DEVICE FOR PREVENTING INTENSITY REDUCTION OF OPTICAL SIGNAL, OPTICAL EMISSION SPECTROMETER, OPTICAL INSTRUMENT, AND MASS SPECTROMETER INCLUDING THE SAME
    61.
    发明申请
    DEVICE FOR PREVENTING INTENSITY REDUCTION OF OPTICAL SIGNAL, OPTICAL EMISSION SPECTROMETER, OPTICAL INSTRUMENT, AND MASS SPECTROMETER INCLUDING THE SAME 有权
    用于防止光信号强度降低的装置,光学发射光谱仪,光学仪器和包括其中的质谱仪

    公开(公告)号:US20150211924A1

    公开(公告)日:2015-07-30

    申请号:US14677300

    申请日:2015-04-02

    Inventor: Jae Won HAHN

    Abstract: A device for a device for preventing the intensity reduction of an optical signal, an optical emission spectrometer, an optical instrument, and a mass spectrometer including the same are provided. The device for preventing the intensity reduction includes a shielding filter which has a mesh structure capable of blocking RF electromagnetic waves radiated from a plasma field for a wafer processing, is installed in the front of an optical window of an optical emission spectrometer for measuring the plasma field from an emission spectrum image of the plasma field, and collects charging particles passing through the mesh.

    Abstract translation: 提供了用于防止光信号强度降低的装置的装置,光发射光谱仪,光学仪器和包括其的质谱仪。 用于防止强度降低的装置包括具有能够阻挡从用于晶片处理的等离子体场辐射的RF电磁波的网格结构的屏蔽滤波器,安装在用于测量等离子体的光发射光谱仪的光学窗口的前面 从等离子体场的发射光谱图像中收集通过网格的带电粒子。

    APPARATUS FOR SELECTIVELY TRANSMITTING THE SPECTRUM OF ELECTROMAGNETIC RADIATION WITHIN A PREDEFINED WAVELENGTH RANGE
    63.
    发明申请
    APPARATUS FOR SELECTIVELY TRANSMITTING THE SPECTRUM OF ELECTROMAGNETIC RADIATION WITHIN A PREDEFINED WAVELENGTH RANGE 有权
    用于选择性地传输在预定波长范围内的电磁辐射光谱的装置

    公开(公告)号:US20150138547A1

    公开(公告)日:2015-05-21

    申请号:US14399463

    申请日:2012-10-31

    Abstract: The apparatus for selectively transmitting the spectrum of electromagnetic radiation within a predefined wavelength range is provided with a carrier (115), a pinhole diaphragm which is arranged above the carrier (115) and is made of a material that is substantially impermeable to the radiation of interest, wherein the pinhole diaphragm has at least one radiation passage opening with a size for allowing through radiation at a wavelength which is less than or equal to a predefinable upper limit wavelength, and an electrically insulating and optically transparent dielectric layer (103) which is formed on the carrier (115) inside the radiation passage opening and extends, in a manner adjoining the radiation passage opening, between the carrier (115) and at least one section below the pinhole diaphragm. The dielectric layer (103) has a thickness which is less than or equal to half a predefinable lower limit wavelength which is less than the upper limit wavelength.

    Abstract translation: 用于选择性地将预定波长范围内的电磁辐射光谱传输的装置设置有载体(115),其布置在载体(115)的上方并由基本上不透过 其中针孔隔膜具有至少一个辐射通道开口,其尺寸允许通过小于或等于可预定上限波长的波长的辐射,以及电绝缘和光学透明的介电层(103),其是 形成在辐射通道开口内部的载体(115)上,以与辐射通道开口相邻的方式在载体(115)和针孔隔膜下方的至少一个部分之间延伸。 电介质层(103)的厚度小于或等于小于上限波长的预定下限波长的一半。

    Object identification device, moving object controlling apparatus having object identification device, information presenting apparatus having object identification device, and spectroscopic image capturing apparatus
    64.
    发明授权
    Object identification device, moving object controlling apparatus having object identification device, information presenting apparatus having object identification device, and spectroscopic image capturing apparatus 有权
    物体识别装置,具有物体识别装置的移动物体控制装置,具有物体识别装置的信息呈现装置和分光图像捕获装置

    公开(公告)号:US09025027B2

    公开(公告)日:2015-05-05

    申请号:US13230009

    申请日:2011-09-12

    Abstract: An object identification device includes an image capturing device to capture images polarized in different directions. A noise removal unit removes noise in the polarized images using a noise removing parameter. An index value computing unit computes an object identification index value for identification-processing areas in the polarized images using data of noise-removed polarized images. An object identification processing unit conducts object identification by determining identification processing areas corresponding to an identification target object based on the object identification index value. An environment information obtaining unit obtains environment information. An environmental condition determination unit determines an environmental condition based on the environment information. A parameter storage unit stores noise removing parameters prepared for mutually exclusive environmental conditions. The noise removal unit reads a noise removing parameter from the parameter storage unit to conduct noise removal. A method of identifying an object and a spectroscopic image capturing apparatus are also provided.

    Abstract translation: 物体识别装置包括用于捕获沿不同方向偏振的图像的图像捕获装置。 噪声去除单元使用噪声去除参数去除偏振图像中的噪声。 索引值计算单元使用去除噪声的偏振图像的数据来计算偏振图像中的识别处理区域的对象识别索引值。 对象识别处理单元通过基于对象识别索引值确定与识别目标对象相对应的识别处理区域来进行对象识别。 环境信息获取单元获取环境信息。 环境条件确定单元基于环境信息来确定环境条件。 参数存储单元存储为相互排斥的环境条件准备的噪声去除参数。 噪声去除单元从参数存储单元读取噪声消除参数以进行噪声去除。 还提供了一种识别对象的方法和分光图像捕获设备。

    Tuned dynamic eigen spectroscopy systems
    66.
    发明授权
    Tuned dynamic eigen spectroscopy systems 有权
    调谐动态特征光谱系统

    公开(公告)号:US08928880B2

    公开(公告)日:2015-01-06

    申请号:US13560220

    申请日:2012-07-27

    Abstract: An apparatus for detecting gas concentrations includes a coded filter to oscillate proximate a resonant frequency. A photo detector is positioned below the coded filter such that the coded filter selectively blocks light that is directed at the photo detector. Optics are positioned to project spectral information on to the coded filter. A processor analyzes a signal received from the photo detector. The processor is adapted to weight a harmonic attic signal.

    Abstract translation: 用于检测气体浓度的装置包括在谐振频率附近振荡的编码滤波器。 光检测器位于编码滤波器的下方,使得编码滤波器选择性地阻挡指向光检测器的光。 定位光学器件将光谱信息投影到编码滤波器上。 处理器分析从光电检测器接收的信号。 处理器适用于加重谐波阁楼信号。

    Image Pickup Device
    68.
    发明申请
    Image Pickup Device 有权
    图像拾取装置

    公开(公告)号:US20140232858A1

    公开(公告)日:2014-08-21

    申请号:US14347389

    申请日:2012-09-20

    Abstract: An image pickup device, which comprises an optical characteristics changing unit (15), an optical system (45) containing an objective lens (47) and for leading a light from the objective lens to the optical characteristics changing unit, and an image pickup element (52) for receiving a light via the optical characteristics changing unit, wherein the optical characteristics changing unit has two or more dividing units, and has a configuration where one of the dividing units is selectively disposed along an optical path, and the dividing unit has a first region to select a specific wavelength from the light coming from the optical system and a second region where optical characteristics of the light from the optical system are not changed.

    Abstract translation: 一种图像拾取装置,包括光学特性改变单元(15),包含物镜(47)并将来自物镜的光引导到光学特性改变单元的光学系统(45)和图像拾取元件 (52),用于经由所述光学特性改变单元接收光,其中所述光学特性改变单元具有两个或更多个分割单元,并且具有沿着光路选择性地布置所述分割单元中的一个的构造,并且所述分割单元具有 从来自光学系统的光中选择特定波长的第一区域和来自光学系统的光的光学特性不改变的第二区域。

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