-
公开(公告)号：KR1020050033737A
公开(公告)日：2005-04-13
申请号：KR1020030069585
申请日：2003-10-07
Applicant: 한국화학연구원
IPC: C07F15/04
CPC classification number: C07F15/045 , C23C16/18
Abstract: Volatile nickel aminoalkoxide complexes, a preparation method thereof and a process for formation of a nickel thin film by using the same compounds are provided, which compounds have high volatility and sufficient thermal stability, and are reduced to nickel by self-pyrolysis without a reducing agent. so that the compounds are useful as a MOCVD(metal organic chemical vapor deposition) precursor for formation of the nickel thin film. The volatile nickel aminoalkoxide complexes represented by formula (1) are provided, wherein m is an integer of 1 to 3; and R and R' are C1-C4 linear or branched alkyl. The volatile nickel aminoalkoxide complexes represented by formula (2) are provided, wherein m is an integer of 1 to 3; n is an integer of 2 to 4; and R and R' are C1-C4 linear or branched alkyl. The method for preparing the volatile nickel aminoalkoxide complexes of formula (1) or (2) comprises a halogenized hexamine nickel compound of Ni(NH3)6X2 with an alkali metal salt of aminoalkoxide of MOCR'2(CH2)mNR2 or MOCR'2(CH2)mO(CH2)nNR2, wherein X is Cl, Br or I; and M is Li or Na. The process for formation of the nickel thin film comprises growing the nickel thin film by using the volatile nickel aminoalkoxide complexes of formula (1) or (2) as a precursor at 250 to 350 deg. C.
Abstract translation: 提供挥发性镍氨基醇氧化物络合物，其制备方法和通过使用相同化合物形成镍薄膜的方法，该化合物具有高挥发性和足够的热稳定性，并且通过自热解而不用还原剂还原成镍 。 使得这些化合物可用作用于形成镍薄膜的MOCVD（金属有机化学气相沉积）前体。 提供由式（1）表示的挥发性镍氨基醇氧化物络合物，其中m为1至3的整数; 并且R和R'是C 1 -C 4直链或支链烷基。 提供由式（2）表示的挥发性镍氨基醇盐络合物，其中m为1至3的整数; n为2〜4的整数， 并且R和R'是C 1 -C 4直链或支链烷基。 制备式（1）或（2）的挥发性镍氨基醇氧化物配合物的方法包括Ni（NH 3）6 X 2的卤化六甲基镍化合物与MOCR'2（CH2）mNR2或MOCR'2（CH2）mNR2的氨基醇盐的碱金属盐 CH2）mO（CH2）nNR2，其中X是Cl，Br或I; M为Li或Na。 形成镍薄膜的方法包括使用式（1）或（2）的挥发性镍氨基醇氧化物配合物作为前体在250至350℃下生长镍薄膜。 C。
-
122.发明公开
公开(公告)号：KR1020050019400A
公开(公告)日：2005-03-03
申请号：KR1020030057134
申请日：2003-08-19
Applicant: 한국화학연구원
IPC: C23C16/00
CPC classification number: C23C16/409 , C07F3/003 , C07F7/28 , C23C16/4485 , C23C16/56 , Y10S261/65
Abstract: PURPOSE: To provide a method for preparing stoichiometric barium strontium titanate thin films of high quality by direct liquid injection metal organic chemical vapor deposition under the milder conditions using organic complexes of Ba, Sr and Ti that are capable of being vaporized together as raw materials for mixing since they have similar thermal stability, decomposition characteristics and solubility. CONSTITUTION: In a method for preparing barium strontium titanate(BaxSr1-xTiO3) thin films by direct liquid injection metal organic chemical vapor deposition, the method is characterized in that a mixture of Ba(th)2(tmeea), Sr(thd)2(tmeea) and Ti(thd)2(O¬i Pr)2 $ûthd=2,2,6,6-tetramethylheptanedionate, tmeea=tris£2-(2-methoxyethoxy)ethyl|amine, O¬i Pr=isoproxy$ý is used as raw materials of barium, strontium and titanium, wherein the method comprises the steps of: dissolving the raw materials of barium, strontium and titanium into an organic solvent; transferring the solution to an instantaneous vaporizer heated to a temperature of 200 to 250 deg.C so that the solution is vaporized; and injecting the vaporized solution into a deposition container having pressure of 0.5 to 2.0 torr so that the vaporized solution is deposited on a matrix heated to a temperature of 300 to 500 deg.C, wherein the method further comprises a step of heat treating the deposited matrix in a temperature range of 600 to 800 deg.C, and wherein the raw materials of barium, strontium and titanium are mixed in a ratio of 1 ¢¦ 2:1:5 ¢¦ 10.
Abstract translation: 目的：提供一种通过直接液体注入金属有机化学气相沉积在较温和的条件下制备化学计量的钛酸锶钛酸盐薄膜的方法，使用能够作为原料蒸发的Ba，Sr和Ti的有机络合物 因为它们具有相似的热稳定性，分解特性和溶解度。 构成：在通过直接液体注入金属有机化学气相沉积制备钛酸锶钡（BaxSr1-xTiO3）薄膜的方法中，该方法的特征在于Ba（th）2（tmeea），Sr（thd）2 （tmeea）和Ti（thd）2（OiI Pr）2 $ûth= 2,2,6,6-四甲基庚二酮，tmeea =三（2-甲氧基乙氧基）乙基|胺，O-Pr =异丙氧基 ý用作钡，锶和钛的原料，其中所述方法包括以下步骤：将钡，锶和钛的原料溶解在有机溶剂中; 将溶液转移到加热至200〜250℃的瞬时蒸发器，使溶液蒸发; 并将蒸发的溶液注入具有0.5至2.0托的压力的沉积容器中，使得蒸发的溶液沉积在加热至300至500℃的基质上，其中该方法还包括热沉处理沉积 基质在600〜800℃的温度范围内，其中钡，锶和钛的原料以1¢| 2：1：5¢| 10的比例混合。
-
公开(公告)号：KR100457824B1
公开(公告)日：2004-11-18
申请号：KR1020010048336
申请日：2001-08-10
Applicant: 한국화학연구원
CPC classification number: B82Y30/00 , C01B13/18 , C01F5/06 , C01G9/02 , C01G11/00 , C01P2002/72 , C01P2002/82 , C01P2004/32 , C01P2004/50 , C01P2004/64 , C01P2006/12
Abstract: A nanoparticle of a metal oxide is prepared by pyrolyzing a compound of formula (I) in a solvent:RMOR' (I) wherein M is beryllium, zinc, magnesium or cadmium; and R and R' are independently a C1-5 alkyl group.
Abstract translation: 金属氧化物的纳米颗粒通过式（I）化合物在溶剂中热解而制备：RMOR'（I）其中M是铍，锌，镁或镉; 并且R和R'独立地为C 1-5烷基。
-
公开(公告)号：KR1020030014019A
公开(公告)日：2003-02-15
申请号：KR1020010048336
申请日：2001-08-10
Applicant: 한국화학연구원
CPC classification number: B82Y30/00 , C01B13/18 , C01F5/06 , C01G9/02 , C01G11/00 , C01P2002/72 , C01P2002/82 , C01P2004/32 , C01P2004/50 , C01P2004/64 , C01P2006/12
Abstract: PURPOSE: Provided is a method for producing divalent metal oxide powder having a nano size by solution pyrolysis by which it is possible to readily produce the metal oxide powder having a nano size and control the size and shape of the particles using a ligand. CONSTITUTION: The method for producing divalent metal oxide powder having a nano size is conducted by pyrolysis of alkylate alkyl metal compound represented by the formula of RMOR', in which M is beryllium, zinc, magnesium or cadmium and R and R' are a hydrogen atom or an alkyl group containing 1 to 5 carbon atoms, in an organic solvent. The solvent is an organic compound having a boiling point between 100 to 400 deg.C, such as hexadecane, tetra(ethyleneglycol)dimethylether, dimethoxyethane and octylether.
Abstract translation: 目的：提供通过溶液热解生产具有纳米尺寸的二价金属氧化物粉末的方法，通过该方法可以容易地制备具有纳米尺寸的金属氧化物粉末，并使用配体控制颗粒的尺寸和形状。 构成：制造具有纳米尺寸的二价金属氧化物粉末的方法是通过将由式RMOR'表示的烷基化烷基金属化合物热解，其中M是铍，锌，镁或镉，R和R'是氢 原子或含有1至5个碳原子的烷基。 溶剂是沸点在100-400℃之间的有机化合物，如十六烷，四（乙二醇）二甲醚，二甲氧基乙烷和辛醚。
-
125.发明公开
公开(公告)号：KR1020030002015A
公开(公告)日：2003-01-08
申请号：KR1020010038745
申请日：2001-06-30
Applicant: 한국화학연구원
IPC: C07F15/00
CPC classification number: C07F15/0046
Abstract: PURPOSE: Provided is a preparation method of a ruthenium complex with enhanced yield using a small amount of zinc catalyst, thereby mass-producing the ruthenium complex. CONSTITUTION: The preparation process characteristically comprises the steps of: reaction of ruthenium trichloride with 3-25 equivalents of 1,3-cyclohexadiene and 5-20 equivalents of zinc powder base on the chloride at room temperature for 10-15 hours; and extracting the reaction product with an organic solvent, then removing the organic acid therefrom.
Abstract translation: 目的：提供使用少量锌催化剂的钌络合物的制备方法，其具有提高的产率，从而大量生产钌络合物。 构成：制备方法特征在于包括以下步骤：在室温下将三氯化钌与3-25当量的1,3-环己二烯和5-20当量的锌粉底物在氯化物上反应10-15小时; 并用有机溶剂萃取反应产物，然后从其中除去有机酸。
-
Patent Agency Ranking
-
127.发明公开화학증착에 의해 비스(2,2,6,6-테트라메틸-3,5-헵탄디오나토)아연으로부터 산화아연막을 형성하는 방법 无效由双（2,2,6,6-四甲基-3,5-庚二酮）锌通过化学气相沉积形成氧化锌膜的方法
公开(公告)号：KR1019970030475A
公开(公告)日：1997-06-26
申请号：KR1019950041205
申请日：1995-11-14
Applicant: 한국화학연구원
IPC: H01L21/316
Abstract: 비스(2,2,6,6,-테트라메틸-3,5-헵탄디오나토) 아연을 화학증착하여 기질 위에 산화아연 막을 형성하는 것이 개시되어 있으며, 이 산화아연 막 위에 질화갈륨, 탄화규소 및 질화붕소의 막을 성장시킬 수도 있다.
-
-
-
-
-
-
-
Search Results
324
records
(took 0.022 seconds)
