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    Electron microscope and method of adjusting monochromator
    51.
    发明授权
    Electron microscope and method of adjusting monochromator 有权
    电子显微镜和调光单色仪的方法

    公开(公告)号：US09362082B2

    公开(公告)日：2016-06-07

    申请号：US14823141

    申请日：2015-08-11

    Applicant: JEOL Ltd.

    Inventor： Masaki Mukai

    IPC: H01J47/00 ,  H01J37/05 ,  H01J37/21

    CPC classification number: H01J37/05 ,  H01J37/21 ,  H01J37/26 ,  H01J2237/057 ,  H01J2237/24535

    Abstract: An electron microscope is offered which can facilitate adjusting a monochromator. The electron microscope (100) includes the monochromator (20) having an energy filter (22) for dispersing the beam (EB) according to energy and a slit plate (24) disposed on an energy dispersive plane. The slit plate (24) is provided with plural energy-selecting slits (25) which are different in width taken in a direction where the beam (EB) is dispersed. The microscope (100) further includes a lens system (30) on which the beam impinges after being monochromatized by the monochromator (20), a first measuring section (50) for measuring the intensity of the beam (EB) emitted from an electron beam source (10), a second measuring section (60) for measuring the intensity of the beam (EB) that has passed through an active one (25-L) of the energy-selecting slits (25), and a slit identifying portion (72) for identifying the active energy-selecting slit (25-L) from the plural energy-selecting slits (25) on the basis of the results of measurements made by the first and second measuring sections (50, 60).

    Abstract translation: 提供了一种可以方便调整单色仪的电子显微镜。 电子显微镜（100）包括具有用于根据能量分散光束（EB）的能量过滤器（22）和设置在能量分散平面上的狭缝板（24）的单色仪（20）。 狭缝板（24）设置有多个能量选择狭缝（25），其沿着分散光束（EB）的方向而具有不同的宽度。 所述显微镜（100）还包括透镜系统（30），所述透镜系统（30）在由所述单色仪（20）单色化之后入射到所述透镜系统（30）上;第一测量部分（50），用于测量从电子束 源极（10），用于测量已经穿过能量选择狭缝（25）的有源（25-L）的光束（EB）的强度的第二测量部分（60）和狭缝识别部分 72），用于基于由第一和第二测量部（50,60）进行的测量结果，从多个能量选择缝（25）识别活动能量选择缝（25-L）。

    Device for mass selective determination of an ion
    55.
    发明授权
    Device for mass selective determination of an ion 有权
    用于质量选择性测定离子的装置

    公开(公告)号：US09035245B2

    公开(公告)日：2015-05-19

    申请号：US14277933

    申请日：2014-05-15

    Applicant: Carl Zeiss Microscopy GmbH

    Inventor： Albrecht Glasmachers ,  Michel Aliman

    IPC: H01J37/05 ,  H01J49/02 ,  H01J49/42 ,  H01J37/244 ,  H01J37/252

    CPC classification number: H01J37/05 ,  H01J37/244 ,  H01J37/252 ,  H01J49/022 ,  H01J49/027 ,  H01J49/424 ,  H01J2237/028 ,  H01J2237/057

    Abstract: A device for mass selective determination of at least one ion or of a plurality of ions is used, for example, in a measuring apparatus having an ion trap. The ion trap has a ring electrode having a first opening. A first electrode is arranged at the first opening. Furthermore, an amplifier for providing a radio-frequency storage signal for the ion trap and a first transformer are provided, said first transformer being connected to the amplifier and the first electrode in such a way that the radio-frequency storage signal is coupled into the first electrode via the first transformer.

    Abstract translation: 例如，在具有离子阱的测量装置中使用用于质量选择性测定至少一种离子或多种离子的装置。 离子阱具有具有第一开口的环形电极。 第一电极设置在第一开口处。 此外，提供了一种用于提供用于离子阱的射频存储信号和第一变压器的放大器，所述第一变压器以这样的方式连接到放大器和第一电极，使得射频存储信号耦合到 第一电极经由第一变压器。

    Energy filter for charged particle beam apparatus
    56.
    发明授权
    Energy filter for charged particle beam apparatus 有权
    带电粒子束装置的能量过滤器

    公开(公告)号：US09000395B2

    公开(公告)日：2015-04-07

    申请号：US14276000

    申请日：2014-05-13

    Applicant: Hermes Microvision, Inc.

    Inventor： Weiming Ren ,  Shuai Li ,  Zhongwei Chen

    IPC: H01J37/12 ,  H01J37/05 ,  H01J37/244 ,  H01J37/26

    CPC classification number: H01J37/05 ,  H01J37/10 ,  H01J37/12 ,  H01J37/244 ,  H01J37/263 ,  H01J2237/057 ,  H01J2237/12 ,  H01J2237/14

    Abstract: This invention provides a method for improving performance of a reflective type energy filter for a charged particle beam, which employs a beam-adjusting lens on an entrance side of a potential barrier of the energy filter to make the charged particle beam become a substantially parallel beam to be incident onto the potential barrier. The method makes the energy filter have both a fine energy-discrimination power over a large emission angle spread and a high uniformity of energy-discrimination powers over a large FOV. A LVSEM using this method in the energy filter can obviously improve image contrast. The invention also provides multiple energy-discrimination detection devices formed by using the advantages of the method.

    Abstract translation: 本发明提供了一种用于提高带电粒子束的反射型能量过滤器的性能的方法，该方法在能量过滤器的势垒的入口侧采用光束调节透镜，以使带电粒子束变成基本平行的光束 被发现在潜在的障碍之上。 该方法使得能量滤波器在大的发射角扩展上具有精细的能量鉴别能力，并且在大的FOV上具有高的能量鉴别能力的均匀性。 在能量过滤器中使用这种方法的LVSEM可以显着提高图像对比度。 本发明还提供了通过使用该方法的优点形成的多个能量鉴别检测装置。

    Energy Filter for Charged Particle Beam Apparatus
    57.
    发明申请
    Energy Filter for Charged Particle Beam Apparatus 有权
    带电粒子束能量滤波器

    公开(公告)号：US20140284476A1

    公开(公告)日：2014-09-25

    申请号：US14276000

    申请日：2014-05-13

    Applicant: Hermes Microvision, Inc.

    Inventor： Weiming Ren ,  Shuai Li ,  Zhongwei Chen

    IPC: H01J37/05 ,  H01J37/12 ,  H01J37/244 ,  H01J37/26

    CPC classification number: H01J37/05 ,  H01J37/10 ,  H01J37/12 ,  H01J37/244 ,  H01J37/263 ,  H01J2237/057 ,  H01J2237/12 ,  H01J2237/14

    Abstract: This invention provides a method for improving performance of a reflective type energy filter for a charged particle beam, which employs a beam-adjusting lens on an entrance side of a potential barrier of the energy filter to make the charged particle beam become a substantially parallel beam to be incident onto the potential barrier. The method makes the energy filter have both a fine energy-discrimination power over a large emission angle spread and a high uniformity of energy-discrimination powers over a large FOV. A LVSEM using this method in the energy filter can obviously improve image contrast. The invention also provides multiple energy-discrimination detection devices formed by using the advantages of the method.

    Abstract translation: 本发明提供了一种用于提高带电粒子束的反射型能量过滤器的性能的方法，该方法在能量过滤器的势垒的入口侧采用光束调节透镜，以使带电粒子束变成基本平行的光束 被发现在潜在的障碍物上。 该方法使得能量滤波器在大的发射角扩展上具有精细的能量鉴别能力，并且在大的FOV上具有高的能量鉴别能力的均匀性。 在能量过滤器中使用这种方法的LVSEM可以显着提高图像对比度。 本发明还提供了通过使用该方法的优点形成的多个能量鉴别检测装置。

    Imaging energy filter for electrons and other electrically charged particles and method for energy filtration of the electrons and other electrically charged particles with the imaging energy filter in electro-optical devices
    59.
    发明授权
    Imaging energy filter for electrons and other electrically charged particles and method for energy filtration of the electrons and other electrically charged particles with the imaging energy filter in electro-optical devices 有权
    电子和其他带电粒子的成像能量过滤器和电子和其他带电粒子的能量过滤方法与电光器件中的成像能量过滤器

    公开(公告)号：US07126117B2

    公开(公告)日：2006-10-24

    申请号：US11168728

    申请日：2005-06-28

    Applicant: Krzysztof Grzelakowski

    Inventor： Krzysztof Grzelakowski

    IPC: H01J37/05 ,  H01J37/063

    CPC classification number: H01J37/05 ,  H01J49/484 ,  H01J2237/151

    Abstract: An imaging energy filter for electrons and other charged particles filters an object formed by these particles at the filter inlet by means of an energetic selection of charged particles in the region of a dispersion aperture. The filter includes two concentric and spherical electrodes, which produce an electrostatic field that deflects the charged particles at an angle α that is greater than π and less than 2π. The deflector, operating as a deflecting element that generates a deflection field, is disposed at an intersection point of the inlet axis and the outlet axis and in a plane of symmetry of the angle α, wherein the plane of symmetry simultaneously is an electro-optical plane. The deflection field generated by the deflecting element deflects the charged particles by an angle π−α/2, leading to a total deflection angle of 2π and co-linearity of the inlet axis and outlet axis.

    Abstract translation: 用于电子和其他带电粒子的成像能量过滤器通过在分散孔径区域中的带电粒子的能量选择来过滤由过滤器入口处的这些颗粒形成的物体。 滤波器包括两个同心和球形电极，其产生静电场，该电场以大于pi且小于2pi的角度α偏转带电粒子。 作为产生偏转场的偏转元件运行的偏转器设置在入口轴线和出口轴线的交点和角度α的对称平面中，其中对称平面同时为电光 飞机 由偏转元件产生的偏转磁场将带电粒子偏转一个角度pi-α/ 2，导致2π的总偏转角和入口轴线和出口轴线的共线性。

    Energy filter and electron microscope
    60.
    发明授权
    Energy filter and electron microscope 失效
    能量过滤器和电子显微镜

    公开(公告)号：US06960763B2

    公开(公告)日：2005-11-01

    申请号：US10738966

    申请日：2003-12-17

    Applicant: G. Martinez Lopez ,  Katsushige Tsuno

    Inventor： G. Martinez Lopez ,  Katsushige Tsuno

    IPC: H01J37/26 ,  G01Q30/06 ,  H01J37/05 ,  H01J37/153 ,  H01J49/44 ,  H01J40/00 ,  H01J47/00

    CPC classification number: H01J37/05 ,  H01J37/153

    Abstract: An energy filter with reduced aberration. The energy filter has a first stage of filter for receiving an electron beam entering along the optical axis and for focusing the beam in one direction vertical to the optical axis and a second stage of filter positioned along the optical axis behind the first stage of filter. The beam once focused by the first stage of filter is made to enter the second stage of filter. In the second stage of filter, the orbit of the electron beam is inverted with respect to the focal point. The two stages of filters are identical in length taken along the optical axis. The first and second stages of filters have electric and magnetic quadrupole fields, respectively, along the optical axis. These quadrupole fields make an angle of 45 degrees to the optical axis to achieve astigmatic focusing.

    Abstract translation: 具有减小像差的能量滤波器。 能量滤波器具有第一级滤波器，用于接收沿着光轴进入的电子束并且用于在垂直于光轴的一个方向上聚焦光束，以及沿着光轴位于第一级过滤器后面的第二级滤光器。 过滤器第一级聚焦的光束进入第二级过滤器。 在滤波器的第二阶段，电子束的轨道相对于焦点反转。 过滤器的两个阶段沿光轴取长度相同。 滤光器的第一和第二阶段分别具有沿着光轴的电和四极四极场。 这些四极场与光轴成45度的角度，以实现散光聚焦。

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