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公开(公告)号：US20140319347A1
公开(公告)日：2014-10-30
申请号：US14325166
申请日：2014-07-07
Applicant: FEI Company
Inventor： Hanno Sebastian von Harrach , Bert Henning Freitag , Pleun Dona
IPC: H01J37/244
CPC classification number: H01J37/244 , G01N23/225 , H01J37/26 , H01J37/28 , H01J2237/002 , H01J2237/2442 , H01J2237/28 , H01J2237/2802
Abstract: A detector support for an electron microscope including a detector support ring and flexible elements, wherein a first end of each of the flexible elements is connected to the support ring, and wherein the detector support ring and the flexible elements are configured to support at least two detectors in a circumferential arrangement around an optical axis of the electron microscope such that an optical axis of each of the at least two detectors intersects the optical axis of the electron microscope and a target point of the at least two detectors is maintained relatively constant over a temperature change.
Abstract translation: 一种用于包括检测器支撑环和柔性元件的电子显微镜的检测器支架，其中每个柔性元件的第一端连接到支撑环，并且其中检测器支撑环和柔性元件构造成支撑至少两个 所述检测器围绕所述电子显微镜的光轴围绕圆周布置，使得所述至少两个检测器中的每一个的光轴与所述电子显微镜的光轴相交，并且所述至少两个检测器的目标点保持在相对恒定的 温度变化。
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公开(公告)号：US12136532B2
公开(公告)日：2024-11-05
申请号：US17964411
申请日：2022-10-12
Applicant: FEI Company
Inventor： Pavel Potocek , Remco Schoenmakers , Maurice Peemen , Bert Henning Freitag
IPC: H01J37/28 , G01N23/20091 , G01N23/203 , G01N23/2254 , H01J37/147 , H01J37/244 , H01J37/26 , H01J37/302
Abstract: Methods for drift corrected, fast, low dose, adaptive sample imaging with a charged particle microscopy system include scanning a surface region of a sample with a charged particle beam to obtain a first image of the surface region with a first detector modality, and then determining a scan strategy for the surface region. The scan strategy comprises a charged particle beam path, a first beam dwell time associated with at least one region of interest in the first image, the first beam dwell time being sufficient to obtain statistically significant data from a second detector modality, and at least a second beam dwell time associated with other regions of the first image, wherein the first beam dwell time is different than the second beam dwell time. The surface region of the sample is then scanned with the determined scan strategy to obtain data from the first and second detector.
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3.发明授权公开(公告)号：US11211223B1
公开(公告)日：2021-12-28
申请号：US17002499
申请日：2020-08-25
Applicant: FEI Company
Inventor： Ivan Lazić , Stefano Vespucci , Eric Gerardus Bosch , Bert Henning Freitag
IPC: H01J37/244 , H01J37/28 , H01J37/145 , H01J37/20
Abstract: A method for imaging a sample with charged particles comprises directing charged particles towards the sample along a primary axis, and simultaneously detecting a first portion and a second portion of the charged particles transmitted through the sample with a first detector and a second detector, respectively. The second detector is positioned downstream of the first detector. Each of the transmitted charged particles exits the sample at an exit angle between a direction of the transmitted charged particle and the primary axis. The exit angles of the first portion of the transmitted charged particles overlap with the exit angles of the second portion of the transmitted charged particles. In this way, complimentary information, such as the structural and compositional information, may be obtained simultaneously.
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公开(公告)号：US10832901B2
公开(公告)日：2020-11-10
申请号：US16424206
申请日：2019-05-28
Applicant: FEI Company
Inventor： Bert Henning Freitag , Sorin Lazar , Stephan Kujawa , Maarten Kuijper , Gerard Nicolaas Anne van Veen , Peter Christiaan Tiemeijer , Jamie McCormack
Abstract: A method of performing Electron Energy-Loss Spectroscopy (EELS) in an electron microscope, comprising: Producing a beam of electrons from a source; Using an illuminator to direct said beam so as to irradiate the specimen; Using an imaging system to receive a flux of electrons transmitted through the specimen and direct it onto a spectroscopic apparatus comprising: A dispersion device, for dispersing said flux in a dispersion direction so as to form an EELS spectrum; and A detector, comprising a detection surface that is sub-divided into a plurality of detection zones, specifically comprising: Using at least a first detection zone, a second detection zone and a third detection zone to register a plurality of EELS spectral entities; and Reading out said first and said second detection zones whilst said third detection zone is registering one of said plurality of EELS spectral entities.
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公开(公告)号：US12288667B2
公开(公告)日：2025-04-29
申请号：US17831147
申请日：2022-06-02
Applicant: FEI Company
Inventor： Pavel Potocek , Bert Henning Freitag , Maurice Peemen
Abstract: A method of imaging a sample includes acquiring one or more first images of a region of the sample at a first imaging condition with a charged particle microscope system. The one or more first images are applied to an input of a trained machine learning model to obtain a predicted image indicating atom structure probability in the region of the sample. An enhanced image indicating atom locations in the region of the sample based on the atom structure probability in the predicted image is caused to be displayed in response to obtaining the predicted image.
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Patent Agency Ranking
公开(公告)号：US20240347314A1
公开(公告)日：2024-10-17
申请号：US18299635
申请日：2023-04-12
Applicant: FEI Company
Inventor： Peter Christiaan Tiemeijer , Sorin Lazar , Bert Henning Freitag , Paolo Longo
IPC: H01J37/244
CPC classification number: H01J37/244 , H01J2237/1514 , H01J2237/1523 , H01J2237/24485 , H01J2237/2826
Abstract: Systems, devices, methods, and techniques for energy-loss spectroscopy at relatively large energy losses are described. A charged particle microscope system can include a beam column section. The beam column section can include one or more charged particle optical elements calibrated for a first energy and one or more charged particle optical elements calibrated for a second energy. The charged particle microscope system can include a detector section. The detector section can be disposed at a position downstream of the beam column section. The detector section can include an electrostatic or magnetic prism and one or more charged particle optical elements calibrated for the second energy. The first energy and the second energy can be different.
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公开(公告)号：US20230395351A1
公开(公告)日：2023-12-07
申请号：US17831147
申请日：2022-06-02
Applicant: FEI Company
Inventor： Pavel Potocek , Bert Henning Freitag , Maurice Peemen
CPC classification number: H01J37/28 , H01J37/244 , H01J37/222 , H01J37/20 , H01J37/265 , G06T7/0004 , H01J2237/226 , G06T2207/10061 , G06T2207/20081
Abstract: A method of imaging a sample includes acquiring one or more first images of a region of the sample at a first imaging condition with a charged particle microscope system. The one or more first images are applied to an input of a trained machine learning model to obtain a predicted image indicating atom structure probability in the region of the sample. An enhanced image indicating atom locations in the region of the sample based on the atom structure probability in the predicted image is caused to be displayed in response to obtaining the predicted image.
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公开(公告)号：US08592764B2
公开(公告)日：2013-11-26
申请号：US13855373
申请日：2013-04-02
Applicant: FEI Company
Inventor： Hanno Sebastian von Harrach , Bert Henning Freitag , Pleun Dona
IPC: H01J37/244 , H01J37/26 , H01J49/06 , G01N23/225 , H01J37/28
CPC classification number: H01J37/244 , G01N23/225 , H01J37/26 , H01J37/28 , H01J2237/002 , H01J2237/2442 , H01J2237/28 , H01J2237/2802
Abstract: Multiple detectors arranged in a ring within a specimen chamber provide a large solid angle of collection. The detectors preferably include a shutter and a cold shield that reduce ice formation on the detector. By providing detectors surrounding the sample, a large solid angle is provided for improved detection and x-rays are detected regardless of the direction of sample tilt.
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公开(公告)号：US11488800B2
公开(公告)日：2022-11-01
申请号：US17214747
申请日：2021-03-26
Applicant: FEI Company
Inventor： Pavel Potocek , Remco Schoenmakers , Maurice Peemen , Bert Henning Freitag
IPC: H01J37/26 , H01J37/28 , G01N23/20 , H01J37/147 , G01N23/20091 , G01N23/2254 , G01N23/203 , H01J37/244
Abstract: Methods for drift corrected, fast, low dose, adaptive sample imaging with a charged particle microscopy system include scanning a surface region of a sample with a charged particle beam to obtain a first image of the surface region with a first detector modality, and then determining a scan strategy for the surface region. The scan strategy comprises a charged particle beam path, a first beam dwell time associated with at least one region of interest in the first image, the first beam dwell time being sufficient to obtain statistically significant data from a second detector modality, and at least a second beam dwell time associated with other regions of the first image, wherein the first beam dwell time is different than the second beam dwell time. The surface region of the sample is then scanned with the determined scan strategy to obtain data from the first and second detector.
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公开(公告)号：US11127562B1
公开(公告)日：2021-09-21
申请号：US16985811
申请日：2020-08-05
Applicant: FEI Company
Inventor： Erik Rene Kieft , Bert Henning Freitag
Abstract: Disclosed herein are systems and methods for pulsing electron beams and synchronizing the pulsed electron beam with scanning a sample at a plurality of scan locations. An example method at least includes pulsing an electron beam to form a pulsed electron beam having a pulse period, moving the pulsed electron beam to interact with a sample at a plurality of locations, the interaction at each of the plurality of locations occurring for a dwell time, and synchronizing data acquisition of the interaction of the pulsed electron beam with the sample based on the pulsing and the translating of the electron beam, wherein the dwell time is based on a derivative of the pulse period.
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