公开(公告)号：US20170236682A1

公开(公告)日：2017-08-17

申请号：US15427672

申请日：2017-02-08

Applicant: Stangenes Industries, Inc.

Inventor： Christopher YECKEL ,  Richard CASSEL

IPC: H01J37/141 ,  H03K17/567

CPC classification number: H05H7/02 ,  H01J2237/1504 ,  H03K3/43 ,  H03K3/45 ,  H05H7/04 ,  H05H2007/022 ,  H05H2007/046 ,  H05H2007/048

Abstract: A device and method for generating pulses to activate and deactivate a kicker magnet is provided. When the kicker magnet is deactivated the circuit generates and stores a magnetic field in an inductor. When the kicker magnet is activated, the circuit changes configuration so that the magnetic field and current stored in the inductor can provide the necessary current to activate the kicker magnet is a minimal amount of time. The configuration of the circuit changes via the use of switches. The switches can employ Zener diodes arranged so as to provide protection against high voltage events and rogue neutrinos that may bombard the switches when the kicker magnet is used in the context of deflecting a particle beam.

公开(公告)号：US09728373B2

公开(公告)日：2017-08-08

申请号：US15338637

申请日：2016-10-31

Applicant: NuFlare Technology, Inc.

Inventor： Nobutaka Kikuiri ,  Ikunao Isomura

IPC: H01J37/26 ,  H01J37/22 ,  H01J37/20 ,  H01J37/244 ,  H01J37/141 ,  H01J37/04

CPC classification number: H01J37/222 ,  H01J37/045 ,  H01J37/141 ,  H01J37/20 ,  H01J37/244 ,  H01J37/3026 ,  H01J37/3177 ,  H01J2237/0435 ,  H01J2237/0453 ,  H01J2237/20285 ,  H01J2237/20292 ,  H01J2237/2448 ,  H01J2237/2806 ,  H01J2237/2817 ,  H01J2237/30422 ,  H01J2237/30438 ,  H01J2237/31762 ,  H01J2237/31764

Abstract: A pattern inspection apparatus includes a data processing circuitry to input detection data based on a secondary electron from a substrate for each irradiation unit region, where n1×m1 irradiation unit regions in irradiation unit regions configure one of n2×m2 image reference regions configuring an inspection measurement image, to calculate, for each of the n2×m2 image reference regions, a statistic value acquired from the detection data of all the n1×m1 irradiation unit regions in one of the n2×m2 image reference regions, and to define the statistic value as image reference data for the image reference region, and a comparison processing circuitry to receive transmission of the image reference data for each image reference region, and to compare, using a reference image corresponding to the inspection measurement image composed of the n2×m2 image reference regions, the measurement image with the reference image for each image reference region.

公开(公告)号：US20170178862A1

公开(公告)日：2017-06-22

申请号：US15375604

申请日：2016-12-12

Applicant: NuFlare Technology, Inc.

Inventor： Munehiro OGASAWARA

IPC: H01J37/317 ,  H01J37/141 ,  H01J37/04 ,  H01J37/22 ,  H01J37/10

CPC classification number: H01J37/3177 ,  H01J37/045 ,  H01J37/10 ,  H01J37/141 ,  H01J37/145 ,  H01J37/153 ,  H01J37/226 ,  H01J2237/0435 ,  H01J2237/31774

Abstract: A multiple charged particle beam apparatus includes: a first aperture array substrate to form multiple beams; a first grating lens that constitutes a concave lens by using the first aperture array substrate as a grating; a second aperture array substrate that allows the multiple beams to pass through; and a first limiting aperture substrate arranged in a position of a convergent point of the multiple beams between the first aperture array substrate and the second aperture array substrate, wherein a first aperture array image having passed through the first shaping aperture array substrate is formed on the second aperture array substrate by a lens action including a magnetic field distribution generated between the first aperture array substrate and the second aperture array substrate and having opposite signs and same magnitude and an electric field distribution generated by the first grating lens.

公开(公告)号：US20170154751A1

公开(公告)日：2017-06-01

申请号：US14952986

申请日：2015-11-26

Applicant: MEVEX CORPORATION

Inventor： Peter W. A. BROWN ,  David A. BROWN ,  David J. HEPWORTH ,  David MACRILLO

IPC: H01J37/141 ,  A61L2/08

CPC classification number: H01J37/141 ,  A61L2/087 ,  G21K1/093 ,  G21K5/04

Abstract: An electron beam from an accelerator is injected into a vacuum chamber and bent approximately 90 degrees by an electromagnet, which can be translated along the vacuum chamber and along the propagation direction of the electron beam. Under the influence of the electromagnet, electrons exit the scan chamber through a thin metal vacuum barrier and are directed toward the product to be irradiated. There can be an x-ray converter located between the electron beam and the product. As the electromagnet moves along the scan chamber and along the direction of the electron beam, the bending angle of the electron beam can be adjusted as a function of the position of the electromagnet with respect to the product.

公开(公告)号：US09640363B2

公开(公告)日：2017-05-02

申请号：US15282028

申请日：2016-09-30

Applicant: Institute Of Physics, Chinese Academy Of Sciences

Inventor： Guoqiang Yu ,  Peng Guo ,  Xiufeng Han ,  Chaohui Guo ,  Xiaoyu Sun ,  Xiangqian Zhou

IPC: H01J37/09 ,  H01F41/00 ,  G01R33/09 ,  H01L43/12 ,  H01F7/20 ,  H01J37/141

CPC classification number: H01J37/09 ,  G01R33/093 ,  G01R33/096 ,  H01F7/202 ,  H01F7/204 ,  H01F41/00 ,  H01J37/141 ,  H01J2237/0262 ,  H01J2237/0264 ,  H01J2237/28 ,  H01J2237/31754 ,  H01L43/12

Abstract: A nano-patterned system comprises a vacuum chamber, a sample stage and a magnetic-field applying device, which comprises a power supply, a magnetic-field generation device and a pair of magnetic poles. The magnetic-field generation device comprises a coil and a magnetic conductive soft iron core. The power supply is connected to the coil, which is wound on the soft iron core to generate a magnetic field. The soft iron core is of a semi-closed frame structure and the magnetic poles are at the ends of the frame structure. The stage is inside a vacuum chamber. The poles are oppositely arranged inside the vacuum chamber relative to the stage. The coil and the soft iron core are outside the vacuum chamber. The soft iron core leads the magnetic field generated by the coil into the vacuum chamber. The magnetic poles locate a sample on the stage and apply a local magnetic field.

公开(公告)号：US20160189913A1

公开(公告)日：2016-06-30

申请号：US14978776

申请日：2015-12-22

Applicant: Axcelis Technologies, Inc.

Inventor： Edward C. Eisner

IPC: H01J37/141 ,  H01J37/317 ,  H01J37/08

CPC classification number: H01J37/141 ,  H01J37/05 ,  H01J37/08 ,  H01J37/1472 ,  H01J37/1475 ,  H01J37/3171 ,  H01J2237/04922 ,  H01J2237/1415 ,  H01J2237/152

Abstract: A combined scanning and focusing magnet for an ion implantation system is provided. The combined scanning and focusing magnet has a yoke having a high magnetic permeability. The yoke defines a hole configured to pass an ion beam therethrough. One or more scanner coils operably are coupled to the yoke and configured to generate a time-varying predominantly dipole magnetic field when electrically coupled to a power supply. One or more focusing coils are operably coupled to the yoke and configured to generate a predominantly multipole magnetic field, wherein the predominantly multipole magnetic field is one of static or time-varying.

Abstract translation: 提供了用于离子注入系统的组合扫描和聚焦磁体。 组合的扫描和聚焦磁体具有磁导率高的磁轭。 轭限定了构造成使离子束通过其中的孔。 一个或多个扫描器线圈可操作地耦合到磁轭并且被配置为当电耦合到电源时产生随时间变化的主要偶极磁场。 一个或多个聚焦线圈可操作地耦合到磁轭并且被配置为产生主要是多极磁场，其中主要是多极磁场是静态或时变之一。

公开(公告)号：US20160064180A1

公开(公告)日：2016-03-03

申请号：US14833583

申请日：2015-08-24

Applicant: Hermes-Microvision, Inc.

Inventor： Weiming Ren ,  Xuerang Hu ,  Xuedong Liu ,  Zhongwei Chen

IPC: H01J37/141 ,  H01J37/28 ,  H01J37/147

CPC classification number: H01J37/141 ,  H01J37/1475 ,  H01J37/28 ,  H01J2237/141 ,  H01J2237/1508 ,  H01J2237/1526 ,  H01J2237/28 ,  H01J2237/2817

Abstract: A new apparatus of plural charged particle beams with multi-axis magnetic lenses is provided, which comprises a plurality of sub-columns The apparatus employs two modified multi-axis magnetic lenses, and magnetic sub-lenses thereof therefore function as the objective lenses and the condenser lenses of all the sub-columns respectively. The plurality of sub-columns can perform the same function or different functions required for observing a surface of a specimen, such as high-throughput inspection and high-resolution review of interested features thereon. Accordingly, the apparatus can be used as a yield management tool in semiconductor manufacturing industry.

Abstract translation: 提供了具有多轴磁透镜的多个带电粒子束的新装置，其包括多个子列。该装置采用两个改进的多轴磁性透镜，并且其磁性子透镜因此用作物镜，并且 所有子列的聚光透镜分别。 多个子列可以执行用于观察样本表面所需的相同功能或不同的功能，例如高通量检测和对其感兴趣的特征的高分辨率检查。 因此，该装置可以用作半导体制造业的屈服管理工具。

公开(公告)号：US09105440B2

公开(公告)日：2015-08-11

申请号：US14468674

申请日：2014-08-26

Applicant: Hermes-Microvision, Inc.

Inventor： Zhongwei Chen ,  Weiming Ren ,  Xuerang Hu ,  Xuedong Liu

IPC: H01J37/141 ,  H01J37/145 ,  H01J37/28

CPC classification number: H01J37/141 ,  H01J37/145 ,  H01J37/28 ,  H01J2237/141 ,  H01J2237/1415 ,  H01J2237/15 ,  H01J2237/281 ,  H01J2237/2817

Abstract: An apparatus of plural charged particle beams with multi-axis magnetic lens is provided to perform multi-functions of observing a specimen surface, such as high-throughput inspection and high-resolution review of interested features thereof and charge-up control for enhancing image contrast and image resolution. In the apparatus, two or more sub-columns are formed and each of the sub-columns performs one of the multi-functions. Basically the sub-columns take normal illumination to get high image resolutions, but one or more may take oblique illuminations to get high image contrasts.

Abstract translation: 提供具有多轴磁性透镜的多个带电粒子束的装置，以执行观察样品表面的多功能，例如高通量检测和其感兴趣特征的高分辨率检查以及用于增强图像对比度的充电控制 和图像分辨率。 在该装置中，形成两个或多个子列，并且每个子列执行多功能之一。 基本上，子列采取正常照明以获得高图像分辨率，但是一个或多个可能采取倾斜照明以获得高图像对比度。

公开(公告)号：US08829470B2

公开(公告)日：2014-09-09

申请号：US14060170

申请日：2013-10-22

Applicant: FEI Company

Inventor： Lubomir T{dot over (u)}ma ,  Josef {hacek over (S)}esták

IPC: G21K5/08 ,  H01J37/26 ,  H01J37/141 ,  H01J37/20

CPC classification number: G21K5/08 ,  H01J37/1413 ,  H01J37/20 ,  H01J37/265 ,  H01J2237/1035 ,  H01J2237/1415 ,  H01J2237/2802 ,  H01J2237/2813

Abstract: The invention relates to a charged-particle apparatus having a charged particle source with an optical axis; a magnetic immersion lens comprising a first lens pole and a configurable magnetic circuit; and a first sample stage movable with respect to the optical axis. The apparatus has a first configuration to position the sample, mounted on the first stage, with respect to the optical axis and a second configuration, having a second lens pole mounted on the first stage and intersecting the optical axis, equipped with a second sample stage to position the sample between the two lens poles and is movable with respect to the optical axis, causing the optical properties of the magnetic immersion lens to differ in the two configurations, and can, in the second configuration, be changed by positioning the second lens pole using the first stage, thus changing the magnetic circuit.

Abstract translation: 本发明涉及具有光轴的带电粒子源的带电粒子装置; 一种包含第一透镜柱和可配置磁路的磁浸透镜; 以及可相对于光轴移动的第一样品台。 该装置具有第一配置，用于相对于光轴定位安装在第一台上的样品，并且具有第二配置，其具有安装在第一台上并与光轴相交的第二透镜杆，该第二透镜杆装备有第二样品台 将样品定位在两个透镜杆之间并且可相对于光轴移动，导致两种结构中的浸没透镜的光学特性不同，并且可以在第二构造中通过将第二透镜 使用第一级，从而改变磁路。

公开(公告)号：US20130306863A1

公开(公告)日：2013-11-21

申请号：US13895576

申请日：2013-05-16

Applicant: Pavel ADAMEC ,  Carlo SALVESEN

Inventor： Pavel ADAMEC ,  Carlo SALVESEN

IPC: H01J37/141

CPC classification number: H01J37/141 ,  H01J37/1475 ,  H01J37/16 ,  H01J2237/0268

Abstract: A deflector system for fast magnetic deflection of a charged particle beam is described. The deflector system includes a tube for separating the beam from the magnetic deflector coil arrangement, the tube having a middle section, at least a first end section, and a second end section, wherein a wall thickness of the middle section is lower than a wall thickness of at least one of the first end section and the second end section.

Abstract translation: 描述了用于带电粒子束的快速磁偏转的偏转器系统。 偏转器系统包括用于将光束与磁偏转线圈装置分离的管，该管具有中间部分，至少第一端部部分和第二端部部分，其中中间部分的壁厚低于壁 第一端部和第二端部中的至少一个的厚度。