公开(公告)号：US20170067779A1

公开(公告)日：2017-03-09

申请号：US15233595

申请日：2016-08-10

Applicant: Samsung Electronics Co., Ltd. ,  Industry-Academic Cooperation Foundation, Yonsei University

Inventor： In-joong Kim ,  llgu Yun

IPC: G01J3/02 ,  G02B5/20 ,  G01J3/443 ,  G02B7/02

CPC classification number: G01J3/0208 ,  G01J3/0218 ,  G01J3/0229 ,  G01J3/024 ,  G01J3/443 ,  G02B5/205 ,  G02B7/021 ,  H01J37/32972 ,  H01J37/3299 ,  H01L21/67253

Abstract: Provided are a tube-type lens usable for accurately detecting a plasma state in a plasma process, an optical emission spectroscopy (OES) apparatus including the tube-type lens, a plasma monitoring system including the OES apparatus, and a method of manufacturing a semiconductor device by using the plasma monitoring system. The tube-type lens includes: a cylindrical tube; a first lens disposed at an entrance of the cylindrical tube, on which light is incident, the first lens including a central portion which prevents transmission of the light and a second lens disposed at an exit of the cylindrical tube, from which the light exits.

Abstract translation: 提供了一种可用于精确检测等离子体处理中的等离子体状态的管式透镜，包括管式透镜的光发射光谱（OES）装置，包括OES装置的等离子体监视系统以及半导体制造方法 装置采用等离子体监测系统。 管式透镜包括：圆柱形管; 第一透镜，设置在圆柱形管的入口处，光入射，第一透镜包括防止光的透射的中心部分和设置在圆柱形管的出口处的第二透镜，光从该光出射。

公开(公告)号：US09494463B2

公开(公告)日：2016-11-15

申请号：US14293405

申请日：2014-06-02

Applicant: Thermo Scientific Portable Analytical Instruments Inc.

Inventor： Mark A. Hamilton

IPC: G01J3/04 ,  G01J3/02 ,  G01J3/443 ,  G01J3/06

CPC classification number: G01J3/0229 ,  G01J3/0237 ,  G01J3/0264 ,  G01J3/027 ,  G01J3/0272 ,  G01J3/0289 ,  G01J3/0291 ,  G01J3/04 ,  G01J3/06 ,  G01J3/443

Abstract: An optical emission spectroscopic (OES) instrument includes a spectrometer, a processor and an adjustable mask controlled by the processor. The adjustable mask defines a portion of an analytical gap imaged by the spectrometer. The instrument automatically adjusts the size and position of an opening in the mask, so the spectrometer images an optimal portion of plasma formed in the analytical gap, thereby improving signal and noise characteristics of the instrument, without requiring tedious and time-consuming manual adjustment of the mask during manufacture or use.

Abstract translation: 光发射光谱（OES）仪器包括光谱仪，处理器和由处理器控制的可调掩模。 可调节掩模定义了由光谱仪成像的分析间隙的一部分。 仪器自动调整面罩开口的尺寸和位置，因此光谱仪将分析间隙中形成的等离子体的最佳部分图像化，从而提高仪器的信号和噪声特性，而不需要繁琐乏味的手动调节 面具在制造或使用过程中。

公开(公告)号：US09482577B2

公开(公告)日：2016-11-01

申请号：US14494315

申请日：2014-09-23

Applicant: University of Virginia Patent Foundation

Inventor： Brooks Hart Pate ,  Justin L. Neill

IPC: G01J3/30 ,  G01J3/443 ,  G01J3/28 ,  G01J3/433 ,  G01J3/453 ,  G01N21/35 ,  G01N21/3586

CPC classification number: G01J3/443 ,  G01J3/2889 ,  G01J3/4338 ,  G01J3/453 ,  G01N21/35 ,  G01N21/3586 ,  G01N2021/3595

Abstract: An emission can be obtained from a sample in response to excitation using a specified range of excitation frequencies. Such excitation can include generating a specified chirped waveform and a specified downconversion local oscillator (LO) frequency using a digital-to-analog converter (DAC), upconverting the chirped waveform via mixing the chirped waveform with a specified upconversion LO frequency, frequency multiplying the upconverted chirped waveform to provide a chirped excitation signal for exciting the sample, receiving an emission from sample, the emission elicited at least in part by the chirped excitation signal, and downconverting the received emission via mixing the received emission with a signal based on the specified downconversion LO signal to provide a downconverted emission signal within the bandwidth of an analog-to-digital converter (ADC). The specified chirped waveform can include a first chirped waveform during a first duration, and a second chirped waveform during a second duration.

Abstract translation: 可以使用特定范围的激发频率响应于激发而从样品获得发射。 这种激励可以包括使用数模转换器（DAC）产生指定的啁啾波形和指定的下变频本地振荡器（LO）频率，通过将啁啾波形与指定的上变频LO频率混频来上变频啁啾波形， 上变频啁啾波形以提供用于激发采样的啁啾激励信号，接收来自采样的发射，至少部分地由啁啾激励信号引起的发射，以及通过基于指定的信号将接收到的发射与信号进行混合来下变频接收的发射 下变频LO信号，以在模数转换器（ADC）的带宽内提供下变频发射信号。 指定的啁啾波形可以包括第一持续时间期间的第一啁啾波形和第二持续时间内的第二啁啾波形。

公开(公告)号：US20160290862A1

公开(公告)日：2016-10-06

申请号：US15084435

申请日：2016-03-29

Applicant: HITACHI HIGH-TECH SCIENCE CORPORATION

Inventor： Yutaka IKKU

IPC: G01J3/02 ,  G01N21/73 ,  G01J3/443

CPC classification number: G01N21/73 ,  G01J3/28

Abstract: A sequential inductively coupled plasma (ICP) optical emission spectrometer includes a controller that operates to perform a series of process based on a shift amount (time dependency) of a wavelength peak position according to time elapse of a reference wavelength obtained as a result of continuously measuring a plurality of emission lines of argon having different wavelengths as the reference wavelength and a per-wavelength shift amount (wavelength dependency) of the reference wavelength, the process including: calculating a shift amount of a wavelength peak position of each measurement wavelength from a standard sample measurement time to an unknown sample measurement time; and performing measurement wavelength correction for correcting the movement position of the diffracting grating corresponding to the wavelength peak position of the measurement wavelength relative to the initial position.

Abstract translation: 顺序电感耦合等离子体（ICP）光发射光谱仪包括控制器，其操作以根据连续地获得的参考波长的时间经过基于波长峰值位置的偏移量（时间依赖性）执行一系列处理 测量具有不同波长的多个发射线作为参考波长和参考波长的每波长偏移量（波长依赖性），该处理包括：计算每个测量波长的波长峰值位置的偏移量 标准样品测量时间到未知样品测量时间; 并且执行测量波长校正，用于校正与测量波长的波长峰值位置相对应的衍射光栅相对于初始位置的移动位置。

公开(公告)号：US20160216155A1

公开(公告)日：2016-07-28

申请号：US15008856

申请日：2016-01-28

Applicant: Industry-Academic Cooperation Foundation, Yonsei University

Inventor： Ilgu YUN ,  Sang Myung LEE

IPC: G01J3/443 ,  C23C16/50 ,  H01J37/32

CPC classification number: G01J3/443 ,  G01J3/0208 ,  G01J3/0216 ,  G01J3/0218 ,  G01J3/0235 ,  H01J37/32935 ,  H01J37/32972

Abstract: Provided is an apparatus for optical emission spectroscopy. The apparatus for the optical emission spectroscopy includes a light collection unit configured to collect light within a plasma process chamber in which plasma is generated to process a substrate, a light transmission unit configured to transmit the collected light, and an analysis unit configured to analyze the light provided through the light transmission unit, thereby analyzing a plasma state. The light collection unit includes a light collection part configured to concentrate the light generated in the plasma process chamber and provide the concentrated light to the light transmission unit.

Abstract translation: 提供了一种用于光发射光谱的装置。 用于光发射光谱的装置包括：光收集单元，被配置为在等离子体处理室内聚集光，其中产生等离子体以处理衬底;光传输单元，被配置为透射所收集的光;以及分析单元，被配置为分析 通过光传输单元提供的光，从而分析等离子体状态。 光收集单元包括：光收集部，被配置为集中在等离子体处理室中产生的光并将集中的光提供给光传输单元。

公开(公告)号：US09384956B2

公开(公告)日：2016-07-05

申请号：US14367944

申请日：2012-10-04

Applicant: NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY ,  S.T.JAPAN INC.

Inventor： Kazumi Inagaki ,  Shin-Ichiro Fujii ,  Akiko Takatsu ,  Koichi Chiba ,  Takao Nakagawa ,  Masaaki Abe ,  Nobuyoshi Kitagawa ,  Yosuke Nakagawa

IPC: H01J49/10 ,  G01N21/71 ,  G01J3/443 ,  B05B7/04 ,  H01J49/04

CPC classification number: H01J49/105 ,  B05B7/0416 ,  G01J3/443 ,  G01N21/714 ,  H01J49/045

Abstract: A nebulizer characterized in being provided with: an inner tube, which is disposed coaxially with an outer tube in which a nebulizing outlet is formed and which, together with the outer tube, forms a gas channel therebetween; a sample channel, which is formed inside the inner tube and through which a liquid sample to be nebulized flows; and a reticular membrane disposed with a gap from the sample outlet that is formed at one end of the inner tube and in which multiple holes, through which liquid sample drops flowing out from the sample outlet pass along with a gas, are formed. Using the nebulizer, the particle size of the nebulized liquid droplets can be made uniformly fine over a broad range of sample liquid flow volumes while retention of sample liquid in the nebulizer is reduced.

Abstract translation: 一种喷雾器，其特征在于具有：内管，其与形成有喷雾出口的外管同轴设置，并且与外管一起在其间形成气体通道; 样品通道，其形成在内管内部，待雾化的液体样品通过该通道流动; 和形成在内管的一端形成有来自样品出口的间隙的网状膜，其中从样品出口流出的液体样品滴下的多个孔与气体一起形成。 使用雾化器，雾化液滴的粒径可以在宽范围的样品液体流量上均匀地精细化，同时将样品液体保留在雾化器中。

公开(公告)号：US20160187201A1

公开(公告)日：2016-06-30

申请号：US14587502

申请日：2014-12-31

Applicant: THERMO SCIENTIFIC PORTABLE ANALYTICAL INSTRUMENTS INC.

Inventor： Peidong Wang ,  Haowen Li ,  Rong Sun ,  Michael Bush

IPC: G01J3/443 ,  G01J3/02

CPC classification number: G01J3/443 ,  G01J3/0208 ,  G01J3/0262 ,  G01N21/15 ,  G01N21/718

Abstract: Methods and apparatus for laser induced breakdown spectroscopy (LIBS) sample chamber. An apparatus includes a sample chamber, a laser source connected to an excitation optics assembly, the excitation optics assembly connected to a first port on the sample chamber, a collimator assembly connected to a spectrometer, the collimator assembly connected to a second port on the sample chamber, and a first lens tube positioned on the first port and a second lens tube positioned on the second port, the first lens tube protecting the first port connected to the excitation optics assembly and the second lens tube protecting the second port connected to the collimator assembly from particles emitted when a laser pulse from the laser source ablates a surface of a target sample and generates a plasma.

Abstract translation: 激光诱导击穿光谱（LIBS）样品室的方法和装置。 一种装置包括样品室，连接到激发光学组件的激光源，连接到样品室上的第一端口的激发光学组件，连接到光谱仪的准直器组件，连接到样品上的第二端口的准直器组件 以及位于所述第一端口上的第一透镜管和位于所述第二端口上的第二透镜管，所述第一透镜套管保护连接到所述激发光学组件的所述第一端口，所述第二透镜套管保护连接到所述准直器的所述第二端口 当来自激光源的激光脉冲消除靶样品的表面并产生等离子体时发射的颗粒的组装。

公开(公告)号：US09352418B2

公开(公告)日：2016-05-31

申请号：US14588824

申请日：2015-01-02

Applicant: Teledyne Instruments, Inc.

Inventor： John W. Roy ,  James Bryan Barbula

IPC: H01J49/26 ,  B23K26/16 ,  B23K26/12 ,  B23K26/36 ,  B23K26/30 ,  G01J3/443 ,  H01J49/10 ,  H01J49/04

CPC classification number: B23K26/16 ,  B23K26/127 ,  B23K26/342 ,  B23K26/36 ,  G01J3/443 ,  H01J49/0463 ,  H01J49/105 ,  H01J49/26

Abstract: A laser ablation system and methods are disclosed for performing material analysis. The laser ablation system includes a sample chamber which holds and encloses a sample material to be ablated; a laser source that produces a laser beam which is directed into the sample chamber to a surface of the sample material to cause laser ablation; a laser measuring device which is physically attached to the sample chamber to measure a power/energy value of the laser beam; and a material analyzing module that is coupled to the sample chamber to receive the ablated material from laser ablation of the sample material.

Abstract translation: 公开了用于进行材料分析的激光烧蚀系统和方法。 激光烧蚀系统包括：样品室，其保持并包围待烧蚀的样品材料; 产生激光束的激光源，其被引导到样品室中到样品材料的表面以引起激光烧蚀; 激光测量装置，物理地附接到样品室以测量激光束的功率/能量值; 以及材料分析模块，其耦合到所述样品室以从所述样品材料的激光烧蚀接收所述烧蚀材料。

公开(公告)号：US09285272B2

公开(公告)日：2016-03-15

申请号：US13507654

申请日：2012-07-17

Applicant: Don Sackett

Inventor： Don Sackett

IPC: G01J3/42 ,  G01J3/44 ,  G01J3/02 ,  G01J3/18 ,  G01J3/28 ,  G01J3/443 ,  G01N21/71 ,  G01N21/359 ,  G01N21/65

CPC classification number: G01J3/44 ,  G01J3/0208 ,  G01J3/0227 ,  G01J3/18 ,  G01J3/2803 ,  G01J3/443 ,  G01N21/359 ,  G01N21/65 ,  G01N21/718 ,  G01N2201/0221

Abstract: A dual source system and method includes a high power laser used to determine elemental concentrations in a sample and a lower power device used to determine compounds present in the sample. A detector subsystem receives photons from the sample after laser energy from the high power laser strikes the sample and provides a first signal. The detector subsystem then receives photons from the sample after energy from the lower power device strikes the sample and provides a second signal. The high power laser is pulsed and the first signal is processed to determine elemental concentrations present in the sample. The lower power device is energized and the second signal is processed to determine compounds present in the signal. Based on the elemental concentrations and the compounds present, the compounds present in the sample are quantified.

Abstract translation: 双源系统和方法包括用于确定样品中的元素浓度的高功率激光器和用于确定样品中存在的化合物的较低功率器件。 检测器子系统在来自大功率激光器的激光能量照射样品后提供第一信号，从样品接收光子。 检测器子系统然后在来自下功率器件的能量撞击样品并提供第二信号之后从样品接收光子。 高功率激光器被脉冲处理并且处理第一信号以确定样品中存在的元素浓度。 较低功率的设备通电，第二个信号被处理以确定信号中存在的化合物。 基于元素浓度和存在的化合物，定量样品中存在的化合物。

公开(公告)号：US09216468B2

公开(公告)日：2015-12-22

申请号：US13880777

申请日：2011-10-26

Applicant: Kiichi Kanda ,  Kenichi Watanabe ,  Yutaka Yanagawa

Inventor： Kiichi Kanda ,  Kenichi Watanabe ,  Yutaka Yanagawa

IPC: B23K1/00 ,  B23K1/19 ,  B23K1/008 ,  B23K35/00 ,  B23K35/28 ,  B23K35/38 ,  G01J3/443 ,  G01N21/67 ,  F28F21/08 ,  B32B15/01

CPC classification number: B23K1/19 ,  B23K1/0012 ,  B23K1/008 ,  B23K35/002 ,  B23K35/284 ,  B23K35/286 ,  B23K35/383 ,  B23K2101/006 ,  B23K2101/14 ,  B23K2103/10 ,  B32B15/016 ,  F28F21/084 ,  F28F21/089 ,  G01J3/443 ,  G01N21/67

Abstract: Provided are: a method for brazing an aluminum alloy, which is characterized in that brazing is carried out by heating an aluminum brazing sheet without using flux in a furnace that is in an argon gas-containing atmosphere, said aluminum brazing sheet comprising a core material that is composed of aluminum or an aluminum alloy and a brazing filler material that is composed of an aluminum alloy and clad on one surface or both surfaces of the core material, and said core material and/or said brazing filler material containing Mg; and a brazing apparatus which is used in the method for brazing an aluminum alloy. The brazing method has good and stable brazing properties and is applicable in industrial practice.

Abstract translation: 本发明提供一种钎焊铝合金的方法，其特征在于，通过在不含有氩气的气氛的炉内不使用助熔剂的情况下加热铝钎焊片进行钎焊，所述铝钎焊片由芯材 由铝或铝合金构成的钎料和由铝合金构成并且在芯材的一个表面或两个表面上包层的钎料，所述芯材和/或含有Mg的钎料; 以及用于钎焊铝合金的方法中的钎焊装置。 钎焊方法具有良好稳定的钎焊性能，适用于工业实践。