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    DISSOLUTION STAGE FOR AN ENVIRONMENTAL SCANNING ELECTRON MICROSCOPE
    101.
    发明申请
    DISSOLUTION STAGE FOR AN ENVIRONMENTAL SCANNING ELECTRON MICROSCOPE 审中-公开
    环境扫描电子显微镜的解析阶段

    公开(公告)号：WO9962097A9

    公开(公告)日：2000-03-16

    申请号：PCT/US9911355

    申请日：1999-05-21

    Applicant: EURO CELTIQUE SA ,  MITCHELL JAMES A ,  PALERMO PHILIP J

    Inventor： MITCHELL JAMES A ,  PALERMO PHILIP J

    IPC: G01Q30/04 ,  G01Q30/08 ,  H01J37/00 ,  H01J37/18 ,  H01J37/20 ,  H01J37/252 ,  H01J37/26 ,  H01J37/28

    CPC classification number: G01N23/2204 ,  H01J37/20 ,  H01J37/28 ,  H01J2237/2001 ,  H01J2237/2002 ,  H01J2237/2003 ,  H01J2237/2005 ,  H01J2237/204 ,  H01J2237/206 ,  H01J2237/2605

    Abstract: A system is provided for imaging, in an ESE microscope or other variable pressure microscope, a single sample at various time intervals during dissolution of the sample in a liquid. The system includes a sample chamber (10) having a sample well. The sample well includes a first fluid port and a second fluid port for forming a dissolution bath in the sample well. In accordance with the system according to the present invention, the sample chamber (10) is placed into the specimen chamber of the ESE microscope and a sample is deposited into the sample well of the sample chamber. The sample is immersed in a liquid which flows through the sample well via the first and second fluid ports during a dissolution cycle. The liquid is then drained from the sample well via one of the first and second fluid ports during a draining cycle, and then, during an imaging cycle, the sample is imaged by the ESE microscope. The dissolution cycle, the draining cycle, and the imaging cycle all occur while the sample well is inside the specimen chamber (10) of the ESE microscope.

    Abstract translation: 提供了一种系统，用于在ESE显微镜或其它可变压力显微镜下，将样品溶解在液体中时以不同的时间间隔成像。 该系统包括具有样品阱的样品室（10）。 样品阱包括用于在样品阱中形成溶解浴的第一流体端口和第二流体端口。 根据本发明的系统，将样品室（10）放置在ESE显微镜的样品室中，并将样品沉积到样品室的样品孔中。 在溶解循环期间，将样品浸入通过第一和第二流体端口流经样品的液体中。 然后在排液循环期间，通过第一和第二流体端口之一从样品阱中排出液体，然后在成像周期期间，通过ESE显微镜对样品进行成像。 当样品井在ESE显微镜的样品室（10）内时，溶解循环，排水循环和成像循环都发生。

    TRANSPORT DEVICE, TREATMENT DEVICE, VACUUM DEVICE, AND CHARGED PARTICLE BEAM DEVICE
    105.
    发明公开
    TRANSPORT DEVICE, TREATMENT DEVICE, VACUUM DEVICE, AND CHARGED PARTICLE BEAM DEVICE 审中-公开
    运输工具，BEHANDLUNGSVORRICHTUNG，VAKUUMVORRICHTUNG UND LADUNGSTEILCHENSTRAHLVORRICHTUNG

    公开(公告)号：EP3139397A1

    公开(公告)日：2017-03-08

    申请号：EP16186479.8

    申请日：2016-08-31

    Applicant: Hitachi High-Tech Science Corporation

    Inventor： IWAHORI, Toshiyuki ,  HASUDA, Masakatsu

    IPC: H01J37/18

    CPC classification number: H01J37/185 ,  H01J37/20 ,  H01J37/285 ,  H01J2237/2002 ,  H01J2237/2004 ,  H01J2237/2006 ,  H01J2237/31749

    Abstract: Provided is a transport device in which a reduction in the size and a reduction in the cost of the entire device are possible. A transport unit 20 which is interposed between a sub-chamber 4 and a first treatment chamber 10 is provided with: a transport bar 21 which transports a sample S along a right-left direction in a preliminary sample chamber; a support 31 which supports the transport bar; a case 41 which supports the support so as to be rotatable around a rotation axis intersecting the right-left direction; and a second O-ring 52 which seals an inside of the case. The preliminary sample chamber and a first treatment space can communicate with each other through the inside of the case. The transport bar is made so as to be able to transition between a first state where the transport bar can transport the sample between the preliminary sample chamber and the inside of the case, and a second state where the transport bar can transport the sample between the first treatment space and the inside of the case, by rotation of the support with respect to the case.

    Abstract translation: 提供了一种输送装置，其中可以减小整个装置的尺寸和降低成本。 插入在副室4和第一处理室10之间的输送单元20设置有：在预备样品室中沿左右方向输送样品S的输送杆21; 支撑运输栏的支架31; 壳体41，其支撑支撑件以能够围绕与左右方向相交的旋转轴线旋转; 以及密封壳体内部的第二O形环52。 预备样品室和第一处理空间可以通过壳体内部彼此连通。 输送条被制成能够在运输条可以在预备样品室和壳体的内部之间输送样品的第一状态和第二状态之间转移，其中运输条可以将样品在 第一处理空间和壳体的内部，通过支撑件相对于壳体的旋转。

    MICRO-CHAMBER FOR INSPECTING SAMPLE MATERIAL
    106.
    发明公开
    MICRO-CHAMBER FOR INSPECTING SAMPLE MATERIAL 有权
    MIKROKAMMER ZUR UNTERSUCHUNG VON PROBENMATERIAL

    公开(公告)号：EP3125271A1

    公开(公告)日：2017-02-01

    申请号：EP15178825.4

    申请日：2015-07-29

    Applicant: FEI Company

    Inventor： MELE, Luigi ,  DONA, Pleun ,  VAN VEEN Gerard

    IPC: H01J37/20

    CPC classification number: H01J37/20 ,  B01L3/502723 ,  B01L2200/0605 ,  B01L2300/0654 ,  B01L2300/0887 ,  B01L2300/123 ,  B01L2400/0406 ,  B01L2400/0694 ,  G01N1/04 ,  G01N21/03 ,  G01N21/11 ,  G01N2021/0346 ,  G01N2021/6482 ,  G01N2223/307 ,  H01J37/26 ,  H01J2237/2002 ,  H01J2237/2003 ,  H01J2237/2005 ,  H01J2237/2006

    Abstract: The invention relates to a micro-chamber for inspecting sample material, the sample material immersed in a liquid when filling the micro-chamber, the micro-chamber comprising:
    • an inspection volume (101) for holding the sample material, the inspection volume defined by:
    o a first rigid layer (102A+102B),
    o a second rigid layer (103A+103B) spaced from the first rigid layer, and
    o a hermetic seal (104) between the first and the second rigid layers,
    Characterized in that,
    prior to filling the inspection chamber with the liquid with immersed sample material,
    • a thin part (105) of at least one of the rigid layers separates the inspection volume from the outside,
    • the thin part is equipped to be punctured, and
    • the inspection volume is an evacuated volume,

    as a result of which the liquid with immersed sample material, when placed upon the thin part, is sucked into the inspection volume when the thin part is punctured.
    This results in a micro-chamber that can be filled with sample material without the need of applying vacuum tubing's to it.

    Abstract translation: 本发明涉及用于检查样品材料的微室，当填充微室时浸在液体中的样品材料，所述微室包括：用于保持样品材料的检查体积（101），检查体积 由第一刚性层（102A + 102B），与第一刚性层隔开的第二刚性层（103A + 103B）和第一和第二刚性层之间的气密密封（104）限定，其特征在于，先前 用浸没的样品材料将液体填充到检查室中，至少一个刚性层的薄部分（105）将检查体积与外部分隔开，薄部分被装备成被刺破，并且€ ¢检查体积为抽真空体积，其结果是当薄的部分被刺穿时，将浸入样品的液体放置在薄部分时被吸入检查体积。 这导致可以填充样品材料的微室，而不需要对其施加真空管。

    SCANNING ELECTRON MICROSCOPE
    107.
    发明公开
    SCANNING ELECTRON MICROSCOPE 审中-公开
    扫描电子显微镜

    公开(公告)号：EP2959287A1

    公开(公告)日：2015-12-30

    申请号：EP14754707.9

    申请日：2014-02-18

    Applicant: B-Nano Ltd.

    Inventor： SHACHAL, Dov ,  DE PICCIOTTO, Rafi

    IPC: G01N23/04

    CPC classification number: H01J37/18 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/164 ,  H01J2237/188 ,  H01J2237/2002 ,  H01J2237/24445 ,  H01J2237/2605

    Abstract: A scanning electron microscope suitable for imaging samples in a non- vacuum environment, the scanning electron microscope including an electron source located within an enclosure maintained under vacuum, an electron permeable membrane disposed at an opening of the enclosure separating an environment within the enclosure which is maintained under vacuum and an environment outside the enclosure which is not maintained under vacuum, the electron permeable membrane not being electrically grounded and at least one non-grounded electrode operative as an electron detector.

    IN SITU HOLDER ASSEMBLY
    109.
    发明公开
    IN SITU HOLDER ASSEMBLY 有权
    STRAHLUNGSBEHEIZTER现场TEM-PROBENHALTER

    公开(公告)号：EP2847573A1

    公开(公告)日：2015-03-18

    申请号：EP13787887.2

    申请日：2013-05-08

    Applicant: E.A. Fischione Instruments, Inc.

    Inventor： DESHMUKH, Pushkarraj V. ,  GRONSKY, Jeffrey J. ,  FISCHIONE, Paul, E.

    IPC: G01N21/01 ,  G01N23/00

    CPC classification number: G01N23/225 ,  G01N21/01 ,  G01N2223/309 ,  G01N2223/31 ,  H01J37/20 ,  H01J37/228 ,  H01J2237/2002 ,  H01J2237/2003 ,  H01J2237/2065

    Abstract: An
    in situ optical specimen holder is disclosed which allows imaging and analysis during dynamic experimentation. This holder assembly includes a set of focusing and reflection optics along with an environmental cell. Electromagnetic radiation can be used to optically excite the specimen in the presence or absence of fluid and the source of such radiation may be located within the body of the holder itself. The spot size of the irradiation at the specimen surface can be varied, thus exciting only a specific region on the specimen. The window type cell provides a variable fluid path length ranging from the specimen thickness to 500μm. The holder has the provision to continuously circulate fluids over the specimen. The pressure within the cell can be regulated by controlling the flow rate of the fluids and the speed of the pumps.

    Abstract translation: 公开了一种在动态实验中进行成像和分析的原位光学样本架。 该保持器组件包括一组聚焦和反射光学器件以及环境细胞。 电磁辐射可用于在存在或不存在流体的情况下光学地激发样品，并且这种辐射源可以位于保持器本体的主体内。 样品表面的照射点尺寸可以变化，从而仅激发样品上的特定区域。 窗型细胞提供从样品厚度到500μm的可变流体路径长度。 保持器具有连续地将流体循环流过样品的规定。 可以通过控制流体的流量和泵的速度来调节电池内的压力。

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