紧凑并且提供高分辨率。 上磁极和样本侧磁极磁耦合到由诸如稀土钴体系或钕铁硼体系的高强度磁性材料制成的永磁体的各极上，即， 轴向对称，并且在其中心具有孔。 在中心轴的一侧产生内部间隙。 因此，磁性透镜轴向形成。 此外，将外部磁场屏蔽并具有调节磁阻的半静态磁路设置在外部。 样品侧磁极和磁路限定永磁体外磁阻最高的区域。 由永磁体，上磁极，样品芯磁极和半静态磁路限定的空间填充有由非磁性材料制成的填充物。 因此，构成物镜。

公开(公告)号：US20080048118A1

公开(公告)日：2008-02-28

申请号：US11907375

申请日：2007-10-11

Applicant: Tsuyoshi Inanobe ,  Sho Takami ,  Yoichi Ose ,  Katsuhiro Sasada

Inventor： Tsuyoshi Inanobe ,  Sho Takami ,  Yoichi Ose ,  Katsuhiro Sasada

IPC: G01N23/00

CPC classification number: H01J37/09 ,  H01J37/16 ,  H01J2237/1405 ,  H01J2237/16 ,  H01J2237/2614 ,  H01J2237/2617 ,  H01J2237/28

Abstract: A structure of an electron beam apparatus having shielding properties for shielding against an environmental magnetic field is provided. The electron beam apparatus comprises a mirror barrel for housing a magnetic lens for converging an electron beam onto a specimen and a specimen chamber for housing the specimen, wherein a non-magnetic material having conductivity is used as a material for at least one of the mirror barrel and a main body of the specimen chamber. The material for the mirror barrel or the main body of the specimen chamber is an aluminum alloy and a thickness of a sidewall of the mirror barrel or the main body of the specimen chamber is 10 mm or more. A magnetic plate having a thickness smaller than that of the sidewall of the mirror barrel or the main body of the specimen chamber is provided on an inner sidewall of the mirror barrel or the main body of the specimen chamber.

Abstract translation: 提供了具有屏蔽性能以防止环境磁场的电子束装置的结构。 电子束装置包括用于容纳用于将电子束会聚在试样上的磁性透镜的反射镜筒和用于容纳样本的试样室，其中具有导电性的非磁性材料用作至少一个反射镜的材料 桶和样品室的主体。 用于镜筒的材料或试样室的主体是铝合金，镜筒的侧壁或试样室的主体的厚度为10mm以上。 厚度小于镜筒侧壁或试样室主体的磁性板设置在镜筒的内侧壁或试样室的主体上。

公开(公告)号：US20060163488A1

公开(公告)日：2006-07-27

申请号：US10540178

申请日：2003-12-12

Applicant: Stefan Lanio

Inventor： Stefan Lanio

IPC: H01J1/50

CPC classification number: H01J37/141 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/145 ,  H01J37/3177 ,  H01J2237/1205 ,  H01J2237/1405

Abstract: The invention provides a lens system for a plurality of charged particle beams. Therein, at least one common excitation coil for at least two lens modules is provided. The lens modules comprise an first pole piece, a second pole piece and at least one opening for a charged particle beam. The lens modules constitute a component and share the excitation coil. Thereby, raw material availability, processing of work pieces and symmetry conditions for the lens fields are improved.

公开(公告)号：US20050040137A1

公开(公告)日：2005-02-24

申请号：US10934016

申请日：2004-09-02

Applicant: Katsushi Nakano

Inventor： Katsushi Nakano

IPC: G03F7/20 ,  H01B13/00 ,  H01F7/06 ,  H01F7/20 ,  H01J3/14 ,  H01J37/147 ,  H01J37/305 ,  H01L21/027

CPC classification number: B82Y10/00 ,  B82Y40/00 ,  H01F5/003 ,  H01F7/20 ,  H01F7/202 ,  H01F2041/0711 ,  H01J37/147 ,  H01J37/1475 ,  H01J37/3174 ,  H01J2237/103 ,  H01J2237/1405 ,  H01J2237/1526 ,  H01J2237/1534 ,  Y10T29/4902

Abstract: Deflectors are disclosed that are suitable for use in various charged-particle-beam (CPB) optical systems as used, for example, in CPB microlithography systems. The deflectors produce a strong magnetic beam-deflecting field when energized with a relatively small electrical current. The beam-deflecting field thus produced is stable with respect to temperature changes, is little affected by eddy currents, and exhibits low aberration caused by manufacturing tolerances of the coil and core. In an exemplary method for manufacturing such a deflector, a magnetic-tape laminate is used as the core. Also, high-precision positioning of the coil and the magnetic-tape laminate is performed using photolithography and electrocasting. Positioning of the magnetic-tape laminate can be performed using a resist pattern formed by photolithography.

Abstract translation: 公开了适用于例如在CPB微光刻系统中使用的各种带电粒子束（CPB）光学系统的偏转器。 当相对较小的电流通电时，偏转器产生强磁场偏转场。 由此产生的光束偏转场相对于温度变化是稳定的，几乎不受涡流的影响，并且表现出由线圈和芯的制造公差引起的低像差。 在制造这种偏转器的示例性方法中，使用磁带层压体作为核心。 此外，使用光刻和电铸来进行线圈和磁带层压体的高精度定位。 可以使用通过光刻形成的抗蚀剂图案来进行磁带层压体的定位。

公开(公告)号：US20020074495A1

公开(公告)日：2002-06-20

申请号：US09882804

申请日：2001-06-15

Inventor： John A. Notte IV

IPC: G01N023/00

CPC classification number: H01J37/21 ,  H01J37/141 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/1405

Abstract: A magnetic lens configured to apply a magnetic field to a charged particle beam is provided. The magnetic lens may include an outer pole piece and an inner pole piece. The outer pole piece may have at least two sectors and at least two slots. The magnetic lens may also have a primary coil winding interposed between the outer pole piece and the inner pole piece. In addition, the magnetic lens may have a number of sector coil windings, and each sector of the outer pole piece may be coupled to one sector coil winding. A magnetic potential of the outer pole piece relative to the inner pole piece may be generated by applying a current to the primary coil winding. A separate magnetic potential of each sector may also be generated by applying a current to the respective sector coil windings of each sector of the outer pole piece.

Abstract translation: 提供了构造成对带电粒子束施加磁场的磁性透镜。 磁性透镜可以包括外极片和内极片。 外极片可以具有至少两个扇区和至少两个槽。 磁性透镜也可以具有插入在外极片和内极片之间的初级线圈绕组。 此外，磁性透镜可以具有多个扇形线圈绕组，并且外部极片的每个扇区可以耦合到一个扇区线圈绕组。 可以通过向初级线圈绕组施加电流来产生外极片相对于内极片的磁势。 也可以通过向外极片的每个扇区的相应扇形线圈绕组施加电流来产生每个扇区的单独磁势。

公开(公告)号：US20230326704A1

公开(公告)日：2023-10-12

申请号：US17658637

申请日：2022-04-08

Applicant: KLA Corporation

Inventor： Lawrence Muray ,  John Gerling ,  James Spallas ,  Alan Brodie

IPC: H01J37/141 ,  H01J37/244

CPC classification number: H01J37/141 ,  H01J37/244 ,  H01J2237/1405 ,  H01J2237/04922

Abstract: A miniature electron beam column in combination with magnetostatic lenses to produce very high-performance miniature electron or ion beam columns. Silicon-based electron optical components provide high-accuracy formation and alignment of critical optical elements and the magnetic lenses provide low-aberration focusing or condensing elements. Accurate assembly of the silicon and magnetic components is achievable via the multilayered assembly techniques and allows for achieving high performance.

公开(公告)号：US09767985B2

公开(公告)日：2017-09-19

申请号：US14895708

申请日：2014-10-17

Applicant: HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY

Inventor： Jiang Huang ,  Mingwu Fan ,  Tiaoqin Yu ,  Lige Zhang ,  Chen Zuo ,  Jun Yang ,  Yongqian Xiong ,  Kaifeng Liu ,  Gerald F. Wu ,  Lei Cao

IPC: H01J37/143 ,  H01J3/12 ,  G21K1/093 ,  G21K5/04

CPC classification number: H01J37/143 ,  G21K1/093 ,  G21K5/04 ,  H01J3/12 ,  H01J33/00 ,  H01J37/3178 ,  H01J2237/0835 ,  H01J2237/1405 ,  H01J2237/152

Abstract: Provided is a device for optimizing a diffusion section of an electron beam, comprising two groups of permanent magnets, a magnetic field formed by the four magnetic poles extending the electron beam in a longitudinal direction, and compressing the electron beam in a transverse direction, so that the electron beam becomes an approximate ellipse; another magnetic field formed by the eight magnetic poles optimizing an edge of a dispersed electron-beam bunch into an approximate rectangle; by controlling the four longitudinal connection mechanisms so that the upper magnetic yoke and the lower magnetic yoke of the first group of permanent magnets move synchronously towards the center thereof thereby longitudinally compressing the electron beam in the shape of an approximate ellipse, and the upper magnetic yoke and the lower magnetic yoke of the second group of permanent magnets move synchronously towards the center thereof thereby longitudinally compressing the electron beam in the shape of an approximate rectangle, and the process of longitudinal compression is repeated until a longitudinal size of the electron-beam bunch is reduced to 80 mm. The invention is capable of reasonably compressing a longitudinal size of an electron-beam bunch after diffusion to approximately 80 mm, which ensures optimum irradiation uniformity and efficiency, and enables the longitudinal size to be within the range of a conventional titanium window.

公开(公告)号：US20160268098A1

公开(公告)日：2016-09-15

申请号：US14404442

申请日：2014-06-12

Applicant: AUROS TECHNOLOGY CO., LTD.

Inventor： JONG LIP CHOI ,  SANG MYEONG LEE ,  HO YOUNG HEO ,  YUN GI LEE ,  SEUNG CHUL OH

IPC: H01J37/28 ,  H01J37/141

CPC classification number: H01J37/28 ,  H01J37/141 ,  H01J37/263 ,  H01J37/265 ,  H01J2237/04922 ,  H01J2237/1405 ,  H01J2237/2809 ,  H01J2237/2817

Abstract: A scanning electron microscope capable of controlling the spot of an electron beam and a measurement method using the same. The scanning electron microscope includes electron magnets disposed in a path in which an electron beam irradiated to a sample moves from the electron beam source of the scanning electron microscope to a sample and configured to control and irradiate the spot of the electron beam in a linear electron beam having a different horizontal to vertical ratio. A control unit controls a ratio and direction of the spot of the electron beam by controlling a supply voltage of the electron magnets.

Abstract translation: 能够控制电子束点的扫描型电子显微镜及使用其的测定方法。 扫描电子显微镜包括设置在照射到样品的电子束从扫描电子显微镜的电子束源移动到样品的路径中的电子磁体，并且被配置为控制和照射电子束的点在线性电子 横梁具有不同的水平与垂直比。 控制单元通过控制电子磁体的电源电压来控制电子束点的比率和方向。

公开(公告)号：US09165745B2

公开(公告)日：2015-10-20

申请号：US14196190

申请日：2014-03-04

Applicant: Tao Luo

Inventor： Tao Luo

IPC: H01J37/145 ,  H01J37/14 ,  H01J37/143 ,  H01J3/20

CPC classification number: H01J37/14 ,  H01J3/20 ,  H01J37/143 ,  H01J37/145 ,  H01J2237/1405

Abstract: An apparatus includes a magnetic adjustment lens positioned at the electron beam path between the electron source and sample, the magnetic adjustment lens excited by an electric coil, and a permanent magnet lens positioned below the magnetic adjustment lens to focus the electron beam onto the sample surface, the permanent magnet lens excited by one or more permanent ring magnets enclosed except on a bottom surface by a magnetic field conductor. The magnetic adjustment lens may be excited to eliminate magnetic field leakage of the permanent magnet lens.

Abstract translation: 一种设备包括位于电子源和样品之间的电子束路径处的磁调节透镜，由电线圈激励的磁调节透镜和位于磁调节透镜下方的永磁体透镜，以将电子束聚焦到样品表面上 由一个或多个永久环形磁体激励的永磁体透镜，除了在磁场表面之外被磁场导体所包围。 可以激励磁调节透镜以消除永磁体透镜的磁场泄漏。