公开(公告)号：US20160025646A1

公开(公告)日：2016-01-28

申请号：US14875084

申请日：2015-10-05

Applicant: KLA-TENCOR CORPORATION

Inventor： Amnon MANASSEN ,  Andrew HILL ,  Avi ABRAMOV

IPC: G01N21/88 ,  G01N21/47

CPC classification number: G01N21/8806 ,  G01J1/0228 ,  G01J3/02 ,  G01J3/021 ,  G01J3/0218 ,  G01J3/0229 ,  G01J3/2823 ,  G01N21/47 ,  G01N21/8851 ,  G01N21/9501 ,  G01N21/956 ,  G01N21/95623 ,  G01N2021/8848 ,  G01N2201/06 ,  G03F7/70633

Abstract: Methods and systems are provided, which pattern an illumination of a metrology target with respect to spectral ranges and/or polarizations, illuminate a metrology target by the patterned illumination, and measure radiation scattered from the target by directing, at a pupil plane, selected pupil plane pixels from a to respective single detector(s) by applying a collection pattern to the pupil plane pixels. Single detector measurements (compressive sensing) has increased light sensitivity which is utilized to pattern the illumination and further enhance the information content of detected scattered radiation with respect to predefined metrology parameters.

Abstract translation: 提供了方法和系统，其对于光谱范围和/或偏振来对计量目标进行照明，通过图案化照明照亮度量目标，并且通过在瞳孔平面指导所选择的瞳孔来测量从目标散射的辐射 通过将收集图案应用于瞳孔平面像素，从一个或多个单个检测器的平面像素。 单个检测器测量（压缩感测）具有增加的光敏度，其用于对照明进行图案化，并且相对于预定义的度量参数进一步增强检测到的散射辐射的信息内容。

公开(公告)号：US20160025567A1

公开(公告)日：2016-01-28

申请号：US14792343

申请日：2015-07-06

Applicant: JDSU Deutschland GmbH

Inventor： Eberhard LOECKLIN

IPC: G01J3/18 ,  G01J3/14

CPC classification number: G01J3/1804 ,  G01J3/02 ,  G01J3/0205 ,  G01J3/021 ,  G01J3/14 ,  G01J2003/1208

Abstract: The invention relates to angle-limiting optical reflectors and optical dispersive devices such as optical spectrum analyzers using the same. The reflector has two reflective surfaces arranged in a two-dimensional corner reflector configuration for reflecting incident light back with a shift, and includes two prisms having a gap therebetween that is tilted to reflect unwanted light and transmit wanted light. A two-pass optical spectrum analyzer utilizes the reflector to block unwanted multi-pass modes that may otherwise exist and degrade the wavelength selectivity of the device.

Abstract translation: 本发明涉及角度限制光学反射器和光学色散装置，例如使用其的光谱分析仪。 反射器具有以二维角反射器构造布置的两个反射表面，用于以偏移方式反射入射光，并且包括两个在其间具有间隙的棱镜，其倾斜以反射不需要的光并传输所需的光。 双通道光谱分析仪利用反射器来阻止可能存在的不期望的多通道模式并降低器件的波长选择性。

公开(公告)号：US09228895B2

公开(公告)日：2016-01-05

申请号：US13480676

申请日：2012-05-25

Applicant: Brian K. McComas ,  Kent P. Pfibsen

Inventor： Brian K. McComas ,  Kent P. Pfibsen

IPC: H04N1/028 ,  H04N5/225 ,  H04N9/09 ,  G01J3/02 ,  G01J3/36 ,  G02B17/06 ,  G01J3/28

CPC classification number: G01J3/0291 ,  G01J3/021 ,  G01J3/0237 ,  G01J3/0286 ,  G01J3/2823 ,  G01J3/36 ,  G02B17/0652 ,  H04N1/0281 ,  H04N5/2258 ,  H04N5/2259 ,  H04N9/09

Abstract: A multi-wavelength optical imaging system and method. In one example, an optical imaging system includes an integrated dewar assembly housing a staring detector that includes a plurality of focal plane array sensors spatially distributed over a common focal plane and aligned relative to one another, each of the plurality of focal plane array sensors being configured for a different waveband. The optical imaging system further includes foreoptics, such as a telescope, optically coupled to the integrated dewar assembly and configured to direct and focus light from an entrance pupil of the optical imaging system into an optical beam incident on at least one of the plurality of focal plane array sensors.

Abstract translation: 一种多波长光学成像系统及方法。 在一个示例中，光学成像系统包括集成的杜瓦瓶组件，该装置包括一个凝视检测器，该检测器包括空间上分布在公共焦平面上并相对于彼此对准的多个焦平面阵列传感器，多个焦平面阵列传感器中的每一个 配置为不同的波段。 光学成像系统还包括诸如望远镜的光学耦合到集成的杜瓦瓶组件并被配置为将来自光学成像系统的入射光瞳的光引导和聚焦到入射到多个焦点中的至少一个焦点 平面阵列传感器。

公开(公告)号：US20150377703A1

公开(公告)日：2015-12-31

申请号：US14718166

申请日：2015-05-21

Applicant: Nanohmics, Inc.

Inventor： Steve M. Savoy ,  Byron G. Zollars ,  Andrew J. Milder ,  Gennady Shvets

IPC: G01J3/12 ,  H01L31/18 ,  G01J3/02

CPC classification number: G01J3/12 ,  G01J1/0414 ,  G01J1/0429 ,  G01J1/0488 ,  G01J1/42 ,  G01J3/021 ,  G01J3/0224 ,  G01J3/26 ,  G01J3/2803 ,  G01J3/51 ,  G01J5/024 ,  G01J5/0809 ,  G01J5/0825 ,  G01J5/0862 ,  G01J5/20 ,  H01L31/18

Abstract: Embodiments of the invention are directed to integrated resonance detectors and arrays of integrated resonance detectors and to methods for making and using the integrated resonance detectors and arrays. Integrated resonance detectors comprise a substrate, a conducting mirror layer, an active layer, and a patterned conducting layer. Electromagnetic radiation is detected by transducing a specific resonance-induced field enhancement in the active layer to a detection current that is proportional to the incident irradiance.

Abstract translation: 本发明的实施例涉及集成谐振检测器和集成谐振检测器的阵列以及用于制造和使用集成谐振检测器和阵列的方法。 集成谐振检测器包括基板，导电镜层，有源层和图案化导电层。 通过将有源层中的特定共振诱导场增强转换成与入射辐照度成比例的检测电流来检测电磁辐射。

公开(公告)号：US20150369663A1

公开(公告)日：2015-12-24

申请号：US14766404

申请日：2013-02-06

Applicant: EMPIRE TECHNOLOGY DEVELOPMENT LLC

Inventor： Mordehai MARGALIT ,  Takahisa KUSUURA ,  Christopher A. WIKLOF

IPC: G01J3/02 ,  F25B21/02 ,  G01J3/28

CPC classification number: G01J3/0286 ,  F25B21/02 ,  G01J3/021 ,  G01J3/027 ,  G01J3/26 ,  G01J3/2823 ,  G01J3/32 ,  Y10T29/49085 ,  Y10T29/49119

Abstract: A tunable spectrometer is described. A tunable spectrometer may include an optical filter, having a first reflector stack and a second reflector stack separated by a half-wave spacer, a heater, a heat-sink and a detector array. At least one of the first reflector stack, the second reflector stack, and the half-wave spacer is made from a thermo-optic material. The heater and the heat sink are separately in contact with at least one of the first reflector stack, the second reflector stack, and the half-wave spacer. The detector array is configured to collect an output from the optical filter. In various embodiments, the heat and the heat sink may be separated by an optically transparent thermal isolator.

Abstract translation: 描述了可调谐光谱仪。 可调谐光谱仪可以包括具有由半波隔离物，加热器，散热器和检测器阵列隔开的第一反射器叠层和第二反射器叠层的滤光器。 第一反射器叠层，第二反射器叠层和半波隔离件中的至少一个由热光材料制成。 加热器和散热器分别与第一反射器叠层，第二反射器叠层和半波隔离件中的至少一个接触。 检测器阵列被配置为收集来自滤光器的输出。 在各种实施例中，热和散热器可以由光学透明的热隔离器分开。

公开(公告)号：US09198578B2

公开(公告)日：2015-12-01

申请号：US13776074

申请日：2013-02-25

Applicant: Board of Regents, The University of Texas System

Inventor： Karel J. Zuzak ,  Jeffrey A. Cadeddu ,  Rafael Ufret-Vincenty ,  Robert P. Francis ,  Edward Livingston

IPC: A61B6/00 ,  A61B5/00 ,  A61B5/1455 ,  G01J3/02 ,  G01J3/28 ,  G01N21/31 ,  G01N21/39 ,  G01J3/10 ,  G01J3/12

CPC classification number: A61B5/0059 ,  A61B5/0071 ,  A61B5/0075 ,  A61B5/0084 ,  A61B5/0086 ,  A61B5/14551 ,  A61B5/4064 ,  A61B5/411 ,  A61B5/413 ,  A61B5/4842 ,  G01J3/02 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/0229 ,  G01J3/0264 ,  G01J3/10 ,  G01J3/2803 ,  G01J3/2823 ,  G01J2003/1213 ,  G01J2003/1282 ,  G01N21/31 ,  G01N21/39

Abstract: A hyperspectral imaging system having an optical path. The system including an illumination source adapted to output a light beam, the light beam illuminating a target, a dispersing element arranged in the optical path and adapted to separate the light beam into a plurality of wavelengths, a digital micromirror array adapted to tune the plurality of wavelengths into a spectrum, an optical device having a detector and adapted to collect the spectrum reflected from the target and arranged in the optical path and a processor operatively connected to and adapted to control at least one of: the illumination source; the dispersing element; the digital micromirror array; the optical device; and, the detector, the processor further adapted to output a hyperspectral image of the target. The dispersing element is arranged between the illumination source and the digital micromirror array, the digital micromirror array is arranged to transmit the spectrum to the target and the optical device is arranged in the optical path after the target.

Abstract translation: 具有光路的高光谱成像系统。 该系统包括适于输出光束的照明源，照射目标的光束，布置在光路中并适于将光束分离成多个波长的分散元件，适于调谐多个的数字微镜阵列 具有检测器并且适于收集从目标反射并布置在光路中的光谱的光学装置，以及可操作地连接到并适于控制以下各项中的至少一个的处理器：照明源; 分散元件; 数字微镜阵列; 光学装置; 并且，所述检测器，所述处理器还适于输出所述目标的高光谱图像。 分散元件布置在照明源和数字微镜阵列之间，数字微镜阵列被布置成将光谱传输到目标，并且光学装置被布置在目标之后的光路中。

公开(公告)号：US20150316476A1

公开(公告)日：2015-11-05

申请号：US14649096

申请日：2013-11-29

Applicant: HORIBA JOBIN YVON SAS

Inventor： Olivier ACHER ,  Simon RICHARD ,  Christian BRACH ,  Viviane MILLET ,  Sebastien CORDE ,  Daphne HERAN

IPC: G01N21/64 ,  G01J3/18 ,  G01J3/447 ,  G01J3/02

CPC classification number: G01N21/645 ,  G01J3/021 ,  G01J3/0224 ,  G01J3/18 ,  G01J3/447 ,  G01N2201/063 ,  G01N2201/0633 ,  G02B5/1866 ,  G02B27/283

Abstract: A spectrometer (100) for analyzing the spectrum of an upstream light beam (1), includes an entrance slit (101) and collimating elements (110) suitable for generating, from the upstream light beam, a collimated light beam (10), characterized in that it also includes: a polarization-dependent diffraction grating (120) suitable for diffracting, at each wavelength (11, 12) of the spectrum of the upstream light beam, the collimated light beam into a first diffracted light beam (11, 12) and a second diffracted light beam (21, 22); optical recombining elements (130) including a planar optical reflecting surface (130) perpendicular to the grating and suitable for deviating at least the second diffracted light beam; and focussing elements (140) suitable for focussing, at each wavelength, the first diffracted light beam and the second diffracted light beam onto one and the same focussing area (141).

Abstract translation: 用于分析上游光束（1）的光谱的光谱仪（100）包括入射狭缝（101）和适于从上游光束产生准直光束（10）的准直元件（110），其特征在于 因为它还包括：适用于在上游光束的光谱的每个波长（11,12）衍射的偏振相关衍射光栅（120），准直光束成为第一衍射光束（11,12 ）和第二衍射光束（21,22）; 光学重组元件（130），包括垂直于光栅的平面光学反射表面（130），并且适于至少偏离第二衍射光束; 以及适于在每个波长处将第一衍射光束和第二衍射光束聚焦到同一聚焦区域（141）上的聚焦元件（140）。

公开(公告)号：US20150308958A1

公开(公告)日：2015-10-29

申请号：US14649660

申请日：2013-12-05

Applicant: GENEPOC INC. ,  UNIVERSITÉ LAVAL

Inventor： Hugo LEMIEUX ,  Sébastien CHAPDELAINE ,  David BÉLIVEAU-VIEL ,  Jean-François GRAVEL

IPC: G01N21/64

CPC classification number: G01N21/6486 ,  G01J3/021 ,  G01J3/0213 ,  G01J3/0216 ,  G01J3/0218 ,  G01J3/443 ,  G01J2003/102 ,  G01N21/6408 ,  G01N21/6445 ,  G01N21/645 ,  G01N21/763 ,  G01N2021/6419 ,  G01N2021/6471 ,  G01N2021/6484 ,  G01N2201/061

Abstract: An interrogation device for detecting luminescent light produced by analytes in a sample excited by multiple excitation light beams each having individual spectral contents, comprising a plurality of light sources each generating an excitation light beam; at least one detector for detecting the luminescent light produced by the sample; and an optical assembly defining distinct and fixed excitation light paths for each of the excitation light beams from the light sources to a common excitation site on the sample and defining a shared luminescence light path for the luminescent light from the excitation site on sample to the at least one detector, the excitation light paths and the luminescence light path being on a same side of the sample, the optical assembly including sample-side optics projecting the excitation light towards the sample and collecting luminescent light from the sample.

Abstract translation: 一种用于检测由各自具有各个光谱含量的多个激发光束激发的样品中的被分析物产生的发光光的询问装置，包括多个光源，每个光源产生激发光束; 用于检测由样品产生的发光的至少一个检测器; 以及光学组件，其为从光源到样品上的共同激发位置的每个激发光束定义不同且固定的激发光路径，并且限定用于从样品上的激发位点到该位置的发光的共享发光光路 至少一个检测器，激发光路径和发光光路位于样品的同一侧，光学组件包括样品侧光学器件，将激发光投射到样品并收集来自样品的发光。

公开(公告)号：US09157803B2

公开(公告)日：2015-10-13

申请号：US14361840

申请日：2012-12-11

Applicant: THERMO FISHER SCIENTIFIC (ECUBLENS) SARL

Inventor： Fabio Demarco ,  Jean-Luc Dorier ,  Edmund Halasz

IPC: G01J3/28 ,  G01J3/443 ,  G01J3/02 ,  G01J3/18 ,  G01N21/67

CPC classification number: G01J3/443 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/0229 ,  G01J3/024 ,  G01J3/0294 ,  G01J3/18 ,  G01J3/2803 ,  G01N21/67

Abstract: A spark optical emission spectrometer comprising: a spark source for causing spark induced emission of light from a sample; a single entrance slit; a toroidal mirror for directing the light through the single entrance slit; a plurality of diffraction gratings for diffracting light that has been directed through the entrance slit by the mirror, whereby the plurality of diffraction gratings are simultaneously illuminated; and at least one array detector for detecting the diffracted light from the plurality of diffraction gratings, wherein the minor is for directing the light through the entrance slit such that light from different regions in the spark source is spatially separated in an image of the light at the gratings whereby a first diffraction grating is preferentially illuminated with light from a first region of the spark source and simultaneously a second diffraction grating is preferentially illuminated with light from a second region of the spark source.

Abstract translation: 一种火花光发射光谱仪，包括：火花源，用于引起火花诱发的来自样品的光的发射; 单个入口狭缝; 用于将光引导通过单个入口狭缝的环形镜; 多个用于衍射光的衍射光栅，所述衍射光栅通过所述反射镜被引导通过所述入射狭缝，由此所述多个衍射光栅同时被照亮; 以及用于检测来自多个衍射光栅的衍射光的至少一个阵列检测器，其中，次要用于引导光通过入口狭缝，使得来自火花源中的不同区域的光在光的图像中在空间上分离 其中由来自火花源的第一区域的光优先照射第一衍射光栅并且同时第二衍射光栅的光栅优先用来自火花源的第二区域的光照射。

公开(公告)号：US09140604B2

公开(公告)日：2015-09-22

申请号：US13491442

申请日：2012-06-07

Applicant: Earl Jensen ,  Mei Sun ,  Kevin O'Brien

Inventor： Earl Jensen ,  Mei Sun ,  Kevin O'Brien

IPC: G01J3/46 ,  G01J1/58 ,  G01J3/02 ,  G01J3/36 ,  G01J3/12

CPC classification number: G01J3/0259 ,  G01J1/58 ,  G01J3/0205 ,  G01J3/021 ,  G01J3/0256 ,  G01J3/0262 ,  G01J3/36 ,  G01J2003/1213

Abstract: A sensor apparatus for measuring characteristics of optical radiation has a substrate and a low profile spectrally selective detection system located within the substrate at one or more spatially separated locations. The spectrally selective detection system includes a generally laminar array of wavelength selectors optically coupled to a corresponding array of optical detectors. It is emphasized that this abstract is provided to comply with the rules requiring an abstract that will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure. It is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims.

Abstract translation: 用于测量光辐射特性的传感器装置具有位于一个或多个空间分离位置的衬底内的衬底和低剖面光谱选择性检测系统。 光谱选择性检测系统包括光学耦合到相应阵列的光学检测器的波长选择器的大体层流阵列。 要强调的是，该摘要被提供以符合要求抽象的规则，允许搜索者或其他读者快速确定技术公开内容的主题。 提交它的理解是，它不会用于解释或限制权利要求的范围或含义。